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31. 发明授权

US07935597B2 Semiconductor device and manufacturing method of the same 有权
标题翻译：半导体器件及其制造方法相同
公开(公告)号：US07935597B2
公开(公告)日：2011-05-03
申请号：US12912609
申请日：2010-10-26
申请人： Yasuhiro Shimamoto , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
发明人： Yasuhiro Shimamoto , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
IPC分类号： H01L21/336
CPC分类号： H01L29/792 , G11C16/0425 , H01L21/28282 , H01L21/31155 , H01L27/105 , H01L27/11521 , H01L27/11526 , H01L27/11546 , H01L27/11568 , H01L29/42344 , H01L29/66833
摘要： Performance and reliability of a semiconductor device including a non-volatile memory are improved. A memory cell of the non-volatile memory includes, over an upper portion of a semiconductor substrate, a select gate electrode formed via a first dielectric film and a memory gate electrode formed via a second dielectric film formed of an ONO multilayered film having a charge storing function. The first dielectric film functions as a gate dielectric film, and includes a third dielectric film made of silicon oxide or silicon oxynitride and a metal-element-containing layer made of a metal oxide or a metal silicate formed between the select gate electrode and the third dielectric film. A semiconductor region positioned under the memory gate electrode and the second dielectric film has a charge density of impurities lower than that of a semiconductor region positioned under the select gate electrode and the first dielectric film.
摘要翻译：提高了包括非易失性存储器的半导体器件的性能和可靠性。非易失性存储器的存储单元包括在半导体衬底的上部上的经由第一电介质膜形成的选择栅电极和通过由具有电荷的ONO多层膜形成的第二电介质膜形成的存储栅电极存储功能。第一电介质膜用作栅极电介质膜，并且包括由氧化硅或氮氧化硅制成的第三电介质膜和由选择栅电极和第三电极之间形成的金属氧化物或金属硅酸盐构成的含金属元素层电介质膜。位于存储栅电极下方的半导体区域和第二电介质膜的电荷密度低于位于选择栅电极和第一电介质膜下方的半导体区域的电荷密度。

32. 发明申请

US20110039385A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20110039385A1
公开(公告)日：2011-02-17
申请号：US12912609
申请日：2010-10-26
申请人： Yasuhiro Shimamoto , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
发明人： Yasuhiro Shimamoto , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
IPC分类号： H01L21/336
CPC分类号： H01L29/792 , G11C16/0425 , H01L21/28282 , H01L21/31155 , H01L27/105 , H01L27/11521 , H01L27/11526 , H01L27/11546 , H01L27/11568 , H01L29/42344 , H01L29/66833
摘要： Performance and reliability of a semiconductor device including a non-volatile memory are improved. A memory cell of the non-volatile memory includes, over an upper portion of a semiconductor substrate, a select gate electrode formed via a first dielectric film and a memory gate electrode formed via a second dielectric film formed of an ONO multilayered film having a charge storing function. The first dielectric film functions as a gate dielectric film, and includes a third dielectric film made of silicon oxide or silicon oxynitride and a metal-element-containing layer made of a metal oxide or a metal silicate formed between the select gate electrode and the third dielectric film. A semiconductor region positioned under the memory gate electrode and the second dielectric film has a charge density of impurities lower than that of a semiconductor region positioned under the select gate electrode and the first dielectric film.
摘要翻译：提高了包括非易失性存储器的半导体器件的性能和可靠性。非易失性存储器的存储单元包括在半导体衬底的上部上的经由第一电介质膜形成的选择栅电极和通过由具有电荷的ONO多层膜形成的第二电介质膜形成的存储栅电极存储功能。第一介质膜用作栅极电介质膜，并且包括由氧化硅或氮氧化硅制成的第三电介质膜和由选择栅电极和第三电极之间形成的金属氧化物或金属硅酸盐构成的含金属元素层电介质膜。位于存储栅电极下方的半导体区域和第二电介质膜的电荷密度低于位于选择栅电极和第一电介质膜下方的半导体区域的电荷密度。

