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31. 发明申请

US20110308464A1 SUBSTRATE PROCESSING APPARATUS, METHOD FOR PROCESSING SUBSTRATE, AND STORAGE MEDIUM 审中-公开
标题翻译：基板处理装置，处理基板的方法和存储介质
公开(公告)号：US20110308464A1
公开(公告)日：2011-12-22
申请号：US13218983
申请日：2011-08-26
申请人： Hiroyuki KUDOH , Hideto Mori , Shinji Okada , Toyohisa Tsuruda
发明人： Hiroyuki KUDOH , Hideto Mori , Shinji Okada , Toyohisa Tsuruda
IPC分类号： C23C16/455 , C23C16/52 , C23C16/458
CPC分类号： H01L21/67017
摘要： Processing gas is supplied from the central upper part of a processing chamber to a wafer on a mounting board, while the processing chamber is exhausted from processing gas exhaust passages at areas outside of the wafer. In addition, purge gas is supplied from purge gas supply passages to a buffer chamber formed between the peripheral part of a container main body and that of a cover body. The supplied flow-rate of the processing gas is made less than the exhaust flow-rate in the processing gas exhaust passages. Accordingly, the purge gas in the buffer chamber is drawn into the processing chamber via a purge gas supply hole formed of a gap between the container main body and the cover body due to a negative pressure inside the processing chamber caused by a difference between the flow rates.
摘要翻译：处理气体从处理室的中央上部供应到安装板上的晶片，同时处理室从在晶片外部的区域处理气体排出通道排出。此外，净化气体从吹扫气体供给通道供应到形成在容器主体的周边部分与盖体的周边部分之间的缓冲室。处理气体的供给流量比处理气体排出通道中的排气流量低。因此，缓冲室中的净化气体由于流体之间的差异而由于处理室内部的负压而经由由容器主体和盖体之间的间隙形成的吹扫气体供给孔而被吸入处理室价格。

32. 发明授权

US07985711B2 Thermosensitive recording material and recording method using the same 有权
标题翻译：热敏记录材料及使用其的记录方法
公开(公告)号：US07985711B2
公开(公告)日：2011-07-26
申请号：US12013555
申请日：2008-01-14
申请人： Hiroshi Tohmatsu , Hideo Aihara , Shinji Okada , Ichiro Sawamura , Hirokazu Watari
发明人： Hiroshi Tohmatsu , Hideo Aihara , Shinji Okada , Ichiro Sawamura , Hirokazu Watari
IPC分类号： B41M5/41
CPC分类号： B41M5/41 , B41J2/36 , B41M5/42 , B41M2205/04 , B41M2205/36
摘要： To provide a thermosensitive recording material that is superior in uniformity, makes it possible to obtain images with high glossiness and has less curl, in which a synthetic paper having a multilayer structure serves as a support. Specifically, there is a thermosensitive recording material including: a support, and a thermosensitive recording layer containing a leuco dye and a color developer on the support, wherein the support is a synthetic paper having a multilayer structure, and an inorganic pigment is contained only in a base layer of the synthetic paper; also, two layers which are formed solely of polypropylene and which contain no inorganic pigment are laid one on top of the other on the base layer containing an inorganic pigment; further, all layers are biaxially stretched.
摘要翻译：为了提供均匀性优异的热敏记录材料，可以获得具有高光泽度并且具有较少卷曲的图像，其中具有多层结构的合成纸用作支撑体。具体而言，存在一种热敏记录材料，其包括载体和在载体上含有无色染料和显色剂的热敏记录层，其中载体是具有多层结构的合成纸，并且无机颜料仅包含在合成纸的基层; 同样地，仅由聚丙烯形成的不含有无机颜料的两层也在含有无机颜料的基层上一层叠置，此外，所有层都被双轴拉伸。

