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31. 发明申请

US20150188278A1 METHOD AND SYSTEM FOR PERFORMING AUTOMATIC GAS REFILLS FOR A GAS LASER 有权
标题翻译：用于气体激光自动气体修复的方法和系统
公开(公告)号：US20150188278A1
公开(公告)日：2015-07-02
申请号：US14585062
申请日：2014-12-29
申请人： Teledyne Instruments, Inc.
发明人： John Roy
IPC分类号： H01S3/036
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus to automatically refill a gas laser is disclosed. The apparatus includes a computing device coupled to a memory. The memory storing instructions that when executed by the computing device cause the computing device to monitor a time elapsed since a last recorded gas refill and when a predetermined time interval is reached since the last recorded gas refill, effectuate a gas refill process to refill the gas laser with gas from a gas supply coupled to the gas laser by automatically controlling the gas laser and the gas supply; and upon completing the gas refill process, record a time stamp of the completed gas refill process. A method and system to automatically refill a gas laser also are disclosed.
摘要翻译：公开了一种自动重新填充气体激光器的装置。该装置包括耦合到存储器的计算装置。存储指令的存储器，当由计算装置执行时，使计算装置监视从上次记录的气体再填充以来经过的时间，并且当从最后记录的气体再填充到达预定的时间间隔时，执行气体补充处理以再填充气体通过自动控制气体激光器和气体供应，通过与气体激光器连接的气体供应气体进行激光; 在完成气体补充处理之后，记录完成的气体补充过程的时间戳。还公开了一种自动重新填充气体激光器的方法和系统。

32. 发明申请

US20150138631A1 Systems and Methods to More Accurately Estimate a Fluorine Concentration in a Source Laser 有权
标题翻译：系统和方法更准确地估计源激光中的氟浓度
公开(公告)号：US20150138631A1
公开(公告)日：2015-05-21
申请号：US14084916
申请日：2013-11-20
申请人： Cymer, LLC
发明人： Alicia Michelle Powers Russin
IPC分类号： H01S3/10 , H01S3/104
CPC分类号： H01S3/10007 , H01S3/036 , H01S3/2251 , H01S3/2256 , H01S3/2366
摘要： In master oscillator-power amplifier (MOPA) systems for generating laser light, a fluorine concentration in each of the master oscillator and power amplifier chambers is maintained. While sensors at the chambers can measure certain values of some variables, the sensors do not directly measure fluorine concentration. As a further complication, the values received from the sensors are known to be affected by various specified variables. To estimate the effect on the received values, an RLS algorithm and covariance matrix are used. To ensure that the RLS algorithm is responsive to recent changes in a specified variable, portions of the covariance matrix are reset to more quickly and more heavily weight the more recent values.
摘要翻译：在用于产生激光的主振荡器功率放大器（MOPA）系统中，保持每个主振荡器和功率放大器腔中的氟浓度。虽然室内的传感器可以测量某些变量的某些值，但传感器不直接测量氟浓度。作为进一步的复杂性，已知从传感器接收的值受到各种指定变量的影响。为了估计对接收值的影响，使用RLS算法和协方差矩阵。为了确保RLS算法响应于指定变量中的最近的变化，协方差矩阵的部分被重置为更快速地并且更加重地加权更新的值。

33. 发明申请

US20150055672A1 DISCHARGE-PUMPED GAS LASER DEVICE 审中-公开
标题翻译：排气泵气体激光装置
公开(公告)号：US20150055672A1
公开(公告)日：2015-02-26
申请号：US14531876
申请日：2014-11-03
申请人： Gigaphoton Inc.
发明人： Akihiko KUROSU , Junichi FUJIMOTO , Yosuke ISHIZUKA , Takashi MATSUNAGA , Osamu WAKABAYASHI
IPC分类号： H01S3/223 , F16C32/04
CPC分类号： H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
摘要： A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
摘要翻译：放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环，被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。

