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31. 发明授权

US09415508B1 Multi-link substrate scanning device 有权
标题翻译：多链路基板扫描装置
公开(公告)号：US09415508B1
公开(公告)日：2016-08-16
申请号：US14713456
申请日：2015-05-15
申请人： Varian Semiconductor Equipment Associates, Inc.
发明人： Robert J. Mitchell , William Weaver
IPC分类号： B25J9/12 , B25J9/10 , B25J9/06 , B25J9/16
CPC分类号： B25J9/1694 , H01J37/20 , H01J2237/20228 , H01J2237/20285 , H01J2237/31701 , Y10S901/09 , Y10S901/23
摘要： A substrate scanning device includes first, second and third linkages, and a direct drive motor coupled between a process chamber and a first end of the first linkage. A first gear motor coupled between a second end of the first linkage and a first end of the second linkage and a second gear motor coupled between a second end of the second linkage and a first end of the third linkage. A substrate support surface coupled to a second end of the third linkage. The direct drive motor for moving the substrate support surface parallel to a scan axis as the direct drive motor moves the substrate support surface along the scan axis. The first and second gear motors can be configured to maintain the substrate support surface in a plane approximately parallel with the scan axis.
摘要翻译：基板扫描装置包括第一，第二和第三连杆，以及耦合在处理室和第一连杆的第一端之间的直接驱动马达。耦合在第一连杆的第二端和第二连杆的第一端之间的第一齿轮马达和耦合在第二连杆的第二端和第三连杆的第一端之间的第二齿轮马达。耦合到第三连杆的第二端的基板支撑表面。直接驱动马达，当直接驱动马达沿着扫描轴移动基板支撑表面时，用于使基板支撑表面平行于扫描轴移动。第一和第二齿轮马达可以被配置为将基板支撑表面保持在与扫描轴线大致平行的平面中。

32. 发明授权

US09368326B2 Scan head and scan arm using the same 有权
标题翻译：扫描头和扫描臂使用相同的
公开(公告)号：US09368326B2
公开(公告)日：2016-06-14
申请号：US13919651
申请日：2013-06-17
申请人： ADVANCED ION BEAM TECHNOLOGY, INC.
发明人： Richard F. McRay
IPC分类号： G01N23/00 , H01J37/317 , H01J37/20
CPC分类号： H01J37/3171 , H01J37/20 , H01J2237/20207 , H01J2237/20228 , H01J2237/20285
摘要： A scan head assembled to a scan arm for an ion implanter and a scan arm using the same are provided, wherein the scan head comprises a case, a shaft assembly, an ESC, a first driving mechanism and a second driving mechanism. The case has a normal center line. The shaft assembly passes through a first side of the case and has a twist axis, a first pivot point fixed relative to the case and a first end located outside the case. The ESC is fastened on the first end and capable of holding a work piece. The first driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to tilt relative to the normal center line. The second driving mechanism is capable of driving the shaft assembly, the ESC and the work piece to rotate about the twist axis.
摘要翻译：提供了组装到用于离子注入机的扫描臂和使用其的扫描臂的扫描头，其中扫描头包括壳体，轴组件，ESC，第一驱动机构和第二驱动机构。案件有正常的中心线。轴组件穿过壳体的第一侧并且具有扭转轴线，相对于壳体固定的第一枢转点和位于壳体外部的第一端部。 ESC紧固在第一端并能够固定工件。第一驱动机构能够驱动轴组件，ESC和工件相对于正常中心线倾斜。第二驱动机构能够驱动轴组件，ESC和工件围绕扭转轴线旋转。

