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21. 发明申请

US20110186089A1 APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE 有权
标题翻译：防止MEMS微结构的装置
公开(公告)号：US20110186089A1
公开(公告)日：2011-08-04
申请号：US12672993
申请日：2008-04-14
申请人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
发明人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
IPC分类号： B08B3/00
CPC分类号： B81B3/001 , B81C2201/115
摘要： An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
摘要翻译：一种用于防止三维MEMS（微机电系统）微结构静止的装置，该装置包括：基板; 以及多个微型突起以预定的高度形成在基板的顶表面上，使得从布置在其上方的微结构流出的清洗溶液被排出。

22. 发明授权

US07975550B2 Micromachined sensor for measuring vibration 失效
标题翻译：用于测量振动的微加工传感器
公开(公告)号：US07975550B2
公开(公告)日：2011-07-12
申请号：US12111841
申请日：2008-04-29
申请人： Myung Lae Lee , Chang Han Je , Sung Sik Lee , Sung Hae Jung , Chang Auck Choi , Gunn Hwang
发明人： Myung Lae Lee , Chang Han Je , Sung Sik Lee , Sung Hae Jung , Chang Auck Choi , Gunn Hwang
IPC分类号： G01N29/00 , G01P15/10
CPC分类号： G01H11/02
摘要： There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.
摘要翻译：提供了一种用于测量振动的微机械传感器，其基于有机硅微加工技术，其中具有弹性的导体由于由振动产生的力连接到质量移动，并且通过使用由于振动产生的感应电动势来测量振动导体在磁场中移动。

23. 发明授权

US06987435B2 Micro-electromechanical actuators 失效
公开(公告)号：US06987435B2
公开(公告)日：2006-01-17
申请号：US10185654
申请日：2002-06-27
申请人： Jong Soo Ko , Dae Sik Lee , Myung Lae Lee , Chi Hoon Jun , Youn Tae Kim
发明人： Jong Soo Ko , Dae Sik Lee , Myung Lae Lee , Chi Hoon Jun , Youn Tae Kim
IPC分类号： H01H51/22
CPC分类号： H01H53/06 , B81B3/0021 , B81B2201/038 , B81B2203/0109 , B81B2203/051 , B81B2203/056 , B81B2203/058 , G02B6/266 , G02B6/3546 , G02B6/3572 , H01H1/0036 , H01H2001/0078
摘要： The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

24. 发明授权

US06253004B1 Optical interconnection structure for enlarging alignment tolerance 失效
标题翻译：用于扩大对准公差的光互连结构
公开(公告)号：US06253004B1
公开(公告)日：2001-06-26
申请号：US09350149
申请日：1999-07-09
申请人： Yong Hee Lee , Young Gu Ju , Myung Lae Lee
发明人： Yong Hee Lee , Young Gu Ju , Myung Lae Lee
IPC分类号： G02B626
CPC分类号： G02B6/4206 , G02B6/425
摘要： An optical interconnection structure between an optoelectric device and a single mode optical fiber for enlarging an alignment tolerance is provided. The optical interconnection structure is constituted by a microlensed optoelectric device and a graded index fiber ended single mode optical fiber. Light beams emitted from the optoelectric device are collimated by the microlens on the rear surface of a substrate or are enlarged in size by being focused or diverged. The extended output light travels a predetermined distance and then reaches the graded index fiber ended single mode optical fiber. When the length of the graded index optical fiber lens is appropriate, the incident extended beams are again focused by the lens, and thus enter into the single mode optical fiber while maintaining a great coupling efficiency. The optoelectric device and the microlens are integrated by the photolithography process, such that alignment with respect to all elements within a substrate is accomplished. Thus, there is no need to make optical alignment for each single element, resulting in the possibility of mass production. Since the graded index optical fiber lens and the single mode optical fiber have the same diameter and the same circular shape, so that they are easily aligned automatically and mechanically stable.
摘要翻译：提供了用于扩大对准公差的光电器件和单模光纤之间的光互连结构。光互连结构由微型光电器件和渐变折射率光纤端接单模光纤构成。从光电装置发射的光束被基板背面的微透镜准直，或者被聚焦或发散的尺寸增大。扩展输出光行进预定距离，然后到达渐变折射率光纤端单模光纤。当渐变折射率光纤透镜的长度适当时，入射的延伸光束再次被透镜聚焦，从而进入单模光纤同时保持很好的耦合效率。通过光刻工艺将光电器件和微透镜集成，使得相对于衬底内的所有元件的对准被实现。因此，不需要对每个单个元件进行光学对准，导致批量生产的可能性。由于分级折射率光纤透镜和单模光纤具有相同的直径和相同的圆形形状，使得它们易于自动且机械稳定地对准。