34. 发明授权

US08937979B2 Gas laser oscillator having function to determine initiation of electric discharge 有权
标题翻译：气体激光振荡器具有确定放电开始的功能
公开(公告)号：US08937979B2
公开(公告)日：2015-01-20
申请号：US14246642
申请日：2014-04-07
申请人： Fanuc Corporation
发明人： Tooru Nukui
IPC分类号： H01S3/00 , H01S3/097
CPC分类号： H01S3/09702 , H01S3/036 , H01S3/09713 , H01S3/104
摘要： A gas laser oscillator includes a control apparatus which creates a command voltage, a laser power supply which supplies power to a discharge tube in accordance with the command voltage, and a voltage detecting unit which detects a voltage applied to the discharge tube. The control apparatus includes a determining unit which determines whether or not a discharge is initiated in the discharge tube, based on a rate of changes in the voltage detected by the voltage detecting unit when power is supplied to the discharge tube in accordance with the command voltage being increased in a stepwise manner. The determining unit is configured to determine whether or not a discharge is initiated in the discharge tube after an initial step that at least includes the first incremental step of the command voltage being increased in a stepwise manner.
摘要翻译：气体激光振荡器包括产生指令电压的控制装置，根据指令电压向放电管供电的激光电源;以及检测施加到放电管的电压的电压检测单元。控制装置包括：判定单元，其基于当根据指令电压向放电管供电时由电压检测单元检测到的电压的变化率，确定放电管中是否开始放电逐步增加。确定单元被配置为确定在至少包括以逐步方式增加的命令电压的第一增量步长的初始步骤之后在放电管中是否开始放电。

35. 发明授权

US08855166B2 6 KHz and above gas discharge laser system 有权
标题翻译： 6KHz及以上气体放电激光系统
公开(公告)号：US08855166B2
公开(公告)日：2014-10-07
申请号：US13352127
申请日：2012-01-17
申请人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
发明人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
IPC分类号： H01S3/08 , H01S3/036 , H01F38/10 , H01F3/10 , H01F27/22 , H01S3/041 , H01S3/225 , H01S3/097 , H01F27/26 , H01S3/04 , H01S3/23
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
摘要翻译：一种操作高重复率气体放电激光系统的系统和方法。该系统包括气体放电室，其具有通过气体放电激光室的操作加热的热室输出窗口，在热室窗口下游的输出激光束脉冲光束路径，包括环境温度窗口，冷却机构光束路径外壳在输出窗口和环境窗口之间。气体放电室可以包括纵向和轴向柔性接地棒，包括连接到第一室壁的第一端，连接到第二室壁的第二端，与第一室壁相对的第二室壁和形成为第一室壁的第一部分螺旋弹簧，接地棒提供机械支撑用于前置离子管。

36. 发明授权

US08576891B2 Gas laser oscillator and gas exchange method for gas laser oscillator 有权
标题翻译：气体激光振荡器和气体激光振荡器的气体交换方法
公开(公告)号：US08576891B2
公开(公告)日：2013-11-05
申请号：US13878911
申请日：2011-09-13
申请人： Naoki Miyamoto , Mototoshi Kumaoka
发明人： Naoki Miyamoto , Mototoshi Kumaoka
IPC分类号： H01S3/20
CPC分类号： H01S3/036 , H01S3/02 , H01S3/0401 , H01S3/0407 , H01S3/2232 , Y10T137/0396
摘要： The sealed gas laser oscillator that includes the airtight vessel, the laser gas supply source that supplies a laser gas to the airtight vessel, and the vacuum pump that performs evacuation until a pressure of an inside of the airtight vessel reaches a target reached pressure every predetermined interval between laser gas exchanges and is connected to the airtight vessel, and that performs laser oscillation in a state where the airtight vessel is filled with the laser gas. The gas laser oscillator includes a unit that determines the target reached pressure on the basis of the interval between laser gas exchanges, a leakage rate of an impurity gas from the outside to the airtight vessel after evacuation, and an allowable impurity gas pressure at which the gas laser oscillator is capable of being operated.
摘要翻译：包括气密容器的密封气体激光振荡器，向气密容器供应激光气体的激光气体供给源，以及在气密容器内部的压力达到目标之前进行抽真空的真空泵达到每个预定的压力激光气体交换之间的间隔并连接到气密容器，并且在气密容器填充有激光气体的状态下进行激光振荡。气体激光振荡器包括基于激光气体交换之间的间隔，排气后从外部到气密容器的杂质气体的泄漏率以及允许的杂质气体压力来确定目标到达压力的单元，气体激光振荡器能够被操作。