33. 发明授权

US07872298B2 Split-gate type memory device 有权
标题翻译：分闸式存储装置
公开(公告)号：US07872298B2
公开(公告)日：2011-01-18
申请号：US11777812
申请日：2007-07-13
申请人： Yasuhiro Shimamoto , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
发明人： Yasuhiro Shimamoto , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
IPC分类号： H01L29/788
CPC分类号： H01L29/792 , G11C16/0425 , H01L21/28282 , H01L21/31155 , H01L27/105 , H01L27/11521 , H01L27/11526 , H01L27/11546 , H01L27/11568 , H01L29/42344 , H01L29/66833
摘要： Performance and reliability of a semiconductor device including a non-volatile memory are improved. A memory cell of the non-volatile memory includes, over an upper portion of a semiconductor substrate, a select gate electrode formed via a first dielectric film and a memory gate electrode formed via a second dielectric film formed of an ONO multilayered film having a charge storing function. The first dielectric film functions as a gate dielectric film, and includes a third dielectric film made of silicon oxide or silicon oxynitride and a metal-element-containing layer made of a metal oxide or a metal silicate formed between the select gate electrode and the third dielectric film. A semiconductor region positioned under the memory gate electrode and the second dielectric film has a charge density of impurities lower than that of a semiconductor region positioned under the select gate electrode and the first dielectric film.
摘要翻译：提高了包括非易失性存储器的半导体器件的性能和可靠性。非易失性存储器的存储单元包括在半导体衬底的上部上的经由第一电介质膜形成的选择栅电极和通过由具有电荷的ONO多层膜形成的第二电介质膜形成的存储栅电极存储功能。第一介质膜用作栅极电介质膜，并且包括由氧化硅或氮氧化硅制成的第三电介质膜和由选择栅电极和第三电极之间形成的金属氧化物或金属硅酸盐构成的含金属元素层电介质膜。位于存储栅电极下方的半导体区域和第二电介质膜的电荷密度低于位于选择栅电极和第一电介质膜下方的半导体区域的电荷密度。

34. 发明申请

US20080029805A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20080029805A1
公开(公告)日：2008-02-07
申请号：US11777812
申请日：2007-07-13
申请人： Yasuhiro SHIMAMOTO , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
发明人： Yasuhiro SHIMAMOTO , Digh Hisamoto , Tetsuya Ishimaru , Shinichiro Kimura
IPC分类号： H01L29/788 , H01L21/336
CPC分类号： H01L29/792 , G11C16/0425 , H01L21/28282 , H01L21/31155 , H01L27/105 , H01L27/11521 , H01L27/11526 , H01L27/11546 , H01L27/11568 , H01L29/42344 , H01L29/66833
摘要： Performance and reliability of a semiconductor device including a non-volatile memory are improved. A memory cell of the non-volatile memory includes, over an upper portion of a semiconductor substrate, a select gate electrode formed via a first dielectric film and a memory gate electrode formed via a second dielectric film formed of an ONO multilayered film having a charge storing function. The first dielectric film functions as a gate dielectric film, and includes a third dielectric film made of silicon oxide or silicon oxynitride and a metal-element-containing layer made of a metal oxide or a metal silicate formed between the select gate electrode and the third dielectric film. A semiconductor region positioned under the memory gate electrode and the second dielectric film has a charge density of impurities lower than that of a semiconductor region positioned under the select gate electrode and the first dielectric film.
摘要翻译：提高了包括非易失性存储器的半导体器件的性能和可靠性。非易失性存储器的存储单元包括在半导体衬底的上部上的经由第一电介质膜形成的选择栅电极和通过由具有电荷的ONO多层膜形成的第二电介质膜形成的存储栅电极存储功能。第一介质膜用作栅极电介质膜，并且包括由氧化硅或氮氧化硅制成的第三电介质膜和由选择栅电极和第三电极之间形成的金属氧化物或金属硅酸盐构成的含金属元素层电介质膜。位于存储栅电极下方的半导体区域和第二电介质膜的电荷密度低于位于选择栅电极和第一电介质膜下方的半导体区域的电荷密度。

