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    • 23. 发明授权
    • Optical member, method of manufacturing the same, and projection exposure system
    • 光学部件及其制造方法以及投影曝光系统
    • US07166163B2
    • 2007-01-23
    • US10973260
    • 2004-10-27
    • Hideki ObaraKazumasa Endo
    • Hideki ObaraKazumasa Endo
    • C30B9/04C30B7/08
    • C30B29/12C30B11/00G02B1/02G03F7/70216G03F7/70958
    • A method of manufacturing an optical member includes a crystal growing step and a carving step. The crystal growing step includes melting a mixture of fluoride powder and a scavenger at a melting temperature of a melting point for the fluoride and above, and then crystallizing the melted fluid and further cooling down an obtained fluoride crystal in a temperature range from 1000° C. to 900° C. by a temperature decreasing rate in a range from 0.1 to 5° C./hr. The carving step includes carving an optical member out of the fluoride crystal obtained in the crystal growing step such that the optical member is made of a fluoride crystal in which a maximum diameter dmax of scattering bodies existing internally and a quantity ns of the scattering bodies per 1 cm3 satisfy a condition represented by the following formula (1): 0
    • 制造光学构件的方法包括晶体生长步骤和雕刻步骤。 晶体生长步骤包括在氟化物及其以上的熔点的熔融温度下熔化氟化物粉末和清除剂的混合物,然后使熔融的流体结晶,并在1000℃的温度范围内进一步冷却所得的氟化物晶体 至900℃,温度降低率为0.1至5℃/小时。 雕刻步骤包括在晶体生长步骤中获得的氟化物晶体中雕刻光学构件,使得光学构件由氟化物晶体制成,其中在内部存在的散射体的最大直径d最大值<! - SIPO 0 最大 2 2 (cm -1)。 (1)<?in-line-formula description =“In-line Formulas”end =“tail”?>