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1. 发明申请

US20150138631A1 Systems and Methods to More Accurately Estimate a Fluorine Concentration in a Source Laser 有权
标题翻译：系统和方法更准确地估计源激光中的氟浓度
公开(公告)号：US20150138631A1
公开(公告)日：2015-05-21
申请号：US14084916
申请日：2013-11-20
申请人： Cymer, LLC
发明人： Alicia Michelle Powers Russin
IPC分类号： H01S3/10 , H01S3/104
CPC分类号： H01S3/10007 , H01S3/036 , H01S3/2251 , H01S3/2256 , H01S3/2366
摘要： In master oscillator-power amplifier (MOPA) systems for generating laser light, a fluorine concentration in each of the master oscillator and power amplifier chambers is maintained. While sensors at the chambers can measure certain values of some variables, the sensors do not directly measure fluorine concentration. As a further complication, the values received from the sensors are known to be affected by various specified variables. To estimate the effect on the received values, an RLS algorithm and covariance matrix are used. To ensure that the RLS algorithm is responsive to recent changes in a specified variable, portions of the covariance matrix are reset to more quickly and more heavily weight the more recent values.
摘要翻译：在用于产生激光的主振荡器功率放大器（MOPA）系统中，保持每个主振荡器和功率放大器腔中的氟浓度。虽然室内的传感器可以测量某些变量的某些值，但传感器不直接测量氟浓度。作为进一步的复杂性，已知从传感器接收的值受到各种指定变量的影响。为了估计对接收值的影响，使用RLS算法和协方差矩阵。为了确保RLS算法响应于指定变量中的最近的变化，协方差矩阵的部分被重置为更快速地并且更加重地加权更新的值。

2. 发明授权

US09065248B2 Systems and methods to more accurately estimate a fluorine concentration in a source laser 有权
标题翻译：更准确地估计源激光器中的氟浓度的系统和方法
公开(公告)号：US09065248B2
公开(公告)日：2015-06-23
申请号：US14084916
申请日：2013-11-20
申请人： Cymer, LLC
发明人： Alicia Michelle Powers Russin
IPC分类号： H01S3/00 , H01S3/10 , H01S3/104
CPC分类号： H01S3/10007 , H01S3/036 , H01S3/2251 , H01S3/2256 , H01S3/2366
摘要： In master oscillator-power amplifier (MOPA) systems for generating laser light, a fluorine concentration in each of the master oscillator and power amplifier chambers is maintained. While sensors at the chambers can measure certain values of some variables, the sensors do not directly measure fluorine concentration. As a further complication, the values received from the sensors are known to be affected by various specified variables. To estimate the effect on the received values, an RLS algorithm and covariance matrix are used. To ensure that the RLS algorithm is responsive to recent changes in a specified variable, portions of the covariance matrix are reset to more quickly and more heavily weight the more recent values.
摘要翻译：在用于产生激光的主振荡器功率放大器（MOPA）系统中，保持每个主振荡器和功率放大器腔中的氟浓度。虽然室内的传感器可以测量某些变量的某些值，但传感器不直接测量氟浓度。作为进一步的复杂性，已知从传感器接收的值受到各种指定变量的影响。为了估计对接收值的影响，使用RLS算法和协方差矩阵。为了确保RLS算法响应于指定变量中的最近的变化，协方差矩阵的部分被重置为更快速地并且更加重地加权更新的值。

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