33. 发明申请

US20150166273A1 WORKPIECE HOLDER FOR WORKPIECE TRANSPORT APPARATUS 审中-公开
标题翻译：工作运输工具的工作人员
公开(公告)号：US20150166273A1
公开(公告)日：2015-06-18
申请号：US14538327
申请日：2014-11-11
申请人： Howard Hughes Medical Institute
发明人： John H. Price , Davi Bock
IPC分类号： B65G65/00
CPC分类号： H01J37/20 , G01N1/32 , G01N35/00732 , H01J37/023 , H01J37/185 , H01J37/261 , H01J2237/2007 , H01J2237/201 , H01J2237/20278 , H01J2237/20285 , H01J2237/20292 , H01J2237/204 , H01J2237/26 , H01J2237/2602
摘要： An automated workpiece processing system including at least one workpiece processing unit, a workpiece holder configured to removably hold a batch of workpieces therein, each workpiece embodying workpiece identifying indicia where the workpiece identifying indicia is a physical representation of a sample held on a respective workpiece, and to interface with the at least one automated workpiece processing unit, and a controller including a memory having a data structure therein that effects, with the workpiece identifying indicia, batch process tracking of each workpiece in the batch of workpieces through the at least one automated workpiece processing unit in a predetermined batch workpiece processing sequence.
摘要翻译：一种自动化工件处理系统，包括至少一个工件处理单元，构造成可拆卸地将一批工件保持在其中的工件保持器，每个工件体现工件识别标记，其中工件识别标记是保持在相应工件上的样品的物理表示，并且与所述至少一个自动化工件处理单元相连接，以及控制器，其包括其中具有数据结构的存储器，其中通过所述至少一个自动化工具，通过所述工件识别标记对所述工件批次中的每个工件进行批处理跟踪工件处理单元在预定的批处理工件处理顺序中。

34. 发明授权

US09024280B2 Composite charged particle beam apparatus 有权
标题翻译：复合带电粒子束装置
公开(公告)号：US09024280B2
公开(公告)日：2015-05-05
申请号：US13622028
申请日：2012-09-18
申请人： Atsushi Uemoto , Yo Yamamoto , Tatsuya Asahata
发明人： Atsushi Uemoto , Yo Yamamoto , Tatsuya Asahata
IPC分类号： H01J37/00 , H01J37/26 , G01N23/22 , G01N23/225 , G01N1/32 , H01J37/28 , H01J37/317
CPC分类号： H01J37/261 , G01N1/32 , G01N23/2208 , G01N23/225 , G01N2223/0816 , G01N2223/102 , G01N2223/105 , H01J37/28 , H01J37/317 , H01J2237/20285 , H01J2237/31745 , H01J2237/31749
摘要： A composite charged particle beam apparatus comprises an FIB column and an SEM column arranged so that the ion and the electron beam irradition axes intersect with each other substantially at a right angle. A sample stage mounts a sample, and a detector detects secondary particles generated from the sample when irradiated with the ion beam or the electron beam. An observation image formation portion forms an FIB image and an SEM image based on a detection signal of the detector. An optical microscope observes the sample, and a display portion displays the FIB image, the SEM image and an optical microscope image. A stage control portion changes the coordinate system of the sample stage to any selected one of the coordinate systems of the FIB image, the SEM image and the optical microscope image.
摘要翻译：复合带电粒子束装置包括FIB柱和SEM柱，其布置成使得离子和电子束辐照轴基本上彼此相交。样品台安装样品，当用离子束或电子束照射时，检测器检测从样品产生的二次颗粒。观察图像形成部基于检测器的检测信号，形成FIB图像和SEM图像。光学显微镜观察样品，显示部显示FIB图像，SEM图像和光学显微镜图像。舞台控制部分将样本舞台的坐标系改变为FIB图像，SEM图像和光学显微镜图像的任意一个坐标系。

35. 发明授权

US09000325B2 Roller mold manufacturing device and manufacturing method 有权
标题翻译：辊模制造装置及制造方法
公开(公告)号：US09000325B2
公开(公告)日：2015-04-07
申请号：US13700783
申请日：2011-06-08
申请人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
发明人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
IPC分类号： H01J37/305 , B29C33/38 , B23K15/08 , H01J37/20 , H01J37/317 , G03F1/20 , G03F7/20 , G03F7/24 , B82Y10/00 , B82Y40/00
CPC分类号： B29C33/3842 , B23K15/08 , B29C33/38 , B82Y10/00 , B82Y40/00 , G03F1/20 , G03F7/2037 , G03F7/24 , H01J37/20 , H01J37/305 , H01J37/3174 , H01J2237/20214 , H01J2237/2025 , H01J2237/20271 , H01J2237/20285
摘要： A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
摘要翻译：在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。为了实现上述目的，一种辊模制造装置（1）设置有电子束照射装置（2）; 具有允许一些电子束通过的开口的掩模（3），并形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置（4），其围绕旋转轴（8）旋转辊模具（100）; 位移量检测传感器（5），其检测所述滚筒模具（100）沿所述旋转轴（8）的方向的旋转偏移位移量; 控制装置（6）; 以及基于来自控制装置（6）的控制信号的致动器（7）允许电子束的描绘位置跟随滚子模具（100）沿旋转轴（8）的方向的位移，其特征在于，抑制由所述辊模（100）沿所述旋转轴（8）的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。

