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31. 发明申请

US20130027146A1 MEMS VIBRATOR AND OSCILLATOR 有权
标题翻译： MEMS振动器和振荡器
公开(公告)号：US20130027146A1
公开(公告)日：2013-01-31
申请号：US13550950
申请日：2012-07-17
申请人： Shogo INABA
发明人： Shogo INABA
IPC分类号： H03B1/00
CPC分类号： H03H9/2457 , B81B3/007 , B81B2201/014 , H03H3/0072 , H03H2009/02283 , H03H2009/02456 , H03H2009/02511
摘要： A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.
摘要翻译： MEMS振动器包括：基板; 设置在所述基板上方的第一电极; 以及第二电极，其设置在所述第二电极的至少一部分具有在所述第一电极和所述第二电极之间的空间的状态下，并且具有能够在所述基板的厚度方向上以静电力振动的光束部分，支撑部分，其支撑梁部分的一个边缘并且设置在基板上方，其中支撑所述一个边缘的支撑部分的支撑侧面具有从基板的厚度方向在平面图中弯曲的弯曲部分，并且所述一个边缘由包括弯曲部的支撑侧面支撑。

32. 发明申请

US20120328860A1 Multi-zone microstructure spring 审中-公开
标题翻译：多区微结构弹簧
公开(公告)号：US20120328860A1
公开(公告)日：2012-12-27
申请号：US13135037
申请日：2011-06-23
申请人： Jeffrey Paul Baugher
发明人： Jeffrey Paul Baugher
IPC分类号： B32B7/02 , B23P13/00
CPC分类号： B81B3/007 , B81B2203/0163 , B81B2203/0376 , Y10T29/49609 , Y10T428/24983
摘要： A method to create a multi-zone microstructure spring includes releasing a buckling layer from a substrate, wherein the buckling layer displaces into a curved shape after the releasing. The buckling layer is displaced, relative to the substrate, through at least one of a first zone, a second zone, and a third zone, wherein the buckling layer provides positive stiffness in the first zone, zero stiffness in a second zone, and negative stiffness in a third zone, and the buckling layer must pass through the first zone to reach the second zone and the buckling layer must pass through the second zone to reach the third zone. A multi-zone microstructure spring includes a substrate and a buckling layer. The buckling layer has a surface area. The buckling layer has a positive stiffness in a first zone, zero stiffness in a second zone, and a negative stiffness in a third zone. The buckling layer must pass through the first zone to reach the second zone and the buckling layer must pass through the second zone to reach the third zone. The buckling layer is connected to the substrate. The microstructure includes an elastic connection. The elastic connection is in contact with the buckling layer over a fraction of the buckling layer's surface area.
摘要翻译：创建多区域微结构弹簧的方法包括从基底释放弯曲层，其中在释放之后，屈曲层移位成弯曲形状。屈曲层相对于基底通过第一区域，第二区域和第三区域中的至少一个移位，其中屈曲层在第一区域中提供正刚度，在第二区域中提供零刚度，并且在第二区域中为零屈曲层必须通过第一区域到达第二区域，并且屈曲层必须通过第二区域以到达第三区域。多区域微结构弹簧包括基底和屈曲层。屈曲层具有表面积。屈曲层在第一区域具有正刚度，在第二区域中具有零刚度，在第三区域中具有负刚度。屈曲层必须穿过第一区域以到达第二区域，并且屈曲层必须通过第二区域以到达第三区域。屈曲层连接到基底。微结构包括弹性连接。弹性连接件在屈曲层表面积的一部分上与屈曲层接触。

33. 发明申请

US20120228504A1 MEMS SENSOR AND SENSOR ARRAY HAVING THE SAME 审中-公开
标题翻译： MEMS传感器和传感器阵列具有相同的功能
公开(公告)号：US20120228504A1
公开(公告)日：2012-09-13
申请号：US13498795
申请日：2009-09-29
申请人： Takanori Maeda , Takahiro Kawano , Kenjiro Fujimoto , Atsushi Onoe
发明人： Takanori Maeda , Takahiro Kawano , Kenjiro Fujimoto , Atsushi Onoe
IPC分类号： G01J5/02
CPC分类号： G01J5/02 , B81B3/007 , B81B2201/0278 , B81B2203/0127 , B81B2203/019 , G01J5/024
摘要： A MEMS sensor has a membrane 3 in a polygon released via a support portion 2, and the membrane 3 has a reinforcement rib portion 6 made up of a plurality of radially extending rib portions 6a and a plurality of divisional membranes 7 constructed between adjacent two rib portions 6a, 6a and formed in a polygon with the two rib portions 6a, 6a as two sides.
摘要翻译： MEMS传感器具有通过支撑部分2释放的多边形膜3，膜3具有由多个径向延伸的肋部分6a和多个分隔膜7构成的加强肋部分6，该分隔膜7在相邻的两个肋部分6a，6a并且以两个肋部6a，6a为两侧形成为多边形。