35. 发明授权

US08030668B2 Semiconductor LED, opto-electronic integrated circuits (OEIC), and method of fabricating OEIC 有权
标题翻译：半导体LED，光电集成电路（OEIC）以及制造OEIC的方法
公开(公告)号：US08030668B2
公开(公告)日：2011-10-04
申请号：US11935904
申请日：2007-11-06
申请人： Digh Hisamoto , Shinichi Saito , Shinichiro Kimura
发明人： Digh Hisamoto , Shinichi Saito , Shinichiro Kimura
IPC分类号： H01L27/15
CPC分类号： H01L27/15 , G02B6/13 , G02B6/43 , H01L33/02 , H01L33/34
摘要： A light emitting diode demonstrating high luminescence efficiency and comprising a Group IV semiconductor such as silicon or germanium equivalent thereto as a basic component formed on a silicon substrate by a prior art silicon process, and a fabricating method of waveguide thereof are provided. The light emitting diode of the invention comprises a first electrode for implanting electrons, a second electrode for implanting holes, and a light emitting section electrically connected to the first and the second electrode, wherein the light emitting section is made out of single crystalline silicon and has a first surface and a second surface facing the first surface, wherein with respect to plane orientation (100) of the first and second surfaces, the light emitting section crossing at right angles to the first and second surfaces is made thinner, and wherein a material having a high refractive index is arranged around the thin film section.
摘要翻译：提供了高发光效率的发光二极管，并且包括通过现有技术的硅工艺在硅衬底上形成的等价于其的硅或锗等IV族半导体作为基底部件，以及其波导管的制造方法。本发明的发光二极管包括用于注入电子的第一电极，用于注入孔的第二电极和与第一和第二电极电连接的发光部分，其中发光部分由单晶硅制成，具有面向第一表面的第一表面和第二表面，其中相对于第一表面和第二表面的平面取向（100），使与第一表面和第二表面成直角交叉的发光部分变薄，并且其中具有高折射率的材料设置在薄膜部分周围。

36. 发明申请

US20080197362A1 SEMICONDUCTOR LED, OPTO-ELECTRONIC INTEGRATED CIRCUITS (OEIC), AND METHOD OF FABRICATING OEIC 有权
标题翻译：半导体LED，光电集成电路（OEIC）和制造OEIC的方法
公开(公告)号：US20080197362A1
公开(公告)日：2008-08-21
申请号：US11935904
申请日：2007-11-06
申请人： Digh HISAMOTO , Shinichi Saito , Shinichiro Kimura
发明人： Digh HISAMOTO , Shinichi Saito , Shinichiro Kimura
IPC分类号： H01L33/00
CPC分类号： H01L27/15 , G02B6/13 , G02B6/43 , H01L33/02 , H01L33/34
摘要： A light emitting diode demonstrating high luminescence efficiency and comprising a Group IV semiconductor such as silicon or germanium equivalent thereto as a basic component formed on a silicon substrate by a prior art silicon process, and a fabricating method of waveguide thereof are provided. The light emitting diode of the invention comprises a first electrode for implanting electrons, a second electrode for implanting holes, and a light emitting section electrically connected to the first and the second electrode, wherein the light emitting section is made out of single crystalline silicon and has a first surface and a second surface facing the first surface, wherein with respect to plane orientation (100) of the first and second surfaces, the light emitting section crossing at right angles to the first and second surfaces is made thinner, and wherein a material having a high refractive index is arranged around the thin film section.
摘要翻译：提供了高发光效率的发光二极管，并且包括通过现有技术的硅工艺在硅衬底上形成的等价于其的硅或锗等IV族半导体作为基底部件，以及其波导管的制造方法。本发明的发光二极管包括用于注入电子的第一电极，用于注入孔的第二电极和与第一和第二电极电连接的发光部分，其中发光部分由单晶硅制成，具有面对第一表面的第一表面和第二表面，其中相对于第一表面和第二表面的平面取向（100），使与第一表面和第二表面成直角交叉的发光部分变薄，并且其中具有高折射率的材料设置在薄膜部分周围。