36. 发明申请

US20150072445A1 LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE 审中-公开
公开(公告)号：US20150072445A1
公开(公告)日：2015-03-12
申请号：US14481088
申请日：2014-09-09
申请人： CANON KABUSHIKI KAISHA
发明人： Toshiro Yamanaka , Gaku Takahashi , Go Tsuchiya , Shinji Ohishi
IPC分类号： H01J37/317 , H01L21/66 , H01J37/304 , H01L21/3065 , H01J37/20 , H01J37/02
CPC分类号： H01J37/3177 , H01J37/023 , H01J37/20 , H01J37/3045 , H01J2237/201 , H01J2237/20228 , H01J2237/20285 , H01L21/67259 , H01L21/681 , H01L21/68764
摘要： A lithography apparatus which performs writing on a substrate using a charged particle beam is provided. The apparatus comprises a plurality of column units each of which comprises a charged particle optical system, a plurality of stages each of which is movable while holding the substrate, and a controller. The controller moves the stages in synchronization with each other in a positional relationship corresponding to an arrangement of the column units, and performs writing on substrates held in the stages simultaneously.
摘要翻译：提供了使用带电粒子束在基板上进行写入的光刻设备。该装置包括多个柱单元，每个柱单元包括带电粒子光学系统，多个阶段，每个阶段在保持基板的同时可移动，以及控制器。控制器以对应于列单元的布置的位置关系彼此同步地移动台，并且同时对保持在台阶中的基板进行写入。

37. 发明授权

US08835872B2 Sample stage device 有权
标题翻译：样品台装置
公开(公告)号：US08835872B2
公开(公告)日：2014-09-16
申请号：US13806989
申请日：2011-06-23
申请人： Takashi Kobayashi
发明人： Takashi Kobayashi
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20285 , H01J2237/20292 , H01J2237/2817 , H01L21/68
摘要： A sample stage device (10) is so configured as to calculate ideal position information xtg(i), tg(i) per predetermined period that is unaffected by drive conditions relating to gaps (25, 26), etc., and to determine, per predetermined cycle and in real time, deviations dx(i), dy(i) between real-time measured positions x(i), y(i) by position detectors comprising laser interferometers (33, 34), etc., and ideal position information xtg(i), tg(i). In addition, it calculates, based on deviations dx(i), dy(i) thus determined, such speed command values vx(i), vy(i) for motors (27, 28) that measured values x(i), y(i) would follow ideal position information xtg(i), tg(i), and performs stable and high-speed positioning control for a sample table (11) through feedback control that controls speed in real time. Thus, with respect to a sample stage device, it is possible to provide a stable and high-speed positioning control method for a sample table, which is capable of suppressing noise caused by thermal drift and vibration, without being affected by drive conditions, such as the initial states of gaps, etc.
摘要翻译：样品台装置（10）被配置为计算不受与间隙（25,26）等有关的驱动条件的影响的每预定周期的理想位置信息xtg（i），tg（i）并且实时地通过包括激光干涉仪（33,34）的位置检测器等实时测量位置x（i），y（i）之间的偏差dx（i），dy（i）和理想位置信息xtg（i），tg（i）。另外，根据如此确定的偏差dx（i），dy（i），计算出测量值x（i），y（i）的电动机（27,28）的速度指令值vx（i），vy （i）将遵循理想位置信息xtg（i），tg（i），并且通过实时控制速度的反馈控制对样本表（11）执行稳定和高速定位控制。因此，对于样品台装置，可以提供一种用于样品台的稳定且高速的定位控制方法，其能够抑制由热漂移和振动引起的噪声，而不受驱动条件的影响，例如作为差距的初始状态等

