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31. 发明申请

US20150015874A1 WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLUMINATION PUPIL CONFIGURATIONS 有权
标题翻译：滤波器和检测系统以及选择灯光配置的方法
公开(公告)号：US20150015874A1
公开(公告)日：2015-01-15
申请号：US14381315
申请日：2013-03-01
申请人： KLA-Tencor Corporation
发明人： Grace H. Chen , Rudolf Brunner , Lisheng Gao , Robert M. Danen , Lu Chen
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N21/95623 , G01N2021/8822 , G01N2021/95676 , G01N2201/061 , G01N2201/0638 , G01N2201/068 , G01N2201/12
摘要： In an optical inspection tool, an illumination aperture is opened at each of a plurality of aperture positions of an illumination pupil area one at a time across the illumination pupil area. For each aperture opening position, an incident beam is directed towards the illumination pupil area so as to selectively pass a corresponding ray bundle of the illumination beam at a corresponding set of one or more incident angles towards the sample and an output beam, which is emitted from the sample in response to the corresponding ray bundle of the incident beam impinging on the sample at the corresponding set of one or more incident angles, is detected. A defect detection characteristic for each aperture position is determined based on the output beam detected for each aperture position. An optimum aperture configuration is determined based on the determined defect detection characteristic for each aperture position.
摘要翻译：在光学检查工具中，照明光圈在照明光瞳区域的多个孔径位置中的每一个处打开，一次一个地穿过照明瞳孔区域。对于每个光圈打开位置，入射光束被引向照明光瞳区域，以便选择性地将照射光束的相应光束束以对应于一个或多个入射角的一组对应于样品的输出光束和输出光束检测来自样品的响应于在相应的一个或多个入射角度的入射光束入射到样品上的相应射线束。基于针对每个孔径位置检测的输出光束来确定每个光圈位置的缺陷检测特性。基于针对每个孔位置确定的缺陷检测特性来确定最佳孔径配置。

32. 发明申请

US20150008324A1 MEASUREMENT APPARATUS AND METHOD, TOMOGRAPHY APPARATUS AND METHOD 有权
标题翻译：测量装置和方法，测量装置和方法
公开(公告)号：US20150008324A1
公开(公告)日：2015-01-08
申请号：US14372418
申请日：2013-02-27
申请人： CANON KABUSHIKI KAISHA
发明人： Takeaki Itsuji
IPC分类号： G01N21/35 , G01N21/47 , G01B11/06 , G01N21/41
CPC分类号： G01N21/3586 , G01B11/06 , G01N21/35 , G01N21/3581 , G01N21/41 , G01N21/47 , G01N21/4795 , G01N2201/06113 , G01N2201/0638 , G01N2201/0697
摘要： An apparatus configured to obtain a physical property of an object by time-domain spectroscopy includes: a detection unit; a delay unit configured to adjust a time difference between generation and detection; a shaping unit configured to collect the electromagnetic wave pulses; a waveform obtaining unit configured to construct a time waveform of the electromagnetic wave pulses; and a collecting position adjusting unit configured to adjust a collecting position. When the collecting position is moved, an amount of adjustment when the collecting position matches first and second reflection portions, respectively, of the object, and a difference by the delay unit required for detecting first and second pulses of the time waveform are obtained, and from an amount of change of the amount of adjustment and the difference, a thickness and a refractive index of a region between the first and second reflection portions of the object are calculated.
摘要翻译：一种被配置为通过时域光谱获得物体的物理性质的装置，包括：检测单元; 延迟单元，被配置为调整生成和检测之间的时间差; 成形单元，被配置为收集电磁波脉冲; 波形获取单元，构造为构成电磁波脉冲的时间波形; 以及收集位置调整单元，被配置为调整收集位置。当收集位置移动时，获得与收集位置分别与物体的第一和第二反射部分相匹配的调节量，以及通过检测时间波形的第一和第二脉冲所需的延迟单元的差异，以及根据调整量的变化量和差值，计算出物体的第一反射部和第二反射部之间的区域的厚度和折射率。

