会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 33. 发明授权
    • Method for removing deposit from substrate and method for drying substrate, as well as apparatus for removing deposit from substrate and apparatus for drying substrate using these methods
    • 用于从基材除去沉积物的方法和用于干燥基材的方法,以及用于使用这些方法从基材和用于干燥基材的设备除去沉积物的设备
    • US07931755B2
    • 2011-04-26
    • US10583348
    • 2004-12-16
    • Yoshitaka NishioYukio Oshima
    • Yoshitaka NishioYukio Oshima
    • B08B5/00B08B5/02
    • F26B21/004B08B5/023B08B5/04B08B5/043F26B5/14
    • In a method for removing deposit that has attached to a main surface of a substrate from the main surface of the substrate using air knife units where a slit portion is formed so that a fluid can be discharged in band form, a fluid introduction path having an approximately uniform form in the direction perpendicular to the direction in which a number of air knife units move relative to the substrate is formed between the air knife units and the main surface of the substrate while the air knife units move relative to the substrate, a fluid is discharged toward the fluid introduction path from a slit that is formed in the rear portion of the above described air knife units, and then, passes through the fluid introduction path so as to be led to a wall surface that is formed so as to face the front portion of the air knife units or the fluid which has the appearance of a wall surface, and furthermore, deposit on the substrate that has attached to the substrate is led away from the main surface of the substrate, together with said fluid, via a fluid lead-out path of which the cross sectional area of the low path is greater than that of the fluid introduction path, and which is formed between the air knife units and the wall surface.
    • 在使用形成有狭缝部的空气刀单元从基板的主面剥离附着于基板的主面的沉积物的方法中,使得能够以带状排出流体的流体导入路径具有 在空气刀单元与基板的主表面之间,在垂直于多个气刀单元相对于基板移动的方向的方向上形成大致均匀的形状,同时气刀单元相对于基板移动,流体 从形成在上述气刀单元的后部的狭缝向流体导入路径排出,然后通过流体导入路径被引导到形成为面对的壁面 气刀单元的前部或具有壁面外观的流体,此外,沉积在附着于基板的基板上,从主要的壳体 衬底的所述表面与所述流体一起经由流体引出路径,低通道的横截面积大于流体引入路径的横截面积,并且其形成在气刀单元和壁表面之间 。