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    • 32. 发明授权
    • Automatic loader
    • 自动装载机
    • US4643629A
    • 1987-02-17
    • US790288
    • 1985-10-22
    • Nobuyuki TakahashiRyuji SugimotoYasuyuki Shirai
    • Nobuyuki TakahashiRyuji SugimotoYasuyuki Shirai
    • B65G1/00B65G1/04B65G1/07B65G47/52C23C14/56H01L21/67H01L21/677B65G1/06
    • H01L21/67781C23C14/56Y10S414/136Y10S414/137Y10S414/139
    • In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms. The processed substrates are returned to the original cassette.
    • 在自动装载机中,将平坦的未处理的基板自动装载到用于处理平坦基板并自动卸载处理的基板的基板处理装置,自动装载机具有:多个用于垂直移动的带盒,具有水平保持的多个基板, 相互平行; 与基板处理装置的单个门接触并形成所有基板的公共输送路径的第一基板输送机构; 单个基板姿势控制台,其布置成与所述第一输送机构接触以校正要供给到所述基板处理装置中的所述基板的姿势; 第二基板输送机构,用于形成多个盒带台与基板姿势控制台之间的至少一个输送路径,并交换和输送基板; 以及布置在第二基板输送机构的各个输送路径中的基板计数器。 经处理的基板返回原始盒。
    • 36. 发明授权
    • Controllable rectifier circuit for a power supply
    • 电源可控整流电路
    • US4161022A
    • 1979-07-10
    • US931765
    • 1978-08-07
    • Kenichi KanazawaNobuyuki Takahashi
    • Kenichi KanazawaNobuyuki Takahashi
    • H02M1/08H02M7/12H02M7/162H03K17/13H05B6/06H05B6/12H02M7/155
    • H05B6/062H02M1/083H02M7/1626H03K17/136
    • A controllable rectifier circuit which may be used in a power supply selectively produces a half-wave or a full-wave rectified signal. The rectifier circuit includes a pair of input terminals for receiving an AC signal and a bridge rectifier coupled to the input terminals and including a pair of output terminals across which a rectified AC signal is produced. The bridge rectifier comprises a first current path including a switchable rectifier for conducting positive half cycles of the AC signal and a second current path including a switchable rectifier for conducting negative half cycles of the AC signal. A pulse generator is supplied with reduced amplitude versions of the positive and negative half cycles of the AC signal, in sequence, to produce an output pulse when the reduced amplitude of the half cycle supplied thereto is less than a predetermined level. A non-reduced half cycle of the AC signal is selectively supplied to the pulse generator to prevent the pulse generator from generating an output pulse during that half cycle so that an output pulse is generated only during the beginning and ending portions of the other half cycle. The generated output pulses are supplied to each of the switchable rectifiers, whereby the bridge rectifier rectifies both half cycles of the AC signal when the non-reduced half cycle is not supplied to the pulse generator, and the bridge rectifier rectifies only the other half cycle of the AC signal when the non-reduced half cycle is supplied to the pulse generator.
    • 可用于电源的可控整流电路选择性地产生半波或全波整流信号。 整流电路包括用于接收AC信号的一对输入端和耦合到输入端的桥式整流器,并且包括一对输出端,跨过整流的交流信号产生一对。 桥式整流器包括第一电流路径,其包括用于传导AC信号的正半周期的可切换整流器和包括用于传导AC信号的负半周期的可切换整流器的第二电流路径。 脉冲发生器按照顺序提供交流信号的正半周期和负半周期的减小幅度版本,以便当提供给其的半周期的减小的幅度小于预定电平时产生输出脉冲。 交流信号的非减速半周期被选择性地提供给脉冲发生器,以防止脉冲发生器在该半周期期间产生输出脉冲,使得仅在另一个半周期的开始和结束部分期间产生输出脉冲 。 所产生的输出脉冲被提供给每个可切换整流器,由此当非减速半周期不提供给脉冲发生器时,桥式整流器对AC信号的两个周期进行整流,并且桥式整流器仅对另一半周期进行整流 的非减速半周期被提供给脉冲发生器。