33. 发明授权

US08926152B2 Ring light illuminator, beam shaper and method for illumination 有权
标题翻译：环形照明器，光束整形器和照明方法
公开(公告)号：US08926152B2
公开(公告)日：2015-01-06
申请号：US13376417
申请日：2011-07-25
申请人： Dacian Burges
发明人： Dacian Burges
IPC分类号： F21V7/04 , G02B21/08 , G01N21/88 , F21V8/00 , G02B19/00 , G02B27/09
CPC分类号： G02B21/084 , G01N21/8806 , G01N2021/8822 , G01N2201/062 , G01N2201/0631 , G01N2201/0638 , G02B6/0006 , G02B6/0008 , G02B19/0028 , G02B19/0061 , G02B27/0994
摘要： A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a light collector, a homogenizing means for light from the light source, and an anamorphic system for imaging an output of the homogenizing means into an area to be illuminated. The anamorphic system compensates deformations of a cross-sectional area of a light beam in a surface to be illuminated due to an oblique angle of incidence of the light beam onto the surface. The homogenizing means in embodiments is a rod, into which light from the light collector is directed. The end of the rod opposite the light collector is imaged by the anamorphic system into the area to be illuminated on the surface. Also disclosed is a method for illumination.
摘要翻译：公开了一种具有环形布置的光源的环形照明器。对于每个光源，对应于光收集器，用于来自光源的光的均匀化装置和用于将均匀化装置的输出成像到待照射区域的变形系统。变形系统由于光束入射到表面上的倾斜入射角来补偿被照射表面中的光束的横截面面积的变形。在实施例中的均质装置是一个杆，来自光收集器的光被引向该杆。与光收集器相对的杆的端部通过变形系统成像到要被照射在表面上的区域中。还公开了一种照明方法。

34. 发明申请

US20140071443A1 REFLECTION TYPE OPTICAL SENSOR AND IMAGE GENERATION APPARATUS 有权
标题翻译：反射型光学传感器和图像发生装置
公开(公告)号：US20140071443A1
公开(公告)日：2014-03-13
申请号：US14023032
申请日：2013-09-10
申请人： Hidemasa SUZUKI , Koji Masuda , Susumu Momma
发明人： Hidemasa SUZUKI , Koji Masuda , Susumu Momma
IPC分类号： G01N21/892
CPC分类号： G01N21/892 , G01N21/55 , G01N21/8903 , G01N2201/0638
摘要： A reflection type optical sensor that detect a surface condition of a moving body and that is used for an image generation apparatus which forms images on a recording media includes a light-emitting device which has a plurality of light emitter systems including at least two light-emitting members and a light-emitting optical system having a plurality of light-emitting lenses corresponding to a plurality of the light emitter systems and guiding light emitted from the light emitter systems to the moving body and a light-receiving device which has a light receiver system including at least two light-receiving members and a light-receiving optical system having light-receiving lenses corresponding to the at least two light-receiving members and guiding light reflected by the moving body to the light receiver system. The image generation apparatus has further a surface condition judging device in addition to the reflection type optical sensor.
摘要翻译：检测运动体的表面状态并用于在记录介质上形成图像的图像产生装置的反射型光学传感器包括具有多个发光器系统的发光器件，所述发光器件包括至少两个发光器件，发光构件和具有对应于多个发光体系的多个发光透镜并将从发光体系发射的光引导到移动体的发光光学系统和具有光接收器的光接收装置系统，包括至少两个光接收部件和具有与所述至少两个光接收部件对应的光接收透镜并将由所述移动体反射的光引导到所述光接收器系统的光接收光学系统。除了反射型光学传感器之外，图像生成装置还具有表面状态判断装置。

