专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07446544B2 Probe apparatus, wafer inspecting apparatus provided with the probe apparatus and wafer inspecting method 有权
标题翻译：探针装置，设置有探针装置的晶片检查装置和晶片检查方法
公开(公告)号：US07446544B2
公开(公告)日：2008-11-04
申请号：US10593830
申请日：2005-03-30
申请人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
发明人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
IPC分类号： G01R31/02
CPC分类号： G01R1/07364 , G01R1/07314 , G01R1/07371 , G01R1/07378
摘要： A probe device including a circuit board for inspection having a great number of inspection electrodes, a probe card having a circuit board for connection having a great number of terminal electrodes and a contact member, an anisotropically conductive connector arranged between the circuit board for inspection and the circuit board for connection and electrically connecting the respective inspection electrodes to the respective terminal electrodes, and a parallelism adjusting mechanism for adjusting a parallelism of the circuit board for inspection and the circuit board for connection to the wafer. The parallelism adjusting mechanism includes a location-varying mechanism, which relatively displaces the circuit board for inspection or the circuit board for connection in the thickness-wise direction of the anisotropically conductive connector. A wafer inspection apparatus can include the probe device.
摘要翻译：一种探针装置，包括具有大量检查电极的用于检查的电路板，具有多个端子电极的连接用电路板的探针卡和接触构件，配置在检查用电路基板之间的各向异性导电性连接器，用于将各个检查电极连接到各个端子电极的电路板，以及用于调整用于检查的电路板的平行度的平行度调节机构和用于连接到晶片的电路板。平行度调节机构包括相对位移用于检查的电路板或用于在各向异性导电连接器的厚度方向上连接的电路板的位置变化机构。晶片检查装置可以包括探针装置。

2. 发明申请

US20070178727A1 Probe apparatus,wafer inspecting apparatus provided with the probe apparatus and wafer inspecting method 有权
标题翻译：探针装置，设置有探针装置的晶片检查装置和晶片检查方法
公开(公告)号：US20070178727A1
公开(公告)日：2007-08-02
申请号：US10593830
申请日：2005-03-30
申请人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
发明人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
IPC分类号： H01R4/58
CPC分类号： G01R1/07364 , G01R1/07314 , G01R1/07371 , G01R1/07378
摘要： A probe device including a circuit board for inspection having a great number of inspection electrodes, a probe card having a circuit board for connection having a great number of terminal electrodes and a contact member, an anisotropically conductive connector arranged between the circuit board for inspection and the circuit board for connection and electrically connecting the respective inspection electrodes to the respective terminal electrodes, and a parallelism adjusting mechanism for adjusting a parallelism of the circuit board for inspection and the circuit board for connection to the wafer. The parallelism adjusting mechanism includes a location-varying mechanism, which relatively displaces the circuit board for inspection or the circuit board for connection in the thickness-wise direction of the anisotropically conductive connector. A wafer inspection apparatus can include the probe device.
摘要翻译：一种探针装置，包括具有大量检查电极的用于检查的电路板，具有多个端子电极的连接用电路板的探针卡和接触构件，配置在检查用电路基板之间的各向异性导电性连接器，用于将各个检查电极连接到各个端子电极的电路板，以及用于调整用于检查的电路板的平行度的平行度调节机构和用于连接到晶片的电路板。平行度调节机构包括相对位移用于检查的电路板或用于在各向异性导电连接器的厚度方向上连接的电路板的位置变化机构。晶片检查装置可以包括探针装置。

