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    • 26. 发明申请
    • CHARGED PARTICLE MICROSCOPE WITH IMPROVED SPECTROSCOPIC FUNCTIONALITY
    • 具有改进光谱功能的充电颗粒显微镜
    • US20160189922A1
    • 2016-06-30
    • US14983038
    • 2015-12-29
    • FEI Company
    • Cornelis Sander KooijmanThijs Thomas WithaarGerard Nicolaas Anne Van Veen
    • H01J37/244H01J37/285
    • H01J37/244G01N23/223G01N23/2252G01N23/2257G01N2223/501H01J37/285H01J2237/2445
    • A spectroscopic analysis method, comprising: Directing a beam of radiation onto a location P on a specimen, thereby causing a flux of X-rays to emanate from said location; Examining said flux using a detector arrangement, thus accruing a measured spectrum; Choosing a set of mutually different measurement directions d={dn} that originate from P, where n is a member of an integer sequence; Recording an output On of said detector arrangement for different values of dn, thus compiling a measurement set M={(On, dn)}; Adopting a spectral model On′ for On that is a convoluted mix of terms Band Lp, where: B is a substantially continuous spectral component associated with Bremsstrahlung; Lp is a substantially discrete spectral component associated with the specimen composition at location P; automatically deconvolving the measurement set Mon the basis of said spectral model On′ and distill Lp therefrom.
    • 一种光谱分析方法,包括:将辐射束定向到样本上的位置P,从而导致从所述位置发出X射线通量; 使用检测器装置检查所述通量,从而产生测量的光谱; 选择一组彼此不同的测量方向d = {dn},其源自于P,其中n是整数序列的成员; 记录不同值dn的所述检测器装置的输出On,从而编译测量集M = {(On,dn)}; 采用光谱模型On'for On是一个卷积混合的条带Band Lp,其中:B是与Bremsstrahlung相关联的基本上连续的光谱分量; Lp是与位置P处的样本组成相关联的基本上离散的光谱分量; 自动解卷积测量设置Mon所述光谱模型的基础On'并从中提取Lp。