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1. 发明授权

US06855927B2 Method and apparatus for observing element distribution 有权
标题翻译：观察元素分布的方法和装置
公开(公告)号：US06855927B2
公开(公告)日：2005-02-15
申请号：US10435050
申请日：2003-05-12
申请人： Yoshifumi Taniguchi , Kazutoshi Kaji , Yasumitsu Ueki , Shigeto Isakozawa
发明人： Yoshifumi Taniguchi , Kazutoshi Kaji , Yasumitsu Ueki , Shigeto Isakozawa
IPC分类号： G01N23/08 , G01N23/02 , G01N23/04 , H01J37/05 , H01J37/26 , H01J37/28
CPC分类号： G01N23/02
摘要： There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.
摘要翻译：提供了一种利用能够限制由样本的厚度或密度引起的伪影的核心损耗电子的元素分布观察方法和元件分布观察装置，或由衍射对比度引起的伪影的发生。计算两个能量损失区域的三个不同能量损失区域中不含任何铁损损失电子和一个能量损失面积的电子束强度，以根据相应的三个能量损失面积获得元素分布，电子束强度。

2. 发明授权

US06930306B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US06930306B2
公开(公告)日：2005-08-16
申请号：US10807116
申请日：2004-03-24
申请人： Kazutoshi Kaji , Yoshifumi Taniguchi , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Yoshifumi Taniguchi , Shigeto Isakozawa
IPC分类号： H01J37/22 , H01J37/05 , H01J37/147 , H01J37/28 , H01J49/44 , H01J37/26
CPC分类号： H01J37/1471 , H01J37/05 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.
摘要翻译：扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。该电子显微镜还包括设置在磁性扇区的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量滤波器，偏转线圈用于校正由磁扇形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。

3. 发明授权

US6150657A Energy filter and electron microscope equipped with the energy filter 有权
标题翻译：能量过滤器和电子显微镜配有能量过滤器
公开(公告)号：US6150657A
公开(公告)日：2000-11-21
申请号：US138995
申请日：1998-08-25
申请人： Koji Kimoto , Yoshifumi Taniguchi , Shunroku Taya , Shigeto Isakozawa , Takashi Aoyama , Masakazu Saito , Tomoko Sekiguchi
发明人： Koji Kimoto , Yoshifumi Taniguchi , Shunroku Taya , Shigeto Isakozawa , Takashi Aoyama , Masakazu Saito , Tomoko Sekiguchi
IPC分类号： G01Q30/02 , H01J37/05 , H01J37/26 , H01J49/44 , H01J49/46
CPC分类号： H01J49/44 , H01J37/05 , H01J2237/24485 , H01J2237/28
摘要： An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.
摘要翻译：能量滤波器具有多个偏转装置，并且通过使用多个偏转装置来构造，使得电子束的平均轨迹对称，并且对称平面的法线相对于电子束的入射方向倾斜。

4. 发明授权

US5981948A Transmission electron microscope and method of observing element distribution 失效
标题翻译：透射电子显微镜及观察元素分布的方法
公开(公告)号：US5981948A
公开(公告)日：1999-11-09
申请号：US30477
申请日：1998-02-25
申请人： Yoshifumi Taniguchi , Shigeto Isakozawa
发明人： Yoshifumi Taniguchi , Shigeto Isakozawa
IPC分类号： G01N23/04 , H01J37/22 , H01J37/26 , H01J37/153
CPC分类号： H01J37/26 , H01J2237/05
摘要： Letting core-loss energy of an objective element be E.sub.c, and width of the energy selection slit be .DELTA.E. Initially, a pre-edge image obtained by increasing an acceleration voltage of an electron gun by E.sub.c -.DELTA.E and a pre-pre-edge image obtained by increasing an acceleration voltage by E.sub.c -.DELTA.E are taken with the same exposure time, and an intensity ratio R of the pre-edge image to the pre-pre-edge image is calculated. Next, a post-edge image obtained by increasing an acceleration voltage by E.sub.c is taken with an exposure time t.sub.pre, and a pre-edge image is taken with an exposure time R.times.t.sub.pre. An element distribution image of the objective element can be obtained by simply performing image subtraction of the pre-edge image from the post-edge image in a computer.
摘要翻译：使目标元素的核心损耗能量为Ec，能量选择狭缝的宽度为DELTA E.首先，通过用Ec-DELTA E增加电子枪的加速电压而获得的前缘图像和预先以相同的曝光时间拍摄通过用Ec-DELTA E增加加速电压而获得的-edge图像，并且计算前缘图像与前前缘图像的强度比R. 接下来，利用曝光时间tpre拍摄通过用Ec增加加速电压而获得的后边缘图像，并且以曝光时间Rxtpre拍摄前边缘图像。可以通过简单地从计算机中的后边缘图像执行预边缘图像的图像相减来获得目标元素的元素分布图像。

5. 发明授权

US08263936B2 Transmission electron microscope having electron spectroscope 有权
标题翻译：透射电子显微镜具有电子分光镜
公开(公告)号：US08263936B2
公开(公告)日：2012-09-11
申请号：US12414883
申请日：2009-03-31
申请人： Shohei Terada , Yoshifumi Taniguchi
发明人： Shohei Terada , Yoshifumi Taniguchi
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01N23/04 , G01N2223/102 , G01N2223/3037
摘要： A transmission electron microscope is capable of correcting, with high efficiency and high accuracy, an electron energy loss spectrum extracted from each of measured portions included in an electron energy loss spectral image with two axes representing the amount of an energy loss and positional information on a measured portion. The transmission electron microscope has an electron spectroscope and a spectrum correction system. The spectrum correction system corrects a spectrum extracted from each measured portion included in an electron energy loss spectral image acquired from a sample based on a difference between a spectrum extracted from a standard portion of a standard spectral image and a spectrum extracted from a portion different from the standard portion.
摘要翻译：透射电子显微镜能够以高效率和高精度校正从包含在电子能量损失光谱图像中的每个测量部分提取的电子能量损失谱，其中两个轴表示能量损失量和位置信息测量部分。透射电子显微镜具有电子分光镜和光谱校正系统。频谱校正系统基于从标准光谱图像的标准部分提取的光谱与从不同于标准光谱图像的部分提取的光谱之间的差异，从包含在从样本获取的电子能量损失光谱图像中的每个测量部分中提取的光谱标准部分。

