专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08261617B2 Micro piezoresistive pressure sensor and manufacturing method thereof 有权
标题翻译：微压阻式压力传感器及其制造方法
公开(公告)号：US08261617B2
公开(公告)日：2012-09-11
申请号：US12745745
申请日：2008-04-21
申请人： Chang Auck Choi , Chang Han Je , Gunn Hwang , Youn Tae Kim , Sung Hae Jung , Myung Lae Lee , Sung Sik Lee , Seok Hwan Moon
发明人： Chang Auck Choi , Chang Han Je , Gunn Hwang , Youn Tae Kim , Sung Hae Jung , Myung Lae Lee , Sung Sik Lee , Seok Hwan Moon
IPC分类号： G01L9/06 , B23P17/04
CPC分类号： G01L9/0042 , Y10T29/42 , Y10T29/49
摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.
摘要翻译：提供一种微型半导体型压力传感器及其制造方法。微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

2. 发明授权

US08613287B2 Apparatus for preventing stiction of MEMS microstructure 有权
标题翻译：用于防止MEMS微结构静止的装置
公开(公告)号：US08613287B2
公开(公告)日：2013-12-24
申请号：US12672993
申请日：2008-04-14
申请人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
发明人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
IPC分类号： B08B3/00
CPC分类号： B81B3/001 , B81C2201/115
摘要： An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
摘要翻译：一种用于防止三维MEMS（微机电系统）微结构静止的装置，该装置包括：基板; 以及多个微型突起以预定的高度形成在基板的顶表面上，使得从布置在其上方的微结构流出的清洗溶液被排出。

3. 发明申请

US20090056448A1 BIDIRECTIONAL READOUT CIRCUIT FOR DETECTING DIRECTION AND AMPLITUDE OF CAPACITIVE MEMS ACCELEROMETERS 有权
标题翻译：用于检测电容式MEMS加速度计的方向和幅度的双向读出电路
公开(公告)号：US20090056448A1
公开(公告)日：2009-03-05
申请号：US12168025
申请日：2008-07-03
申请人： Sung Sik LEE , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik LEE , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P13/04
摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
摘要翻译：提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够被应用于各种MEMS传感器。

4. 发明授权

US07997137B2 Bidirectional readout circuit for detecting direction and amplitude of capacitive MEMS accelerometers 有权
标题翻译：用于检测电容MEMS加速度计的方向和振幅的双向读出电路
公开(公告)号：US07997137B2
公开(公告)日：2011-08-16
申请号：US12168025
申请日：2008-07-03
申请人： Sung Sik Lee , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik Lee , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
IPC分类号： G01P15/08
CPC分类号： G01P15/125 , G01P13/04
摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
摘要翻译：提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够被应用于各种MEMS传感器。

5. 发明申请

US20110186089A1 APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE 有权
标题翻译：防止MEMS微结构的装置
公开(公告)号：US20110186089A1
公开(公告)日：2011-08-04
申请号：US12672993
申请日：2008-04-14
申请人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
发明人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
IPC分类号： B08B3/00
CPC分类号： B81B3/001 , B81C2201/115
摘要： An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
摘要翻译：一种用于防止三维MEMS（微机电系统）微结构静止的装置，该装置包括：基板; 以及多个微型突起以预定的高度形成在基板的顶表面上，使得从布置在其上方的微结构流出的清洗溶液被排出。

6. 发明授权

US07975550B2 Micromachined sensor for measuring vibration 失效
标题翻译：用于测量振动的微加工传感器
公开(公告)号：US07975550B2
公开(公告)日：2011-07-12
申请号：US12111841
申请日：2008-04-29
申请人： Myung Lae Lee , Chang Han Je , Sung Sik Lee , Sung Hae Jung , Chang Auck Choi , Gunn Hwang
发明人： Myung Lae Lee , Chang Han Je , Sung Sik Lee , Sung Hae Jung , Chang Auck Choi , Gunn Hwang
IPC分类号： G01N29/00 , G01P15/10
CPC分类号： G01H11/02
摘要： There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.
摘要翻译：提供了一种用于测量振动的微机械传感器，其基于有机硅微加工技术，其中具有弹性的导体由于由振动产生的力连接到质量移动，并且通过使用由于振动产生的感应电动势来测量振动导体在磁场中移动。

7. 发明申请

US20100251826A1 MICRO PIEZORESISTIVE PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF 有权
标题翻译：微型PIEZORESISTIVE压力传感器及其制造方法
公开(公告)号：US20100251826A1
公开(公告)日：2010-10-07
申请号：US12745745
申请日：2008-04-21
申请人： Chang Auck Choi , Chang Han Je , Gunn Hwang , Youn Tae Kim , Sung Hae Jung , Myung Lae Lee , Sung Sik Lee , Seok Hwan Moon
发明人： Chang Auck Choi , Chang Han Je , Gunn Hwang , Youn Tae Kim , Sung Hae Jung , Myung Lae Lee , Sung Sik Lee , Seok Hwan Moon
IPC分类号： G01L9/06 , H01L41/22
CPC分类号： G01L9/0042 , Y10T29/42 , Y10T29/49
摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.
摘要翻译：提供一种微型半导体型压力传感器及其制造方法。微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