35. 发明申请

US20110132077A1 MULTI-WAVELENGTH LIGHT SOURCE 审中-公开
标题翻译：多波长光源
公开(公告)号：US20110132077A1
公开(公告)日：2011-06-09
申请号：US12737693
申请日：2009-07-22
申请人： Kevin P. Killeen , Karsten Kraiczek , Hubert Kuderer
发明人： Kevin P. Killeen , Karsten Kraiczek , Hubert Kuderer
IPC分类号： G01N30/00 , G01N30/74 , F21V11/00
CPC分类号： G01N30/74 , G01J2003/102 , G01N21/05 , G01N21/31 , G01N2021/0346 , G01N2021/3129 , G01N2021/3133 , G01N2021/3148 , G01N2021/317 , G01N2030/027 , G01N2201/06153 , G01N2201/0627 , G01N2201/0638
摘要： A fluid separation system (10) for separating compounds of a sample fluid in a mobile phase comprises a detector (50) adapted to detect separated compounds by providing an optical stimulus signal to the sample fluid and receiving a response signal to the optical stimulus signal. The detector (50) comprises a light source (100) adapted to provide an output light beam (230) as the optical stimulus signal. The light source (100) comprises a plurality of light emitting elements (200, 200A, 200Z) each adapted to emit a light beam (210, 210A1, 210A2, 210Z1, 210Z2) having a respective wavelength, and a diffracting element (220). The plurality of light emitting elements (200, 200A, 200Z) are arranged that emitted light beams (210, 210A1, 210A2, 210Z1, 210Z2) impinging, on the diffracting element (220) are diffracted by the diffracting element (220) to form the output light beam (230).
摘要翻译：用于分离流动相中的样品流体的化合物的流体分离系统（10）包括适于通过向样品流体提供光学刺激信号并且接收对光学刺激信号的响应信号来检测分离的化合物的检测器（50）。检测器（50）包括适于提供输出光束（230）作为光学刺激信号的光源（100）。光源（100）包括多个发光元件（200,200A，200Z），每个发光元件适于发射具有相应波长的光束（210,210A1,210A2,210Z1,210Z2）和衍射元件（220），。多个发光元件（200,200A，200Z）被布置成入射到衍射元件（220）上的发射光束（210,210A1,210A2,210Z1,210Z2）被衍射元件（220）衍射以形成输出光束（230）。

36. 发明申请

US20070247844A1 LED INSPECTION LAMP AND LED SPOT LIGHT 有权
标题翻译： LED检测灯和LED点光源
公开(公告)号：US20070247844A1
公开(公告)日：2007-10-25
申请号：US11695894
申请日：2007-04-03
申请人： Jack Brass , Richard Doran , Donald Klipstein , Thomas Lemons , Bjarki Hallgrimson , Sarah Dobbin
发明人： Jack Brass , Richard Doran , Donald Klipstein , Thomas Lemons , Bjarki Hallgrimson , Sarah Dobbin
IPC分类号： F21V9/00
CPC分类号： G01N21/6428 , G01N21/31 , G01N21/6402 , G01N21/6447 , G01N21/8803 , G01N2201/0221 , G01N2201/0612 , G01N2201/0621 , G01N2201/0627 , G01N2201/0638 , G01N2201/0693 , Y10S362/80
摘要： An LED inspection lamp has plurality of LED sources for emitting electromagnetic radiation at different peak wavelengths for causing visible fluorescence in different leak detection dyes. A lens is associated with each LED. Radiation passing through lenses is superimposed in target area at target distance. Another LED inspection lamp has plurality of LEDs emitting electromagnetic radiation at a peak wavelength. A lens adaptor has lens housing for attachment to LED inspection lamp with a single LED for causing visible fluorescence, and a lens. Substantially all of the radiation from the LED passes through the lens and is focused in a target area at a target distance from the lenses. LED spot lights have a similar configuration. The LEDs may produce white light from distinct LEDs or from white LEDs. The light may be a flashlight or fixed spot light.
摘要翻译： LED检查灯具有多个LED源，用于发射不同峰值波长的电磁辐射，以引起不同的检漏染料中的可见荧光。镜头与每个LED相关联。通过透镜的辐射以目标距离叠加在目标区域中。另一个LED检查灯具有发射峰值波长的电磁辐射的多个LED。镜头适配器具有透镜壳体，用于附接到具有用于引起可见荧光的单个LED的LED检查灯和透镜。基本上来自LED的所有辐射通过透镜并聚焦在与透镜目标距离处的目标区域中。 LED射灯具有相似的配置。 LED可能产生来自不同LED或白色LED的白光。灯可能是手电筒或固定点灯。