37. 发明授权

US08416828B2 Catalyst module for high repetition rate CO2 lasers 失效
标题翻译：用于高重复率CO 2激光器的催化剂模块
公开(公告)号：US08416828B2
公开(公告)日：2013-04-09
申请号：US12901260
申请日：2010-10-08
申请人： David B. Cohn
发明人： David B. Cohn
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/041 , H01S3/2232
摘要： An array of discrete catalyst elements is contained in a heated module external to the main laser vessel with an auxiliary gas flow loop connecting them so as to provide independent control of catalyst temperature and gas flow rate to achieve high CO+1/2O2 to CO2 recombination under high pulse repetition frequency operation for a sealed laser. Catalyst elements in the form of cylinders with holes through their centers are mounted on multiple parallel rods or catalysts in the form of small spherical or cylindrical elements are contained in multiple packets arranged in the module so as to minimize flow impedance and maximize laser gas recycling throughput. The cylindrical catalyst module is constructed so as to allow for rapid heating to operating temperature while withstanding atmospheric differential pressures during laser processing.
摘要翻译：离散催化剂元件的阵列包含在主激光器外部的加热模块中，其中具有连接它们的辅助气流回路，以便提供对催化剂温度和气体流速的独立控制，以实现高CO + 1 / 2O 2至CO 2重组在密封激光器的高脉冲重复频率操作下。具有穿过其中心的孔的气缸形式的催化剂元件安装在多个平行的杆上，小球形或圆柱形元件形式的催化剂被包含在布置在模块中的多个分组中，以便最小化流动阻抗并最大化激光气体回收吞吐量。圆柱形催化剂模块被构造成允许在激光加工期间耐受大气压差的快速加热到工作温度。

38. 发明申请

US20130034118A1 GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
标题翻译：用于激光激光的气体净化器
公开(公告)号：US20130034118A1
公开(公告)日：2013-02-07
申请号：US13198484
申请日：2011-08-04
申请人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
发明人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/2253
摘要： An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.
摘要翻译：准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。在激光器的操作期间，在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。气体清洁装置从壳体中提取激光气体混合物，并将激光气体混合物通过电极组件。通过用重复的大功率短脉冲脉冲驱动电极组件，在电极组件中产生反复脉冲的气体放电。脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

39. 发明申请

US20120275481A1 System and Method for Controlling Gas Concentration in a Two-Chamber Gas Discharge Laser System 有权
标题翻译：控制二室气体放电激光系统气体浓度的系统和方法
公开(公告)号：US20120275481A1
公开(公告)日：2012-11-01
申请号：US13098259
申请日：2011-04-29
申请人： Daniel J. Riggs
发明人： Daniel J. Riggs
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/03 , H01S3/225 , H01S3/2308
摘要： Methods and systems for controlling the gas concentrations in the chambers of a two chamber gas discharge laser such as an excimer laser are disclosed. A first set of inject opportunities is selected for the laser chamber of the master oscillator, and a second set of inject opportunities is selected for the laser chamber of the power amplifier. At each selected inject opportunity for the master oscillator, its laser chamber receives an inject containing a fixed amount of a non-halogen containing gas, and a calculated amount of a halogen containing gas. At the selected inject opportunities for the power amplifier, its laser chamber receives a fixed amount of the halogen containing gas, and may also receive a fixed amount of the non-halogen containing gas.
摘要翻译：公开了用于控制诸如准分子激光器的二室气体放电激光器的室中的气体浓度的方法和系统。为主振荡器的激光室选择第一组注入机会，并且为功率放大器的激光室选择第二组注入机会。在主振荡器的每个选择的注入机会下，其激光室接收包含固定量的不含卤素气体的注入和计算量的含卤素气体。在功率放大器的所选择的注入机会中，其激光室接收固定量的含卤素气体，并且还可以接收固定量的不含卤素气体。

40. 发明授权

US08130810B2 Lasers 失效
标题翻译：激光器
公开(公告)号：US08130810B2
公开(公告)日：2012-03-06
申请号：US12763267
申请日：2010-04-20
申请人： Wilhelm Bayerl , Jim Fieret
发明人： Wilhelm Bayerl , Jim Fieret
IPC分类号： H01S3/22 , H01S3/223
CPC分类号： H01S3/036 , H01S3/2232
摘要： A laser apparatus comprises a laser having a lasing chamber an inlet to the lasing chamber for a lasing gas containing a heavy noble gas and an outlet from the lasing chamber for the discharge of a flow of lasing gas, wherein the outlet is able to be paced in communication with the atmospheric through an adsorptive trap containing a selective adsorbent of the heavy noble gas.In operation, the heavy noble gas (xenon or krypton) is adsorbed in the trap. The trap may be taken to a remote site for the recovery of the heavy noble gas when it is approaching saturation.
摘要翻译：一种激光装置包括激光器，该激光器具有一个激光室，一个入射室，用于一个用于包含重稀有气体的激光气体的入射室和一个用于排出激发气体流的激光室的出口，其中出口能够起搏通过含有重稀有气体的选择性吸附剂的吸附阱与大气连通。在操作中，重稀有气体（氙气或氪气）被吸附在捕集器中。陷阱可以被带到远程位置，以便在接近饱和时恢复重稀土气体。

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