38. 发明申请

US20130075606A1 COMPOSITE CHARGED PARTICLE BEAM APPARATUS 有权
标题翻译：复合充电颗粒光束装置
公开(公告)号：US20130075606A1
公开(公告)日：2013-03-28
申请号：US13622028
申请日：2012-09-18
申请人： Atsushi UEMOTO , Yo YAMAMOTO , Tatsuya ASAHATA
发明人： Atsushi UEMOTO , Yo YAMAMOTO , Tatsuya ASAHATA
IPC分类号： H01J37/26
CPC分类号： H01J37/261 , G01N1/32 , G01N23/2208 , G01N23/225 , G01N2223/0816 , G01N2223/102 , G01N2223/105 , H01J37/28 , H01J37/317 , H01J2237/20285 , H01J2237/31745 , H01J2237/31749
摘要： Provided is a composite charged particle beam apparatus, including: a focused ion beam column (4); an electron beam column (6) orthogonal to the focused ion beam column (4); a sample stage (2) for moving a sample (11); an optical microscope (14) for observing the sample (11); a display portion (12, 13) capable of displaying a focused ion beam image, an electron beam image, and an optical microscope image, and a stage control portion (3) for moving the sample stage (2) in accordance with a coordinate system of each image.
摘要翻译：提供一种复合带电粒子束装置，包括：聚焦离子束柱（4）; 与聚焦离子束柱（4）正交的电子束柱（6）; 用于移动样品（11）的样品台（2）; 用于观察样品（11）的光学显微镜（14）; 能够显示聚焦离子束图像的显示部分（12,13），电子束图像和光学显微镜图像，以及用于根据坐标系移动样品台（2）的载台控制部分（3）的每个图像。

39. 发明申请

US20130068734A1 ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD 有权
标题翻译：滚筒模制造装置及制造方法
公开(公告)号：US20130068734A1
公开(公告)日：2013-03-21
申请号：US13700783
申请日：2011-06-08
申请人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
发明人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
IPC分类号： B29C33/38
CPC分类号： B29C33/3842 , B23K15/08 , B29C33/38 , B82Y10/00 , B82Y40/00 , G03F1/20 , G03F7/2037 , G03F7/24 , H01J37/20 , H01J37/305 , H01J37/3174 , H01J2237/20214 , H01J2237/2025 , H01J2237/20271 , H01J2237/20285
摘要： A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
摘要翻译：在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。为了实现上述目的，一种辊模制造装置（1）设置有电子束照射装置（2）; 具有允许一些电子束通过的开口的掩模（3），并且形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置（4），其围绕旋转轴（8）旋转辊模具（100）; 位移量检测传感器（5），其检测所述滚筒模具（100）沿所述旋转轴（8）的方向的旋转偏移位移量; 控制装置（6）; 以及基于来自控制装置（6）的控制信号的致动器（7）允许电子束的描绘位置跟随滚子模具（100）沿旋转轴（8）的方向的位移，其特征在于，抑制由所述辊模（100）沿所述旋转轴（8）的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。

40. 发明授权

US08174229B2 Sample stage apparatus and method of controlling the same 有权
标题翻译：样品台装置及其控制方法
公开(公告)号：US08174229B2
公开(公告)日：2012-05-08
申请号：US12420358
申请日：2009-04-08
申请人： Masashi Fujita , Shuichi Nakagawa , Takashi Kobayashi
发明人： Masashi Fujita , Shuichi Nakagawa , Takashi Kobayashi
IPC分类号： B64C17/06
CPC分类号： H01J37/20 , H01J2237/20228 , H01J2237/20285 , H01J2237/20292
摘要： The present invention provides a stage apparatus capable of reducing a positioning time without increasing a positional deviation. A positioning control method of a sample stage apparatus includes: a high-speed movement step of moving a table to a high-speed movement target position at a first movement speed; a positional deviation correcting step of moving the table to a low-speed positioning step start position at a second movement speed that is lower than the first movement speed; a low-speed positioning step of moving the table to a target position at a third movement speed that is lower than the second movement speed. After the low-speed positioning step is completed, a rod connected to a motor returns to its original position to separate a pin of the rod side from a concave portion of the table side.
摘要翻译：本发明提供一种能够在不增加位置偏差的情况下减少定位时间的舞台装置。采样台装置的定位控制方法包括：以第一移动速度将桌子移动到高速移动目标位置的高速移动步骤; 位置偏差校正步骤，以低于第一移动速度的第二移动速度将桌子移动到低速定位步骤开始位置; 低速定位步骤，以低于第二移动速度的第三移动速度将桌子移动到目标位置。在低速定位步骤完成之后，连接到电动机的杆返回到其原始位置，以将杆侧的销与台侧的凹部分开。

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