37. 发明授权

US5434664A Capillary flowcell for multiple wavelength detection 失效
标题翻译：用于多波长检测的毛细管流通池
公开(公告)号：US5434664A
公开(公告)日：1995-07-18
申请号：US227914
申请日：1994-04-15
申请人： Edwin Sapp
发明人： Edwin Sapp
IPC分类号： G01N27/447 , G01N21/03 , G01N21/05 , G01N21/27 , G01N30/74
CPC分类号： G01N21/05 , G01N2021/0346 , G01N2201/0638
摘要： A capillary flowcell of this invention comprises a holding means including an optical axis, the optical axis being defined by, in sequential order, (a) a first (entrance) aperture, (b) a first lens, (c) a capillary tube having its long axis centered across the optical axis, and (d) a second lens. The first lens focuses electromagnetic radiation from the entrance aperture passes through the inner diameter of the capillary tube, thus maximizing the signal generated by the analyte within the capillary tube. The second lens focuses electromagnetic radiation which has passed through the capillary tube. Methods and apparatus pertaining to the flowcell are given.
摘要翻译：本发明的毛细管流通池包括一个保持装置，该保持装置包括一个光轴，该光轴按顺序定义为（a）第一（入口）孔，（b）第一透镜，（c）毛细管，其长轴在光轴上居中，和（d）第二透镜。聚焦来自入口孔的电磁辐射的第一透镜通过毛细管的内径，从而最大化由毛细管内的分析物产生的信号。第二个透镜聚焦已经通过毛细管的电磁辐射。给出了与流池相关的方法和装置。

38. 发明授权

US5171995A Sample holder for optical spectrometer and method for taking a spectrum 失效
标题翻译：用于光谱仪的样品座和采集光谱的方法
公开(公告)号：US5171995A
公开(公告)日：1992-12-15
申请号：US764619
申请日：1991-09-24
申请人： Jurgen Gast , Arno Simon , Eckhard Reh
发明人： Jurgen Gast , Arno Simon , Eckhard Reh
IPC分类号： G01N21/03 , G01N30/74 , G01N35/00
CPC分类号： G01N21/03 , G01N2021/0339 , G01N2021/035 , G01N2035/00237 , G01N2201/0638
摘要： A sample holder for placing a sample substance for transmission measurements with optical radiation into a spectrometer, in particular, a FTIR spectrometer which is at least partially made from a material transparent to the optical radiation in a intermeshing wavelength region and which exhibits an index of refraction in excess of 1 is configured as a converging lens with a concave surface (11) and a convex surface (12). To take an absorption spectrum of a powder and/or fluid dissolved or suspended sample substance, the sample substance is brought onto the concave surface (11) of the sample holder before the measurement where it, in consequence of the curvature and in contrast to a flat surface, is concentrated in a substantially smaller surface region. The configuration of the sample holder as a converging lens increases the yield of the radiation penetrating through the sample substance onto the detector of the spectrometer configuration.
摘要翻译：用于将用于具有光学辐射的透射测量的样品物质放置在光谱仪中的样品架，特别是FTIR光谱仪，其至少部分地由在相互啮合的波长区域内的光辐射透明的材料制成并且具有折射率超过1被配置为具有凹面（11）和凸面（12）的会聚透镜。为了获得粉末和/或流体溶解或悬浮的样品物质的吸收光谱，在测量之前将样品物质带到样品保持器的凹面（11）上，其中由于曲率而与平坦的表面集中在基本上较小的表面区域。作为会聚透镜的样品架的构造增加了穿透样品物质的辐射的产量到光谱仪配置的检测器上。

