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31. 发明申请

US20050191828A1 Method for ion implanting insulator material to reduce dielectric constant 有权
标题翻译：用于离子注入绝缘材料以降低介电常数的方法
公开(公告)号：US20050191828A1
公开(公告)日：2005-09-01
申请号：US11003000
申请日：2004-12-01
申请人： Amir Al-Bayati , Rick Roberts , Kenneth Collins , Ken MacWilliams , Hiroji Hanawa , Kartik Ramaswamy , Biagio Gallo , Andrew Nguyen
发明人： Amir Al-Bayati , Rick Roberts , Kenneth Collins , Ken MacWilliams , Hiroji Hanawa , Kartik Ramaswamy , Biagio Gallo , Andrew Nguyen
IPC分类号： H01J37/32 , H01L21/4763
CPC分类号： H01J37/32082 , H01J37/321 , H01L21/76254
摘要： An integrated microelectronic circuit has a multi-layer interconnect structure overlying the transistors consisting of stacked metal pattern layers and insulating layers separating adjacent ones of said metal pattern layers. Each of the insulating layers is a dielectric material with plural gas bubbles distributed within the volume of the dielectric material to reduce the dielectric constant of the material, the gas bubbles being formed by ion implantation of a gaseous species into the dielectric material.
摘要翻译：集成的微电子电路具有覆盖由堆叠的金属图案层和分离相邻的所述金属图案层的绝缘层的晶体管的多层互连结构。每个绝缘层是具有分布在电介质材料的体积内的多个气泡的介电材料，以降低材料的介电常数，气泡通过将气态物质离子注入电介质材料而形成。

32. 发明授权

US06917755B2 Substrate support 有权
标题翻译：基材支持
公开(公告)号：US06917755B2
公开(公告)日：2005-07-12
申请号：US10376857
申请日：2003-02-27
申请人： Andrew Nguyen , Gerhard Schneider , Akihiro Hosokawa , Takayuki Matsumoto
发明人： Andrew Nguyen , Gerhard Schneider , Akihiro Hosokawa , Takayuki Matsumoto
IPC分类号： H01L21/683 , C23C16/458 , C23C16/48 , G02F1/13 , H01L21/673 , H01L21/687 , F26B3/30
CPC分类号： H01L21/6875 , C23C16/4581 , C23C16/4583 , C23C16/481 , H01L21/6734
摘要： An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus for supporting a substrate includes ball disposed on an inclined ball support surface. The ball support surface is adapted to bias the ball toward one side of the ball support surface thereby providing space for the ball to roll as the substrate supported thereon changes in length when exposed to thermal influences. In another embodiment, the apparatus further comprises a cage adapted to capture the ball to the ball support surface.
摘要翻译：描述了一种用于支撑基板的装置，其具有适于最小化基板支撑件和支撑在其上的基板之间的损伤的球。在一个实施例中，用于支撑衬底的装置包括设置在倾斜的球支撑表面上的球。球支撑表面适于将球朝向球支撑表面的一侧偏置，从而当被支撑在其上的基板在暴露于热影响时在长度上变化时为球提供空间。在另一个实施例中，该装置还包括适于将球捕获到球支撑表面的笼。

33. 发明申请

US20050133075A1 Non-dripping nozzle apparatus 有权
标题翻译：无滴水喷嘴装置
公开(公告)号：US20050133075A1
公开(公告)日：2005-06-23
申请号：US10743928
申请日：2003-12-22
申请人： Andrew Nguyen
发明人： Andrew Nguyen
IPC分类号： H01L21/00 , B08B3/00
CPC分类号： H01L21/6715
摘要： According to one aspect of the invention, a dispense head for a wafer processing apparatus is provided. The dispense head may include an inlet, at least one outlet, a drain, and a passageway therethrough interconnecting the inlet, the outlet, and the drain. The inlet may be a first height above a bottom of the passageway, the outlet may be a second height above the bottom, and the drain may be a third height above the bottom. A first valve may be connected to the inlet, and a second valve may be connected to the drain. When the first valve is opened and the second valve is closed, fluid flows into the inlet and out of the outlet. When the second valve is opened and the first valve is closed, fluid from the passageway flows out of the drain. A pump may be connected to the drain.
摘要翻译：根据本发明的一个方面，提供了一种用于晶片处理装置的分配头。分配头可以包括入口，至少一个出口，排水口和通过其互连入口，出口和排水口的通道。入口可以是通道底部上方的第一高度，出口可以是底部上方的第二高度，并且排水口可以是底部上方的第三高度。第一阀可以连接到入口，并且第二阀可以连接到排水管。当第一阀打开并且第二阀关闭时，流体流入入口并离开出口。当第二阀打开并且第一阀关闭时，来自通道的流体流出排水管。泵可以连接到排水管。

