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    • 40. 发明授权
    • Integrated circuit testing device
    • 集成电路测试装置
    • US06191604B1
    • 2001-02-20
    • US09238172
    • 1999-01-28
    • Makoto HaseyamaShigeyuki MaruyamaNaomi MiyajiSusumu Moriya
    • Makoto HaseyamaShigeyuki MaruyamaNaomi MiyajiSusumu Moriya
    • G01R3102
    • G01R31/2886G01R1/07357
    • An integrated circuit testing device includes a flexible base of an insulating material, the base having a first surface and a second surface opposite to each other, an integrated circuit to be tested being bonded to the first surface. A conductive wiring layer is provided on the first or second surface of the base, the wiring layer including a plurality of projecting contacts over the first surface at positions which electrodes of the integrated circuit are connected to. An elastic member is provided beneath the second surface of the base opposite to the first surface, the elastic member having a first level of hardness. A flexible film member is provided between the second surface of the base and the elastic member, the film member having a second level of hardness higher than the first level of hardness of the elastic member.
    • 集成电路测试装置包括绝缘材料的柔性基座,该基座具有彼此相对的第一表面和第二表面,待测试的集成电路与第一表面接合。 在基座的第一或第二表面上设置有导电布线层,布线层包括在集成电路的电极连接的位置上的第一表面上的多个突出接点。 弹性构件设置在基座的与第一表面相对的第二表面下方,弹性构件具有第一水平的硬度。 柔性膜构件设置在基座的第二表面和弹性构件之间,膜构件具有比弹性构件的第一硬度高的第二硬度水平。