3. 发明申请

US20060211280A1 Anisotropic conductive connector, conductive paste composition, probe member, wafer inspection device and wafer inspection method 有权
标题翻译：各向异性导电连接器，导电膏组合物，探针构件，晶片检查装置和晶圆检查方法
公开(公告)号：US20060211280A1
公开(公告)日：2006-09-21
申请号：US10548832
申请日：2004-03-23
申请人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
发明人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
IPC分类号： H01R4/58
CPC分类号： G01R1/0735 , H01L23/49827 , H01L2924/0002 , H01R13/2414 , H01L2924/00
摘要： Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used in electrical inspection of a plurality of integrated circuits formed on a wafer repeatedly over a great number of times, and thus high durability and long service life are achieved, and applications thereof. The anisotropically conductive connector of the invention comprises elastic anisotropically conductive films, in each of which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film have been formed. The conductive particles contained in the conductive parts for connection in the anisotropically conductive connector are obtained by laminating surfaces of core particles exhibiting magnetism with a coating layer formed of a high-conductive metal, and the coating layer is a coating layer having a high hardness.
摘要翻译：这里公开了各向异性导电连接器，即使在多次重复地形成在晶片上的多个集成电路的电气检查中，长时间保持良好的导电性，因此具有高耐久性使用寿命长，使用寿命长。本发明的各向异性导电连接器包括弹性各向异性导电膜，其中每个导电膜已形成多个用于连接的导电部件，其中包含导电颗粒并在膜的厚度方向上延伸。包含在各向异性导电连接器中用于连接的导电部件中的导电颗粒通过将表现出磁性的芯颗粒的表面与由高导电性金属形成的涂层层压而获得，并且涂层是具有高硬度的涂层。

4. 发明授权

US07318729B2 Sheet-form connector and production method and application therefor 有权
标题翻译：板式连接器及其生产方法及应用
公开(公告)号：US07318729B2
公开(公告)日：2008-01-15
申请号：US10515062
申请日：2003-10-24
申请人： Katsumi Sato , Kazuo Inoue
发明人： Katsumi Sato , Kazuo Inoue
IPC分类号： H01R12/00 , H05K1/00
CPC分类号： G01R1/07314 , G01R1/06711 , G01R1/06733 , H01L23/49811 , H01L23/49827 , H01L2924/0002 , H01L2924/09701 , H01R11/01 , H01R12/523 , H05K1/116 , H05K3/4007 , H05K3/423 , H05K2201/0367 , H05K2201/0394 , H05K2201/09436 , H05K2201/09481 , H05K2203/0733 , H01L2924/00
摘要： Disclosed herein are a sheet-like connector that electrode structures each having a front-surface electrode part small in diameter can be formed, a stable electrically connected state can be surely achieved even to a circuit device, on which electrodes have been formed at a small pitch, and the electrode structures are prevented from falling off from an insulating sheet to achieve high durability, and a production process and applications thereof.The sheet-like connector of the invention has an insulating sheet and a plurality of electrode structures arranged in the insulating sheet and extending through in a thickness-wise direction of the insulating sheet. Each of the electrode structures is composed of a front-surface electrode part exposed to a front surfaces of the insulating sheet and projected from the front surface of the insulating sheet, a back-surface electrode part exposed to a back surface of the insulating sheet, a short circuit part continuously extending from the base end of the front-surface electrode part through the insulating sheet in the thickness-wise direction thereof and linked to the back-surface electrode part, and a holding part continuously extending from a base end portion of the front-surface electrode part outward along the front surface of the insulating sheet.
摘要翻译：这里公开了一种片形连接器，其可以形成具有直径小的前表面电极部分的电极结构，甚至可以可靠地获得稳定的电连接状态，其中电路已经形成在小电极节距，并且防止电极结构从绝缘片脱落以实现高耐久性，以及其制造方法和应用。本发明的片状连接器具有布置在绝缘片中的绝缘片和多个电极结构，并沿绝缘片的厚度方向延伸。每个电极结构由暴露于绝缘片的前表面并从绝缘片的前表面突出的前表面电极部分，暴露于绝缘片的背面的背面电极部分组成，从前表面电极部分的基端沿其厚度方向通过绝缘片连续地延伸并连接到背面电极部分的短路部分，以及从背面电极部分的基端部分连续延伸的保持部分，前表面电极部分沿着绝缘片的前表面向外。