8. 发明授权

US07679186B2 Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same 失效
标题翻译：压电微电子机械系统开关，开关阵列及其制造方法
公开(公告)号：US07679186B2
公开(公告)日：2010-03-16
申请号：US11634627
申请日：2006-12-06
申请人： Sung Hae Jung , Myung Lae Lee , Sung Weon Kang
发明人： Sung Hae Jung , Myung Lae Lee , Sung Weon Kang
IPC分类号： H01L23/48
CPC分类号： H01H57/00 , H01H2057/006 , H01L2924/0002 , H01L2924/00
摘要： A piezoelectric micro electro-mechanical system switch (MEMS), an array of piezoelectric MEMS switches, and a method of fabricating the switch, which are capable of improving low voltage and switching characteristics while securing high signal isolation, are provided. The piezoelectric MEMS switch includes a semiconductor substrate including a groove, a support formed over the semiconductor substrate and the groove. An actuator including a piezoelectric layer is formed on the support. A switching member is formed on the support on one side of the actuator, wherein upward movement of the switching member changes by a deformation of the piezoelectric layer of the actuator. Radio frequency (RF) transfer lines are arranged at a predetermined distance on the switching member and are separated by a predetermined interval from each other. The actuator is formed to have at least two cantilevers each having one end such that the ends are connected to each other.
摘要翻译：提供压电微机电系统开关（MEMS），压电MEMS开关阵列，以及制造开关的方法，其能够在确保高信号隔离的同时提高低电压和开关特性。压电MEMS开关包括半导体衬底，其包括凹槽，形成在半导体衬底上的支撑件和凹槽。包括压电层的致动器形成在支撑件上。切换构件形成在致动器的一侧上的支撑件上，其中切换构件的向上运动通过致动器的压电层的变形而改变。射频（RF）传输线被布置在切换部件上的预定距离处并以彼此间隔预定间隔分开。致动器形成为具有至少两个悬臂，每个悬臂具有一端，使得端部彼此连接。

9. 发明授权

US08398921B2 Chemical sensor using metal nano-particles and method for manufacturing chemical sensor using metal nano-particles 有权
公开(公告)号：US08398921B2
公开(公告)日：2013-03-19
申请号：US12946852
申请日：2010-11-15
申请人： Myung Lae Lee , Young Jun Kim , Sung Hae Jung , Ho Jun Ryu , Jong Moo Lee
发明人： Myung Lae Lee , Young Jun Kim , Sung Hae Jung , Ho Jun Ryu , Jong Moo Lee
IPC分类号： G01N27/00 , G01N27/30 , G01N33/00 , G01N31/00
CPC分类号： B32B37/02 , B82Y15/00 , B82Y30/00 , B82Y40/00 , G01N33/0047 , Y10T29/49124 , Y10T156/10 , Y10T436/21 , Y10T436/212
摘要： A chemical sensor using metal nano-particles and a method for manufacturing a chemical sensor using metal nano-particles are provided. The chemical sensor includes: metal nano-particles; single-ligand organic molecules (or a single molecule) that binds to the metal nano-particles by using a metal bonding functional group; a substrate bonding functional group formed at the metal nano-particles and the single-ligand organic molecules as bound to each other; a substrate; electrodes formed on the substrate and having an interdigitate (IDT) structure; and a substrate functional group formed on the substrate and positioned between the electrodes, wherein the substrate bonding functional group and the substrate functional group are covalently bonded.

10. 发明授权

US06992637B2 Slot antenna having slots formed on both sides of dielectric substrate 有权
标题翻译：插槽天线，其具有形成在电介质基板两侧的槽
公开(公告)号：US06992637B2
公开(公告)日：2006-01-31
申请号：US10743459
申请日：2003-12-23
申请人： Jung Hwan Hwang , Sung Hae Jung , Woo Seok Yang , Jae Woo Lee , Sung Weon Kang , Yun Tae Kim
发明人： Jung Hwan Hwang , Sung Hae Jung , Woo Seok Yang , Jae Woo Lee , Sung Weon Kang , Yun Tae Kim
IPC分类号： H01Q13/10
CPC分类号： H01Q1/38 , H01Q13/16
摘要： The present invention is provided to manufacture a slot antenna having slots formed on both sides, that is, a top and a bottom of a dielectric substrate, wherein electric fields in the slots are generated in the utmost same direction. According to this structure, it is possible to realize a compact and lightweight slot antenna having higher gain and radiation efficiency characteristics in comparison with the conventional meandered slot antenna.
摘要翻译：本发明提供用于制造具有形成在两侧上的槽的缝隙天线，即电介质衬底的顶部和底部，其中槽中的电场在最大相同的方向上产生。根据该结构，与传统的蜿蜒槽缝天线相比，可以实现具有较高增益和辐射效率特性的紧凑且重量轻的缝隙天线。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式