会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 31. 发明授权
    • Portable computer with selectively operable cooling unit
    • 便携式计算机,可选择性地可操作的冷却单元
    • US5881298A
    • 1999-03-09
    • US707634
    • 1996-09-05
    • David A. Cathey
    • David A. Cathey
    • G06F1/20G06F1/32G06F1/00
    • G06F1/203G06F1/3203
    • A portable computer that conserves power when the computer operates from its portable power source. The portable computer has a processor operatively coupled to an input device, an output device, and a memory device. The portable computer also includes a portable power source operatively coupled to the processor, and a selectively operable cooling system that is adapted to create a heat transfer zone in which heat dissipates from the processor. The cooling system has a cooling unit that may be selectively disabled in a desired power-saving mode during which the processor may continue to operate. The cooling unit is preferably disabled by electrically disconnecting the cooling unit from the portable power source to de-energize the cooling system, or by physically disconnecting the cooling system from the portable computer.
    • 便携式计算机,当计算机从其便携式电源运行时节省电力。 便携式计算机具有可操作地耦合到输入设备,输出设备和存储设备的处理器。 便携式计算机还包括可操作地耦合到处理器的便携式电源,以及可选择性地操作的冷却系统,其适于产生热处理器散热的传热区域。 冷却系统具有可以在处理器可以继续操作的期望的省电模式中选择性地禁用的冷却单元。 优选地,通过将​​冷却单元与便携式电源电断开以使冷却系统断电,或通过物理地将冷却系统与便携式计算机断开连接来实现冷却单元的禁用。
    • 33. 发明授权
    • Leak detection method and apparatus for plasma processing equipment
    • 等离子体处理设备的泄漏检测方法和装置
    • US5789754A
    • 1998-08-04
    • US699489
    • 1996-08-19
    • David A. CatheyRodney C. Langley
    • David A. CatheyRodney C. Langley
    • G01N21/73
    • G01N21/73
    • In one aspect, a method of detecting leaks of external atmospheric gases into a plasma reactor comprises monitoring an emission spectra of a plasma within the reactor for the presence of an external atmospheric constituent. In another aspect, a method of detecting an external atmospheric leak in a plasma enhanced reactor comprising detecting photon emission of excited nitrogen present within the reactor. In yet another aspect, a leak detection system of continuously detecting for leaks of external atmospheric gases into a plasma reactor comprises: a) an optical detection apparatus in optical communication with a plasma in the plasma reactor; b) the optical detection apparatus being configured to monitor an emission spectra of the plasma for a signal due to presence of an external atmospheric constituent within the plasma and for a signal due to a non-atmospheric constituent within the plasma; and c) an alarm configured to generate a response when the relative size of the external atmospheric constituent signal to the non-atmospheric constituent signal exceeds a predetermined value.
    • 在一个方面,检测外部大气气体进入等离子体反应器的泄漏的方法包括监测反应器内的等离子体的外部大气成分的存在的发射光谱。 在另一方面,一种检测等离子体增强反应器中的外部大气泄漏的方法,包括检测存在于反应器内的受激氮的光子发射。 在另一方面,一种连续地检测外部大气气体进入等离子体反应器的泄漏检测系统包括:a)与等离子体反应器中的等离子体光学连通的光学检测装置; b)光学检测装置被配置为监测由于在等离子体内存在外部大气成分和由于等离子体内的非大气成分引起的信号引起的信号的等离子体的发射光谱; 以及c)被配置为当所述外部大气分量信号相对于所述非大气分量信号的相对大小超过预定值时产生响应的报警。
    • 36. 发明授权
    • Method of selectively etching silicon dioxide dielectric layers on
semiconductor wafers
    • 在半导体晶片上选择性地蚀刻二氧化硅电介质层的方法
    • US5300463A
    • 1994-04-05
    • US847368
    • 1992-03-06
    • David A. CatheyJ. Brett Rolfson
    • David A. CatheyJ. Brett Rolfson
    • H01L21/311H01L21/00H01L21/02H01L21/465
    • H01L21/31111
    • A method of utilizing and etching SiO.sub.2 in the processing of semiconductor wafers comprises: a) providing a layer of undoped SiO.sub.2 atop a wafer; b) providing a layer of doped SiO.sub.2 atop the layer of undoped SiO.sub.2 ; and c) wet etching the layer of doped SiO.sub.2 selectively relative to the undoped layer of SiO.sub.2 utilizing an acid solution, the acid solution comprising a mixture of at least two different mineral acids provided in a selected ratio relative to one another, one of the mineral acids being HF. The preferred volumetric ratio of other mineral acids in the acid solution to HF in the acid solution is from 20:1 to 110:1, with a ratio of from 45:1 to 65:1 being most preferred. Example acids to be combined with the HF include H.sub.2 SO.sub.4, HCl, HNO.sub.3, H.sub.3 PO.sub.4, HBr, HI, HClO.sub.4, and HIO.sub.4, or mixtures thereof.
    • 在半导体晶片的处理中利用和蚀刻SiO 2的方法包括:a)在晶片顶上提供未掺杂的SiO 2层; b)在未掺杂的SiO 2层的顶部提供掺杂SiO 2层; 和c)使用酸溶液相对于未掺杂的SiO 2层选择性地浸蚀掺杂SiO 2层,所述酸溶液包含以相对于彼此的选定比率提供的至少两种不同的无机酸的混合物,所述矿物质之一 酸是HF。 在酸溶液中酸溶液中的其它无机酸与HF的优选体积比为20:1至110:1,最优选的比例为45:1至65:1。 与HF组合的实例酸包括H 2 SO 4,HCl,HNO 3,H 3 PO 4,HBr,HI,HClO 4和HIO 4,或其混合物。