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    • 36. 发明授权
    • Radially poled piezoelectric diaphragm structures
    • 径向极化压电隔膜结构
    • US07053532B2
    • 2006-05-30
    • US10740292
    • 2003-12-18
    • Meng H. LeanSteven A. BuhlerJohn S. FitchKarl A. Littau
    • Meng H. LeanSteven A. BuhlerJohn S. FitchKarl A. Littau
    • H01L41/08
    • H01L41/0973H01L41/047
    • In accordance with one embodiment of the present application, a piezoelectric diaphragm structure includes a diaphragm, with a piezoelectric material located on the diaphragm. The piezoelectric material is being poled in a radial direction to the piezoelectric material, wherein the poling direction is in-plane with the piezoelectric material. An inter-digitated electrode grid is positioned on a first surface of the piezoelectric material, the inter-digitated electrode grid including a plurality of electrodes configured to selectively receive positive and negative voltage. The application of the positive and negative voltages generate electric fields in the piezoelectric material, at least a portion of which are in-plane with the piezoelectric material, resulting in an actuation of the piezoelectric material, causing a length change of the piezoelectric material in the Radial direction.In accordance with another embodiment of the present application, provided is a method of actuating a piezoelectric diaphragm structure, including poling a piezoelectric material in a radial direction of the piezoelectric material, wherein the poling direction is in-plane with the piezoelectric material. The piezoelectric material is located in operative contact with the diaphragm, and an electrode arrangement located on a surface of the piezoelectric material is selectively supplied with voltages generating electric fields. The generated electric fields are at least partially in the same plane as the poling direction, resulting in a d33 mode of actuation of the piezoelectric material, causing a length change of the piezoelectric material in the Radial direction.
    • 根据本申请的一个实施例,压电振膜结构包括隔膜,压电材料位于隔膜上。 压电材料在压电材料的径向方向上被极化,其中极化方向与压电材料成平面。 数字化电极栅格位于压电材料的第一表面上,数字化电极栅格包括多个电极,其被配置为选择性地接收正电压和负电压。 正压和负电压的施加在压电材料中产生电场,其压电材料的至少一部分与压电材料成平面,导致压电材料的致动,导致压电材料的长度变化 径向。 根据本申请的另一实施例,提供了一种致动压电膜结构的方法,包括在压电材料的径向方向上极化压电材料,其中极化方向与压电材料成平面。 压电材料位于与隔膜有效接触的位置,并且位于压电材料表面上的电极装置被选择性地供给产生电场的电压。 产生的电场至少部分地在与极化方向相同的平面中,导致压电材料的致动模式,导致压电材料在径向方向上的长度变化。