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    • 34. 发明授权
    • Processes and materials for step and flash imprint lithography
    • 步进和闪光压印光刻的工艺和材料
    • US07419611B2
    • 2008-09-02
    • US11219095
    • 2005-09-02
    • Richard Anthony DiPietroMark Whitney HartFrances Anne HouleHiroshi Ito
    • Richard Anthony DiPietroMark Whitney HartFrances Anne HouleHiroshi Ito
    • H01L21/302
    • G03F7/0755B82Y10/00B82Y40/00G03F7/0002G03F7/0045
    • A method of forming an image. The method includes: a transfer layer on a substrate; forming on the transfer layer, an etch barrier layer; pressing a template having a relief pattern into the etch barrier layer; exposing the etch barrier layer to actinic radiation forming a cured etch barrier layer having thick and thin regions corresponding to the relief pattern; removing the template; removing the thin regions of the cured etch barrier layer; removing regions of the transfer layer not protected by the etch barrier layer; removing regions of the substrate not protected by the transfer layer and any remaining etch barrier layer; and removing remaining transfer layer. The transfer layer may be removed using a solvent, the etch barrier layer may include a release agent and an adhesion layer may be formed between the transfer layer and the etch barrier layer. A reverse tone process is also described.
    • 一种形成图像的方法。 该方法包括:在基板上的转印层; 在转印层上形成蚀刻阻挡层; 将具有浮雕图案的模板压入蚀刻阻挡层中; 将蚀刻阻挡层暴露于形成具有对应于浮雕图案的厚和薄区域的固化蚀刻阻挡层的光化辐射; 删除模板; 去除固化的蚀刻阻挡层的薄区域; 除去未被蚀刻阻挡层保护的转移层的区域; 除去未被转移层保护的衬底的区域和任何剩余的蚀刻阻挡层; 并去除剩余的转移层。 可以使用溶剂去除转移层,蚀刻阻挡层可以包括脱模剂,并且可以在转移层和蚀刻阻挡层之间形成粘合层。 还描述了反向色调处理。
    • 38. 发明授权
    • Control of polymerization kinetics and rate of polymer precipitation as
a means of controlling the aggregation and morphology in conductive
polymers and precursors thereof
    • 控制聚合动力学和聚合物沉淀速率作为控制导电聚合物及其前体中的聚集和形态的手段
    • US06153725A
    • 2000-11-28
    • US43630
    • 1998-07-17
    • Marie AngelopoulosRichard Anthony DiPietro
    • Marie AngelopoulosRichard Anthony DiPietro
    • C08G61/12H01B1/12C08G73/00
    • H01B1/128C08G61/122
    • The present invention is directed to methods of fabricating electrically conducting polymers and precursors thereof in which the polymer has a controlled level of aggregation and morphology. This is done by controlling the rate of polymerization and the rate at which the polymer precipitates from solution during the polymerization reaction. An additive is added to the polymerization medium, said additive increasing or decreasing the rate at which the polymer precipitates from the reaction medium. When said additive is a second organic solvent, the polymerization reaction proceeds homogeneously for a longer period of time than does the corresponding polymerization reaction which does not include said additive. Control of the polymerization kinetics allows control of the morphology for the isolated polymer and in turn control of the properties of these polymers.
    • PCT No.PCT / US97 / 13273 Sec。 371日期:1998年7月17日 102(e)日期1998年7月17日PCT 1997年7月24日PCT公布。 出版物WO98 / 04611 日期1998年2月5日本发明涉及制造导电聚合物及其前体的方法,其中聚合物具有受控的聚集和形态水平。 这是通过控制聚合速率和在聚合反应期间聚合物从溶液中沉淀的速率来完成的。 将添加剂加入到聚合介质中,所述添加剂增加或降低聚合物从反应介质中沉淀出的速率。 当所述添加剂是第二有机溶剂时,与不含所述添加剂的相应聚合反应相比,聚合反应进行的时间比较长。 聚合动力学的控制允许控制分离的聚合物的形态,从而控制这些聚合物的性质。