33. 发明授权

US07947215B2 Heat treatment apparatus, heat treatment method, and recording medium storing computer program carrying out the same 有权
标题翻译：热处理装置，热处理方法和存储执行其的计算机程序的记录介质
公开(公告)号：US07947215B2
公开(公告)日：2011-05-24
申请号：US12788981
申请日：2010-05-27
申请人： Hikaru Ito , Shinji Okada , Masami Yamashita
发明人： Hikaru Ito , Shinji Okada , Masami Yamashita
IPC分类号： B05C11/00
CPC分类号： C21D9/00 , C21D9/0056 , C21D11/00
摘要： An experiment is conducted in advance, for finding a temperature of a cooling plate attained as a result of balancing between a temperature of a substrate after heat treatment and a temperature of the cooling plate at the time of cooling of the substrate. Then, before heat treatment of a first substrate, the cooling plate is moved to a position above a hot plate, the cooling plate is heated to that temperature, and thereafter heat treatment of the substrate is started.
摘要翻译：预先进行实验，以获得由于热处理后的基板的温度与冷却基板之间的冷却板的温度之间的平衡而获得的冷却板的温度。然后，在热处理第一基板之前，将冷却板移动到加热板上方的位置，将冷却板加热至该温度，然后开始对基板进行热处理。

34. 发明申请

US20110065575A1 THERMOSENSITIVE RECORDING MATERIAL AND PRODUCTION METHOD THEREOF 失效
标题翻译：耐热记录材料及其生产方法
公开(公告)号：US20110065575A1
公开(公告)日：2011-03-17
申请号：US12879427
申请日：2010-09-10
申请人： Kenji SHIMIZU , Shinji Okada
发明人： Kenji SHIMIZU , Shinji Okada
IPC分类号： B41M5/337 , B41M5/323
CPC分类号： B41M5/423
摘要： To provide a thermosensitive recording material, containing a base, a thermosensitive recording layer disposed on the base and containing a leuco dye and a color developer, an intermediate layer disposed on the thermosensitive recording layer, and a protective layer disposed on the intermediate layer, wherein the intermediate layer contains a resin, and an aziridine compound.
摘要翻译：为了提供含有碱的热敏记录材料，设置在基材上并含有无色染料和彩色显影剂的热敏记录层，设置在热敏记录层上的中间层和设置在中间层上的保护层，其中中间层含有树脂和氮丙啶化合物。

35. 发明授权

US07745347B2 Heat treatment apparatus, heat treatment method, and recording medium storing computer program carrying out the same 有权
标题翻译：热处理装置，热处理方法和存储执行其的计算机程序的记录介质
公开(公告)号：US07745347B2
公开(公告)日：2010-06-29
申请号：US11734424
申请日：2007-04-12
申请人： Hikaru Ito , Shinji Okada , Masami Yamashita
发明人： Hikaru Ito , Shinji Okada , Masami Yamashita
IPC分类号： C21D11/00
CPC分类号： C21D9/00 , C21D9/0056 , C21D11/00
摘要： An experiment is conducted in advance, for finding a temperature of a cooling plate attained as a result of balancing between a temperature of a substrate after heat treatment and a temperature of the cooling plate at the time of cooling of the substrate. Then, before heat treatment of a first substrate, the cooling plate is moved to a position above a hot plate, the cooling plate is heated to that temperature, and thereafter heat treatment of the substrate is started.
摘要翻译：预先进行实验，以获得由于热处理后的基板的温度与冷却基板之间的冷却板的温度之间的平衡而获得的冷却板的温度。然后，在热处理第一基板之前，将冷却板移动到加热板上方的位置，将冷却板加热至该温度，然后开始对基板进行热处理。

