专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明授权

US07250601B2 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method 有权
标题翻译：能谱测定装置，电子能量损失光谱仪，电子显微镜，电子能量损失光谱测定方法等
公开(公告)号：US07250601B2
公开(公告)日：2007-07-31
申请号：US11372057
申请日：2006-03-10
申请人： Kazutoshi Kaji , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
IPC分类号： H01J47/00
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/244 , H01J37/252 , H01J37/26 , H01J37/28 , H01J2237/24485 , H01J2237/24495 , H01J2237/2487 , H01J2237/262 , H01J2237/2802 , H05H1/0037
摘要： An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
摘要翻译：电子束检测器检测光谱的峰值，并且当峰值位置偏离电子束检测器上的参考位置时，使用用于控制电子束检测器上的电子束位置的控制器来校正偏差。测量电子能量损失谱，同时控制校正电子束在样本上的位置与光谱的峰值位置之间的偏差，以及用电子束检测器测量的光谱。

32. 发明授权

US07146872B2 Micro manipulator 失效
标题翻译：微机械手
公开(公告)号：US07146872B2
公开(公告)日：2006-12-12
申请号：US10214196
申请日：2002-08-08
申请人： Kazuhiro Morita , Motohide Ukiana , Kazuhiro Fujii , Shigeto Isakozawa , Hidemi Koike , Tamio Tanikawa
发明人： Kazuhiro Morita , Motohide Ukiana , Kazuhiro Fujii , Shigeto Isakozawa , Hidemi Koike , Tamio Tanikawa
IPC分类号： B25J17/00
CPC分类号： B25J17/0266 , B25J7/00 , B25J9/0015 , Y10T29/53 , Y10T74/20335 , Y10T74/20341
摘要： Provision of a 3-DOF micro manipulator easy to operate and capable of executing accurate positioning, wherein the link mechanisms of the micro manipulator whose main operation is parallel 3-DOF operation are implemented by cutting, folding, and moding a sheet of metal plate. Base and end effector are connected by three link mechanisms. The three link mechanisms are manufactured by cutting and folding a flexible plate material, and are equipped with plate-like arm portions each having a spread in the axially peripheral direction of the end effector, with hinge portions that are formed longitudinally across each arm portion in order to function as revolving joints R, and with a hinge portion also formed at the middle position of the arm portion in order to function as revolving joints R. Also, a parallelogrammatic link is formed between one longitudinal end of the arm portion and the middle portion thereof in order to function as a prismatic joint pair P.
摘要翻译：提供易于操作并能够执行精确定位的3-DOF微操纵器，其中主操作是平行3自由度操作的微操纵器的连杆机构通过切割，折叠和模制一块金属板来实现。基本和末端执行器通过三个连杆机构连接。三连杆机构通过切割和折叠柔性板材来制造，并且配备有在端部执行器的轴向周向方向上具有扩展的板状臂部分，铰链部分纵向跨越每个臂部分形成为了作为旋转接头R起作用，并且铰链部分也形成在臂部分的中间位置，以起到旋转接头R.而且，臂部分的一个纵向端部与中间部分之间形成一个平行四边形连杆部分，以便作为棱柱形接头对P.

33. 发明授权

US06930306B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US06930306B2
公开(公告)日：2005-08-16
申请号：US10807116
申请日：2004-03-24
申请人： Kazutoshi Kaji , Yoshifumi Taniguchi , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Yoshifumi Taniguchi , Shigeto Isakozawa
IPC分类号： H01J37/22 , H01J37/05 , H01J37/147 , H01J37/28 , H01J49/44 , H01J37/26
CPC分类号： H01J37/1471 , H01J37/05 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.
摘要翻译：扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。该电子显微镜还包括设置在磁性扇区的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量滤波器，偏转线圈用于校正由磁扇形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。

34. 发明授权

US06703613B2 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method 有权
标题翻译：能谱测定装置，电子能量损失光谱仪，电子显微镜，电子能量损失光谱测定方法等
公开(公告)号：US06703613B2
公开(公告)日：2004-03-09
申请号：US09988339
申请日：2001-11-19
申请人： Kazutoshi Kaji , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
IPC分类号： H01J4700
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/244 , H01J37/252 , H01J37/26 , H01J37/28 , H01J2237/24485 , H01J2237/24495 , H01J2237/2487 , H01J2237/262 , H01J2237/2802 , H05H1/0037
摘要： An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
摘要翻译：电子束检测器检测光谱的峰值，并且当峰值位置偏离电子束检测器上的参考位置时，使用用于控制电子束检测器上的电子束位置的控制器来校正偏差。测量电子能量损失谱，同时控制校正电子束在样本上的位置与光谱的峰值位置之间的偏差，以及用电子束检测器测量的光谱。

35. 发明授权

US5367171A Electron microscope specimen holder 失效
标题翻译：电子显微镜样品架
公开(公告)号：US5367171A
公开(公告)日：1994-11-22
申请号：US965423
申请日：1992-10-23
申请人： Takashi Aoyama , Kishu Hosoi , Yutaka Misawa , Koji Kimoto , Shigeto Isakozawa , Kazuhiro Ueda
发明人： Takashi Aoyama , Kishu Hosoi , Yutaka Misawa , Koji Kimoto , Shigeto Isakozawa , Kazuhiro Ueda
IPC分类号： H01J37/20
CPC分类号： H01J37/20
摘要： A specimen cartridge fashioned of a good thermal conductor, with an outer frame being fashioned of heat insulating material, and with a connecting rod being fashioned of a poor thermal conductor. A temperature distribution of the specimen is uniform and a temperature drift is reduced, with a thermal expansion of a specimen cartridge tilting rod not affecting the tilting angle, thereby making it possible to perform various highly accurate observations and measurements with an electron microscope.
摘要翻译：由良好的热导体形成的样品盒，外框由绝热材料制成，并且连接杆由不良的导热体构成。样品盒的温度分布是均匀的并且温度漂移降低，而样品盒倾斜杆的热膨胀不影响倾斜角度，从而可以用电子显微镜进行各种高精度的观测和测量。

