会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 31. 发明授权
    • High voltage transistor and method of manufacturing the same
    • 高压晶体管及其制造方法
    • US07221028B2
    • 2007-05-22
    • US10899371
    • 2004-07-26
    • Tae-kwang YuHee-seog JeonSeung-beom YoonYong-tae Kim
    • Tae-kwang YuHee-seog JeonSeung-beom YoonYong-tae Kim
    • H01L29/72
    • H01L29/66659H01L21/26586H01L21/28114H01L29/42376H01L29/665H01L29/7835
    • The present invention relates to a high voltage transistor and method of manufacturing the same. The high voltage transistor includes: a channel region which is formed in a semiconductor substrate; a gate insulating film which is formed on the channel region of the semiconductor substrate; a low concentration source region and a low concentration drain region having the channel region interposed therebetween and each being formed in the semiconductor substrate; a high concentration source region which is formed to be spaced away from the channel region by a first distance; a high concentration drain region which is formed to be spaced away from the channel region by a second distance that is larger than the first distance; a gate electrode which has a gate bottom portion interfacing with the gate insulating film over the channel region, and a gate top portion integrated with the gate bottom portion and protruding by a predetermined length from a top of the gate bottom portion to extend over the low concentration drain region; a first metal silicide layer which is formed on the high concentration source region; and a second metal silicide layer which is formed on the high concentration drain region.
    • 本发明涉及高压晶体管及其制造方法。 高压晶体管包括:形成在半导体衬底中的沟道区; 形成在半导体衬底的沟道区上的栅极绝缘膜; 低浓度源极区和低浓度漏极区,其间具有沟道区,并且各自形成在半导体衬底中; 高浓度源区,其形成为与沟道区隔开第一距离; 高浓度漏区,其形成为与沟道区隔开距离大于第一距离的第二距离; 栅极电极,其具有与沟道区域上的栅极绝缘膜接合的栅极底部,以及与栅极底部一体化并且从栅极底部的顶部突出预定长度的栅极顶部,以在低于 浓度排水区; 形成在高浓度源区上的第一金属硅化物层; 以及形成在高浓度漏极区上的第二金属硅化物层。
    • 36. 发明授权
    • Methods of forming bipolar junction transistors having preferred base
electrode extensions and transistors formed thereby
    • 形成具有优选的基极延伸的双极结型晶体管和由此形成的晶体管的方法
    • US6048773A
    • 2000-04-11
    • US85777
    • 1998-05-28
    • Hee-Seog Jeon
    • Hee-Seog Jeon
    • H01L29/73H01L21/331H01L29/423H01L29/70H01L29/732
    • H01L29/66272H01L29/42304
    • Methods of forming bipolar junction transistors having preferred base electrode extensions include the steps of forming a base electrode of second conductivity type (e.g., P-type) on a face of a substrate. A conductive base electrode extension layer is then formed in contact with a sidewall of the base electrode. The base electrode extension layer may be doped or undoped. An electrically insulating base electrode spacer is then formed on the conductive base electrode extension layer, opposite the sidewall of the base electrode. The conductive base electrode extension layer is then etched to define a L-shaped base electrode extension, using the base electrode spacer as an etching mask. Dopants of second conductivity type are then diffused from the base electrode, through the base electrode extension and into the substrate to define an extrinsic base region therein. This diffusion step can be performed in a carefully controlled manner to limit the extent to which the extrinsic base region dopants adversely effect the electrical characteristics of surrounding regions or contribute to parasitic capacitance. Dopants of second conductivity type are also preferably implanted into the substrate to define an intrinsic base region therein. This dopant implant step is preferably performed using the base electrode spacer as an implant mask. Accordingly, the base electrode spacer is used advantageously as an etching mask and as a dopant implantation mask. An emitter region of first conductivity type is also preferably formed in the intrinsic base region.
    • 形成具有优选的基极延伸部的双极结型晶体管的方法包括以下步骤:在衬底的表面上形成第二导电类型的基极(例如P型)。 然后形成与基极的侧壁接触的导电基极延伸层。 基极延伸层可以是掺杂的或未掺杂的。 然后,在与基极的侧壁相对的导电基极延伸层上形成电绝缘基极间隔物。 然后,使用基极间隔件作为蚀刻掩模,蚀刻导电基极延伸层以限定L形基极延伸。 然后,第二导电类型的掺杂剂从基极通过基极延伸扩散到衬底中以在其中限定非本征基区。 该扩散步骤可以以仔细控制的方式进行,以限制外部碱性区域掺杂对其周围区域的电特性的不利影响或有助于寄生电容的程度。 也优选将第二导电类型的掺杂剂注入到衬底中以在其中限定其内部基极区域。 该掺杂剂注入步骤优选使用基极间隔物作为植入掩模进行。 因此,基极隔离器有利地用作蚀刻掩模和掺杂剂注入掩模。 也优选在本征基区形成第一导电类型的发射极区域。
    • 37. 发明授权
    • Methods of fabricating bipolar transistors having separately formed
intrinsic base and link-up regions
    • 制造具有单独形成的本征基极和连接区域的双极晶体管的方法
    • US5747374A
    • 1998-05-05
    • US757802
    • 1996-11-27
    • Hee-Seog Jeon
    • Hee-Seog Jeon
    • H01L29/73H01L21/328H01L21/331H01L29/732
    • H01L29/66272
    • Methods which provide for the formation of the intrinsic base regions and the link-up regions in separate processing steps are provided. These methods include the steps of forming a first conductive layer on a substrate of a first conductivity type containing a region of a second conductivity type therein, wherein the first conductive layer is formed on the region of second conductivity type semiconductor material. The first conductive layer is patterned to define a sidewall of a window which exposes a portion of the region of a second conductivity type semiconductor material. An insulating layer is formed on the sidewall, the first conductive layer and the exposed portion of the region of second conductivity type semiconductor material. A first mask is then formed on the insulating layer which exposes a region of the insulating layer corresponding to a link-up region of the bipolar transistor. A first impurity ion of a first conductivity type is then implanted through the insulating layer using the first mask to form a link-up region. The first mask may be removed and a sidewall spacer formed on the sidewall. The insulating layer is then removed to expose a region of second conductivity type semiconductor material adjacent the sidewall spacer to define an implantation region for an intrinsic base region. A second impurity ion of the first conductivity type is then implanted in the region of second conductivity type semiconductor material using the sidewall spacer as a mask to form an intrinsic base region. Thus, an intrinsic base region and a link-up region are formed separately.
    • 提供了在单独的处理步骤中提供形成本征基区和连接区的方法。 这些方法包括在其中包含第二导电类型的区域的第一导电类型的衬底上形成第一导电层的步骤,其中第一导电层形成在第二导电类型半导体材料的区域上。 图案化第一导电层以限定暴露第二导电类型半导体材料区域的一部分的窗口的侧壁。 绝缘层形成在第二导电型半导体材料的侧壁,第一导电层和暴露部分的侧壁上。 然后在绝缘层上形成第一掩模,其暴露与双极晶体管的连接区域对应的绝缘层的区域。 然后通过第一掩模通过绝缘层注入第一导电类型的第一杂质离子以形成连接区域。 可以去除第一掩模并且在侧壁上形成侧壁间隔物。 然后去除绝缘层以暴露与侧壁间隔物相邻的第二导电类型半导体材料的区域,以限定本征基区的注入区。 然后使用侧壁间隔物作为掩模将第一导电类型的第二杂质离子注入第二导电类型半导体材料的区域中以形成本征基区。 因此,分别形成本征基区和连接区。