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1. 发明申请

US20120127556A1 METHOD AND SYSTEM FOR PACKAGING A DISPLAY 审中-公开
标题翻译：用于包装显示器的方法和系统
公开(公告)号：US20120127556A1
公开(公告)日：2012-05-24
申请号：US13353132
申请日：2012-01-18
申请人： Brian J. Gally , William J. Cummings , Lauren Palmateer , Philip D. Floyd , Clarence Chui
发明人： Brian J. Gally , William J. Cummings , Lauren Palmateer , Philip D. Floyd , Clarence Chui
IPC分类号： G02B26/00 , B32B38/16
CPC分类号： B81B7/0067 , B81B2201/045 , B81C2203/0109 , B81C2203/0145 , B81C2203/019 , G02B26/001
摘要： A package structure and method of packaging for an interferometric modulator. A transparent substrate having an interferometric modulator formed thereon is provided. A backplane is joined to the transparent substrate with a seal where the interferometric modulator is exposed to the surrounding environment through an opening in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure.
摘要翻译：用于干涉式调制器的封装结构和封装方法。提供了其上形成有干涉式调制器的透明基板。背板通过密封件连接到透明基板上，其中干涉式调制器通过背板或密封件中的开口暴露于周围环境。在透明基板和背板接合之后，并且在任何期望的干燥剂，剥离材料和/或自对准单层被引入到包装结构中之后，将开口密封。

2. 发明授权

US08040587B2 Desiccant in a MEMS device 有权
标题翻译：干燥剂在MEMS器件中
公开(公告)号：US08040587B2
公开(公告)日：2011-10-18
申请号：US11750279
申请日：2007-05-17
申请人： Lauren Palmateer
发明人： Lauren Palmateer
IPC分类号： G02B26/00 , G02F1/29
CPC分类号： G02B26/001 , B81B7/0038 , B81B2201/047 , B81B2203/053 , B81C2203/019 , G02B26/0833
摘要： A package structure and method for packaging a MEMS device is described. In one embodiment, the MEMS base device can include a substrate having a MEMS device formed thereon, a backplate, an exposed or activated desiccant disposed between the backplate and the transparent substrate, and a cover at least partially encapsulating said desiccant. In another embodiment, a MEMS display device can be manufactured by contacting the substrate and/or backplate with a cover which at least partially encapsulates a desiccant, joining the backplate and the substrate to form a package, and exposing or activating the desiccant.
摘要翻译：描述了用于封装MEMS器件的封装结构和方法。在一个实施例中，MEMS基底器件可以包括其上形成有MEMS器件的衬底，背板，设置在背板和透明衬底之间的暴露或激活的干燥剂，以及至少部分地封装所述干燥剂的盖。在另一个实施例中，可以通过使衬底和/或背板接触至少部分地包封干燥剂，连接背板和衬底以形成封装以及暴露或激活干燥剂的盖来制造MEMS显示装置。

3. 发明授权

US07532385B2 Optical interference display panel and manufacturing method thereof 有权
标题翻译：光干涉显示面板及其制造方法
公开(公告)号：US07532385B2
公开(公告)日：2009-05-12
申请号：US10807128
申请日：2004-03-24
申请人： Wen-Jian Lin , Brian Arbuckle , Brian Gally , Philip Floyd , Lauren Palmateer
发明人： Wen-Jian Lin , Brian Arbuckle , Brian Gally , Philip Floyd , Lauren Palmateer
IPC分类号： G02B26/00 , H01L21/00
CPC分类号： G02B26/001 , B81B7/0012 , B81B2201/045
摘要： A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.
摘要翻译：第一电极和牺牲层依次形成在基板上，然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。支撑件形成在第一开口中，然后在牺牲层和支撑件上形成第二电极，从而形成微机电系统结构。之后，使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构，并且至少一个第二开口保留在腔室的侧壁上。随后采用释放蚀刻工艺以通过第二开口去除牺牲层，以便在光学干涉反射结构中形成空腔。最后，关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

