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    • 31. 发明授权
    • Supporting plate, apparatus and method for stripping supporting plate
    • 支撑板支撑板,剥离支撑板的装置和方法
    • US08080123B2
    • 2011-12-20
    • US13036761
    • 2011-02-28
    • Akihiko NakamuraAtsushi MiyanariYoshihiro Inao
    • Akihiko NakamuraAtsushi MiyanariYoshihiro Inao
    • B29C65/48B32B37/00B32B38/10B32B39/00B32B43/00
    • B29C63/0013B29L2031/3425Y10T156/1111Y10T156/1132Y10T156/1928
    • A method for stripping a supporting plate from a circuit-formed surface of a substrate to which it is bonded with an adhesive by using a plate which has a first penetrating hole formed in a substantially central portion thereof in the thickness direction, a second penetrating hole formed in a peripheral portion thereof in the thickness direction, and a hole for attracting the supporting plate formed between the first penetrating hole and the second penetrating hole in the radial direction of the plate. The method involves supplying a solvent from outside to the first penetrating hole of the plate and to an associated first penetrating hole formed in a substantially central portion of the supporting plate; distributing the solvent from the first penetrating hole of the supporting plate through grooves formed on a surface of the supporting plate in contact with the adhesive and connecting with the first penetrating hole of the supporting plate; dissolving the adhesive with the solvent; and draining the solvent from a second penetrating hole connecting with the grooves and formed in a peripheral portion of the supporting plate and the second penetrating hole formed in the plate.
    • 一种从其厚度方向的大致中央部形成有第一贯通孔的板剥离由基板的电路形成面与粘接剂抵接的支撑板的方法,第二贯通孔 在其厚度方向的周边部分形成有用于吸引形成在板的径向方向上的第一贯通孔和第二贯通孔之间的支撑板的孔。 该方法包括从外部向板的第一穿透孔和形成在支撑板的大致中心部分中的相关联的第一穿透孔提供溶剂; 从支撑板的第一贯通孔通过形成在支撑板的表面上的与粘合剂接触并与支撑板的第一穿透孔连接的槽分配溶剂; 用溶剂溶解粘合剂; 并且从与所述槽连接的第二贯通孔排出溶剂,并形成在所述支撑板的周边部分和形成在所述板中的所述第二贯通孔。
    • 32. 发明申请
    • Coating apparatus, coating method and coating-film forming appratus
    • 涂布设备,涂布方法和涂膜成膜设备
    • US20100009084A1
    • 2010-01-14
    • US12584103
    • 2009-08-31
    • Seiji OhishiAkihiko Nakamura
    • Seiji OhishiAkihiko Nakamura
    • B05D1/40B05C11/02
    • H01L21/6715B05D1/002B05D1/42Y10S134/902
    • A coating apparatus comprises a tray, a nozzle for supplying a coating liquid, and a squeegee which serves as an applicator for spreading a coating liquid. The tray has a recessed portion into which a substrate is placed, and a spinner chuck is provided in the recessed portion. In the spinner chuck, a chuck for attracting the substrate is attached to the upper end of a spinner shaft which can be lifted and lowered, and the upper surface of the chuck and the bottom surface of the recessed portion are arranged to be in the same plane in a state where the spinner shaft is lowered to the lowest position. The nozzle is positioned above a non-recessed portion of the tray and supplies a coating liquid only onto a non-recessed portion of the upper surface of the tray to form a coating liquid pool, and the applicator is relatively movable in a horizontal direction in a state of maintaining a certain distance with respect to the upper surface of the substrate accommodated into the recessed portion and spreads the coating liquid of the coating liquid pool from the non-recessed portion of the upper surface of the tray over the entire upper surface of the substrate.
