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1. 发明授权

US09000325B2 Roller mold manufacturing device and manufacturing method 有权
标题翻译：辊模制造装置及制造方法
公开(公告)号：US09000325B2
公开(公告)日：2015-04-07
申请号：US13700783
申请日：2011-06-08
申请人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
发明人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
IPC分类号： H01J37/305 , B29C33/38 , B23K15/08 , H01J37/20 , H01J37/317 , G03F1/20 , G03F7/20 , G03F7/24 , B82Y10/00 , B82Y40/00
CPC分类号： B29C33/3842 , B23K15/08 , B29C33/38 , B82Y10/00 , B82Y40/00 , G03F1/20 , G03F7/2037 , G03F7/24 , H01J37/20 , H01J37/305 , H01J37/3174 , H01J2237/20214 , H01J2237/2025 , H01J2237/20271 , H01J2237/20285
摘要： A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
摘要翻译：在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。为了实现上述目的，一种辊模制造装置（1）设置有电子束照射装置（2）; 具有允许一些电子束通过的开口的掩模（3），并形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置（4），其围绕旋转轴（8）旋转辊模具（100）; 位移量检测传感器（5），其检测所述滚筒模具（100）沿所述旋转轴（8）的方向的旋转偏移位移量; 控制装置（6）; 以及基于来自控制装置（6）的控制信号的致动器（7）允许电子束的描绘位置跟随滚子模具（100）沿旋转轴（8）的方向的位移，其特征在于，抑制由所述辊模（100）沿所述旋转轴（8）的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。

2. 发明申请

US20130068734A1 ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD 有权
标题翻译：滚筒模制造装置及制造方法
公开(公告)号：US20130068734A1
公开(公告)日：2013-03-21
申请号：US13700783
申请日：2011-06-08
申请人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
发明人： Naoto Ito , Toshio Kitada , Hidenari Kiguchiya
IPC分类号： B29C33/38
CPC分类号： B29C33/3842 , B23K15/08 , B29C33/38 , B82Y10/00 , B82Y40/00 , G03F1/20 , G03F7/2037 , G03F7/24 , H01J37/20 , H01J37/305 , H01J37/3174 , H01J2237/20214 , H01J2237/2025 , H01J2237/20271 , H01J2237/20285
摘要： A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam irradiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotary shaft (8); a displacement amount detection sensor (5) which detects a rotational runout displacement amount of the roller mold (100) in the direction of the rotary shaft (8); a control device (6); and an actuator (7) which, based on a control signal from the control device (6), allows a depiction position by the electron beams to follow the displacement of the roller mold (100) in the direction of the rotary shaft (8), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold (100) in the direction of the rotary shaft (8), is suppressed.
摘要翻译：在抑制成本增加的同时抑制了由于辊模在旋转轴的方向上的旋转跳动而导致的图形变得不清楚的现象。为了实现上述目的，一种辊模制造装置（1）设置有电子束照射装置（2）; 具有允许一些电子束通过的开口的掩模（3），并且形成对抗蚀剂进行同时描绘的多个光束; 旋转驱动装置（4），其围绕旋转轴（8）旋转辊模具（100）; 位移量检测传感器（5），其检测所述滚筒模具（100）沿所述旋转轴（8）的方向的旋转偏移位移量; 控制装置（6）; 以及基于来自控制装置（6）的控制信号的致动器（7）允许电子束的描绘位置跟随滚子模具（100）沿旋转轴（8）的方向的位移，其特征在于，抑制由所述辊模（100）沿所述旋转轴（8）的方向的旋转偏移而引起的所述抗蚀剂的露出位置的偏移。

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