36. 发明授权

US4945247A Field emission electron gun system 失效
标题翻译：场发射电子枪系统
公开(公告)号：US4945247A
公开(公告)日：1990-07-31
申请号：US365827
申请日：1989-06-14
申请人： Takeshi Kawasaki , Junji Endo , Shigeto Isakozawa , Masahiro Tomita , Akira Tonomura
发明人： Takeshi Kawasaki , Junji Endo , Shigeto Isakozawa , Masahiro Tomita , Akira Tonomura
IPC分类号： H01J29/48 , H01J37/073 , H01J37/145
CPC分类号： H01J37/073
摘要： In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.
摘要翻译：在具有包括场发射电子源的多级加速管的场发射电子枪系统中，用于提取电子的场发射电极，在场发射电子源和场发射电极之间具有磁隙的磁透镜或具有也用作场发射电极的磁极的磁性透镜以及用于加速电子的至少两级的加速电极，用于磁性透镜的磁化电流I与施加在磁场之间的场致发射电压V1互锁地变化发射电子源和场发射电极，使得IN / 2ROOT V1（N：磁性透镜的绕组数）取预定值，施加在场发射电子源和第一级加速电极之间的第一加速电压V2 与场致发射电压V1互锁，使得V2 / V1取规定值。

37. 发明授权

US4283627A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US4283627A
公开(公告)日：1981-08-11
申请号：US098664
申请日：1979-11-29
申请人： Shigeto Isakozawa , Kazuo Shii
发明人： Shigeto Isakozawa , Kazuo Shii
IPC分类号： H01J37/147 , H01J37/04 , H01J37/26 , H01J37/295 , G01N23/00
CPC分类号： H01J37/04 , H01J37/265 , H01J37/295
摘要： The electron beam having penetrated a sample is projected on a field limiting plate having an opening by means of an objective lens. That part of the electron beam which has passed through the opening of the field limiting plate, is projected upon a viewing screen by means of an image forming lens system. An electron beam deflection system is disposed between the hind focal point of the objective lens and the field limiting plate, the system having its deflection center at the hind focal point of the objective lens.
摘要翻译：穿透了样品的电子束通过物镜投射在具有开口的场界限板上。已经通过场界限板的开口的电子束的那部分通过图像形成透镜系统投射到观察屏幕上。电子束偏转系统设置在物镜的后焦点和场限制板之间，该系统的偏转中心位于物镜的后焦点处。

38. 发明授权

US08134131B2 Method and apparatus for observing inside structures, and specimen holder 有权
标题翻译：用于观察内部结构和试样架的方法和装置
公开(公告)号：US08134131B2
公开(公告)日：2012-03-13
申请号：US12329661
申请日：2008-12-08
申请人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
发明人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
IPC分类号： G21K5/00
CPC分类号： H01J37/20 , G01N23/2251 , G01N23/2252 , H01J37/26 , H01J2237/2008 , H01J2237/206 , H01J2237/2802
摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.
摘要翻译：本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以便确定失败的机制。本发明是一种观察内部结构的方法。该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态部分。

39. 发明授权

US07923701B2 Charged particle beam equipment 有权
标题翻译：带电粒子束设备
公开(公告)号：US07923701B2
公开(公告)日：2011-04-12
申请号：US12081969
申请日：2008-04-24
申请人： Hiromi Inada , Hiroyuki Tanaka , Shun-ichi Watanabe , Shigeto Isakozawa , Mitsugu Sato , Atsushi Takane , Satoshi Yamaguchi
发明人： Hiromi Inada , Hiroyuki Tanaka , Shun-ichi Watanabe , Shigeto Isakozawa , Mitsugu Sato , Atsushi Takane , Satoshi Yamaguchi
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/265 , H01J2237/15 , H01J2237/2487 , H01J2237/2826
摘要： Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.
摘要翻译：带电粒子束设备具有用于校准放大的标本图像的尺寸值的处理单元和用于改变扫描带电粒子束的量的装置。此外，试样架具有用于保持具有周期性结构的试样或同时具有周期性结构和非周期性结构的试样的机构，以及用于自动改变放大的试样图像的倍率并存储测量值的存储装置在所有放大倍率。

40. 发明授权

US07462830B2 Method and apparatus for observing inside structures, and specimen holder 有权
标题翻译：用于观察内部结构和试样架的方法和装置
公开(公告)号：US07462830B2
公开(公告)日：2008-12-09
申请号：US10912148
申请日：2004-08-06
申请人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
发明人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
IPC分类号： H01J37/28
CPC分类号： H01J37/20 , G01N23/2251 , G01N23/2252 , H01J37/26 , H01J2237/2008 , H01J2237/206 , H01J2237/2802
摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.
摘要翻译：本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定失败的机制。本发明是用于观察内部结构的方法。该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态部分。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式