36. 发明授权

US07640885B2 Liquid processing method and liquid processing apparatus 有权
标题翻译：液体处理方法和液体处理装置
公开(公告)号：US07640885B2
公开(公告)日：2010-01-05
申请号：US11812766
申请日：2007-06-21
申请人： Tsunenaga Nakashima , Kenji Urata , Shinji Okada , Nobuaki Matsuoka
发明人： Tsunenaga Nakashima , Kenji Urata , Shinji Okada , Nobuaki Matsuoka
IPC分类号： B05B15/02 , B05B3/00 , B05C11/02
CPC分类号： B05C11/08 , H01L51/0005
摘要： In a nozzle unit 4 equipped with processing-liquid nozzles 4A to 4J, an air layer 73 and a solvent layer 74 for processing liquid are successively formed outside a processing-liquid layer 71 included in the tip of each nozzle 4A (4B to 4J). Next, the solvent layer 74 in the nozzle 4A is thrown out into a drain part 62 of a standby unit 6 and subsequently, the processing liquid is supplied from the nozzle 4A to the surface of a wafer W, performing a coating process. After completing the coating process, the processing liquid remaining in the nozzle 4A is sucked and continuously, respective tips of the nozzles 4A to 4J are dipped into respective solvents in solvent reservoir 62A to 62J, respectively. From this state, by sucking in the nozzle 4A, there are newly formed, outside the processing layer 71 in the tip of the nozzle 4A, an air layer 73 and a solvent layer 74. Thus, in supplying a substrate, such as semiconductor wafer, with a processing liquid by use of a nozzle unit having a plurality of processing-liquid nozzles integrated, it is possible to prevent dryness of the processing liquids in the respective nozzles while preventing the nozzle unit from being large-sized.
摘要翻译：在具有处理液喷嘴4A〜4J的喷嘴单元4中，在各喷嘴4A（4B〜4J）的前端包含的处理液层71的外侧依次形成有用于处理液体的空气层73和溶剂层74，。接着，喷嘴4A中的溶剂层74被排出到备用单元6的排出部分62中，随后将处理液从喷嘴4A供给至晶片W的表面，进行涂覆处理。在完成涂布处理之后，吸附残留在喷嘴4A中的处理液，喷嘴4A至4J的各个末端分别浸入溶剂储存器62A至62J中的相应溶剂中。从该状态，通过吸入喷嘴4A，在喷嘴4A的前端处的处理层71的外侧，空气层73和溶剂层74之间新形成。因此，在供给诸如半导体晶片的基板通过使用具有一体化的多个处理液喷嘴的喷嘴单元，通过处理液体，可以防止喷嘴单元大尺寸的处理液在各喷嘴中的干燥。

37. 发明申请

US20090272219A1 STEERING COLUMN SYSTEM 有权
标题翻译：转向柱系统
公开(公告)号：US20090272219A1
公开(公告)日：2009-11-05
申请号：US12094464
申请日：2006-11-21
申请人： Shinji Okada , Hiroshi Shibazaki , Toshimasa Wada
发明人： Shinji Okada , Hiroshi Shibazaki , Toshimasa Wada
IPC分类号： B62D1/18
CPC分类号： B62D1/184
摘要： To provide a steering column system which has superior operating feeling and operating properties and which can suppress an operation failure,An engaging arm 5 is displaced relative to a cam member 22 by an annular member 24 being deformed elastically, whereby distal ends of gear teeth are made to shift from each other, thereby making it possible not only to enhance the operation feeling of the operation lever but also to facilitate the meshing thereof.
摘要翻译：为了提供具有优良的操作感觉和操作性能并且可以抑制操作故障的转向柱系统，接合臂5通过弹性变形的环形构件24相对于凸轮构件22移位，由此齿轮齿的远端为从而不仅能够提高操作杆的操作感，而且能够进行啮合。