37. 发明授权

US5270232A Process for fabricating field effect transistor 失效
标题翻译：制造场效应晶体管的工艺
公开(公告)号：US5270232A
公开(公告)日：1993-12-14
申请号：US943018
申请日：1992-09-10
申请人： Shinichiro Kimura , Shoji Shukuri , Hiromasa Noda , Digh Hisamoto , Hideyuki Matsuoka , Kazuyoshi Torii , Natsuki Yokoyama , Toshiyuki Yoshimura , Kazunori Tsujimoto , Eiji Takeda
发明人： Shinichiro Kimura , Shoji Shukuri , Hiromasa Noda , Digh Hisamoto , Hideyuki Matsuoka , Kazuyoshi Torii , Natsuki Yokoyama , Toshiyuki Yoshimura , Kazunori Tsujimoto , Eiji Takeda
IPC分类号： H01L29/78 , H01L21/285 , H01L21/336 , H01L21/70
CPC分类号： H01L29/66606 , H01L21/28525 , H01L29/66621 , Y10S438/947
摘要： A very thin oxide film is formed at an opening formed in an insulator film and a conductor layer, on a substrate, and impurity-containing polysilicon is formed on the sidewall of the opening. Impurity diffusion from the from the silicon into the substrate through the very thin oxide film causes a lowering in effective concentration of the diffused impurities, resulting in the formation of shallower source/drain region. Thereafter, a gate insulator film and a gate electrode are formed on the substrate surface in an area bounded by an insulator film formed on the sidewall of the opening. The gate electrode smaller than the opening, the size of which corresponds to the limit of processing, and the shallower source/drain region afford a miniaturized MOSFET.
摘要翻译：在基板上形成绝缘体膜和导体层的开口处形成非常薄的氧化膜，并且在开口的侧壁上形成含杂质的多晶硅。通过非常薄的氧化膜从硅到衬底的杂质扩散导致扩散杂质的有效浓度降低，导致形成较浅的源/漏区。此后，在由形成在开口的侧壁上的绝缘膜限定的区域中的基板表面上形成栅绝缘膜和栅电极。小于开口的栅极电极，其尺寸对应于处理极限，并且较浅的源极/漏极区域提供小型化的MOSFET。

38. 发明申请

US20090231921A1 MANUFACTURING METHOD OF NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND NONVOLATILE SEMICONDUCTOR STORAGE DEVICE 审中-公开
标题翻译：非易失性半导体存储器件和非易失性半导体存储器件的制造方法
公开(公告)号：US20090231921A1
公开(公告)日：2009-09-17
申请号：US12389361
申请日：2009-02-19
申请人： Shinichiro Kimura , Yasuhiro Shimamoto , Digh Hisamoto
发明人： Shinichiro Kimura , Yasuhiro Shimamoto , Digh Hisamoto
IPC分类号： G11C16/06 , H01L21/336 , H01L29/792 , G11C5/14
CPC分类号： H01L27/11568 , H01L29/42328 , H01L29/792
摘要： In a nonvolatile semiconductor storage device having a split-gate memory cell including a control gate electrode and a sidewall memory gate electrode and a single-gate memory cell including a single memory gate electrode on the same silicon substrate, the control gate electrode is formed in a first region via a control gate insulating film, the sidewall memory gate electrode is formed in the first region via a charge trapping film, and at the same time, a single memory gate electrode is formed in a second region via the charge trapping film. At this time, the sidewall memory gate electrode and the single memory gate electrode are formed in the same process, and the control gate electrode and the sidewall memory gate electrode are formed so as to be adjacently disposed to each other in a state of being electrically isolated from each other.
摘要翻译：在具有包括控制栅电极和侧壁存储栅电极的分闸存储单元的非易失性半导体存储器件和在同一硅衬底上包括单个存储栅电极的单栅极存储单元中，形成控制栅电极经由控制栅极绝缘膜的第一区域，所述侧壁存储栅电极经由电荷捕获膜形成在所述第一区域中，并且同时经由电荷捕获膜在第二区域中形成单个存储器栅电极。此时，侧壁存储器栅极电极和单个存储器栅极电极以相同的工艺形成，并且控制栅极电极和侧壁存储栅电极形成为在电气的状态下彼此相邻地设置彼此隔离