34. 发明授权

US06308654B1 Inductively coupled parallel-plate plasma reactor with a conical dome 失效
标题翻译：具有锥形圆顶的电感耦合平行板等离子体反应器
公开(公告)号：US06308654B1
公开(公告)日：2001-10-30
申请号：US08734015
申请日：1996-10-18
申请人： Gerhard Schneider , Viktor Shel , Andrew Nguyen , Robert W. Wu , Gerald Z. Yin
发明人： Gerhard Schneider , Viktor Shel , Andrew Nguyen , Robert W. Wu , Gerald Z. Yin
IPC分类号： C23C1600
CPC分类号： H01J37/321
摘要： A plasma reactor appropriate for fabrication, especially etching, of semiconductor integrated circuits and similar processes in which the chamber has a top comprising a truncated conical dome and, preferably, a counter electrode disposed at the top of the conical dome. An RF coil is wrapped around the conical dome to inductively couple RF energy into a plasma within the chamber dome. The dome temperature can be controlled in a number of ways. A heat sink can be attached to the outside rim of the dome. A rigid conical thermal control sheath can be fit to the outside of the dome, and any differential thermal expansion between the two is accommodated by the conical geometry, thus assuring good thermal contact. The rigid thermal control sheath can include resistive heating, fluid cooling, or both. Alternatively, a flexible resistive heater can be wrapped around the dome inside the RF coil. The resistive heater includes a heater wire wound in a serpentine path that has straight portions overlying and perpendicular to the RF coil but has bends located away from the RF coil. The path prevents the heater wire from shorting the azimuthal electric field induced by the RF coil and also acts as a Faraday shield preventing capacitive coupling from the coil into the chamber plasma.
摘要翻译：适用于半导体集成电路的制造，特别是蚀刻的等离子体反应器和类似的工艺，其中腔室具有顶部，该顶部包括截顶圆锥形圆顶，优选地，设置在锥形圆顶顶部的对置电极。 RF线圈围绕圆锥形圆顶包裹以将射频能量感应耦合到腔室内的等离子体中。圆顶温度可以以多种方式进行控制。散热器可以连接到圆顶的外边缘。刚性圆锥形热控制护套可以配合到圆顶的外部，并且两者之间的任何差别的热膨胀由锥形几何形状适应，从而确保良好的热接触。刚性热控鞘可以包括电阻加热，流体冷却或两者。或者，柔性电阻加热器可以缠绕在RF线圈内的圆顶周围。电阻加热器包括缠绕在蛇形路径中的加热线，其具有覆盖并垂直于RF线圈的直线部分，但具有远离RF线圈的弯曲。该路径防止加热线短路由RF线圈引起的方位电场，并且还用作防止从线圈到室等离子体的电容耦合的法拉第屏蔽。

35. 发明授权

US10890497B2 Active pressure sensing toilet gasket and methods of use 有权
公开(公告)号：US10890497B2
公开(公告)日：2021-01-12
申请号：US16045727
申请日：2018-07-25
申请人： David R. Hall , K. Jeffrey Campbell , Andrew Nguyen , Jared Reynolds , Joshua Larsen
发明人： David R. Hall , K. Jeffrey Campbell , Andrew Nguyen , Jared Reynolds , Joshua Larsen
IPC分类号： G01L1/08 , G01L1/18 , E03D11/00 , G01G19/52 , A61B5/11 , G01G19/44
摘要： The pressure pad which pressure-sensing fabric which is within a gasket and which measures the distribution of pressure on the gasket. Thus, the gasket protects the pressure-sensing fabric from damage due to water or mechanical trauma. The pressure pad includes multiple piezoresistive depositions of piezoresistive depositions ink or paste which act as individual pressure-sensing points. Conductive tracks between the piezoresistive depositions transmit the pressure measurements in the form of electrical signals. The pressure-sensing fabric is connected to a controller and transmits pressure measurements to the controller. Algorithms stored on the controller create a map of absolute mechanical loading to each pressure-sensing point of the pressure pad. The gasket may be mounted beneath a toilet or between plumbing joints. The pressure pad may detect weaknesses in the gasket, a toilet user's weight, a weight of excrement added to the toilet, or a toilet user's posture.

