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21. 发明授权

US06317198B1 Method of examining an exposure tool 失效
标题翻译：检查曝光工具的方法
公开(公告)号：US06317198B1
公开(公告)日：2001-11-13
申请号：US09345758
申请日：1999-07-01
申请人： Kazuya Sato , Satoshi Tanaka , Tadahito Fujisawa , Soichi Inoue
发明人： Kazuya Sato , Satoshi Tanaka , Tadahito Fujisawa , Soichi Inoue
IPC分类号： G03B2732
CPC分类号： G03F7/706
摘要： In a method of examining the shape of the light source of an exposure tool, the shape of the pupil of its projection optical system, and the alignment of the shape of the light source with the shape of the pupil, the exposure tool comprising a light source, an illumination optical system for directing the light emitted from the light source to a reticle, and a projection optical system for transferring the reduced image on the reticle onto a wafer, the light emitted from the light source is projected on a reticle including a grating pattern where a transmitting area and a shading area are repeated in a finite number, the diffracted light of the first order or higher passed through the reticle is caused to illuminate the outer edge of the pupil of the projection optical system, and the pattern image on the reticle is projected on the wafer in the defocus state.
摘要翻译：在检查曝光工具的光源的形状，其投影光学系统的光瞳的形状以及光源的形状与瞳孔的形状的对准的方法中，曝光工具包括光光源，用于将从光源发射的光引导到掩模版的照明光学系统，以及用于将掩模版上的还原图像转印到晶片上的投影光学系统，从光源发射的光被投射在包括以有限数量重复发送区域和阴影区域的光栅图案，使通过标线的一级以上的衍射光照射投影光学系统的光瞳的外缘，并且图案图像在散焦状态下，在掩模版上投影在晶片上。

22. 发明授权

US06171708B2 Sulfur containing atomic group introduced porous article 失效
标题翻译：含硫原子团引入多孔物品
公开(公告)号：US06171708B2
公开(公告)日：2001-01-09
申请号：US09255661
申请日：1999-02-22
申请人： Yasushi Takeuchi , Masaaki Kawabe , Hiroaki Yamazaki , Masashi Kaneko , Genya Anan , Kazuya Sato
发明人： Yasushi Takeuchi , Masaaki Kawabe , Hiroaki Yamazaki , Masashi Kaneko , Genya Anan , Kazuya Sato
IPC分类号： B32B904
CPC分类号： D06M10/06 , B29C59/12 , B29K2105/0854 , C08J7/12 , D06M10/025 , D06M11/51 , H01M2/16 , H01M2/162 , Y10S526/917 , Y10T428/24999 , Y10T428/8305
摘要： A porous article wherein a sulfur containing atomic group is introduced onto at least a part of outer-inner surfaces of the article, a ratio (S/C) of the number of sulfur atoms (S) to the number of carbon atoms (C) on the surface onto which the sulfur containing atomic group is introduced is 7×10−4 or more, a ratio (O/C) of the number of oxygen atoms (O) to the number of carbon atoms (C) on the surface onto which the sulfur containing atomic group is introduced is 0.2 or more, and the ratio (S/C) and the ratio (O/C) are determined by means of an X-ray photoelectron spectrophotometer is disclosed.
摘要翻译：将含硫原子团引入制品的外表面的至少一部分的多孔制品，硫原子数（S）与碳原子数（C）的比（S / C）在其上引入含硫原子团的表面上为7×10 -4以上，表面上的氧原子数（O）与碳原子数（C）的比（O / C）含硫的原子团为0.2以上，通过X射线光电子分光光度计测定比（S / C）和比率（O / C）。

