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    • 31. 发明授权
    • Method of processing a piezoelectric device
    • 压电装置的处理方法
    • US5647932A
    • 1997-07-15
    • US601539
    • 1996-02-14
    • Yutaka TaguchiKazuo EdaAkihiro KanaboshiTetsuyoshi OguraYoshihiro Tomita
    • Yutaka TaguchiKazuo EdaAkihiro KanaboshiTetsuyoshi OguraYoshihiro Tomita
    • H03H3/02H01L21/30H01L21/304H01L21/306
    • H03H3/02Y10S148/012Y10S148/135
    • The following steps are performed when processing electronic components such as piezoelectric devices. At Step 1 inter-atom bond is created between a functional member such as a quartz crystal plate and a first substrate, and the functional member and the quartz crystal plate are directly joined together. At Step 2, the functional member and a second substrate are fixed together with an adhesive agent or by a direct bond. At Step 3, the first substrate is removed chemically or mechanically, with said functional member and said second substrate still being joined together. A step of polishing said functional member for the adjustment of thickness thereof may be done between Step 1 and Step 2. For example, a silicon dioxide thin film may be provided between the functional member and the first substrate. Since no adhesive layer exists between the functional member and the first substrate, this improves the degree of plane of the functional member when joined to the first substrate. Therefore, functional member thickness accuracy becomes extremely high and mass productivity is also improved.
    • 在处理诸如压电装置的电子部件时执行以下步骤。 在步骤1中,在诸如石英晶体板的功能部件和第一基板之间产生原子间键合,并且功能部件和石英晶体板直接接合在一起。 在步骤2中,功能部件和第二基板通过粘合剂或直接粘合固定在一起。 在步骤3中,第一衬底被化学或机械地移除,所述功能构件和所述第二衬底仍然连接在一起。 可以在步骤1和步骤2之间进行用于调整其厚度的抛光所述功能部件的步骤。例如,可以在功能部件和第一基板之间设置二氧化硅薄膜。 由于在功能部件和第一基板之间不存在粘接层,因此能够提高与第一基板接合时的功能部件的平面度。 因此,功能元件厚度精度变得非常高,并且也提高了批量生产率。
    • 38. 发明授权
    • High-frequency switch
    • 高频开关
    • US06998932B2
    • 2006-02-14
    • US10809309
    • 2004-03-24
    • Yutaka TaguchiYuki Satoh
    • Yutaka TaguchiYuki Satoh
    • H01P1/10H01P5/12
    • H01P1/15
    • A high-frequency switch having two input terminals and two output terminals of which a broad pass band is required has (i) a circuit board that has two input electrodes along one side and two output electrodes along another side, and (ii) four PIN diodes mounted on this circuit board. Each side of the quadrangle made by connecting the input electrodes and the output electrodes is not parallel to the corresponding side of the quadrangle made by connecting electrodes for mounting the PIN diodes. Each side and the corresponding side form an angle other than 180°. This structure can provide a high-frequency switch capable of reducing a transmission loss in the paths and facilitating impedance matching.
    • 具有需要宽通带的两个输入端子和两个输出端子的高频开关具有:(i)沿着一侧具有两个输入电极和沿着另一侧具有两个输出电极的电路板,以及(ii)四个PIN 安装在该电路板上的二极管。 通过连接输入电极和输出电极制成的四边形的每一侧不平行于用于安装PIN二极管的连接电极制成的四边形的相应侧。 每一侧和相应的一侧形成除180°以外的角度。 该结构可以提供能够减小路径中的传输损耗并促进阻抗匹配的高频开关。