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31. 发明授权

US07018552B2 Method of manufacturing electronic device 有权
公开(公告)号：US07018552B2
公开(公告)日：2006-03-28
申请号：US10389981
申请日：2003-03-18
申请人： Ikuo Uematsu , Naoya Hayamizu
发明人： Ikuo Uematsu , Naoya Hayamizu
IPC分类号： H01L21/302
CPC分类号： H01L21/02071 , G02F2001/136295 , H01L21/02063 , H01L29/4908 , H01L29/66757 , Y10S134/902 , Y10S438/906 , Y10S438/963
摘要： A method of manufacturing an electronic device comprises forming a wiring material layer made of aluminum or an aluminum alloy on the surface of an insulating film on a substrate, patterning the wiring material layer by a reactive ion etching treatment with a resist pattern used as a mask so as to form a wiring, and treating the surface of the insulating film including the wiring with an aqueous solution for removing the etching residue, the aqueous solution containing a peroxosulfate, a fluorine-containing compound and an acid for adjusting the pH value and having a pH value of −1 to 3.

32. 发明授权

US06210748B1 Method for producing liquid crystal display and method for cleaning substrate 失效
公开(公告)号：US06210748B1
公开(公告)日：2001-04-03
申请号：US09098984
申请日：1998-06-17
申请人： Yoshiyuki Nagahara , Naoya Hayamizu , Naoaki Sakurai , Noriko Okoshi , Toshitaka Nonaka , Hiroaki Furuya
发明人： Yoshiyuki Nagahara , Naoya Hayamizu , Naoaki Sakurai , Noriko Okoshi , Toshitaka Nonaka , Hiroaki Furuya
IPC分类号： B05D512
CPC分类号： H01L21/02052
摘要： An electrode substrate is brush cleaned with a hydrogen gas dissolved water, which has an oxidation-reduction potential of −860 mV to −400 mV and a pH of 8 to 12, before applying an alignment layer material on the electrode substrate. Thus, it is possible to decrease the manufacturing costs without decreasing the detergency.

33. 发明授权

US08454754B2 Cleaning method and method for manufacturing electronic device 有权
标题翻译：电子设备制造方法及清洗方法
公开(公告)号：US08454754B2
公开(公告)日：2013-06-04
申请号：US12028288
申请日：2008-02-08
申请人： Yukihiro Shibata , Naoya Hayamizu , Masaaki Kato , Nobuo Kobayashi
发明人： Yukihiro Shibata , Naoya Hayamizu , Masaaki Kato , Nobuo Kobayashi
IPC分类号： B08B3/10
CPC分类号： H01L21/67051 , H01L21/6708
摘要： A cleaning method includes: producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning a workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece. A method for manufacturing an electronic device includes: producing a workpiece; producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning the workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece.
摘要翻译：清洗方法包括：通过硫酸电解产生氧化溶液; 并用氧化液清洗工件。通过混合加热来加热氧化溶液以清洁工件。电子设备的制造方法包括：制造工件; 通过电解硫酸生成氧化溶液; 并用氧化溶液清洗工件。通过混合加热来加热氧化溶液以清洁工件。

34. 发明授权

US08211287B2 Sulfuric acid electrolysis process 有权
标题翻译：硫酸电解过程
公开(公告)号：US08211287B2
公开(公告)日：2012-07-03
申请号：US12459161
申请日：2009-06-26
申请人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B1/28
CPC分类号： C25B1/285
摘要： Sulfuric acid electrolysis process wherein; a temperature of electrolyte containing sulfuric acid to be supplied to an anode compartment and a cathode compartment is controlled to 30 degree Celsius or more; a flow rate F1 (L/min.) of the electrolyte containing sulfuric acid to be supplied to said anode compartment is controlled to 1.5 times or more (F1/Fa≧1.5) a flow rate Fa (L/min.) of gas formed on an anode side as calculated from Equation (1) shown below and a flow rate F2(L/min.) of said electrolyte containing sulfuric acid to be supplied to said cathode compartment is controlled to 1.5 times or more (F2/Fc≧1.5) a flow rate Fe (L/min.) of gas formed on a cathode side as calculated from Equation (2) shown below. Fa=(I×S×R×T)/(4×Faraday constant) Equation (1) Fe=(I×S×R×T)/(2×Faraday constant) Equation (2) I: Electrolytic current (A) S: Time: 60 second (Fixed) R: Gas constant (0.082 1·atm/K/mol) K: Absolute temperature (273.15 degree Celsius+T degree Celsius) T: Electrolysis temperature (degree Celsius) Faraday constant: (C/mol)
摘要翻译：硫酸电解法其中; 供给阳极室和阴极室的含有硫酸的电解质的温度控制在30摄氏度以上; 供给所述阳极室的含有硫酸的电解质的流量F1（L / min）被控制为形成的气体的流量Fa（L / min）的1.5倍以上（F1 /Fa≥1.5）在阳极侧，由下述式（1）计算，含有供给阴极室的硫酸的电解质的流量F2（L / min）被控制为1.5倍以上（F2 /Fc≥1.5 ）由如下所示的等式（2）计算的在阴极侧形成的气体的流速Fe（L / min）。 Fa =（I×S×R×T）/（4×法拉第常数）等式（1）Fe =（I×S×R×T）/（2×法拉第常数）等式（2）I：电解电流）S：时间：60秒（固定）R：气体常数（0.082 1·atm / K / mol）K：绝对温度（273.15摄氏度+ T摄氏度）T：电解温度（摄氏度）法拉第常数 / mol）