25. 发明授权

US08613287B2 Apparatus for preventing stiction of MEMS microstructure 有权
标题翻译：用于防止MEMS微结构静止的装置
公开(公告)号：US08613287B2
公开(公告)日：2013-12-24
申请号：US12672993
申请日：2008-04-14
申请人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
发明人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
IPC分类号： B08B3/00
CPC分类号： B81B3/001 , B81C2201/115
摘要： An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
摘要翻译：一种用于防止三维MEMS（微机电系统）微结构静止的装置，该装置包括：基板; 以及多个微型突起以预定的高度形成在基板的顶表面上，使得从布置在其上方的微结构流出的清洗溶液被排出。

26. 发明申请

US20090056448A1 BIDIRECTIONAL READOUT CIRCUIT FOR DETECTING DIRECTION AND AMPLITUDE OF CAPACITIVE MEMS ACCELEROMETERS 有权
标题翻译：用于检测电容式MEMS加速度计的方向和幅度的双向读出电路
公开(公告)号：US20090056448A1
公开(公告)日：2009-03-05
申请号：US12168025
申请日：2008-07-03
申请人： Sung Sik LEE , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik LEE , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P13/04
摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
摘要翻译：提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够被应用于各种MEMS传感器。

27. 发明授权

US07209608B2 Wavelength tunable optical filter 失效
标题翻译：波长可调滤光片
公开(公告)号：US07209608B2
公开(公告)日：2007-04-24
申请号：US10923838
申请日：2004-08-24
申请人： Chang Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
发明人： Chang Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Yun Tae Kim
IPC分类号： G02B6/28 , G02B6/36 , G02B27/00 , G02B1/10 , G02B5/28
CPC分类号： G02B26/001 , G02B2006/12109
摘要： Provided is a Fabry-Perot type wavelength tunable optical filter, comprising a first mirror; a second mirror located over the first mirror; a driving body located over the first mirror, and having both ends fixed to the first mirror through a spacer; a plurality of electrodes, each formed on both ends of the driving body; a rod structure connecting a center of the driving body and the second mirror; a plurality of fixing means, each fixed to the first mirror at both sides of the rod structure through the spacer; and a plurality of elastic bodies connecting the rod structure with the plurality of fixing means and acting as a rotational axis. And the mirror is driven by the rod structure acting as a lever that has an elastic body as a rotational axis, when warping is generated by electro-thermal expansion, electromagnetic force or external force. Thereby the mirror can be driven in the larger wavelength tunable range and the low power consumption.
摘要翻译：提供了一种法布里 - 珀罗型波长可调谐滤光器，包括第一反射镜; 位于第一镜上的第二镜; 位于所述第一反射镜上方的驱动体，并且其两端通过间隔件固定到所述第一反射镜; 多个电极，各自形成在所述驱动体的两端; 连接驱动体的中心和第二反射镜的杆结构; 多个固定装置，每个固定装置通过间隔件固定到杆结构的两侧的第一反射镜; 以及多个弹性体，其将所述杆结构与所述多个固定装置连接并用作旋转轴线。并且当由作为电热膨胀，电磁力或外力产生翘曲时，作为具有弹性体作为旋转轴的杠杆的杆结构驱动反射镜。从而可以在更大的波长可调范围和低功耗范围内驱动反射镜。

