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    • 33. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US08637354B2
    • 2014-01-28
    • US13159804
    • 2011-06-14
    • Shinya SasagawaHitoshi NakayamaMasashi TsubukuDaigo Shimada
    • Shinya SasagawaHitoshi NakayamaMasashi TsubukuDaigo Shimada
    • H01L21/00H01L29/04
    • H01L29/7869H01L29/45H01L29/66969
    • When a transistor including a conductive layer having a three-layer structure is manufactured, three-stage etching is performed. In the first etching process, an etching method in which the etching rates for the second film and the third film are high is employed, and the first etching process is performed until the first film is at least exposed. In the second etching process, an etching method in which the etching rate for the first film is higher than that in the first etching process and the etching rate for a “layer provided below and in contact with the first film” is lower than that in the first etching process is employed. In the third etching process, an etching method in which the etching rates for the first to the third films are higher than those in the second etching process is preferably employed.
    • 当制造包括具有三层结构的导电层的晶体管时,进行三级蚀刻。 在第一蚀刻工艺中,采用其中第二膜和第三膜的蚀刻速率高的蚀刻方法,并且执行第一蚀刻处理直到第一膜至少暴露。 在第二蚀刻工艺中,第一膜的蚀刻速率高于第一蚀刻工艺中的蚀刻速率和“下面设置并与第一膜接触的”层的蚀刻速率的蚀刻方法低于 采用第一蚀刻工艺。 在第三蚀刻工艺中,优选使用其中第一至第三膜的蚀刻速率高于第二蚀刻工艺中的蚀刻速率的蚀刻方法。
    • 35. 发明授权
    • Light emitting and receiving device
    • 发光和接收装置
    • US08194714B2
    • 2012-06-05
    • US12781257
    • 2010-05-17
    • Hitoshi Nakayama
    • Hitoshi Nakayama
    • H01S5/00H01L21/00
    • H01S5/0264H01S5/1085H01S5/4031H01S5/4068
    • A light emitting and receiving device having a first region and a second region adjacent to the first region in a plan view, includes: a light absorbing layer formed in the first and second regions; a first cladding layer formed above the light absorbing layer; an active layer formed above the first cladding layer in the first region; and a second cladding layer formed above the active layer, wherein at least part of the active layer forms a gain region, a stepped side surface having an end surface of the gain region is formed at the boundary between the first region and the second region, light produced in the gain region exits through the end surface of the gain region, and part of the light having exited reaches the light absorbing layer in the second region and is received by the light absorbing layer.
    • 在平面图中具有第一区域和与第一区域相邻的第二区域的发光和接收装置包括:形成在第一和第二区域中的光吸收层; 形成在所述光吸收层的上方的第一覆层; 在第一区域中形成在第一包层上方的有源层; 以及形成在所述有源层上方的第二覆层,其中所述有源层的至少一部分形成增益区域,在所述第一区域和所述第二区域之间的边界处形成具有所述增益区域的端面的阶梯侧面, 在增益区域中产生的光通过增益区域的端面离开,并且退出的一部分光到达第二区域中的光吸收层并被光吸收层接收。