36. 发明申请

US20180334669A1 Fault Tolerant Method of Tagging Pharmaceutical and Nutritional Products using Multiple Taggants in Varying Ratios 审中-公开
公开(公告)号：US20180334669A1
公开(公告)日：2018-11-22
申请号：US15597633
申请日：2017-05-17
申请人： David R. Hall , Steven J.M. Butala , Dan Allen , Andrew Nguyen , Conrad Rosenbrock , Ben Swenson , Daniel Hendricks , Joe Fox
发明人： David R. Hall , Steven J.M. Butala , Dan Allen , Andrew Nguyen , Conrad Rosenbrock , Ben Swenson , Daniel Hendricks , Joe Fox
IPC分类号： C12N15/10
CPC分类号： C12N15/1065
摘要： We disclose a method of tagging a variety of pharmaceutical or nutritional products in which well-studied chemicals may be added to the products in unique ratios. The identities of the chemicals and their relative ratios comprise unique taggants. The taggants may identify which of multiple distinct categories the product falls within. The method includes the step of systematically varying the relative concentrations of the chemicals resulting in multiple ratios of the chemicals. The plurality of ratios of a defined set of chemicals may be collected to form a library of taggants associated with specified items or categories. As the number of chemicals added per product increases, the library supports more categories and the system is less likely to produce a false positive. The method may result in a series of taggants for each item which is single fault tolerant or double fault tolerant.

37. 发明申请

US20180306826A1 Method of Detecting Drug Taggants in Biological Samples to Assess Drug Decay 审中-公开
公开(公告)号：US20180306826A1
公开(公告)日：2018-10-25
申请号：US15496407
申请日：2017-04-25
申请人： David R. Hall , Dan Allen , Conrad Rosenbrock , Daniel Hendricks , Andrew Nguyen , Steven J.M. Butala , Travis Niederhauser , Terrece Pearman , Joe Fox
发明人： David R. Hall , Dan Allen , Conrad Rosenbrock , Daniel Hendricks , Andrew Nguyen , Steven J.M. Butala , Travis Niederhauser , Terrece Pearman , Joe Fox
IPC分类号： G01N33/94 , G01N17/00 , G01N33/493 , A61B5/15 , A61B10/00 , A47K17/00
CPC分类号： G01N33/94 , A47K17/00 , A61B5/15 , A61B10/0038 , A61B10/0051 , A61B10/007 , A61B2010/0061 , A61B2010/0077 , A61B2010/0087 , G01N33/15 , G01N33/493 , G01N2458/00
摘要： We disclose a method of using taggants to assess how and to what extent a drug in a drug composition that a user has consumed has decayed in response to storage conditions and time. The taggants may decay in response to environmental conditions which cause different drugs to lose their efficacy. These environmental conditions may include light, temperature, oxidation, moisture, and age. The taggants may be detected in biological samples, including urine and feces. By identifying the taggants, the drug composition and other information relating to the drug may be identified. Additionally, quantification of the different taggants may be used to determine whether the drug in the drug composition has been exposed to environmental conditions which may reduce its efficacy.

38. 发明授权

US09970949B1 Method for identifying and tracking pharmaceutical and nutritional products using nanoparticles of different sizes and shapes 有权
公开(公告)号：US09970949B1
公开(公告)日：2018-05-15
申请号：US15612071
申请日：2017-06-02
申请人： David R. Hall , Joe Fox , Steven J. M. Butala , Dan Allen , Andrew Nguyen , Daniel Hendricks , Terrece Pearman
发明人： David R. Hall , Joe Fox , Steven J. M. Butala , Dan Allen , Andrew Nguyen , Daniel Hendricks , Terrece Pearman
IPC分类号： G01N33/94 , G01N33/02 , G01N33/15 , G01N21/00 , G01N33/52
CPC分类号： G01N33/02 , G01N33/15 , Y10T436/13
摘要： We disclose a method of tagging pharmaceutical and nutritional products with nanoparticles which include noble metals. The disclosure describes a plurality of nanoparticles each with either a different size and/or shape. The nanoparticles of different sizes and shapes are distinguishable using spectroscopic techniques because each is associated with different optical properties and have a different spectral signature. The different optical properties are at least due to the unique size or shape of the nanoparticles. Each of the plurality of nanoparticles may be associated with a different characteristic of the tagged pharmaceutical or nutritional product. The method includes mixing the nanoparticles with or adhering the nanoparticles to the tagged pharmaceutical or nutritional product. Two or more of the plurality of nanoparticles may be mixed with or adhered to the tagged pharmaceutical or nutritional product in a ratio and the ratio may be associated with a characteristic of the product.