4. 发明申请

US20080115596A1 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 失效
标题翻译：密封MEMS器件测试湿度的系统和方法
公开(公告)号：US20080115596A1
公开(公告)日：2008-05-22
申请号：US12021218
申请日：2008-01-28
申请人： Brian Gally , Lauren Palmateer , Manish Kothari , Williams Cummings
发明人： Brian Gally , Lauren Palmateer , Manish Kothari , Williams Cummings
IPC分类号： G01G9/00
CPC分类号： B81C99/0045 , G01M3/002 , G01M3/02 , G01M3/186 , G01M3/229 , G02B26/001 , Y10T29/49002
摘要： One embodiment provides a method of testing humidity. The method includes measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor. The method further includes comparing the weights of the first and second devices and determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison. In one embodiment, the relative humidity value or degree is determined considering at least one of the following parameters: i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.
摘要翻译：一个实施例提供了测试湿度的方法。该方法包括测量i）包围多个干涉式调制器的第一装置的第一权重和ii）封闭多个干涉式调制器的第二装置的第二权重，其中第一和第二装置含有不同量的水汽。该方法还包括比较第一和第二装置的重量，并且至少部分地基于重量比较来确定两个装置之一内的相对湿度值或相对湿度的程度。在一个实施例中，考虑以下参数中的至少一个来确定相对湿度值或度数：i）至少一个装置内的温度 - 湿度组合，ii）至少一个装置的密封件的厚度和宽度，iii）所述至少一个装置的部件的粘合剂渗透性，iv）所述至少一个装置内的干燥剂容量，以及v）装置尺寸。

5. 发明授权

US07184202B2 Method and system for packaging a MEMS device 有权
标题翻译：用于封装MEMS器件的方法和系统
公开(公告)号：US07184202B2
公开(公告)日：2007-02-27
申请号：US11045800
申请日：2005-01-28
申请人： Mark W. Miles , Jeffrey B. Sampsell , Lauren Palmateer , Brian W. Arbuckle , Philip D. Floyd
发明人： Mark W. Miles , Jeffrey B. Sampsell , Lauren Palmateer , Brian W. Arbuckle , Philip D. Floyd
IPC分类号： G02F1/00
CPC分类号： B81C1/0023 , G02B26/001 , Y10T29/49002
摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
摘要翻译：描述了基于MEMS的显示装置，其中干涉式调制器的阵列被配置为将光反射通过透明基板。透明基板被密封到背板，并且背板可以包含用于控制干涉式调制器阵列的电子电路。背板可以为诸如可用于控制显示器状态的电子部件等设备组件提供物理支持。背板也可以用作设备的主要结构支撑。

6. 发明申请

US20060067645A1 System and method of testing humidity in a sealed MEMS device 失效
标题翻译：在密封的MEMS器件中测试湿度的系统和方法
公开(公告)号：US20060067645A1
公开(公告)日：2006-03-30
申请号：US11173822
申请日：2005-07-01
申请人： Brian Gally , Lauren Palmateer , Manish Kothari , William Cummings
发明人： Brian Gally , Lauren Palmateer , Manish Kothari , William Cummings
IPC分类号： G02B6/00
CPC分类号： B81C99/0045 , G01M3/002 , G01M3/02 , G01M3/186 , G01M3/229 , G02B26/001 , Y10T29/49002
摘要： One embodiment provides a method of testing humidity, comprising: determining a property of a device which encloses a plurality of interferometric modulators; and determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined property. In one embodiment, the property of the device includes one of the following: i) a weight of the device, ii) a color change of a desiccant enclosed in the device, iii) a resistance inside the device, iv) whether frost formed in an inside area of the device which is contacted by a cold finger device, v) whether a desiccant enclosed in the device, when water vapor is provided into the device, is working properly, and vi) combination of at lest two of i)-v).
摘要翻译：一个实施例提供一种测试湿度的方法，包括：确定包围多个干涉式调制器的装置的属性; 以及至少部分地基于所确定的属性来确定所述装置内的相对湿度值或相对湿度的程度。在一个实施例中，设备的特性包括以下之一：i）设备的重量，ii）封装在设备中的干燥剂的颜色变化，iii）设备内部的电阻，iv）是否形成设备的内部区域，其由冷指装置接触，v）当在设备中提供水蒸气时，包封在设备中的干燥剂是否正常工作，以及vi）至少两个组合，i） - v）。

