会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 39. 发明申请
    • ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME
    • 机电传感器及其制造方法
    • US20130049527A1
    • 2013-02-28
    • US13587751
    • 2012-08-16
    • Yoshihiro HasegawaYasuyoshi Takai
    • Yoshihiro HasegawaYasuyoshi Takai
    • H02N1/00H01G7/00
    • B06B1/0292H01G5/16H02N1/006Y10T29/43
    • The present invention provides a technology for decreasing a dispersion of the performance among electromechanical transducers each having through wiring. A method for manufacturing an electromechanical transducer includes: obtaining a structure in which an insulative portion having a through hole therein is bonded onto an electroconductive substrate; filling the through hole with an electroconductive material to form a through wiring which is electrically connected with the electroconductive substrate; and using the electroconductive substrate as a first electrode, forming a plurality of vibrating membrane portions including a second electrode, which opposes to the first electrode through a plurality of gaps, on an opposite side of the first electrode to the side having the insulative portion, to thereby forming a plurality of cells.
    • 本发明提供了一种用于减小每个具有通过布线的机电换能器之间的性能分散的技术。 制造机电换能器的方法包括:获得其中具有通孔的绝缘部分结合到导电基底上的结构; 用导电材料填充通孔以形成与导电基板电连接的贯通布线; 并且使用所述导电性基板作为第一电极,在所述第一电极的与所述绝缘部的一侧相反的一侧形成多个振动膜部,所述多个振动膜部包括与所述第一电极相对的多个间隙的第二电极, 从而形成多个单元。