39. 发明授权

US09927448B1 Method of measuring food dyes in bodily waste to identify and quantify drug consumption 有权
公开(公告)号：US09927448B1
公开(公告)日：2018-03-27
申请号：US15465939
申请日：2017-03-22
申请人： David R. Hall , Steven Butala , Dan Allen , Daniel Hendricks , Andrew Nguyen , Terrece Pearman
发明人： David R. Hall , Steven Butala , Dan Allen , Daniel Hendricks , Andrew Nguyen , Terrece Pearman
IPC分类号： G01N33/94 , G01N33/493 , G01N21/25 , G01N33/58
CPC分类号： G01N33/94 , G01N21/31 , G01N33/493 , G01N33/583 , G01N2021/3196 , Y10T436/13
摘要： We disclose a drug tracking system and method of use which may be used to screen a subject's bodily waste and to identify the drug the subject has consumed. The system includes a drug that is tagged with a food dye that may be detected in the subject's bodily waste using absorption spectroscopic analysis. The subject consumes the tagged drug and a user obtains a sample of the subject's bodily waste. The user may analyze the subject's urine using an absorption spectroscopic technique. The user may enter the emission spectrum obtained from the absorption spectroscopic analysis into a database that includes the signature emission spectra from multiple food dyes that are used as drug tags. The emission spectra may be compared and the identity of the food dye and its associated drug may be determined.

40. 发明授权

US09123762B2 Substrate support with symmetrical feed structure 有权
标题翻译：具有对称进料结构的基板支撑
公开(公告)号：US09123762B2
公开(公告)日：2015-09-01
申请号：US12910547
申请日：2010-10-22
申请人： Xing Lin , Douglas A. Buchberger, Jr. , Xiaoping Zhou , Andrew Nguyen , Anchel Sheyner
发明人： Xing Lin , Douglas A. Buchberger, Jr. , Xiaoping Zhou , Andrew Nguyen , Anchel Sheyner
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H01L21/683 , H01J37/32 , H01L21/67
CPC分类号： H01L21/67069 , H01J37/32532 , H01J37/32577 , H01J37/32715 , H01J37/32724 , H01L21/6831
摘要： Apparatus for processing a substrate is disclosed herein. In some embodiments, a substrate support may include a substrate support having a support surface for supporting a substrate the substrate support having a central axis; a first electrode disposed within the substrate support to provide RF power to a substrate when disposed on the support surface; an inner conductor coupled to the first electrode about a center of a surface of the first electrode opposing the support surface, wherein the inner conductor is tubular and extends from the first electrode parallel to and about the central axis in a direction away from the support surface of the substrate support; an outer conductor disposed about the inner conductor; and an outer dielectric layer disposed between the inner and outer conductors, the outer dielectric layer electrically isolating the outer conductor from the inner conductor. The outer conductor may be coupled to electrical ground.
摘要翻译：本文公开了用于处理衬底的装置。在一些实施例中，衬底支撑件可以包括具有用于支撑衬底的支撑表面的衬底支撑件，衬底支撑件具有中心轴线; 设置在所述基板支撑件内的第一电极，用于当设置在所述支撑表面上时向基板提供RF功率; 内部导体，其围绕第一电极的与支撑表面相对的表面的中心耦合到第一电极，其中内部导体是管状的，并且从第一电极沿着远离支撑表面的方向平行于中心轴并围绕中心轴线延伸的基板支撑; 设置在内部导体周围的外部导体; 以及设置在所述内部和外部导体之间的外部电介质层，所述外部电介质层将所述外部导体与所述内部导体电隔离。外部导体可以耦合到电气接地。

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