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    • 28. 发明授权
    • SOI lens structure for medical probe
    • 医用探头的SOI透镜结构
    • US08675293B2
    • 2014-03-18
    • US12693186
    • 2010-01-25
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • G02B7/02
    • B29D11/0073G02B6/32G02B23/2423
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着复合晶片材料的背面通过复合晶片材料的背面形成光学端口 折射透镜的光轴。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 29. 发明申请
    • SOI Lens Structure for Medical Probe
    • 医疗探针的SOI透镜结构
    • US20110181966A1
    • 2011-07-28
    • US12693186
    • 2010-01-25
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • G02B1/02G02B1/00B29D11/00
    • B29D11/0073G02B6/32G02B23/2423
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 30. 发明授权
    • Tunable laser with polarization anisotropic amplifier for fabry-perot filter reflection isolation
    • 具有极化各向异性放大器的可调谐激光器,用于fabry-perot滤光镜反射隔离
    • US06339603B1
    • 2002-01-15
    • US09696055
    • 2000-10-25
    • Dale C. FlandersMark E. Kuznetsov
    • Dale C. FlandersMark E. Kuznetsov
    • H01S310
    • H01S5/141H01S5/02248H01S5/0264H01S5/0617H01S5/0687H01S5/142
    • A semiconductor tunable laser system includes a tunable Fabry-Perot cavity and a cavity length modulator, which controls an optical length of the cavity at least over a distance corresponding to the spacings between the longitudinal modes of the laser cavity. Thus, the tunable Fabry-Perot cavity allows the laser cavity to have gain at the desired wavelength of operation while the cavity length modulator tunes the cavity length such that a longitudinal cavity mode exists at the desired wavelength of operation. Also, in one embodiment, a wavelength locker system is further provides that has a differential wavelength filter, e.g., stepped etalon, and a multi-element detector, e.g., a quad-detector. The controller then modulators the Fabry-Perot cavity to control the wavelength in response to the signal received from the multi-element detector.
    • 半导体可调谐激光器系统包括可调谐的法布里 - 珀罗腔和空腔长度调制器,其控制空腔的光学长度至少在与激光腔的纵向模式之间的间隔相对应的距离上。 因此,可调谐法布里 - 珀罗腔允许激光腔在所需的操作波长下具有增益,而空腔长度调制器调谐腔长度,使得在期望的操作波长处存在纵向腔模式。 而且,在一个实施例中,还提供波长锁存器系统,其具有差分波长滤波器,例如阶梯式标准具,以及多元件检测器,例如四检测器。 然后,控制器调制法布里 - 珀罗腔,以响应于从多元件检测器接收到的信号来控制波长。