5. 发明申请

US20070069743A1 Sheet-like probe, process for producing the same and its application 有权
标题翻译：片状探针，其制造方法及其应用
公开(公告)号：US20070069743A1
公开(公告)日：2007-03-29
申请号：US10556782
申请日：2004-05-12
申请人： Kazuo Inoue , Katsumi Sato
发明人： Kazuo Inoue , Katsumi Sato
IPC分类号： G01R31/02
CPC分类号： G01R1/0735 , G01R3/00
摘要： Disclosed herein are a sheet-like probe capable of surly preventing positional deviation between electrode structures and electrodes to be inspected by temperature changes in a burn-in test, even when the object of inspection is a wafer having a large area of 8 inches or greater in diameter or a circuit device, the pitch of electrodes to be inspected of which is extremely small, and thus capable of stably retaining a good electrically connected state, and a production process and applications thereof. The sheet-like probe of the present invention comprises a contact film obtained by holding a plurality of electrode structures arranged in accordance with a pattern corresponding to respective electrodes to be connected and having a front-surface electrode part exposed to a front surface and a back-surface electrode part exposed to a back surface by an insulating film composed of a flexible resin, and a frame plate supporting the contact film.
摘要翻译：这里公开了一种片状探针，即使当检查对象是具有8英寸或更大的大面积的晶片时，能够防止在老化试验中的温度变化来检查电极结构和电极之间的位置偏移的片状探针直径或电路装置，其检查的电极的间距极小，因此能够稳定地保持良好的电连接状态及其制造方法和应用。本发明的片状探针包括通过保持根据与要连接的各个电极相对应的图案布置的多个电极结构而获得的接触膜，并且具有暴露于前表面和背面的前表面电极部分通过由柔性树脂构成的绝缘膜暴露于背面的表面电极部分和支撑接触膜的框架板。

6. 发明申请

US20080048686A1 Sheet-like Probe, Method of Producing the Probe, and Application of the Probe 审中-公开
标题翻译：片状探针，探针的制作方法和探针的应用
公开(公告)号：US20080048686A1
公开(公告)日：2008-02-28
申请号：US11568820
申请日：2005-05-18
申请人： Katsumi Sato , Kazuo Inoue , Isamu Mochizuki , Hiroyuki Hirasawa
发明人： Katsumi Sato , Kazuo Inoue , Isamu Mochizuki , Hiroyuki Hirasawa
IPC分类号： G01R31/02 , G01R1/073 , H01R43/00
CPC分类号： G01R1/0735 , Y10T29/49117
摘要： Disclosed herein are a sheet-like probe that permits forming a front-surface electrode part small in diameter and surely achieving a stable electrically connected state even to a circuit device, on which electrodes have been formed at a small pitch, and prevents the electrode structures from falling off from an insulating film to achieve high durability, and a production process and applications thereof. The sheet-like probe of the invention has a contact film obtained by arranging, in a flexible insulating film, a plurality of electrode structures extending through in a thickness-wise direction of the insulating film in a state separated from one another in a plane direction of the insulating film, wherein each of the electrode structures is exposed to the surfaces of the insulating film and composed of a front-surface electrode part projected from a front surface of the insulating film, a back-surface electrode part exposed to a back surface of the insulating film, a short circuit part directly joined to the front-surface electrode part and the back-surface electrode part for electrically connecting them and extending in a thickness-wise direction of the insulating film, and a holding part formed at a proximal end portion of the front-surface electrode part and extending in the plane direction of the insulating film, and at least a part of the holding part is embedded in the insulating film.
摘要翻译：这里公开了一种片状探针，其允许形成直径小的前表面电极部分，并且即使在电极已经以小间距形成的电路器件上也可以实现稳定的电连接状态，并且防止电极结构从绝缘膜脱落以实现高耐久性，以及其制造方法及其应用。本发明的片状探针具有接触膜，该接触膜通过在柔性绝缘膜中配置多个电极结构体，所述多个电极结构在绝缘膜的厚度方向上以在平面方向上彼此分离的状态延伸的绝缘膜，其中每个电极结构暴露于绝缘膜的表面并由从绝缘膜的前表面突出的前表面电极部分组成，背面电极部分暴露于背面绝缘膜的直接接合到前表面电极部分的短路部分和用于电连接它们并沿着绝缘膜的厚度方向延伸的背面电极部分，以及形成在近端的保持部分前表面电极部的端部并且在绝缘膜的平面方向上延伸，并且至少一部分保持部嵌入绝缘膜 ng膜。

