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    • 32. 发明授权
    • Concave-convex surface inspection apparatus
    • 凹凸表面检查装置
    • US08049868B2
    • 2011-11-01
    • US12400140
    • 2009-03-09
    • Masataka TodaToshihiko YoshikawaKatsuya InuzukaKoji Kuno
    • Masataka TodaToshihiko YoshikawaKatsuya InuzukaKoji Kuno
    • G01C3/08G01N21/00
    • G01B11/25
    • A concave-convex surface inspection apparatus includes a slit light source unit emitting a slit light to a concave-convex surface of an object to be inspected, an image-taking unit taking an image of the concave-convex surface illuminated by the emitted slit light with an imaging optical axis intersecting with an optical axis of the slit light with a narrow-angle equal to or narrower than 30 degrees, and an evaluation section obtaining a three dimensional shape of the concave-convex surface and evaluating the obtained three dimensional shape, wherein the slit light source unit includes a slit light source and a cylindrical lens, the image-taking unit includes a telecentric lens unit, an image-taking section having an imaging surface tilted relative to the imaging optical axis for increasing a focusing range of the concave-convex surface, and a P polarizer.
    • 凹凸表面检查装置包括将狭缝光发射到被检查物体的凹凸面的狭缝光源单元,摄像单元拍摄由发射的狭缝光照射的凹凸面的图像 具有与狭缝等于或小于30度的狭缝光的光轴相交的成像光轴和获得凹凸表面的三维形状的评估部分,并评估所获得的三维形状, 其中所述狭缝光源单元包括狭缝光源和柱面透镜,所述摄像单元包括远心透镜单元,摄像部分具有相对于成像光轴倾斜的成像表面,用于增加所述摄像部分的聚焦范围 凹凸表面和P偏振器。