7. 发明申请

US20060066600A1 System and method for display device with reinforcing substance 失效
标题翻译：具有增强物质的显示装置的系统和方法
公开(公告)号：US20060066600A1
公开(公告)日：2006-03-30
申请号：US11144305
申请日：2005-06-03
申请人： Lauren Palmateer
发明人： Lauren Palmateer
IPC分类号： G09G5/00
CPC分类号： B81B3/007 , B81B7/0038 , B81B2201/047 , B81C2203/0163 , G02B26/001
摘要： A package structure and method of packaging an interferometric modulator with a reinforcing substance to help support the integrity of the package. In some embodiments the reinforcing substance is a desiccant integrated into the backplate or the transparent substrate.
摘要翻译：一种封装结构和方法，用于将具有加强物质的干涉式调制器封装以帮助支持封装的完整性。在一些实施方案中，增强物质是整合到背板或透明基底中的干燥剂。

8. 发明授权

US08435838B2 Optimization of desiccant usage in a MEMS package 失效
标题翻译： MEMS封装中干燥剂使用的优化
公开(公告)号：US08435838B2
公开(公告)日：2013-05-07
申请号：US12680503
申请日：2007-09-28
申请人： Yen Hua Lin , Rihui He , Lingling Wu , Lauren Palmateer , David Heald
发明人： Yen Hua Lin , Rihui He , Lingling Wu , Lauren Palmateer , David Heald
IPC分类号： H01L21/00
CPC分类号： B81C1/00285 , B81C1/00674
摘要： A MEMS device may be package with a desiccant to provide a moisture-free environment. In order to avoid undesirable effects on the MEMS device, the desiccant may be selected or treated so as to be compatible with a particular MEMS device. This treatment may include baking of the desiccant to as to cause outgassing of moisture or other undesirable material. The structure of the MEMS device may also be altered to improve compatibility with particular desiccants.
摘要翻译： MEMS器件可以用干燥剂包装以提供无湿度的环境。为了避免对MEMS器件的不期望的影响，可以选择或处理干燥剂以便与特定的MEMS器件兼容。这种处理可以包括烘烤干燥剂，以引起除湿或其它不期望的物质。还可以改变MEMS器件的结构，以改善与特定干燥剂的相容性。

9. 发明申请

US20110290552A1 METHOD AND SYSTEM FOR PACKAGING MEMS DEVICES WITH INCORPORATED GETTER 审中-公开
标题翻译：用于包装具有并发卡特的MEMS器件的方法和系统
公开(公告)号：US20110290552A1
公开(公告)日：2011-12-01
申请号：US13208218
申请日：2011-08-11
申请人： Lauren Palmateer , William J. Cummings , Brian Gally , Clarence Chui , Manish Kothari
发明人： Lauren Palmateer , William J. Cummings , Brian Gally , Clarence Chui , Manish Kothari
IPC分类号： H01L23/28 , B29C65/54
CPC分类号： B81B7/0038 , B81C2203/019 , G02B26/001
摘要： Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.
摘要翻译：公开了用于封装诸如干涉式调制器阵列之类的MEMS装置的方法和系统。 MEMS器件封装结构的一个实施例包括具有化学反应物吸气剂的密封。 MEMS器件封装的另一实施例包括具有吸气剂的主密封件和靠近主密封件的外周边的次级密封件。 MEMS器件封装的另一个实施例包括位于MEMS器件封装内部并且靠近封装密封件的内周边的吸气剂。

10. 发明授权

US07916103B2 System and method for display device with end-of-life phenomena 有权
标题翻译：具有寿命终止现象的显示装置的系统和方法
公开(公告)号：US07916103B2
公开(公告)日：2011-03-29
申请号：US11102543
申请日：2005-04-08
申请人： Lauren Palmateer
发明人： Lauren Palmateer
IPC分类号： G02B26/00
CPC分类号： G09G3/3466 , G02B26/001 , G02B26/0841 , G09G2300/06 , G09G2320/04 , G09G2330/04
摘要： Systems and methods of displaying an end-of-life image on an electronic display are disclosed. An end-of-life image is displayed on a MEMS display device in the presence of sufficient water vapor and without continued activation of the display. The image can he displayed in response to user input, in response to detection of a predefined level of water vapor within the display package, according to a prestored lifetime of the device, or according to the natural expiration of the lifetime of the display device and packaging.
摘要翻译：公开了在电子显示器上显示寿命终止图像的系统和方法。寿命延长的图像显示在MEMS显示装置上，在存在足够的水蒸气并且不持续激活显示器的情况下。响应于用户输入，响应于根据预先存储的设备的寿命或者根据显示设备的寿命的自然过期来检测显示包中的预定水平的水蒸气，可以显示图像，以及打包。

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