7. 发明授权

US07311531B2 Anisotropic conductive connector, conductive paste composition, probe member, wafer inspection device and wafer inspection method 有权
标题翻译：各向异性导电连接器，导电膏组合物，探针构件，晶片检查装置和晶圆检查方法
公开(公告)号：US07311531B2
公开(公告)日：2007-12-25
申请号：US10548832
申请日：2004-03-23
申请人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
发明人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
IPC分类号： H01R4/58
CPC分类号： G01R1/0735 , H01L23/49827 , H01L2924/0002 , H01R13/2414 , H01L2924/00
摘要： An anisotropically conductive connector, and applications thereof, by which good conductivity is retained over a long period of time even when it is used in electrical inspection of a plurality of integrated circuits formed on a wafer repeatedly over a great number of times, and thus high durability and long service life are achieved. The anisotropically conductive connector includes elastic anisotropically conductive films, in each of which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film are formed. The conductive particles contained in the conductive parts for connection in the anisotropically conductive connector are obtained by laminating surfaces of core particles exhibiting magnetism with a coating layer formed of a high-conductive metal, and the coating layer is a coating layer having a high hardness.
摘要翻译：各向异性导电连接器及其应用，即使在多次重复地形成在晶片上的多个集成电路的电气检查中，长时间保持良好的导电性，因此高实现了耐久性和长使用寿命。各向异性导电连接器包括弹性各向异性导电膜，其中形成有用于连接的多个导电部件，其中包含导电颗粒并且在膜的厚度方向上延伸。包含在各向异性导电连接器中用于连接的导电部件中的导电颗粒通过将表现出磁性的芯颗粒的表面与由高导电性金属形成的涂层层压而获得，并且涂层是具有高硬度的涂层。

8. 发明申请

US20070293062A1 ANISOTROPIC CONDUCTIVE CONNECTOR AND CIRCUIT-DEVICE ELECTRICAL INSPECTION DEVICE 审中-公开
标题翻译：各向异性导电连接器和电路设备电气检测装置
公开(公告)号：US20070293062A1
公开(公告)日：2007-12-20
申请号：US11837873
申请日：2007-08-13
申请人： Katsumi SATO , Kazuo Inoue
发明人： Katsumi SATO , Kazuo Inoue
IPC分类号： H01R4/58
CPC分类号： H01R13/2414 , G01R1/0735 , H01L23/49827 , H01L23/49838 , H01L2924/0002 , H01L2924/00
摘要： An anisotropically conductive connector having a frame plate, in which a plurality of openings have been formed in accordance with a pattern corresponding to electrodes to be connected, and an elastic anisotropically conductive film composed of a plurality of functional parts arranged in the respective openings of the frame plate. The conductive film is composed of a conductive part for connection extending in a thickness-wise direction of the film and an insulating part formed integrally with the conductive part. Conductive parts for high-frequency shielding are arranged to surround each of the conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction, and are formed in the part to be supported in the elastic anisotropically conductive film. The frame plate is connected to a ground.
摘要翻译：具有框架板的各向异性导电连接器，其中根据与要连接的电极相对应的图案形成有多个开口;以及弹性各向异性导电膜，其由布置在所述连接器的各个开口中的多个功能部件框架板。导电膜由用于在膜的厚度方向上延伸的连接用导电部和与导电部一体形成的绝缘部构成。用于高频屏蔽的导电部件被布置为围绕用于连接的每个导电部件，电连接到框架板并在厚度方向上延伸，并且形成在弹性各向异性导电膜中被支撑的部分中。框架板连接到地面。

