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    • 31. 发明授权
    • FinFET process compatible native transistor
    • FinFET工艺兼容天然晶体管
    • US08153493B2
    • 2012-04-10
    • US12267121
    • 2008-11-07
    • Jam-Wem Lee
    • Jam-Wem Lee
    • H01L21/336
    • H01L29/66628H01L29/6659H01L29/7834H01L29/785
    • Provided is a top-channel only finFET device. The methods and devices described herein may provide a native device that is compatible with a finFET process flow. A gate may be formed on the top of a fin providing the channel region of the device. In an embodiment, the gate is provided only on one side of the channel, for example, on the top of the fin. The sidewalls of the fin including channel may abut an isolation structure. In an embodiment, isolation structures are formed between the fins to provide a planar surface for the formation of a gate.
    • 提供了仅顶部通道finFET器件。 本文所述的方法和装置可以提供与finFET工艺流程兼容的本机器件。 可以在提供器件的沟道区域的翅片的顶部上形成栅极。 在一个实施例中,门仅设置在通道的一侧上,例如在翅片的顶部。 包括通道的翅片的侧壁可以邻接隔离结构。 在一个实施例中,在翅片之间形成隔离结构以提供用于形成栅极的平面。
    • 32. 发明申请
    • Forming ESD Diodes and BJTs Using FinFET Compatible Processes
    • 使用FinFET兼容工艺形成ESD二极管和BJT
    • US20090315112A1
    • 2009-12-24
    • US12143644
    • 2008-06-20
    • Jam-Wem Lee
    • Jam-Wem Lee
    • H01L29/00H01L21/336
    • H01L21/823431H01L27/0248H01L29/66795H01L29/785
    • A method of forming an electrostatic discharging (ESD) device includes forming a first and a second semiconductor fin over a substrate and adjacent to each other; epitaxially growing a semiconductor material on the first and the second semiconductor fins, wherein a first portion of the semiconductor material grown from the first semiconductor fin joins a second portion of the semiconductor material grown from the second semiconductor fin; and implanting a first end and a second end of the semiconductor material and first end portions of the first and the second semiconductor fins to form a first and a second implant region, respectively. A P-N junction is formed between the first end and the second end of the semiconductor material. The P-N junction is a junction of an ESD diode, or a junction in an NPN or a PNP BJT.
    • 形成静电放电(ESD)器件的方法包括在衬底上形成彼此相邻的第一和第二半导体鳍; 在所述第一半导体鳍片和所述第二半导体鳍片上外延生长半导体材料,其中从所述第一半导体鳍片生长的所述半导体材料的第一部分接合从所述第二半导体鳍片生长的所述半导体材料的第二部分; 以及植入半导体材料的第一端和第二端以及第一和第二半导体鳍片的第一端部分别分别形成第一和第二植入区域。 在半导体材料的第一端和第二端之间形成P-N结。 P-N结是ESD二极管或NPN或PNP BJT中的结的结。
    • 39. 发明授权
    • High-voltage MOSFETs having current diversion region in substrate near fieldplate
    • 在场板附近的基板中具有电流分流区的高压MOSFET
    • US08541848B2
    • 2013-09-24
    • US13271342
    • 2011-10-12
    • Yun-Pei HuangYi-Feng ChangJam-Wem Lee
    • Yun-Pei HuangYi-Feng ChangJam-Wem Lee
    • H01L29/78
    • H01L29/0653H01L29/063H01L29/0696H01L29/1095H01L29/402H01L29/42368H01L29/7816
    • To limit or prevent current crowding, various HV-MOSFET embodiments include a current diversion region disposed near a drain region of an HV-MOSFET and near an upper surface of the semiconductor substrate. In some embodiments, the current diversion region is disposed near a field plate of the HV-MOSFET, wherein the field plate can also help to reduce or “smooth” electric fields near the drain to help limit current crowding. In some embodiments, the current diversion region is a p-doped, n-doped, or intrinsic region that is at a floating voltage potential. This current diversion region can push current deeper into the substrate of the HV-MOSFET (relative to conventional HV-MOSFETs), thereby reducing current crowding during ESD events. By reducing current crowding, the current diversion region makes the HV-MOSFETs disclosed herein more impervious to ESD events and, therefore, more reliable in real-world applications.
    • 为了限制或防止电流拥挤,各种HV-MOSFET实施例包括设置在HV-MOSFET的漏极区附近并且在半导体衬底的上表面附近的电流分流区域。 在一些实施例中,电流引流区域设置在HV-MOSFET的场板附近,其中场板还可以帮助减少或“平滑”漏极附近的电场,以帮助限制电流拥挤。 在一些实施例中,电流分流区域是处于浮置电压电位的p掺杂,n掺杂或本征区域。 该电流分流区可以将电流深度推入HV-MOSFET的衬底(相对于传统HV-MOSFET),从而减少ESD事件期间的电流拥挤。 通过减少电流拥挤,电流分流区域使得本文公开的HV-MOSFET更加不可避免地存在ESD事件,因此在现实世界的应用中更可靠。