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21. 发明申请

US20070215448A1 MEMS thermal device with slideably engaged tether and method of manufacture 有权
标题翻译：具有可滑动接合系绳的MEMS热敏装置及其制造方法
公开(公告)号：US20070215448A1
公开(公告)日：2007-09-20
申请号：US11378340
申请日：2006-03-20
申请人： Alok Paranjpye , Jeffery Summers
发明人： Alok Paranjpye , Jeffery Summers
IPC分类号： H01H1/00 , H01H11/00
CPC分类号： B81B3/0024 , B81B2201/018 , B81B2201/0278 , H01H2037/008 , H01H2061/008 , Y10T29/49105 , Y10T29/49147 , Y10T29/49204 , Y10T29/53248
摘要： A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.
摘要翻译：公开了一种MEMS热开关，其使用可滑动接合的系绳将热膨胀梁耦合到冷弯头梁，并且通过热梁的膨胀来弯曲冷弯曲梁。刚性接合的系绳将热的，扩张的梁和冷的弯曲梁的远端连接在一起，而可滑动地接合的系绳允许热的，膨胀的梁相对于冷的屈肌梁而伸长，而不加载可滑动地接合的系绳具有很大的剪切力。结果，系链的材料可以变得更硬，并且因此将热膨胀梁的弯曲力更有效地传递到凉爽的弯曲梁。

22. 发明申请

US20070207584A1 Method and apparatus for curing epoxy-based photoresist using a continuously varying temperature profile 审中-公开
标题翻译：使用连续变化的温度曲线固化环氧系光致抗蚀剂的方法和设备
公开(公告)号：US20070207584A1
公开(公告)日：2007-09-06
申请号：US11364334
申请日：2006-03-01
申请人： Alok Paranjpye , Douglas Thompson
发明人： Alok Paranjpye , Douglas Thompson
IPC分类号： H01L21/8222
CPC分类号： B81C1/0069 , B81B2201/014 , B81C2201/018 , G03F7/40 , H01H61/04 , H01H2061/008
摘要： A method for curing an epoxy-based photoresist uses a continuously varying temperature profile, to continuously raise the kinetic energy of the monomers involved in the curing process, allowing them to cross-link. By using the continuously varying temperature profile, the maximum temperature to achieve a more completely cured film is reduced, as is the total processing time. In addition, curing using the continuously varying temperature profile is a single step method, rather than a multi-step method of the prior art, significantly simplifying the process flow for producing the cured structures. The cured structures may have mechanical properties which render them suitable as functional elements of various MEMS devices, including rigid, dielectric tethers used in MEMS thermal switches, for example.
摘要翻译：固化环氧系光致抗蚀剂的方法使用连续变化的温度分布，以连续提高参与固化过程的单体的动能，从而使它们交联。通过使用连续变化的温度曲线，总的处理时间也减少了实现更完全固化的膜的最高温度。此外，使用连续变化的温度分布的固化是单步法，而不是现有技术的多步法，显着简化了用于生产固化结构的工艺流程。固化的结构可以具有机械性质，使得它们适合作为各种MEMS装置的功能元件，例如包括用于MEMS热开关的刚性介电系绳。

23. 发明申请

US20070170811A1 Hysteretic MEMS thermal device and method of manufacture 有权
标题翻译：迟滞MEMS热装置及其制造方法
公开(公告)号：US20070170811A1
公开(公告)日：2007-07-26
申请号：US11334438
申请日：2006-01-19
申请人： Paul Rubel
发明人： Paul Rubel
IPC分类号： H02N10/00
CPC分类号： H02N10/00 , F03G7/06 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , Y10T29/42 , Y10T29/49155 , Y10T29/49204
摘要： A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.
摘要翻译： MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。加热两个相应的驱动梁使得第一段在基本上围绕锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。

24. 发明授权

US07095309B1 Thermoelastic actuator design 有权
标题翻译：热弹性致动器设计
公开(公告)号：US07095309B1
公开(公告)日：2006-08-22
申请号：US09693079
申请日：2000-10-20
申请人： Gregory John McAvoy , Kia Silverbrook
发明人： Gregory John McAvoy , Kia Silverbrook
IPC分类号： H01H61/00
CPC分类号： B81C99/006 , B41J2/14427 , B81B3/0024 , B81B3/0035 , B81B2201/038 , F03G7/06 , F05C2203/0813 , F05C2203/083 , F05C2251/04 , F05C2251/044 , F05C2251/046 , H01H1/0036 , H01H2061/006 , H01H2061/008
摘要： The invention concerns thermoelastic designs incorporating and expansive element formed from material selected in accordance a procedure involving the derivation of an indicator of the material's potential effectiveness for each application.
摘要翻译：本发明涉及热弹性设计，其包括由膨胀元件形成的膨胀元件，所述材料是根据涉及推导每种应用的材料潜在有效性的指标的程序选择的。

25. 发明申请

US20030038703A1 Combination horizontal and vertical thermal actuator 审中-公开
公开(公告)号：US20030038703A1
公开(公告)日：2003-02-27
申请号：US10263117
申请日：2002-10-02
申请人： 3M Innovative Properties Company
发明人： Billy L. Weaver , Douglas P. Goetz , Kathy L. Hagen , Mike E. Hamerly , Robert G. Smith , Silva K. Theiss
IPC分类号： H01H037/52
CPC分类号： B81B3/0024 , B81B2201/031 , H01H1/0036 , H01H61/01 , H01H2001/0068 , H01H2061/006 , H01H2061/008
摘要： A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.