34. 发明申请

US20110290022A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20110290022A1
公开(公告)日：2011-12-01
申请号：US13177485
申请日：2011-07-06
申请人： Jong Woon Kim , Won Kyu Jeung
发明人： Jong Woon Kim , Won Kyu Jeung
IPC分类号： G01P15/02 , C23F1/02
CPC分类号： B81C1/00158 , B81B3/0062 , B81B3/007 , B81B2201/0235 , B81B2203/053 , B81C1/00484 , B81C1/00531 , B81C1/00539 , B81C1/00571 , B81C2201/01 , B81C2201/0132 , B81C2201/0133 , B81C2201/014 , C09K13/00 , C09K13/08 , G01C19/56 , G01P15/0802 , G01P15/0922 , G01P15/18 , G01P2015/084 , G01P2015/0871
摘要： Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.
摘要翻译：本文公开了一种惯性传感器及其制造方法。根据本发明的优选实施例的惯性传感器100被配置为包括板状膜110，质量体120，其包括设置在膜110的中心部分113下方并设置在中心部分处的粘合部123 以及设置在粘合部123的外侧并被图案化以垂直贯穿其中的图案形成部分125，以及形成在膜110和粘合部123之间的第一粘合层130，并且设置在第一粘合层130的内侧图形部分125.通过使用图案形成部分125作为掩模的各向同性蚀刻，第一粘合剂层130的区域变窄，从而可以提高惯性传感器100的灵敏度。

35. 发明授权

US08039911B2 MEMS sensor 有权
标题翻译： MEMS传感器
公开(公告)号：US08039911B2
公开(公告)日：2011-10-18
申请号：US12485696
申请日：2009-06-16
申请人： Goro Nakatani , Mizuho Okada , Nobuhisa Yamashita
发明人： Goro Nakatani , Mizuho Okada , Nobuhisa Yamashita
IPC分类号： H01L29/84 , H01L21/00 , H04R19/04
CPC分类号： G01P15/125 , B81B3/007 , B81B2201/0235 , B81B2201/0257 , B81B2203/0118 , G01P15/0802 , H04R7/16 , H04R19/005 , H04R19/04
摘要： The MEMS sensor according to the present invention includes a diaphragm. In the diaphragm, an angle formed by two straight lines connecting supporting portions and the center of a main portion with one another respectively is set to satisfy the relation of the following formula (1): (A2/A1)/(B2/B1)≧1 (1) A2: maximum vibrational amplitude of the diaphragm in a case of working a physical quantity of a prescribed value on the diaphragm A1: maximum vibrational amplitude of the diaphragm in a case of working the physical quantity on the diaphragm in an omitting structure obtained by omitting one of the supporting portions from the diaphragm B2: maximum stress caused in the diaphragm in the case of working the physical quantity on the diaphragm B1: maximum stress caused in the diaphragm in the case of working the physical quantity on the diaphragm in the omitting structure.
摘要翻译：根据本发明的MEMS传感器包括隔膜。在隔膜中，由分别连接支撑部和主体部的中心的两条直线形成的角度分别设定为满足下式（1）的关系：（A2 / A1）/（B2 / B1） ≧1（1）A2：在隔膜A1上施加规定值的物理量的情况下的隔膜的最大振动振幅：在省略膜片的物理量的情况下的隔膜的最大振动振幅从隔膜B2省略支撑部分中的一个所获得的结构：在加工隔膜B1上的物理量的情况下在隔膜中产生的最大应力：在隔膜上施加物理量的情况下在隔膜中引起的最大应力在省略的结构。

36. 发明授权

US07990601B2 System and method for display device with reinforcing substance 有权
标题翻译：具有增强物质的显示装置的系统和方法
公开(公告)号：US07990601B2
公开(公告)日：2011-08-02
申请号：US12727171
申请日：2010-03-18
申请人： Lauren Palmateer
发明人： Lauren Palmateer
IPC分类号： G02F1/03
CPC分类号： B81B3/007 , B81B7/0038 , B81B2201/047 , B81C2203/0163 , G02B26/001
摘要： A package structure and method of packaging an interferometric modulator with a reinforcing substance to help support the integrity of the package. In some embodiments the reinforcing substance is a desiccant integrated into the backplate or the transparent substrate.
摘要翻译：一种封装结构和方法，用于将具有加强物质的干涉式调制器封装以帮助支持封装的完整性。在一些实施方案中，增强物质是整合到背板或透明基底中的干燥剂。