23. 发明授权

US6130747A Method of measuring aberrations of lens 有权
标题翻译：测量镜片像差的方法
公开(公告)号：US6130747A
公开(公告)日：2000-10-10
申请号：US251997
申请日：1999-02-18
申请人： Hiroshi Nomura , Kazuya Sato
发明人： Hiroshi Nomura , Kazuya Sato
IPC分类号： G01M11/00 , G01M11/02 , G03F7/20 , G03F9/00 , H01L21/027 , G01N21/00
CPC分类号： G01M11/0264 , G03F7/706
摘要： A method of measuring the aberrations of a projection lens is disclosed. In this method, a photo-mask is irradiated with an illumination beam through an illumination optics, an inspection mark which comprises a periodic pattern on the photo-mask is imaged on a substrate through a projection optics, and a measurement mark which comprises a periodic pattern corresponding to the periodic pattern of the inspection mark is provided on the substrate. A period P of the periodic pattern of the measurement mark satisfies the following condition:.lambda./{NA(1-.sigma.)}.ltoreq.P.ltoreq.3.lambda./{NA(1+.sigma.)}The measurement mark is measured, and the aberrations of the projection lens are estimated on the basis of the measurement result.
摘要翻译：公开了一种测量投影透镜的像差的方法。在该方法中，通过照明光学器件照射光照射光束，通过投影光学器件将包含在光掩模上的周期性图案的检查标记成像在基板上，并且包括周期性的测量标记在基板上设置与检查标记的周期性图案对应的图案。测量标记的周期性图形的周期P满足以下条件：λ/ {NA（1-sigma）}

24. 发明授权

US5810573A Scroll compressor having a baffle plate and oil passages in the orbiting scroll member 失效
标题翻译：涡旋式压缩机在绕动涡旋件中具有挡板和油路
公开(公告)号：US5810573A
公开(公告)日：1998-09-22
申请号：US757582
申请日：1996-11-27
申请人： Toshihiko Mitsunaga , Kazuya Sato
发明人： Toshihiko Mitsunaga , Kazuya Sato
IPC分类号： F04C27/00 , F04C18/02 , F04C23/00 , F04C29/00 , F04C29/02 , F04C29/06 , F04C18/04
CPC分类号： F04C18/0253 , F04C23/008 , F04C29/0007 , F04C29/025 , F04C2240/603
摘要： A compression chamber of a scroll compression element driven by a crank shaft of an electromotive element and stored in an upper portion of a closed container is formed by engaging spiral wraps formed on the mirror plates of a fixed scroll member and an orbiting scroll member with each other, a bush portion having an engagement hole to be engaged with an upper end portion of the crank shaft is formed in a central axis portion of the under surface of the mirror plate of the orbiting scroll member, a space formed between the engagement hole of the bush portion and the upper end portion of the crank shaft serves as an oil input port, lubricating oil which is stored in an oil reservoir in an inner bottom portion of the closed container and goes up through an oil passage formed within the crank shaft by an oil pump unit is supplied from the oil input port into the compression chamber, oil injection communication passages communicating with the compression chamber from the oil input port are formed in the mirror plate of the orbiting scroll member, and the open ends on the compression chamber side of the oil injection communication passages are made open to positions near terminal portions of the spiral wraps for an initial-stage compression room formed in the fixed scroll member and the orbiting scroll member.
摘要翻译：由电动元件的曲轴驱动并存储在密闭容器的上部的涡旋压缩元件的压缩室通过将形成在固定涡旋构件和绕动涡旋件的反射板上的螺旋形涡卷与每个另外，具有与曲轴的上端部接合的卡合孔的套筒部形成在绕动涡旋部件的镜板的下表面的中心轴部，曲轴的衬套部分和上端部分用作油输入口，润滑油储存在密封容器的内底部的储油器中，并通过形成在曲轴内的油通道向上通过油泵单元从油输入口供给到压缩室，从油输入口与压缩室连通的注油连通路形成在绕动涡旋构件的反射板中，并且油喷射连通通道的压缩室侧的开口端被开放到用于形成在固定涡旋件中的初级压缩室的螺旋形涡卷的端部附近的位置构件和绕动涡旋构件。