35. 发明授权

US08137513B2 Sulfuric acid electrolytic cell and a sulfuric acid recycle type cleaning system applying the sulfuric acid electrolytic cell 有权
标题翻译：硫酸电解池和硫酸循环型清洗系统应用硫酸电解池
公开(公告)号：US08137513B2
公开(公告)日：2012-03-20
申请号：US12459134
申请日：2009-06-26
申请人： Masaaki Kato , Yoshiyuki Seya , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Masaaki Kato , Yoshiyuki Seya , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B9/08 , C25B11/12 , C25B1/28
CPC分类号： C25B1/285 , C25B9/00
摘要： In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and said cathode are contacted in sequence, the rear face of said cathode is pasted with conductive paste to the current collector comprising a rigid body with size equal to, or larger than, said cathode and electric power is supplied from one current collector to the other current collector via said conductive paste.
摘要翻译：在硫酸电解池中，电解供给阳极室的硫酸和包含隔膜的阴极室，由所述隔膜隔开的所述阳极室和所述阴极室分别设置在所述阴极室中的阴极和设在所述阴极室中的导电金刚石阳极阳极室，作为所述导电金刚石阳极，在所述导电衬底的表面上形成导电金刚石膜，所述导电衬底的背面用导电膏粘贴在集电器上，该集电器包括尺寸等于或等于的刚体，或大于所述导电基底，构成所述阳极室的阳极室框架通过垫圈与所述金刚石阳极的导电金刚石膜侧面的周边接触，所述隔膜与所述阳极室的前表面接触与所述隔膜的前面相连，阴极隔室框架构成所述阴极co 间隔件，垫圈和所述阴极按顺序接触，所述阴极的背面用导电膏粘贴到集电器，该集电器包括尺寸等于或大于所述阴极的刚体，并且电力从一个集电器经由所述导电浆料到另一个集电器。

36. 发明授权

US08105728B2 Polyelectrolyte material, method for producing polyelectrolyte material, polyelectrolyte component, fuel cell, and method for producing fuel cell 失效
标题翻译：聚电解质材料，聚电解质材料的制造方法，聚电解质成分，燃料电池及燃料电池的制造方法
公开(公告)号：US08105728B2
公开(公告)日：2012-01-31
申请号：US11858533
申请日：2007-09-20
申请人： Naoya Hayamizu , Yukihiro Shibata , Akiko Saito , Jun Momma , Hideo Oota
发明人： Naoya Hayamizu , Yukihiro Shibata , Akiko Saito , Jun Momma , Hideo Oota
IPC分类号： H01M8/10
CPC分类号： H01M8/1025 , C08G65/405 , C08G65/4056 , C08G65/4087 , C08J5/2256 , C08J2371/12 , H01M4/8605 , H01M8/0289 , H01M8/1011 , H01M2300/0082 , Y02E60/523 , Y02P70/56
摘要： A polyelectrolyte material includes as a main chain: a benzene ring; an ether; and a carbonyl group. A part of the benzene ring is sulfonated. A method for manufacturing a polyelectrolyte material includes: synthesizing disulfonyl difluorobenzophenone; and polymerizing the disulfonyl difluorobenzophenone, 4,4′-difluorobenzophenone, and phenolphthalein with a crown ether as a catalyst. The synthesizing is performed by reacting 4,4′-difluorobenzophenone with fuming sulfuric acid, performing salting-out the reaction product, and recrystallizing the salting-out product.
摘要翻译：聚电解质材料包括主链：苯环; 一个醚和羰基。苯环的一部分被磺化。聚电解质材料的制造方法包括：合成二磺酰基二氟二苯甲酮; 并用冠醚作为催化剂使二磺酰基二氟二苯甲酮，4,4'-二氟二苯甲酮和酚酞聚合。合成通过使4,4'-二氟二苯甲酮与发烟硫酸反应，进行反应产物盐析，并重结晶盐析产物。

