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    • 39. 发明申请
    • Method and apparatus for forming thin film
    • 用于形成薄膜的方法和装置
    • US20050136694A1
    • 2005-06-23
    • US10973249
    • 2004-10-27
    • Kenichi InoueHiroyuki TakamatsuTakashi KoboriKazushi HayashiToshihiro Kugimiya
    • Kenichi InoueHiroyuki TakamatsuTakashi KoboriKazushi HayashiToshihiro Kugimiya
    • C23C14/34C23C14/24C23C14/26C23C14/35C23C16/00H01J37/32H01L21/203H01L21/26H01L21/324H01L21/42H01L21/477
    • C23C14/35C23C14/228C23C14/26H01J37/32009
    • A rotor having a cylindrical peripheral surface is disposed in a treatment vessel into which a carrier gas is introduced, and the rotor peripheral surface is opposed to the surface of a substrate with a predetermine gap therebetween. The rotor peripheral surface is also opposed to a film-forming material supplying member having a film-forming material on its surface at a position apart from the position where the rotor faces the substrate. Film-forming particulates including atomic molecules of the film-forming material and cluster particulates thereof are scattered from the surface of the film-forming material supplying member by sputtering, and the rotor is rotated to form a carrier gas flow near the rotor peripheral surface. The film-forming particulates are transported to the vicinity of the surface of the substrate by the carrier gas flow and adhered to the surface of the substrate. As a result, the adverse effect of high-energy particles and the like can be suppressed to efficiently form a satisfactory thin film by an evaporation or sputtering process, which has less restriction to a source material gas, without the need for large equipment.
    • 具有圆筒形周面的转子设置在其中引入载气的处理容器中,并且转子外周表面与基板的表面之间具有预定的间隙。 转子外周表面也与在其表面上离开转子面向基板的位置的表面上的成膜材料供给构件相对。 包括成膜材料的原子分子和簇粒子的成膜颗粒通过溅射从成膜材料供给构件的表面散射,转子旋转以在转子周边表面附近形成载气流。 成膜微粒通过载气流输送到基板的表面附近并粘附到基板的表面。 结果,可以抑制高能粒子等的不利影响,通过蒸发或溅射法有效地形成令人满意的薄膜,对原料气体的限制较少,而无需大型设备。
    • 40. 发明申请
    • Powder for sublayer coating type magnetic recording medium
    • 用于亚层涂层型磁记录介质的粉末
    • US20050129945A1
    • 2005-06-16
    • US10508033
    • 2003-04-02
    • Kazuyuki MatsumotoKenichi InoueKen Inoue
    • Kazuyuki MatsumotoKenichi InoueKen Inoue
    • C01G49/06G11B5/738B32B5/16C09C1/22
    • G11B5/738Y10T428/2982
    • A powder for an underlayer of a coating-type magnetic recording medium, which powder comprises flat-acicular iron oxide particles having an average major axis length of 20-200 nm, a short axis cross-section taken perpendicularly to the long axis that has a long width and a short width, and a short axis cross-section ratio defined as the ratio of the long width to the short width that is greater than 1.3 and substantially uniform in the long axis direction, the powder having a specific surface area measured by the BET method of 30-100 m2/g. The underlayer powder preferably contains 0.1-5.0 wt % of P and, optionally, an amount of R(R representing one or more rare earth elements, defined as including Y) such that R/Fe expressed in atomic percentage (at. %) is 0.1-10 at. %.
    • 一种用于涂层型磁记录介质底层的粉末,该粉末包含平均长轴长度为20-200nm的扁平针状氧化铁颗粒,垂直于长轴的短轴截面为 长宽度和短宽度,短轴截面比定义为长宽与短宽的比大于1.3并且在长轴方向上基本均匀,所述粉末的比表面积由 BET法为30-100m 2 / g。 底层粉末优选含有0.1-5.0重量%的P和任选的R(R表示一个或多个稀土元素,定义为包括Y)的量,使得以原子百分比(at。%)表示的R / Fe为 0.1-10 at。 %。