25. 发明授权

US5235331A Key scanning apparatus 失效
标题翻译：钥匙扫描仪
公开(公告)号：US5235331A
公开(公告)日：1993-08-10
申请号：US704998
申请日：1991-05-28
申请人： Kazuya Sato
发明人： Kazuya Sato
IPC分类号： G06F3/023 , H03M11/20
CPC分类号： H03M11/20
摘要： A key scanning apparatus includes display control circuit for receiving display data and for generating a display control signal which includes display timing periods for driving a display and key scan timing periods for scanning a key matrix. The display timing periods and the key scan timing periods appear in the display control signal in a time sharing manner. The key scanning apparatus also includes a key scan control circuit for outputting a key scan signal to scan the key matrix on the basis of the display control signal and selector for selectively applying either one of the display control signal and the key scan signal to data transfer lines. When the selector outputs the display control signal to the data transfer lines, transfer display data is transferred, and when the selector outputs the key scan signal to the transfer lines, key scan data is transferred. An interrupt control circuit is also provided which generates and outputs a key scan interrupt request signal to the CPU and a key data hold circuit is also provided which receives and holds key data from the key matrix in synchronism with the key scan signal, applies the held data to the CPU, and generates a key scan inhibit signal to inhibit the succeeding key scan operation until the held key data is read by the CPU.
摘要翻译：键扫描装置包括显示控制电路，用于接收显示数据并产生显示控制信号，该显示控制信号包括用于驱动显示的显示定时周期和用于扫描键矩阵的键扫描定时周期。显示定时周期和键扫描定时周期以分时方式出现在显示控制信号中。钥匙扫描装置还包括一个按键扫描控制电路，用于根据显示控制信号和选择器输出按键扫描信号扫描按键矩阵，以便选择性地将显示控制信号和键扫描信号中的任一个应用于数据传送线条。当选择器将显示控制信号输出到数据传输线时，传送显示数据被传送，并且当选择器将键扫描信号输出到传送线时，键扫描数据被传送。还提供了一个中断控制电路，它产生并将一个键扫描中断请求信号输出给CPU，并且还提供了一个关键数据保持电路，它与按键扫描信号同步地从键矩阵接收和保存关键数据，数据发送到CPU，并产生键扫描禁止信号，以禁止随后的键扫描操作，直到CPU读取保持的键数据。

26. 发明授权

US08834234B2 Double-side polishing apparatus 有权
标题翻译：双面抛光装置
公开(公告)号：US08834234B2
公开(公告)日：2014-09-16
申请号：US13509696
申请日：2010-11-16
申请人： Junichi Ueno , Kazuya Sato , Syuichi Kobayashi
发明人： Junichi Ueno , Kazuya Sato , Syuichi Kobayashi
IPC分类号： B24B37/013 , B24B37/08
CPC分类号： B24B37/013 , B24B37/08
摘要： A double-side polishing apparatus including at least: upper and lower turn tables each having a polishing pad attached thereto; a carrier having a holding hole formed therein for holding a wafer between the upper and lower turn tables; a sensor for detecting a thickness of the wafer during polishing, the sensor being disposed in a through-hole provided at the upper turn table in a direction of an upper-turn-table rotation axis; and a sensor holder for holding the sensor, wherein a material of the sensor holder is quartz. As a result, there is provided a double-side polishing apparatus that can polish a wafer while the difference from the target wafer thickness is reduced by surely inhibiting deformation of the sensor holder due to the influence of heat generated during the polishing of the wafer.
摘要翻译：一种双面抛光装置，其至少包括：上下转台，每个具有附着在其上的抛光垫; 具有形成在其中用于将晶片保持在上下转台之间的保持孔的载体; 用于在抛光期间检测晶片的厚度的传感器，所述传感器设置在设置在所述上转台上的通孔中，所述通孔沿上转盘旋转轴线的方向; 以及用于保持传感器的传感器保持器，其中传感器保持器的材料是石英。结果，提供了一种双面抛光装置，其可以通过可靠地抑制由于在晶片的抛光期间产生的热的影响而可靠地抑制传感器保持器的变形，从而可以减少与目标晶片厚度之间的差异。

