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    • 27. 发明授权
    • Distributed feedback laser diode comprising an active layer partly
adjacent to a waveguide layer
    • 分布式反馈激光二极管包括与波导层部分相邻的有源层
    • US4799226A
    • 1989-01-17
    • US56011
    • 1987-06-01
    • Ikuo Mito
    • Ikuo Mito
    • H01S5/00H01S5/12H01S5/223H01S5/323H01S3/19
    • H01S5/2232H01S5/12H01S5/2237H01S5/32391
    • In a distributed feedback laser diode comprising an optical waveguide layer, a first stack of a current confining and a current blocking layer, and a second stack of a first cladding layer, an active layer, and a second cladding layer consecutively on a semiconductor substrate having a corrugated surface, a pair of inwardly directed surfaces is formed to define a groove in the first stack, to divide the current blocking layer into two current blocking parts, and to expose an area of the waveguide layer as a groove bottom. The first cladding layer is formed on the current blocking parts, the inwardly directed surfaces, and the groove bottom. The laser diode is suitable to manufacture by metal organic chemical vapor deposition. The groove is preferably perpendicular to corrugations of the corrugated surface. The groove bottom may have a width of 1.5 microns. The groove can be formed by chemical etching of the first stack before epitaxial growth of the first cladding layer.
    • 在分布式反馈激光二极管中,包括光波导层,电流限制和电流阻挡层的第一叠层,以及连续地在半导体衬底上的第一覆层,有源层和第二覆层的第二堆叠, 形成波纹表面,一对向内的表面形成为在第一堆叠中限定凹槽,以将电流阻挡层划分成两个电流阻挡部分,并将波导层的区域暴露为凹槽底部。 第一包层形成在电流阻挡部分,向内指向的表面和槽底部上。 激光二极管适用于通过金属有机化学气相沉积制造。 槽优选垂直于波纹表面的波纹。 槽底可以具有1.5微米的宽度。 可以在第一包层的外延生长之前,通过第一堆叠的化学蚀刻来形成沟槽。
    • 28. 发明授权
    • Heterostructure semiconductor laser diode
    • 异质结构半导体激光二极管
    • US4796268A
    • 1989-01-03
    • US4860
    • 1987-01-12
    • Werner Schairer
    • Werner Schairer
    • H01S5/10H01S5/16H01S5/20H01S5/223H01S3/19
    • H01S5/2232H01S5/20H01S5/1021H01S5/16H01S5/2059
    • A heterostructure semiconductor laser diode with a sequence of layers, formed on a substrate, including a laser-active layer arranged between enclosing layers of opposite respectively conductivity types, a cover layer disposed on the side of the sequence of layers facing away from the substrate, and a layer of a conductivity type opposite to that of the substrate arranged between the substrate and the lower enclosing layer and having in the area of the plane of symmetry, a narrow strip produced by diffusion which has the same conductivity type as the substrate and penetrates into the area of the substrate. The current flowing in the forward direction of the semiconductor laser diode is thereby restricted to a narrow strip-shaped area of the laser-active layer.
    • 一种具有层序列的异质结构半导体激光二极管,其形成在基板上,包括布置在相对于导电类型相反的封闭层之间的激光有源层,设置在背离衬底的层序列一侧的覆盖层, 以及与布置在基板和下封闭层之间的基板的导电类型的导电类型的层,并且在对称平面的区域中具有通过扩散产生的窄带,其具有与基板相同的导电类型并且穿透 进入基材的区域。 因此,在半导体激光二极管的正向流动的电流被限制在激光有源层的窄带状区域。