39. 发明授权

US5357464A Semiconductor memory having writing and reading transistors, method of fabrication thereof, and method of use thereof 失效
标题翻译：具有写入和读取晶体管的半导体存储器，其制造方法及其使用方法
公开(公告)号：US5357464A
公开(公告)日：1994-10-18
申请号：US22937
申请日：1993-02-26
申请人： Shuji Shukuri , Toru Koga , Shinichiro Kimura , Digh Hisamoto , Kazuhiko Sagara , Tokuo Kure , Eiji Takeda
发明人： Shuji Shukuri , Toru Koga , Shinichiro Kimura , Digh Hisamoto , Kazuhiko Sagara , Tokuo Kure , Eiji Takeda
IPC分类号： H01L27/10 , G11C11/401 , G11C11/402 , H01L21/8242 , H01L27/108 , G11C11/40
CPC分类号： G11C11/401 , H01L27/108
摘要： Disclosed is a semiconductor memory having a self-amplifying cell structure, using (1) a writing transistor and (2) a reading transistor with a floating gate as a charge storage node for each memory cell, and a method of fabricating the memory cell. The writing transistor and reading transistor are of opposite conductivity type to each other; for example, the writing transistor uses a P-channel MOS transistor and the reading transistor (having the floating gate) uses an N-channel MOS transistor. The floating gate of the reading transistor is connected to a single bit line through a source-drain path of the writing transistor, the source-drain path of the reading transistor is connected between the single bit line and a predetermined potential, and the gate electrodes of the writing and reading transistors are connected to a single word line. At least the reading transistor can be formed in a trench, and the word line can be formed overlying the writing transistor and the reading transistor in the trench. Also disclosed is a method of operating the memory cell, wherein the voltage applied to the word line, in a standby condition, is intermediate to the voltage applied to the word line during the writing operation and during the reading operation.
摘要翻译：公开了具有自放大单元结构的半导体存储器，其使用（1）写入晶体管和（2）具有浮置栅极的读取晶体管作为每个存储单元的电荷存储节点，以及制造该存储单元的方法。写入晶体管和读取晶体管彼此具有相反的导电类型; 例如，写入晶体管使用P沟道MOS晶体管，并且读取晶体管（具有浮置栅极）使用N沟道MOS晶体管。读取晶体管的浮置栅极通过写入晶体管的源极 - 漏极连接到单个位线，读取晶体管的源极 - 漏极连接在单个位线和预定电位之间，并且栅电极的写和读晶体管连接到单个字线。至少读取晶体管可以形成在沟槽中，并且字线可以形成在沟槽中的写入晶体管和读取晶体管的上方。还公开了一种操作存储单元的方法，其中在备用状态下施加到字线的电压在写入操作期间和在读取操作期间施加到字线的电压的中间。

40. 发明授权

US5200635A Semiconductor device having a low-resistivity planar wiring structure 失效
标题翻译：具有低电阻率平面布线结构的半导体器件
公开(公告)号：US5200635A
公开(公告)日：1993-04-06
申请号：US686757
申请日：1991-04-17
申请人： Toru Kaga , Shinichiro Kimura , Katsutaka Kimura , Yoshinobu Nakagome , Digh Hisamoto , Yoshifumi Kawamoto , Eiji Takeda , Shimpei Iijima , Tokuo Kure , Takashi Nishida
发明人： Toru Kaga , Shinichiro Kimura , Katsutaka Kimura , Yoshinobu Nakagome , Digh Hisamoto , Yoshifumi Kawamoto , Eiji Takeda , Shimpei Iijima , Tokuo Kure , Takashi Nishida
IPC分类号： H01L27/108 , H01L29/417 , H01L29/45
CPC分类号： H01L29/41775 , H01L27/10817 , H01L29/456 , H01L2924/0002
摘要： The present invention concerns a semiconductor device having a low-resistivity wiring structure. Wirings formed directly on a hill and valley structure result in a thin portion and, in an extreme case, a disconnected portion. This increases the resistivity of wirings on the hill and valley structure and lowers the reliability of the connection. In a case where the wirings are data lines of a memory, with an increased effective length, the resistance and the parasitic capacitance of the data line is greater. The above mentioned problems have been solved by wirings which comprise at least two layers of conductive film including a first conductive film as a lower layer and a second conductive film as an upper layer, and the first conductive layer has a surface moderating or planarizing the hills and valleys in the underlying material.
摘要翻译：本发明涉及具有低电阻率布线结构的半导体器件。直接形成在山谷和山谷结构上的布线导致薄的部分，并且在极端情况下是断开的部分。这增加了山丘和山谷结构上的布线电阻率，降低了连接的可靠性。在布线是存储器的数据线的情况下，随着有效长度的增加，数据线的电阻和寄生电容更大。上述问题已经通过包括至少两层导电膜的布线来解决，所述导电膜包括作为下层的第一导电膜和作为上层的第二导电膜，并且第一导电层具有调节或平坦化山丘的表面和底层材料中的山谷。

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