27. 发明授权

US08426329B2 Duplex eutectic silicon alloy, manufacturing method thereof, and manufacturing method of sintered compact using silicon alloy powder 失效
标题翻译：双相共晶硅合金及其制造方法以及使用硅合金粉末的烧结体的制造方法
公开(公告)号：US08426329B2
公开(公告)日：2013-04-23
申请号：US12917820
申请日：2010-11-02
申请人： Toshiyuki Watanabe , Masafumi Matsushita , Toshitaka Sakurai , Kazuya Sato , Yoko Matsushita , Takayoshi Misaki , Setsuko Shindo , Ayumi Shindo , Yumiko Kubota , Akiko Matsushita , Kunio Saito , Takumi Shitara , Futoshi Yanagino , Takashi Yoshida , Takashi Mizushima , Osamu Matsuzono , Kazuaki Sato , Kouki Shimizu
发明人： Toshiyuki Watanabe , Masafumi Matsushita , Toshitaka Sakurai , Kazuya Sato , Yoko Matsushita , Takayoshi Misaki , Setsuko Shindo , Ayumi Shindo , Yumiko Kubota , Akiko Matsushita , Kunio Saito , Takumi Shitara , Futoshi Yanagino , Takashi Yoshida , Takashi Mizushima , Osamu Matsuzono , Kazuaki Sato , Kouki Shimizu
IPC分类号： C04B35/599
CPC分类号： C04B35/597 , C04B35/6263 , C04B35/62655 , C04B35/6316 , C04B2235/3418 , C04B2235/421 , C04B2235/5445 , C04B2235/606 , C04B2235/658 , C04B2235/76 , C04B2235/767 , C04B2235/81 , C04B2235/9623
摘要： A duplex eutectic silicon alloy including 30-70 weight % silicon, 10-45 weight % nitrogen, 1-40 weight % aluminum, and 1-40 weight % oxygen has a eutectic structure comprising a β′-sialon phase and an ο′-sialon phase. The alloy is produced by controlling cooling at a rate of 50° C. or less per minute in combustion synthesis. A ductile sintered product capable of replacing steel in various applications can be produced by placing a compact composed of a powder of the alloy in a sintering furnace which can supply a heat quantity at least ten times the heat capacity of the compact; and sintering the compact at a pressure at least as great as atmospheric pressure, within a nitrogen atmosphere in which the silicon gas mole fraction is 10% or more, and at a temperature within the range from 1400° C. to 1700° C.
摘要翻译：包含30-70重量％硅，10-45重量％氮，1-40重量％铝和1-40重量％氧气的双相共晶硅合金具有包含β'-赛隆相和二甲基亚砜的共晶结构，赛隆相通过在燃烧合成中以每分钟50℃或更低的速率控制冷却来生产合金。能够在各种应用中替代钢的延性烧结体可以通过将由合金粉末组成的压块放置在烧结炉中来制造，所述烧结炉能够提供至少十倍于压坯的热容量的热量; 在至少与大气压相同的压力下，在硅气体摩尔分数为10％以上的氮气气氛中，在1400℃〜1700℃的温度范围内烧结成形体。

28. 发明授权

US08273291B2 Silicon alloy, alloy powder thereof, manufacturing apparatus, manufacturing process and sintered alloy thereof 失效
标题翻译：硅合金，其合金粉末，制造装置，制造工艺及其烧结合金
公开(公告)号：US08273291B2
公开(公告)日：2012-09-25
申请号：US12407300
申请日：2009-03-19
申请人： Toshiyuki Watanabe , Masafumi Matsushita , Toshitaka Sakurai , Kazuya Sato , Yoko Matsushita
发明人： Toshiyuki Watanabe , Masafumi Matsushita , Toshitaka Sakurai , Kazuya Sato , Yoko Matsushita
IPC分类号： B22F1/00
CPC分类号： C22C30/00 , B22F3/23 , C21D11/00
摘要： A controlled combustion synthesis apparatus comprises an ignition system, a pressure sensor for detecting internal pressure, a nitrogen supply, a gas pressure control valve for feeding nitrogen and exhausting reaction gas, means for detecting the internal temperature of the reaction container, a water cooled jacket, and a cooling plate. A temperature control system controls the temperature of the reaction container by controlling the flow of cooling water supplied to the jacket and the cooling plate in response to the detected temperature. By combustion synthesizing, while controlling the internal pressure and temperature, the apparatus can synthesize a silicon alloy including 30-70 wt. % silicon, 10-45 wt. % nitrogen, 1-40 wt. % aluminum, and 1-40 wt % oxygen.
摘要翻译：控制燃烧合成装置包括点火系统，用于检测内部压力的压力传感器，氮气供应，用于输入氮气和排出反应气体的气体压力控制阀，用于检测反应容器的内部温度的装置，水冷套管，和冷却板。温度控制系统通过响应于检测到的温度控制供给到护套和冷却板的冷却水的流量来控制反应容器的温度。通过燃烧合成，在控制内部压力和温度的同时，该装置可以合成包含30-70wt。％硅，10-45wt。％氮，1-40重量％％铝和1-40重量％的氧。