38. 发明申请

US20080010830A1 Manufacturing Method For Toothed Power Transmission Member Having Oil Reservoir And Toothed Power Transmission Member Manufactured By This Manufacturing Method 有权
标题翻译：具有由此制造方法制造的油藏和齿形传动部件的齿形传动部件的制造方法
公开(公告)号：US20080010830A1
公开(公告)日：2008-01-17
申请号：US11720410
申请日：2005-11-29
申请人： Shinji Okada , Yasushi Watanabe , Naoki Hara , Seiichi Moriyama , Hideki Hidaka
发明人： Shinji Okada , Yasushi Watanabe , Naoki Hara , Seiichi Moriyama , Hideki Hidaka
IPC分类号： B21K1/30 , F16H19/08 , F16H35/00 , G05G13/00
CPC分类号： B21J5/12 , B21K1/066 , B21K1/12 , B21K1/30 , B21K1/305 , F16H57/0427 , F16H57/0463 , Y10T29/49467 , Y10T74/18088 , Y10T74/19 , Y10T74/20256
摘要： A method of manufacturing a toothed power transmission member having an oil reservoir according to the present invention includes steps of forming primitive concave portion, which form a basis for the oil reservoir, on a surface of a toothed power transmission member work, and forming a tooth surface by processing the toothed power transmission member work such that a trace of the primitive concave portion is left on the toothed power transmission member thereby to form a toothed power transmission member. The trace of the primitive concave portion, which is formed in the step of forming a tooth surface and left on the toothed power transmission member, serves as the oil reservoir.
摘要翻译：根据本发明的具有储油器的齿形动力传递构件的制造方法包括以下步骤：在齿形动力传动构件工件的表面上形成形成储油器基础的原始凹部，并形成齿通过加工带齿的动力传递部件的工作，使得原始凹部的痕迹留在齿形传动部件上，从而形成齿形传动部件。在形成齿面并留在齿形传动部件上的步骤中形成的原始凹部的痕迹用作油储存器。

39. 发明申请

US20060240222A1 Pellicle and novel fluoropolymer 有权
标题翻译：薄膜和新型含氟聚合物
公开(公告)号：US20060240222A1
公开(公告)日：2006-10-26
申请号：US11446242
申请日：2006-06-05
申请人： Ikuo Matsukura , Hiromasa Yamamoto , Yuichiro Ishibashi , Shinji Okada , Naoko Shirota
发明人： Ikuo Matsukura , Hiromasa Yamamoto , Yuichiro Ishibashi , Shinji Okada , Naoko Shirota
IPC分类号： B32B3/10
CPC分类号： G03F1/62 , C08G65/007 , C08G65/226 , G03F7/0046 , Y10T428/24331 , Y10T428/3154
摘要： It is to provide a useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material. A pellicle wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following unit (1). The unit (1) is a unit containing a fluorine atom, wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group. For example, a unit represented by the following formula (A1) (wherein n is 1 or 2, RF1 is —F or —CF3, and RF2 is —F or a C1-5 perfluoroalkyl group):
摘要翻译：本发明提供一种对短波长光（具有193nm的照射波长的ArF准分子激光和157nm的照射波长的F2准分子激光）的透明性和耐久性优异的氟系聚合物，防护薄膜材料。防护薄膜组件，其中用于防护薄膜和/或粘合剂的聚合物（I）是基本上包含以下单元（1）的聚合物。单元（1）是包含氟原子的单元，其中形成聚合物主链的链包含碳原子和醚氧原子，形成主链的至少一个碳原子是形成环状基团的碳原子，并且形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。例如，由下式（A1）（其中n为1或2，R F1）表示的单元为-F或-CF 3 3，R“ F 2是-F或C 1-5〜5全氟烷基）：

40. 发明授权

US06984704B2 Fluorinated compound, fluoropolymer and process for its production 失效
公开(公告)号：US06984704B2
公开(公告)日：2006-01-10
申请号：US11059695
申请日：2005-02-17
申请人： Shun-ichi Kodama , Isamu Kaneko , Osamu Yokokoji , Shinji Okada , Yoko Takebe , Yasuhide Kawaguchi
发明人： Shun-ichi Kodama , Isamu Kaneko , Osamu Yokokoji , Shinji Okada , Yoko Takebe , Yasuhide Kawaguchi
IPC分类号： C08F36/20 , C08F114/18
CPC分类号： C08F36/20 , C08F36/16 , C08F214/18 , C08F2/60
摘要： To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg.A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2-Q-CR3═CHR4 (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.

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