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    • 21. 发明授权
    • Method for producing a piezoelectric/electrostrictive film-type element
    • 压电/电致伸缩薄膜型元件的制造方法
    • US6088893A
    • 2000-07-18
    • US57398
    • 1998-04-09
    • Yukihisa TakeuchiTsutomu NanatakiKoji KimuraNobuo Takahashi
    • Yukihisa TakeuchiTsutomu NanatakiKoji KimuraNobuo Takahashi
    • H04R17/00H01L41/09H01L41/22H04R17/08H01L41/08
    • H01L41/0973H01L41/314H01L41/1875H04R17/08Y10T29/42
    • A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween.Thus, it is possible to effectively improve, for example, the piezoelectric and/or electrostrictive characteristics such as the displacement amount, and the resonance frequency characteristics.
    • 压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底,其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分,其由 根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极,压电和/或电致伸缩层和上电极,其中至少一部分周缘 压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分,以构成相对于隔膜部分设置的伸出部分,并且伸出部分处于与部分区域不完全连接的状态 通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分 允许尖晶石颗粒介入其间。 因此,可以有效地改善例如位移量和谐振频率特性等压电和/或电致伸缩特性。
    • 22. 发明授权
    • Piezoelectric/electrostrictive film-type element and method for
producing the same
    • 压电/电致伸缩薄膜型元件及其制造方法
    • US5814920A
    • 1998-09-29
    • US777953
    • 1996-12-23
    • Yukihisa TakeuchiTsutomu NanatakiKoji KimuraNobuo Takahashi
    • Yukihisa TakeuchiTsutomu NanatakiKoji KimuraNobuo Takahashi
    • H04R17/00H01L41/09H01L41/22H04R17/08H01L41/08
    • H01L41/0973H01L41/314H01L41/1875H04R17/08Y10T29/42
    • A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween. Thus, it is possible to effectively improve, for example, the piezoelectric and/or electrostrictive characteristics such as the displacement amount, and the resonance frequency characteristics.
    • 压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底,其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分,其由 根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极,压电和/或电致伸缩层和上电极,其中至少一部分周缘 压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分,以构成相对于隔膜部分设置的伸出部分,并且伸出部分处于与部分区域不完全连接的状态 通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分 允许尖晶石颗粒介入其间。 因此,可以有效地改善例如位移量和谐振频率特性等压电和/或电致伸缩特性。
    • 26. 发明授权
    • Optical switch
    • 光开关
    • US06842550B2
    • 2005-01-11
    • US10027775
    • 2001-12-20
    • Yukihisa TakeuchiTsutomu NanatakiKoji Kimura
    • Yukihisa TakeuchiTsutomu NanatakiKoji Kimura
    • G02B6/35G02B6/43
    • G02B6/3522G02B6/3512G02B6/3556G02B6/3578G02B6/3582G02B6/43
    • An optical switch comprises a light transmission portion, an optical path-changing portion, an actuator portion and light transmission channels; said light transmission portion having a light reflecting plane provided on one part of a plane facing the changing portion to totally reflect light; said optical path-changing portion being provided in proximity to the light reflecting plane and having an optical path-changing member for reflecting or scattering light; said actuator portion having a mechanism being displaced and transmitting displacement to the optical path changing portion; and said light transmission channels having optical wave guiding bodies and being provided in three directions with the light reflecting plane as a starting point. Switching or dividing of an optical path is conducted by contacting or separating the optical path-changing portion to or from the light reflecting plane by displacement of the actuator portion.
    • 光开关包括光传输部分,光路改变部分,致动器部分和光传输通道; 所述光传输部分具有设置在面对所述改变部分的平面的一部分上以全反射光的光反射面; 所述光路改变部分设置在光反射面附近并具有用于反射或散射光的光路改变部件; 所述致动器部分具有位移并将位移传递到光路改变部分的机构; 并且所述光传输通道具有光波导体并且以三个方向设置有光反射面作为起点。 通过使致动器部分的位移与光反射面接触或分离光路改变部分来进行光路的切换或分割。