26. 发明申请

US20140266562A1 Integrated Electrical-Switching Mechanical Device Having a Blocked State 有权
标题翻译：具有阻塞状态的集成电开关机械装置
公开(公告)号：US20140266562A1
公开(公告)日：2014-09-18
申请号：US14289784
申请日：2014-05-29
申请人： STMicroelectronics (Rousset) SAS
发明人： Antonio Di-Giacomo , Christian Rivero , Pascal Fornara
IPC分类号： H01H1/00
CPC分类号： H01H1/0036 , H01H61/00 , H01H2001/0068 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： An integrated circuit, comprising an electrical-switching mechanical device in a housing having at least one first thermally deformable assembly including a beam held in at least two different locations by at least two arms secured to edges of the housing, the beam and the arms being metallic and situated within the same first metallization level and an electrically conductive body, wherein the said first thermally deformable assembly has at least one first configuration at a first temperature and a second configuration when at least one is at a second temperature different from the first temperature, wherein the beam is at a distance from the body in the first configuration and in contact with the said body and immobilized by the said body in the second configuration and establishing or prohibiting an electrical link passing through the body and through the beam.
摘要翻译：一种集成电路，包括壳体中的电切换机械装置，其具有至少一个第一热变形组件，所述组件包括通过固定到所述壳体的边缘的至少两个臂固定在至少两个不同位置的梁，所述梁和所述臂是金属并位于相同的第一金属化水平和导电体内，其中所述第一热变形组件在第一温度和第二构型具有至少一个第一构型，当至少一个处于与第一温度不同的第二温度时，其中所述梁在所述第一构造中与所述主体一定距离并且与所述主体接触并且以所述第二构造被所述主体固定，并且建立或禁止穿过所述主体并通过所述梁的电连杆。

27. 发明授权

US08245391B2 Method of manufacturing a hysteretic MEMS two-dimensional thermal device 有权
标题翻译：制造迟滞MEMS二维热装置的方法
公开(公告)号：US08245391B2
公开(公告)日：2012-08-21
申请号：US12588060
申请日：2009-10-02
申请人： Paul J. Rubel
发明人： Paul J. Rubel
IPC分类号： H05K3/02 , H05K3/10
CPC分类号： H02N10/00 , F03G7/06 , H01H61/02 , H01H61/04 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H2061/008 , Y10T29/42 , Y10T29/49155 , Y10T29/49204
摘要： A MEMS hysteretic thermal device may be formed having two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.
摘要翻译：可以形成MEMS滞后热装置，其具有由耦合到衬底表面的载流环驱动的两个被动束段。第一光束段被配置为沿着具有垂直于衬底表面的分量的方向移动，而第二光束段被配置成沿具有平行于衬底表面的分量的方向移动。通过提供这种二维运动，单个MEMS迟滞热装置可以用于封闭具有固定到基板表面的至少一个固定触点的开关。

28. 发明授权

US08120133B2 Micro-actuator and locking switch 有权
标题翻译：微执行器和锁定开关
公开(公告)号：US08120133B2
公开(公告)日：2012-02-21
申请号：US11519142
申请日：2006-09-11
申请人： Flavio Pardo
发明人： Flavio Pardo
IPC分类号： H01L29/12
CPC分类号： H01H61/04 , B81B3/0024 , B81B2201/018 , H01H2001/0047 , H01H2061/006 , H01H2061/008
摘要： A micro-electromechanical actuator employs metal for the hot arm and silicon for at least the flexible portion of the cold arm. The cold arm made of silicon is coupled to a metal wire that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.
摘要翻译：微机电致动器至少将冷臂的柔性部分用于热臂和硅的金属。由硅制成的冷臂联接到与其一起移动的金属线，并且当至少两个这样的致动器形成开关时，用于承载要切换的信号。第一芯片上的这种开关的阵列可以与倒装芯片接合到第一芯片的第二芯片协同地布置，第二芯片具有将电控制电流路由到各种热臂以加热它们的电线，信号由各种开关切换。

29. 发明授权

US08115579B2 MEMS actuators with stress releasing design 有权
标题翻译：具有应力释放设计的MEMS致动器
公开(公告)号：US08115579B2
公开(公告)日：2012-02-14
申请号：US12839708
申请日：2010-07-20
申请人： Stéphane Mènard , Nicolas Gonon
发明人： Stéphane Mènard , Nicolas Gonon
IPC分类号： H01H51/22
CPC分类号： H01H61/04 , F03G7/06 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.
摘要翻译：微机电（MEMS）致动器包括热臂构件和冷臂构件。冷臂构件包括至少两个纵向间隔开的屈曲部。致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。这种改进的MEMS致动器中的应力更均匀分布，从而减少机械蠕变，提高其可靠性及其使用寿命。

30. 发明授权

US07760065B2 MEMS device with bi-directional element 有权
标题翻译：具有双向元件的MEMS器件
公开(公告)号：US07760065B2
公开(公告)日：2010-07-20
申请号：US11772039
申请日：2007-06-29
申请人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
发明人： Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
IPC分类号： H01H71/18 , H01H61/00
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译：本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。冷梁锚附接到基板。第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。第二束对被配置成在被加热时延长到更高的温度。

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