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    • 1. 发明授权
    • Roller mold manufacturing device and manufacturing method
    • 辊模制造装置及制造方法
    • US09000325B2
    • 2015-04-07
    • US13700783
    • 2011-06-08
    • Naoto ItoToshio KitadaHidenari Kiguchiya
    • Naoto ItoToshio KitadaHidenari Kiguchiya
    • H01J37/305B29C33/38B23K15/08H01J37/20H01J37/317G03F1/20G03F7/20G03F7/24B82Y10/00B82Y40/00
    • B29C33/3842B23K15/08B29C33/38B82Y10/00B82Y40/00G03F1/20G03F7/2037G03F7/24H01J37/20H01J37/305H01J37/3174H01J2237/20214H01J2237/2025H01J2237/20271H01J2237/20285
    • A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
    • 在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。 为了实现上述目的,一种辊模制造装置(1)设置有电子束照射装置(2); 具有允许一些电子束通过的开口的掩模(3),并形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置(4),其围绕旋转轴(8)旋转辊模具(100); 位移量检测传感器(5),其检测所述滚筒模具(100)沿所述旋转轴(8)的方向的旋转偏移位移量; 控制装置(6); 以及基于来自控制装置(6)的控制信号的致动器(7)允许电子束的描绘位置跟随滚子模具(100)沿旋转轴(8)的方向的位移, 其特征在于,抑制由所述辊模(100)沿所述旋转轴(8)的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。
    • 4. 发明申请
    • ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
    • 滚筒模制造装置及制造方法
    • US20130068734A1
    • 2013-03-21
    • US13700783
    • 2011-06-08
    • Naoto ItoToshio KitadaHidenari Kiguchiya
    • Naoto ItoToshio KitadaHidenari Kiguchiya
    • B29C33/38
    • B29C33/3842B23K15/08B29C33/38B82Y10/00B82Y40/00G03F1/20G03F7/2037G03F7/24H01J37/20H01J37/305H01J37/3174H01J2237/20214H01J2237/2025H01J2237/20271H01J2237/20285
    • A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
    • 在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。 为了实现上述目的,一种辊模制造装置(1)设置有电子束照射装置(2); 具有允许一些电子束通过的开口的掩模(3),并且形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置(4),其围绕旋转轴(8)旋转辊模具(100); 位移量检测传感器(5),其检测所述滚筒模具(100)沿所述旋转轴(8)的方向的旋转偏移位移量; 控制装置(6); 以及基于来自控制装置(6)的控制信号的致动器(7)允许电子束的描绘位置跟随滚子模具(100)沿旋转轴(8)的方向的位移, 其特征在于,抑制由所述辊模(100)沿所述旋转轴(8)的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。
    • 5. 发明授权
    • Core-shell magnetic material, method of manufacturing core-shell magnetic material, device, antenna device, and portable device
    • 核 - 壳磁性材料,核 - 壳磁性材料的制造方法,器件,天线装置和便携式装置
    • US08289222B2
    • 2012-10-16
    • US12411101
    • 2009-03-25
    • Tomohiro SuetsunaKouichi HaradaMaki YonetsuSeiichi SuenagaNaoto ItoAkihiro Tsujimura
    • Tomohiro SuetsunaKouichi HaradaMaki YonetsuSeiichi SuenagaNaoto ItoAkihiro Tsujimura
    • H01Q1/00
    • H01F1/33H01Q9/16H01Q9/42Y10T428/12465
    • The present invention provides a core-shell magnetic material having an excellent characteristic in a high frequency band, particularly, in a GHz band. The core-shell magnetic material includes: core-shell magnetic particles including magnetic metal particles and an oxide coating layer, the magnetic metal particle containing magnetic metal selected from the group of Fe, Co, and Ni, nonmagnetic metal selected from the group of Mg, Al, Si, Ca, Zr, Ti, Hf, Zn, Mn, a rare-earth element, Ba, and Sr, and an element selected from carbon and nitrogen, and the oxide coating layer being made of an oxide containing at least one nonmagnetic metal as one of the components of the magnetic metal particle; and oxide particles existing at least a part between the magnetic metal particles and containing nonmagnetic metal selected from the group of Mg, Al, Si, Ca, Zr, Ti, Hf, Zn, Mn, a rare-earth element, Ba, and Sr, and in which nonmagnetic metal/magnetic metal (atomic ratio) in the particles is higher than that in the oxide coating layer.
    • 本发明提供了在高频带,特别是GHz频带中具有优异特性的核 - 壳磁性材料。 核 - 壳磁性材料包括:包含磁性金属颗粒和氧化物涂层的核 - 壳磁性颗粒,含有选自Fe,Co和Ni的磁性金属的磁性金属颗粒,选自Mg组中的非磁性金属 ,Al,Si,Ca,Zr,Ti,Hf,Zn,Mn,稀土元素,Ba和Sr以及选自碳和氮的元素,氧化物被覆层由至少含有氧化物 一种非磁性金属作为磁性金属颗粒的组分之一; 并且存在至少一部分在磁性金属颗粒之间并且含有选自Mg,Al,Si,Ca,Zr,Ti,Hf,Zn,Mn,稀土元素,Ba和Sr中的非磁性金属的氧化物颗粒 ,其中颗粒中的非磁性金属/磁性金属(原子比)高于氧化物涂层中的非磁性金属/磁性金属(原子比)。
    • 6. 发明授权
    • Perpendicular magnetic recording media and magnetic storage apparatus using the same
    • 垂直磁记录介质及使用其的磁存储装置
    • US07892663B2
    • 2011-02-22
    • US12156317
    • 2008-05-30
    • Hiroyuki NakagawaRyoko ArakiNaoto ItoTakayuki Ichihara
    • Hiroyuki NakagawaRyoko ArakiNaoto ItoTakayuki Ichihara
    • G11B5/65
    • G11B5/82G11B5/65G11B5/66
    • Embodiments of the present invention provide a perpendicular magnetic recording media having excellent resolution, signal to noise ratio (S/N), and a small adjacent track erasure. According to one embodiment, underlayers for controlling the orientation and segregation of a magnetic layer, a magnetic layer including an oxide and an alloy of magnetic materials mainly composed of Co, Cr, and Pt, and a ferromagnetic-metal layer which does not contain oxygen, are formed over a substrate. The magnetic layer has at least two layers including ferromagnetic grains and oxides, a first magnetic layer, which is the part of the magnetic layer closer to the substrate, has grain boundaries mainly composed of Cr oxide and at least one oxide selected from Si, Ti, Nb, and Ta, and grain boundaries of a second magnetic layer at the ferromagnetic-metal layer side includes at least one oxide selected from Si, Ti, Nb, and Ta in which Cr oxide is less than the first magnetic layer.
    • 本发明的实施例提供了具有优异的分辨率,信噪比(S / N)和小的相邻轨道擦除的垂直磁记录介质。 根据一个实施例,用于控制磁性层的取向和偏析的底层,包括氧化物的磁性层和主要由Co,Cr和Pt组成的磁性材料的合金以及不含氧的铁磁性金属层 ,形成在衬底上。 磁性层具有至少两层包括铁磁性粒子和氧化物的层,作为靠近衬底的磁性层的一部分的第一磁性层具有主要由Cr氧化物和至少一种选自Si,Ti Nb和Ta中的至少一种,并且在铁磁金属层侧的第二磁性层的晶界包含选自Si,Ti,Nb和Ta中的至少一种氧化物小于第一磁性层的氧化物。