37. 发明申请

US20110223333A1 METHOD OF TREATING CATALYST FOR NANOCARBON PRODUCTION AND METHOD OF MANUFACTURING NANOCARBON 审中-公开
标题翻译：处理纳米碳生产催化剂的方法及制备纳米碳的方法
公开(公告)号：US20110223333A1
公开(公告)日：2011-09-15
申请号：US13047207
申请日：2011-03-14
申请人： Masashi Yamage , Naoya Hayamizu
发明人： Masashi Yamage , Naoya Hayamizu
IPC分类号： C23C16/26 , B01J23/755 , B01J21/18 , C23C16/44 , C23F1/00 , C23F1/16 , C23F1/28 , C23F1/30 , C23F1/40 , B82Y40/00
CPC分类号： B01J37/06 , B01J23/745 , B01J23/755 , B01J35/002 , B82Y30/00 , B82Y40/00 , C01B32/15
摘要： According to one embodiment, a method of treating catalyst for nanocarbon production comprises, bringing a surface of a catalytic material into contact with a chemical, the catalytic material containing a metallic material and being used to produce nanocarbon, corroding the surface of the catalytic material, and drying the surface of the catalytic material.
摘要翻译：根据一个实施方案，一种处理用于纳米碳生产的催化剂的方法包括：使催化材料的表面与化学品接触，所述催化材料含有金属材料并用于生产纳米碳，腐蚀催化材料的表面，并干燥催化材料的表面。

38. 发明申请

US20110143549A1 ETCHING METHOD, METHOD FOR MANUFACTURING MICROSTRUCTURE, AND ETCHING APPARATUS 审中-公开
标题翻译：蚀刻方法，制造微结构的方法和蚀刻装置
公开(公告)号：US20110143549A1
公开(公告)日：2011-06-16
申请号：US12963187
申请日：2010-12-08
申请人： Makiko TANGE , Naoya Hayamizu , Nobuyoshi Sato , Yuri Yonekura , Hideaki Hirabayashi , Yoshiaki Kurokawa , Nobuo Kobayashi , Masaaki Kato , Hiroki Domon
发明人： Makiko TANGE , Naoya Hayamizu , Nobuyoshi Sato , Yuri Yonekura , Hideaki Hirabayashi , Yoshiaki Kurokawa , Nobuo Kobayashi , Masaaki Kato , Hiroki Domon
IPC分类号： H01L21/302 , B44C1/22 , C23F1/00 , H01L21/02
CPC分类号： C25B1/22 , C25B9/08 , G03F1/80 , G03F7/423 , H01L21/02057 , H01L21/31133 , H01L21/6708
摘要： In one embodiment, an etching method is disclosed. The method can include producing an oxidizing substance by electrolyzing a sulfuric acid solution, and producing an etching solution having a prescribed oxidizing species concentration by controlling a produced amount of the produced oxidizing substance. The method can include supplying the produced etching solution to a surface of a workpiece.
摘要翻译：在一个实施例中，公开了蚀刻方法。该方法可以包括通过电解硫酸溶液来生产氧化物质，并通过控制生成的氧化物质的产生量来制备具有规定的氧化物质浓度的蚀刻溶液。该方法可以包括将所产生的蚀刻溶液供应到工件的表面。

39. 发明申请

US20090081510A1 SUPPORTED CATALYST, METHOD FOR MANUFACTURING SUPPORTED CATALYST, FUEL CELL, AND METHOD FOR MANUFACTURING FUEL CELL 审中-公开
标题翻译：支持的催化剂，制造支持的催化剂的方法，燃料电池和制造燃料电池的方法
公开(公告)号：US20090081510A1
公开(公告)日：2009-03-26
申请号：US12239066
申请日：2008-09-26
申请人： Naoya Hayamizu , Yukihiro Shibata , Masashi Yamage , Jun Momma , Hideo Oota
发明人： Naoya Hayamizu , Yukihiro Shibata , Masashi Yamage , Jun Momma , Hideo Oota
IPC分类号： H01M4/88 , H01M4/96 , B01J27/20 , B01J31/02 , H01M4/08
CPC分类号： H01M4/90 , H01M4/8817 , H01M4/8882 , H01M4/8892 , H01M4/9083 , H01M4/926 , H01M8/0234 , H01M8/0243 , Y02P70/56
摘要： A supported catalyst includes: a catalyst; and a carbon body. The catalyst is supported on the carbon body, and the carbon body is linear.
摘要翻译：负载催化剂包括：催化剂; 和碳体。催化剂负载在碳体上，碳体是线性的。

40. 发明申请

US20080196743A1 CLEANING METHOD AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE 有权
标题翻译：用于制造电子设备的清洁方法和方法
公开(公告)号：US20080196743A1
公开(公告)日：2008-08-21
申请号：US12028288
申请日：2008-02-08
申请人： Yukihiro SHIBATA , Naoya HAYAMIZU , Masaaki KATO , Nobuo KOBAYASHI
发明人： Yukihiro SHIBATA , Naoya HAYAMIZU , Masaaki KATO , Nobuo KOBAYASHI
IPC分类号： B08B3/08 , B08B3/10
CPC分类号： H01L21/67051 , H01L21/6708
摘要： A cleaning method includes: producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning a workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece. A method for manufacturing an electronic device includes: producing a workpiece; producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning the workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece.
摘要翻译：清洗方法包括：通过硫酸电解产生氧化溶液; 并用氧化液清洗工件。通过混合加热来加热氧化溶液以清洁工件。电子设备的制造方法包括：制造工件; 通过电解硫酸生成氧化溶液; 并用氧化溶液清洗工件。通过混合加热来加热氧化溶液以清洁工件。

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