39. 发明授权

US4912529A Apparatus and method to compensate for refraction of radiation 失效
$Apparatus and method to compensate for refraction of radiation$
标题翻译：用于补偿辐射折射的装置和方法
公开(公告)号：US4912529A
公开(公告)日：1990-03-27
申请号：US083744
申请日：1987-08-07
申请人： Gary R. Allen , Philip E. Moskowitz
发明人： Gary R. Allen , Philip E. Moskowitz
IPC分类号： G01J1/42 , G01N21/25
CPC分类号： G01N21/255 , G01J2001/4247 , G01N2201/0638
摘要： An apparatus to compensate for refraction of radiation passing through a curved wall of an article is provided. The apparatus of a preferred embodiment is particularly advantageous for use in arc tube discharge diagnostics. The apparatus of the preferred embodiment includes means for pre-refracting radiation on a predetermined path by an amount equal and inverse to refraction which occurs when radiation passes through a first wall of the arc tube such that, when the radiation passes through the first wall of the arc tube and into the cavity thereof, the radiation passes through the cavity approximately on the predetermined path; means for releasably holding the article such that the radiation passes through the cavity thereof; and means for post-refracting radiation emerging from a point of the arc tube opposite its point of entry by an amount equal and inverse to refraction which occurs when radiation emerges from the arc tube. In one embodiment the means for pre-refracting radiation includes a first half tube comprising a longitudinally bisected tube obtained from a tube which is approximately identical to the arc tube's cylindrical portion and a first cylindrical lens, the first half tube being mounted with its concave side facing the radiation source and the first cylindrical lens being mounted between the first half tube and the arc tube and the means for post-refracting radiation includes a second half tube comprising a longitudinally bisected tube obtained from a tube which is approximately identical to the arc tube's cylindrical portion and a second cylindrical lens, the second half tube being mounted with its convex side facing the radiation source and the second cylindrical lens being mounted between the arc tube and the second half tube. Methods to compensate for refraction of radiation passing into and out of an arc tube is also provided.
摘要翻译：提供了用于补偿穿过物品的弯曲壁的辐射的折射的装置。优选实施例的装置对于用于电弧管放电诊断是特别有利的。优选实施例的装置包括用于将预定路径上的辐射预折射与辐射通过电弧管的第一壁时发生的折射相等和相反的量的装置，使得当辐射通过第电弧管并进入其空腔，辐射大致在预定路径上通过空腔; 用于可释放地保持物品使得辐射通过其空腔的装置; 以及用于将从电弧管的与其入口相反的点出射的辐射的后折射量与辐射从电弧管出射时发生的相等和相反的折射。在一个实施例中，用于预折射辐射的装置包括：第一半管，其包括从与所述电弧管的圆柱形部分大致相同的管获得的纵向平分管和第一柱面透镜，所述第一半管安装有其凹面面对辐射源并且第一柱面透镜安装在第一半管和电弧管之间，并且用于后折射辐射的装置包括第二半管，该第二半管包括从管获得的纵向平分管，其与电弧管的圆筒部分和第二柱面透镜，第二半管安装成其凸面面对辐射源，第二柱面透镜安装在电弧管和第二半管之间。还提供了补偿进入和离开电弧管的辐射的折射的方法。

40. 发明公开

US20240337596A1 Method And Apparatus For Mapping Distribution of Chemical Compounds in Soil 审中-公开
公开(公告)号：US20240337596A1
公开(公告)日：2024-10-10
申请号：US18749755
申请日：2024-06-21
申请人： S4 Mobile Laboratories, LLC
发明人： Linda BARRETT
IPC分类号： G01N21/3563 , G01N21/359 , G01N21/85 , G01N33/24 , G01S19/26
CPC分类号： G01N21/3563 , G01N21/359 , G01N21/8507 , G01N33/24 , G01S19/26 , G01N2021/855 , G01N2201/0636 , G01N2201/0638 , G01N2201/08
摘要： A method for mapping distribution of chemical compounds in soil is described herein including inserting a probe into the soil, obtaining spectroscopic data regarding the soil, sampling a core of soil adjacent to the probe locations, dividing the core into multiple depth increments, analyzing the core samples, matching each core sample with a corresponding depth increment of the probe insertions, obtaining data from the probe insertions, dividing the probe insertion data into training, validation, and test categories, resampling spectral variables from the probe insertion data to a wavelength interval longer than a native wavelength interval of an associated spectrometer, normalizing the probe insertion data on a spectrum by spectrum basis, utilizing a machine learning normalization algorithm, standardizing the spectral variables to a common scale by removing a mean and scaling to unit variance, and choosing a model utilizing the test set.

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