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    • 31. 发明授权
    • System for calculating an operating time of a measuring machine
    • 用于计算测量机的运行时间的系统
    • US06308108B1
    • 2001-10-23
    • US09255735
    • 1999-02-23
    • Hirokazu MichiwakiKatsumi Sato
    • Hirokazu MichiwakiKatsumi Sato
    • G06F1900
    • G06Q10/06G05B2219/31412
    • An apparatus for calculating an operating time of a measuring machine, includes: a part program storing unit storing a part program; a command analyzing unit extracting commands relating to movement of a measurement probe from the part program stored in the part program storing unit, calculating operating times required for the measuring machine to implement the respective extracted commands, on the basis of movement parameters for the movement of said measurement probe, and summing up the calculated operating times to calculate a total operating time from a start of measurement to an end of measurement; and a displaying unit displaying the total operating time thus calculated by the command analyzing unit.
    • 一种用于计算测量机的操作时间的装置,包括:存储零件程序的零件程序存储单元; 命令分析单元,从存储在所述零件程序存储单元中的零件程序中提取与测量探头的移动相关的命令,基于所述移动参数来计算所述测量机执行相应提取的命令所需的操作时间 所述测量探头,并将计算出的操作时间相加,以计算从开始测量到测量结束的总操作时间; 以及显示单元,显示由命令分析单元计算的总操作时间。
    • 32. 发明授权
    • Storehouse for use in storage of clean materials
    • 仓库用于清洁材料的储存
    • US5798455A
    • 1998-08-25
    • US660458
    • 1996-06-07
    • Soichiro SakataHideto TakahashiKatsumi Sato
    • Soichiro SakataHideto TakahashiKatsumi Sato
    • G01N27/04F24F3/16F24F7/06G01N13/00F24F7/00G01B11/00G01R27/00
    • F24F3/161F24F2003/1625F24F2003/1628
    • A storehouse is constituted including a clean room 12 and a storage space 10 for storing clean materials, which is isolated from the clean room. The clean air for storage is generated by a storage air generator 36 and is supplied to the storage space 10 through air supply systems 32, 46. The clean air for storage is purified to such a cleanliness level that it contains hydrocarbon group including methane of less than 10 ppb by using the method of combustion with a catalyst, or purified to such a cleanliness level extent that the contact angle of a pure water droplet or the surface resistivity to the clean material surface can be kept at substantially the same level as that which is indicated immediately after cleaning the material, by using a catalytic reaction tower, an activated charcoal filter, or a fluid bed type adsorbing tower, all of which are made by using materials generating no gaseous impurities. Accordingly, it is possible to effectively prevent the substrate surface from contamination caused by the organic substance. No inert gas is employed, thus ensuring safety operation with an inexpensive running cost.
    • 构成了一个仓库,其中包括一个洁净室12和一个用于存放与洁净室隔离的清洁材料的储存空间10。 用于储存的清洁空气由储存空气发生器36产生,并通过空气供应系统32,46供应到储存空间10.用于储存的清洁空气被净化到这样的清洁水平,使得其含有包含较少甲烷的烃基 通过使用用催化剂燃烧的方法,或者纯化到这样的清洁度水平程度,使得纯水滴的接触角或与清洁材料表面的表面电阻率可以保持在基本相同的水平, 通过使用催化反应塔,活性炭过滤器或流化床型吸附塔清洁材料后立即表示,所有这些都是通过使用不产生气态杂质的材料制成的。 因此,可以有效地防止由有机物引起的基板表面污染。 不使用惰性气体,从而以廉价的运行成本确保安全运行。
    • 39. 发明授权
    • Sheet-like probe, method of producing the probe, and application of the probe
    • 片状探针,探针的制造方法和探针的应用
    • US07671609B2
    • 2010-03-02
    • US11587485
    • 2005-04-26
    • Katsumi SatoKazuo InoueHitoshi FujiyamaMutsuhiko YoshiokaHisao Igarashi
    • Katsumi SatoKazuo InoueHitoshi FujiyamaMutsuhiko YoshiokaHisao Igarashi
    • G01R31/02
    • A63H29/22A63H30/04A63H31/00F16H48/08G01R1/06711G01R1/0735G01R3/00H01L51/5012H05B33/14Y10T29/49155
    • A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.
    • 片状探针具有多孔膜。 在片状探针中,在形成于多孔膜的贯通孔的各位置上,充分地将接触膜支撑在接触膜的周缘和多孔膜的一体,使得柔性树脂绝缘层包含在 多孔膜的细孔。 电极结构体以穿透方式被支撑在绝缘层中。 每个电极结构体包括暴露于绝缘层的前表面并从绝缘层的前表面突出的表面电极部分,暴露于绝缘层的背面的背面电极部分,连续的短路部分 从前表面电极部分的基端部延伸穿过绝缘层的厚度方向,并与背面电极部分连接,沿着绝缘层的前表面向外延伸的保持部分从基端部分 和支撑绝缘层的支撑体。
    • 40. 发明授权
    • Sheet-like probe, process for producing the same and its application
    • 片状探针,其制造方法及其应用
    • US07391227B2
    • 2008-06-24
    • US10556782
    • 2004-05-12
    • Kazuo InoueKatsumi Sato
    • Kazuo InoueKatsumi Sato
    • G01R1/073G01R31/02
    • G01R1/0735G01R3/00
    • Disclosed herein are a sheet-like probe capable of surly preventing positional deviation between electrode structures and electrodes to be inspected by temperature changes in a bum-in test, even when the object of inspection is a wafer having a large area of 8 inches or greater in diameter or a circuit device, the pitch of electrodes to be inspected of which is extremely small, and thus capable of stably retaining a good electrically connected state, and a production process and applications thereof. The sheet-like probe of the present invention comprises a contact film obtained by holding a plurality of electrode structures arranged in accordance with a pattern corresponding to respective electrodes to be connected and having a front-surface electrode part exposed to a front surface and a back-surface electrode part exposed to aback surface by an insulating film composed of a flexible resin, and a frame plate supporting the contract film.
    • 这里公开了一种片状探针,即使当检查对象是具有8英寸或更大的面积的晶片时,能够防止电极结构和电极之间的位置偏移,从而可以通过烧伤测试中的温度变化进行检查 直径或电路装置,其检查的电极的间距极小,因此能够稳定地保持良好的电连接状态及其制造方法和应用。 本发明的片状探针包括通过保持根据与要连接的各个电极对应的图案布置的多个电极结构而获得的接触膜,并且具有暴露于前表面和背面的前表面电极部分 通过由柔性树脂构成的绝缘膜暴露于表面的表面电极部分和支撑合同膜的框架板。