6. 发明授权

US07723682B2 Transmission electron microscope provided with electronic spectroscope 有权
标题翻译：透射电子显微镜配有电子分光镜
公开(公告)号：US07723682B2
公开(公告)日：2010-05-25
申请号：US12024357
申请日：2008-02-01
申请人： Shohei Terada , Yoshifumi Taniguchi
发明人： Shohei Terada , Yoshifumi Taniguchi
IPC分类号： G01N23/02 , H01J37/26
CPC分类号： H01J37/05 , H01J37/09 , H01J37/244 , H01J37/26 , H01J37/265 , H01J2237/0453 , H01J2237/057 , H01J2237/24455 , H01J2237/2446 , H01J2237/24485 , H01J2237/2802
摘要： In order to correct measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis; a method for correcting magnification and position and a system for correcting magnification and position, both of which are capable of correcting measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis, are provided.
摘要翻译：为了使用电子分光镜和透射电子显微镜，以能量损失轴和测量位置的两个正交轴形成的光谱图像，以高效率和高精度校正光谱图像的测量倍率和测量位置信息轴; 用于校正放大率和位置的方法以及用于校正倍率和位置的系统，它们都能够使用电子分光镜和透射电子显微镜来高效率和高精度地校正光谱图像的测量倍率和测量位置提供了在作为能量损失轴的量和测量位置信息轴的两个正交轴上形成的光谱图像。

7. 外观设计

USD636005S1 Electron microscope 有权
公开(公告)号：USD636005S1
公开(公告)日：2011-04-12
申请号：US29363415
申请日：2010-06-09
申请人： Mitsuru Oonuma , Akira Omachi , Yoshifumi Taniguchi , Isao Nagaoki , Hiroshi Aoyagi
设计人： Mitsuru Oonuma , Akira Omachi , Yoshifumi Taniguchi , Isao Nagaoki , Hiroshi Aoyagi

8. 发明申请

US20080073521A1 Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus 失效
标题翻译：带电粒子束装置的标准试样，其试样制备方法和带电粒子束装置
公开(公告)号：US20080073521A1
公开(公告)日：2008-03-27
申请号：US11717094
申请日：2007-03-13
申请人： Toshie Yaguchi , Takeo Kamino , Yoshifumi Taniguchi
发明人： Toshie Yaguchi , Takeo Kamino , Yoshifumi Taniguchi
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , B82Y15/00 , G01N2223/303 , G01N2223/3037 , H01J37/263 , H01J2237/2826 , H01J2237/31745
摘要： An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.
摘要翻译：本发明的目的是提供一种用于带电粒子束的标准样品，其使得能够在图像上的亚微米至数十微米的尺寸上高精度地测量，并且使用标准样品。为了达到上述目的，本发明提供一种包含两个不同的用于放大或测量校准的样品的带电粒子束的标准样品和使用该样品的带电粒子束装置。

9. 发明申请

US20060076492A1 Transmission electron microscope and image observation method using it 有权
标题翻译：透射电子显微镜和使用它的图像观察方法
公开(公告)号：US20060076492A1
公开(公告)日：2006-04-13
申请号：US11245428
申请日：2005-10-07
申请人： Yoshifumi Taniguchi , Hisafumi Otsuka
发明人： Yoshifumi Taniguchi , Hisafumi Otsuka
IPC分类号： G21K7/00
CPC分类号： H01J37/26 , H01J37/224 , H01J37/265 , H01J2237/0216 , H01J2237/2025 , H01J2237/20292
摘要： Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is recorded, drift in the place out of the view field subjected to recording is measured from moment to moment by another TV camera or a position sensitive detector. Drift is corrected by the movement of the specimen due to a specimen holder or by the movement of the image due to an image shift coil.
摘要翻译：在拍摄TEM图像时产生的漂移与拍摄同时被校正，从而拍摄TEM图像自由形成的漂移影响。在记录TEM图像的同时，通过另一台电视摄像机或位置敏感探测器随时测量被记录的视场外的位置的漂移。漂移由于样品夹持器的移动或由于图像移动线圈的图像的运动而被校正。

10. 发明授权

US06992286B2 Material characterization system 失效
标题翻译：材料表征系统
公开(公告)号：US06992286B2
公开(公告)日：2006-01-31
申请号：US10792781
申请日：2004-03-05
申请人： Toshie Yaguchi , Takeo Kamino , Yoshifumi Taniguchi
发明人： Toshie Yaguchi , Takeo Kamino , Yoshifumi Taniguchi
IPC分类号： G01N23/203
CPC分类号： G01N23/2252 , G01N23/20 , H01J37/244 , H01J37/256 , H01J37/28
摘要： An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.
摘要翻译：电子束装置设有电子束衍射图像分析部，用于计算由用于观察电子束衍射图像的TV摄像机拍摄的衍射图像的晶格距离，用于获取材料成分的EDX分析部，用于材料表征检索的数据库，以及具有数据库检索功能的材料表征部分。材料表征部分通过基于从电子束衍射图像分析部分传送的晶格距离数据和从EDX分析部分传送的元素数据来检索检索数据库来表征材料。

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