    • 涂布装置包括托盘,用于供给涂布液的喷嘴和用作涂布液的涂布器的刮板。 托盘具有凹部,基底被放置在该凹部中,并且在凹部中设置旋转卡盘。 在旋转卡盘中,用于吸引基板的卡盘安装在可以升降的旋转轴的上端,并且卡盘的上表面和凹部的底面布置成相同 在旋转轴下降到最低位置的状态下。 喷嘴位于托盘的非凹陷部分的上方,并将涂布液仅提供到托盘上表面的非凹槽部分上以形成涂液池,并且涂布器可在水平方向上相对移动 相对于容纳在凹部中的基板的上表面保持一定距离的状态,并且将涂布液的涂布液从托盘的上表面的非凹部扩展到整个上表面的整个上表面 底物。
    • 33. 发明授权
    • Coating apparatus, coating method and coating-film forming apparatus
    • 涂布装置,涂布方法和涂膜成膜装置
    • US07611581B2
    • 2009-11-03
    • US11288991
    • 2005-11-29
    • Seiji OhishiAkihiko Nakamura
    • Seiji OhishiAkihiko Nakamura
    • B05C5/02
    • H01L21/6715B05D1/002B05D1/42Y10S134/902
    • A coating apparatus is provided in which a coating liquid supplied onto a surface of a substrate such as a semiconductor wafer and a glass substrate can be easily leveled so as to have a uniform thickness without any edge bead. The coating apparatus comprises a tray, a nozzle for supplying a coating liquid, and a squeegee which serves as an applicator for spreading a coating liquid. The tray has a recessed portion into which a substrate is placed, and a spinner chuck is provided in the recessed portion. In the spinner chuck, a chuck for attracting the substrate is attached to the upper end of a spinner shaft which can be lifted and lowered, and the upper surface of the chuck and the bottom surface of the recessed portion are arranged to be in the same plane in a state where the spinner shaft is lowered to the lowest position.
    • 提供一种涂布装置,其中供应到诸如半导体晶片和玻璃基板的基板的表面上的涂布液可以容易地平整,以便具有均匀的厚度而没有任何边缘珠。 涂布装置包括托盘,用于供给涂布液的喷嘴和用作涂布液的涂布器的刮板。 托盘具有凹部,基底被放置在该凹部中,并且在凹部中设置旋转卡盘。 在旋转卡盘中,用于吸引基板的卡盘安装在可以升降的旋转轴的上端,并且卡盘的上表面和凹部的底面布置成相同 在旋转轴下降到最低位置的状态下。
    • 34. 发明申请
    • SEPARATING DEVICE
    • 分离装置
    • US20090139662A1
    • 2009-06-04
    • US12326340
    • 2008-12-02
    • Akihiko NakamuraJunichi KatsuragawaAtsushi MiyanariYoshihiro InaoYasumasa Iwata
    • Akihiko NakamuraJunichi KatsuragawaAtsushi MiyanariYoshihiro InaoYasumasa Iwata
    • B29C63/00
    • B32B43/006B32B37/12B32B2038/1891B32B2457/14H01L21/67173H01L21/67346Y10S156/93Y10S156/941Y10T156/11Y10T156/1111Y10T156/19Y10T156/195Y10T156/1978Y10T279/11
    • A separating device according to the present invention separates a support plate (14) from a substrate (12) of a laminate (10) including the substrate (12) and the support plate (14) bonded to each other. The separating device includes: a first storing section (20) for storing the laminate (10); a plurality of first processing sections (30) for reducing adhesive force of an adhesive (13) applied between the substrate (12) and the support plate (14); and a first carrying section (50) which is capable of moving in the first direction and carries the laminate (10) from the first storing section (20) to the first processing section (30) while holding the laminate (10). With the first carrying section (50), it is possible to provide a separating device (100) which moves straightly so as to carry the laminate (10). This provides a separating device for (i) processing a laminate including a substrate and a support plate and (ii) separating the support plate from the substrate, which separating device performs the separating process efficiently.
    • 根据本发明的分离装置将支撑板(14)与包括彼此结合的基板(12)和支撑板(14)的层叠体(10)的基板(12)分离。 分离装置包括:用于储存层压板(10)的第一储存部分(20)。 多个第一处理部(30),用于降低施加在所述基板(12)和所述支撑板(14)之间的粘合剂(13)的粘合力; 以及第一承载部(50),其能够在保持层叠体(10)的同时沿第一方向移动并将层压体(10)从第一收纳部(20)运送到第一处理部(30)。 利用第一承载部分(50),可以提供一个分离装置(100),该分离装置(100)直线移动以便承载层压板(10)。 这提供了一种分离装置,用于(i)处理包括基板和支撑板的层压板,以及(ii)将支撑板与基板分离,该分离装置有效地执行分离过程。
    • 37. 发明申请
    • Electromagnetic relay
    • 电磁继电器
    • US20060181380A1
    • 2006-08-17
    • US11341589
    • 2006-01-30
    • Akihiko NakamuraShigemitsu AokiHirofumi Saso
    • Akihiko NakamuraShigemitsu AokiHirofumi Saso
    • H01H67/02
    • H01H50/043H01H9/40H01H50/26H01H50/60H01H50/646
    • An electromagnetic relay including a base, an electromagnet fitted to the base, and a contact section operable to open or close with an operation of the electromagnet. The base includes a retaining face firstly contacting with the yoke of the electromagnet, in an action of fitting the electromagnet to the base, and retaining the electromagnet at a predetermined height on the base as seen in a direction of the coil center axis of the electromagnet. The base also includes a guide face slidably engaged with the yoke, by shifting the yoke along the retaining face, and guiding the electromagnet in a fitting direction intersecting with the coil center axis. The retaining face and the guide face cooperate with each other to fixedly support the electromagnet at a predetermined fitting position on the base.