29. 发明申请

US20090185947A1 SILICON ALLOY, ALLOY POWDER THEREOF, MANUFACTURING APPARATUS, MANUFACTURING PROCESS AND SINTERED ALLOY THEREOF 失效
标题翻译：硅合金，其合金粉末，制造设备，制造工艺及其烧结合金
公开(公告)号：US20090185947A1
公开(公告)日：2009-07-23
申请号：US12407300
申请日：2009-03-19
申请人： Toshiyuki Watanabe , Masafumi Matsushita , Toshitaka Sakurai , Kazuya Sato , Yoko Matsushita
发明人： Toshiyuki Watanabe , Masafumi Matsushita , Toshitaka Sakurai , Kazuya Sato , Yoko Matsushita
IPC分类号： C22C28/00 , B22F1/00 , C22C1/00 , C22C30/00 , C21D11/00 , C09K3/00
CPC分类号： C22C30/00 , B22F3/23 , C21D11/00
摘要： A controlled combustion synthesis apparatus comprises an ignition system, a pressure sensor for detecting internal pressure, a nitrogen supply, a gas pressure control valve for feeding nitrogen and exhausting reaction gas, means for detecting the internal temperature of the reaction container, a water cooled jacket, and a cooling plate. A temperature control system controls the temperature of the reaction container by controlling the flow of cooling water supplied to the jacket and the cooling plate in response to the detected temperature. By combustion synthesizing, while controlling the internal pressure and temperature, the apparatus can synthesize a silicon alloy including 30-70 wt. % silicon, 10-45 wt. % nitrogen, 1-40 wt. % aluminum, and 1-40 wt % oxygen.
摘要翻译：控制燃烧合成装置包括点火系统，用于检测内部压力的压力传感器，氮气供应，用于输入氮气和排出反应气体的气体压力控制阀，用于检测反应容器的内部温度的装置，水冷套管，和冷却板。温度控制系统通过响应于检测到的温度控制供给到护套和冷却板的冷却水的流量来控制反应容器的温度。通过燃烧合成，在控制内部压力和温度的同时，该装置可以合成包含30-70wt。％硅，10-45wt。％氮，1-40重量％％铝和1-40重量％的氧。

30. 发明授权

US07416395B2 Sleeve for coupling a refrigerant pipe to a compressor container 有权
标题翻译：用于将制冷剂管连接到压缩机容器的套筒
公开(公告)号：US07416395B2
公开(公告)日：2008-08-26
申请号：US11238107
申请日：2005-09-28
申请人： Kazuya Sato
发明人： Kazuya Sato
IPC分类号： F03C2/00 , F04C18/00
CPC分类号： F04C23/008 , F01C21/10 , F04C18/3564 , F04C23/001 , F04C2230/231 , F04C2240/30 , F04C2240/806
摘要： A sleeve connecting a refrigerant pipe to a sealed compressor container has a reduced outer dimension and an inner step that accommodates the refrigerant pipe. An end of the refrigerant pipe abuts the inner step to accurately locate the refrigerant pipe to permit the refrigerant pipe to be secured in an desired relationship with the sleeve. The sleeve is attached to the container with increased accuracy and less chance of damage to the container through deformation during the attachment process. The sleeve and container may be composed of iron, while the refrigerant pipe may be composed of copper, so that the more rigid sleeve can accurately couple the less rigid refrigerant pipe to the container.
摘要翻译：将制冷剂管连接到密封的压缩机容器的套筒具有减小的外部尺寸和容纳制冷剂管的内部步骤。制冷剂管的一端与内部台阶抵接以精确地定位制冷剂管，以使制冷剂管能够与套筒保持期望的关系。通过在附接过程中变形，套筒以更高的准确性和较少的容器损坏附着在容器上。套管和容器可以由铁组成，而制冷剂管可以由铜组成，使得更刚性的套筒可以将较不刚性的制冷剂管道精确地联接到容器。

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