9. 发明申请

US20060154500A1 Anisotropic conductive connector and wafer inspection device 有权
标题翻译：各向异性导电连接器和晶圆检查装置
公开(公告)号：US20060154500A1
公开(公告)日：2006-07-13
申请号：US10559846
申请日：2004-06-01
申请人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
发明人： Hisao Igarashi , Katsumi Sato , Kazuo Inoue
IPC分类号： H01R4/58
CPC分类号： G01R1/0735 , G01R1/07378 , H01R4/04 , H01R12/52
摘要： Disclosed herein are a wafer inspection apparatus, which is small in size, is prevented from shortening the service life of its circuit board for inspection, capable of collectively performing inspection as to a great number of electrodes to be inspected, has good electrical properties and capable of performing electrical inspection of high functional integrated circuits, and an anisotropically conductive connector suitable for use in this wafer inspection apparatus. The anisotropically conductive connector of the invention comprises an elastic anisotropically conductive film composed of a plurality of conductive parts for connection each extending in a thickness-wise direction of the film and arranged in a state separated from each other and an insulating part formed among these conductive parts for connection, and a frame plate for supporting this film. The frame plate is formed of a metallic material having a coefficient of linear thermal expansion of 3×10−6 to 2×10−5 K−1, the conductive parts for connection are obtained by filling conductive particles having a number average particle diameter of 20 to 80 μm and exhibiting magnetism in an elastic polymeric substance at a high density, the conductive particles have, on a surface of which, a coating layer composed of a noble metal and having a thickness of at least 20 nm, each of the conductive parts for connection has a durometer hardness of 10 to 35, and an electric resistance between the conductive parts for connection is at least 10 MΩ.
摘要翻译：这里公开了一种晶片检查装置，其尺寸小，防止其检查用电路板的使用寿命缩短，能够共同对大量检查电极进行检查，具有良好的电气性能和能力执行高功能集成电路的电气检查，以及适用于该晶片检查装置的各向异性导电连接器。本发明的各向异性导电连接器包括：弹性各向异性导电膜，由多个用于连接的导电部件构成，每个导电部件沿薄膜的厚度方向延伸并以彼此分离的状态布置，并且在这些导电用于连接的部件和用于支撑该膜的框架板。框架板由具有3×10 -6至2×10 -5 K -1的线性热膨胀系数的金属材料形成，用于连接的导电部件通过以高密度填充数均粒径为20至80μm的导电颗粒并在高弹性聚合物质中显示出磁性，其表面上具有由贵金属，厚度至少为20nm，用于连接的导电部件的硬度为10〜35的硬度，连接用导电部件之间的电阻为10MΩ以上。

10. 发明授权

US07671609B2 Sheet-like probe, method of producing the probe, and application of the probe 有权
标题翻译：片状探针，探针的制造方法和探针的应用
公开(公告)号：US07671609B2
公开(公告)日：2010-03-02
申请号：US11587485
申请日：2005-04-26
申请人： Katsumi Sato , Kazuo Inoue , Hitoshi Fujiyama , Mutsuhiko Yoshioka , Hisao Igarashi
发明人： Katsumi Sato , Kazuo Inoue , Hitoshi Fujiyama , Mutsuhiko Yoshioka , Hisao Igarashi
IPC分类号： G01R31/02
CPC分类号： A63H29/22 , A63H30/04 , A63H31/00 , F16H48/08 , G01R1/06711 , G01R1/0735 , G01R3/00 , H01L51/5012 , H05B33/14 , Y10T29/49155
摘要： A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.
摘要翻译：片状探针具有多孔膜。在片状探针中，在形成于多孔膜的贯通孔的各位置上，充分地将接触膜支撑在接触膜的周缘和多孔膜的一体，使得柔性树脂绝缘层包含在多孔膜的细孔。电极结构体以穿透方式被支撑在绝缘层中。每个电极结构体包括暴露于绝缘层的前表面并从绝缘层的前表面突出的表面电极部分，暴露于绝缘层的背面的背面电极部分，连续的短路部分从前表面电极部分的基端部延伸穿过绝缘层的厚度方向，并与背面电极部分连接，沿着绝缘层的前表面向外延伸的保持部分从基端部分和支撑绝缘层的支撑体。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式