    • 一种电磁继电器,其包括基座,安装到基座的电磁体以及可操作以通过电磁体的操作来打开或闭合的接触部分。 底座包括一个保持面,首先与电磁铁的磁轭接触,在将电磁铁安装到基座上的作用下,将电磁铁保持在基座上的预定高度,如电磁铁的线圈中心轴线方向 。 基座还包括通过沿着保持面移动磁轭而与轭架可滑动地接合的引导面,并且沿与线圈中心轴线相交的装配方向引导电磁铁。 保持面和引导面彼此配合,以将电磁体固定在基座上的预定的配合位置。
    • 38. 发明授权
    • Electromagnetic relay
    • 电磁继电器
    • US06677840B2
    • 2004-01-13
    • US09903614
    • 2001-07-13
    • Akihiko NakamuraShigemitsu AokiYoshio OkamotoTomohisa Endoh
    • Akihiko NakamuraShigemitsu AokiYoshio OkamotoTomohisa Endoh
    • H01H6702
    • H01H50/54H01H9/40H01H50/021H01H50/44H01H50/443H01H50/546H01H50/60
    • An electromagnetic relay of a simple structure for reliably making and breaking a high load voltage. First and second fixed contact terminals are mounted on an insulating base block. First and second branched moving pieces are attached to the lower side of a hanging portion of a spring member. When a relay coil is not excited, the first and second moving pieces are resiliently urged into contact with a back-stop plate, displaced from the first and second fixed contact elements. When the relay coil is excited, contact elements attached to the first and second moving pieces are resiliently urged into contact with respective contact elements attached to the first and second fixed contact elements, electrically connecting the respective first and second fixed contact terminals.
    • 一种简单结构的电磁继电器,用于可靠地制造和断开高负载电压。 第一和第二固定接触端子安装在绝缘基座上。 第一和第二分支移动件附接到弹簧构件的悬挂部分的下侧。 当继电器线圈不被激励时,第一和第二移动件被弹性地推压与从第一和第二固定接触元件移位的后挡板接触。 当继电器线圈被激励时,附接到第一和第二移动片的接触元件被弹性地推动与附接到第一和第二固定接触元件的相应接触元件接触,电连接相应的第一和第二固定接触端子。
    • 39. 发明授权
    • Heat treatment apparatus and method
    • 热处理装置及方法
    • US06609909B2
    • 2003-08-26
    • US09981633
    • 2001-10-17
    • Taiichiro AokiAkihiko NakamuraAkinori Nishie
    • Taiichiro AokiAkihiko NakamuraAkinori Nishie
    • F27D500
    • H01L21/67109Y10S414/136
    • A heat treatment apparatus comprises: a chamber; a cooling plate and a heating plate disposed within the chamber vertically spaced from each other; plural lift pins used to support a material to be treated; a supporting member for supporting the plural lift pins; and an elevator member to which the supporting member is attached through a joint so that the supporting member can be selectively made rotatable and can be fixed at any inclined angle, wherein distances of tips of each of the lift pins from the heating or cooling plate are initially adjusted to be uniform through inclination of the supporting member while the tips contact the heating or cooling plate, after which the supporting member is fixed in an adjusted inclined angle and then the material to be treated is lifted up with the plural lift pins to closely approach the heating or cooling plate during heat treatment.
    • 一种热处理设备包括:一个室; 设置在所述室内的冷却板和加热板,其彼此垂直间隔开; 用于支撑要处理的材料的多个提升销; 用于支撑多个提升销的支撑构件; 以及电梯构件,支撑构件通过接头附接到所述电梯构件,使得所述支撑构件能够选择性地制造为可旋转的并且可以以任何倾斜角度被固定,其中每个提升销的顶部距加热或冷却板的距离为 最初通过支撑构件的倾斜调节为均匀,同时尖端接触加热或冷却板,之后将支撑构件以调整的倾斜角度固定,然后将多个提升销钉紧紧地提升待处理材料 在热处理过程中接近加热或冷却板。