28. 发明授权

US06947656B2 Variable optical attenuator with tunable wavelength selectivity 有权
公开(公告)号：US06947656B2
公开(公告)日：2005-09-20
申请号：US10412580
申请日：2003-04-14
申请人： Chang-Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Youn Tae Kim
发明人： Chang-Kyu Kim , Myung Lae Lee , Chi Hoon Jun , Chang Auck Choi , Youn Tae Kim
IPC分类号： G02B26/02 , G02B6/26 , G02B6/34 , G02B6/35 , G02B6/00
CPC分类号： G02B6/352 , G02B6/266 , G02B6/29358 , G02B6/29389 , G02B6/29395 , G02B6/3514 , G02B6/3552 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3576 , G02B6/3578 , G02B6/3594
摘要： A variable optical attenuator with tunable wavelength selectivity includes at least two reflectors disposed parallel to each other at a predetermined angle from an optic axis and driving units connected to said at least two reflectors for allowing the reflectors to move back and forth in a direction perpendicular or parallel to the optic axis or to revolve centering on an axis perpendicular or parallel to the optic axis. Since the variable optical attenuator of the present invention serves as a variable optical attenuator and, at the same time, as a tunable wavelength filter, problems of insertion loss and optical alignment that might be caused by separately installing a variable optical attenuator and a wavelength filter can be effectively prevented. Moreover, by implementing the variable optical attenuator and the tunable wavelength filter by using a single device, the size of a system using the optical attenuator can be reduced.

29. 发明授权

US06360033B1 Optical switch incorporating therein shallow arch leaf springs 失效
标题翻译：光开关，其中包括浅拱形板簧
公开(公告)号：US06360033B1
公开(公告)日：2002-03-19
申请号：US09475051
申请日：1999-12-30
申请人： Jong Hyun Lee , Myung Lae Lee
发明人： Jong Hyun Lee , Myung Lae Lee
IPC分类号： G02B626
CPC分类号： G02B6/358 , B81B3/0054 , B81B2201/033 , B81B2201/045 , B81B2203/051 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/3584 , G02B26/0833
摘要： An optical switch selectively transmits an optical signal to one of multiple optical paths for use in an optical communication. The optical switch includes a mobile structure provided with a mirror surface at one end surface of the mobile structure to change the optical path by moving the mobile structure backward and forward along an axis parallel to the mirror surface. It has at least a pair of leaf springs in the form of a shallow arch, wherein each of the leaf springs is connected to both side surfaces of the mobile structure in a leaf spring axis perpendicular to the mirror surface, respectively, thereby obtaining a latch-up function and an actuator for moving the mobile structure. In the optical switch, elastic bodies are introduced into connection portions of the leaf springs, respectively, to give rise to a degree of freedom to the connection portions in the direction of the leaf spring axis. The elastic body can be an I-shape beam, a multiple spring with a curvature and an S-shape beam allowing angle deflection.
摘要翻译：光开关选择性地将光信号发送到多个光路中的一个以用于光通信。光学开关包括在移动结构的一个端面处设置有镜面的移动结构，以通过沿着平行于镜面的轴线向前和向前移动移动结构来改变光路。它具有至少一对形式为浅拱形的板簧，其中每个板簧分别在垂直于镜面的板簧轴上连接到移动结构的两个侧表面，从而获得闩锁 -up功能和用于移动移动结构的致动器。在光学开关中，弹性体分别被引入到板簧的连接部分中，从而在板簧轴线的方向上产生连接部分的自由度。弹性体可以是I形梁，具有曲率的多重弹簧和允许角度偏转的S形梁。

30. 发明授权

US08638110B2 High resolution circuit for converting capacitance-to-time deviation 有权
标题翻译：用于转换电容 - 时间偏差的高分辨率电路
公开(公告)号：US08638110B2
公开(公告)日：2014-01-28
申请号：US12675111
申请日：2008-07-21
申请人： Sung Sik Lee , Myung Lae Lee , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik Lee , Myung Lae Lee , Gunn Hwang , Chang Auck Choi
IPC分类号： G01R27/26
CPC分类号： G01D5/24
摘要： There is provided a high resolution circuit for converting a capacitance-to-time deviation including a capacitance deviation detecting unit generating two detection signals having a phase difference corresponding to variations of capacitance of an micro electro mechanical system (MEMS) sensor; a capacitance deviation amplifying unit dividing frequencies of the two detection signals to amplify the phase difference corresponding to the capacitance deviation; and a time signal generating unit generating a time signal having a pulse width corresponding to the amplified phase difference.
摘要翻译：提供了一种用于转换电容 - 时间偏差的高分辨率电路，包括产生具有与微机电系统（MEMS）传感器的电容变化相对应的相位差的两个检测信号的电容偏差检测单元; 电容偏差放大单元，对所述两个检测信号的频率进行分频，以放大与所述电容偏差对应的相位差; 以及时间信号生成单元，生成具有与放大后的相位差对应的脉冲宽度的时间信号。

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