37. 发明申请

US20110180931A1 ROBUST HIGH ASPECT RATIO SEMICONDUCTOR DEVICE 有权
标题翻译：稳定的高倍率半导体器件
公开(公告)号：US20110180931A1
公开(公告)日：2011-07-28
申请号：US13121268
申请日：2009-09-24
申请人： Freddy Roozeboom , Martijn Goossens , Willen Frederik Adrianus Besling , Nynke Verhaegh
发明人： Freddy Roozeboom , Martijn Goossens , Willen Frederik Adrianus Besling , Nynke Verhaegh
IPC分类号： H01L23/48 , G03F1/00
CPC分类号： H01L29/41 , B81B3/007 , B81B2201/06 , B81C1/00619 , B81C2201/0112 , B81C2201/0132 , H01L28/91
摘要： The invention relates to an semi-conductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner.
摘要翻译：本发明涉及一种半导体器件，其包括第一表面和布置在第一表面上的相邻的第一和第二电气元件，其中第一和第二元件中的每个元件在第一方向上从第一表面延伸，第一元件具有基本上垂直于第一方向的横截面和至少部分地沿第一方向延伸的侧壁表面，其中侧壁表面包括沿着基本上平行于第一方向延伸的线邻接第一部分的第一部分和第二部分，其中，第一和第二部分相对于彼此以一定角度放置以提供内角，其中内角处的侧壁表面至少部分地布置成距离第二元件的面对部分恒定的距离R，以提供机械加强结构在内角。

38. 发明申请

US20110159626A1 Micro-Electro-Mechanical Device And Method Of Manufacturing The Same 有权
标题翻译：微机电装置及其制造方法
公开(公告)号：US20110159626A1
公开(公告)日：2011-06-30
申请号：US12963483
申请日：2010-12-08
申请人： Kaoru Tsuchiya , Takafumi MIZOGUCHI
发明人： Kaoru Tsuchiya , Takafumi MIZOGUCHI
IPC分类号： H01L21/02
CPC分类号： B81B3/007 , B81B2201/0264 , B81B2203/0315 , Y10S977/724 , Y10S977/732 , Y10S977/733 , Y10T428/249953
摘要： The present invention improves mechanical strength of a micro-electro-mechanical device (MEMS) having a movable portion to improve reliability. In a micro-electro-mechanical device (MEMS) having a movable portion, a portion which has been a hollow portion in the case of a conventional structure is filled with a filler material. As the filler material, a block copolymer that is highly flexible is used, for example. By filling the hollow portion, mechanical strength improves. Besides, warpage of an upper portion of a structure body in the manufacture process is prevented, whereby yield improves. A micro-electro-mechanical device thus manufactured is highly reliable.
摘要翻译：本发明提高了具有可移动部分的微机电装置（MEMS）的机械强度，以提高可靠性。在具有可移动部分的微机电装置（MEMS）中，在常规结构的情况下已经是中空部分的部分填充有填充材料。作为填充材料，例如使用高度柔性的嵌段共聚物。通过填充中空部分，机械强度提高。此外，防止了制造过程中的结构体的上部的翘曲，从而产率提高。这样制造的微机电装置是高度可靠的。

39. 发明授权

US07923894B2 Actuator, image projection apparatus and production method for actuator 失效
标题翻译：执行机构，图像投影装置及执行机构的制作方法
公开(公告)号：US07923894B2
公开(公告)日：2011-04-12
申请号：US12447503
申请日：2007-12-03
申请人： Hiroshi Obi , Hironori Tomita , Akira Kurozuka
发明人： Hiroshi Obi , Hironori Tomita , Akira Kurozuka
IPC分类号： G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , B81B3/007 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/058 , B81B2207/07 , H02N1/006 , H04N1/113 , H04N2201/0082
摘要： The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.
摘要翻译：本发明涉及具有第一可移动部分，支撑第一可移动部分的第二可动部分和背衬的双轴向枢转型致动器。第一可动部分和第二导电部分，用于独立施加驱动电压到第一可移动部分和第二可移动部分中的每一个，在被隔离沟槽分开的状态下设置在第二可动部分上，并且通过背衬设置在第二可移动部分下方。通过在电气隔离状态下提供这种背衬，相互稳定的第一导电部分和第二导电部分，并且实现致动器的制造步骤的简化。通过在本发明的致动器的第一导电部分上设置反射镜，可以通过简单的制造工艺提供双轴向枢转型反射镜装置。

40. 发明授权

US07843111B2 Dielectric composite and a method of manufacturing a dielectric composite 有权
标题翻译：介电复合材料和制造介电复合材料的方法
公开(公告)号：US07843111B2
公开(公告)日：2010-11-30
申请号：US12400231
申请日：2009-03-09
申请人： Mohamed Yahia Benslimane , Peter Gravesen
发明人： Mohamed Yahia Benslimane , Peter Gravesen
IPC分类号： H01L41/08
CPC分类号： H02N1/006 , B81B3/007 , B81B2201/038 , H01L41/0471 , H01L41/083 , H01L41/0836 , H01L41/0986 , H01L41/27 , H01L41/333 , H01L41/45 , H04R23/00 , Y10S310/80 , Y10T428/24612
摘要： A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied.
摘要翻译：与用于换能器的类似的现有技术复合材料相比，用于换能器的复合材料促进了增加的致动力。根据本发明，与用于换能器的类似的现有技术复合材料相比，复合材料还有助于提高换能器在一个方向上的顺应性和改进的反应时间，并且提供其应用传感器的寿命增加。

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