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    • 25. 发明授权
    • Vitreous silica crucible for pulling silicon single crystal
    • 硅玻璃坩埚用于拉硅单晶
    • US08715415B2
    • 2014-05-06
    • US12752374
    • 2010-04-01
    • Makiko KodamaHiroshi KishiMinoru Kanda
    • Makiko KodamaHiroshi KishiMinoru Kanda
    • C30B15/10
    • C30B15/10C30B29/06C30B35/002
    • Provided is a vitreous silica crucible for pulling silicon single crystals, which can melt a silicon raw material in a short time and improve production yield of silicon single crystals by temporal change of an opaque vitreous silica layer. The vitreous silica crucible includes an opaque vitreous silica layer(11) provided on an outer surface thereof and containing plural bubbles, and a transparent vitreous silica layer(12) provided on an inner surface and not containing bubbles substantially. The opaque vitreous silica layer(11) has a bubble diameter distribution in which the content of bubbles having a diameter of less than 40 μm is 10% or more and less than 30%, the content of bubbles having a diameter of 40 μm or more and less than 90 μm is 40% or more and less than 80%, and the content of bubbles having a diameter equal to or more than 90 μm is 10% or more and less than 30%. Relatively small bubbles contained in the opaque vitreous silica layer(11) contribute to the thermal conductivity of a crucible at an initial pulling stage, and relatively large bubbles contained in the opaque vitreous silica layer are expanded through a long-term pulling process to thereby largely contribute to the warmth retaining property of the crucible at a later pulling stage.
    • 本发明提供一种用于拉伸硅单晶的石英玻璃坩埚,其可以在短时间内熔化硅原料,并且通过不透明氧化硅玻璃层的时间变化提高硅单晶的产率。 石英玻璃坩埚包括设置在其外表面并且包含多个气泡的不透明玻璃状石英层(11),以及设置在内表面上且基本上不含有气泡的透明玻璃状石英层(12)。 不透明玻璃状石英层(11)具有气泡直径分布,其中直径小于40μm的气泡的含量为10%以上且小于30%,气泡的直径为40μm以上 小于90μm的是40%以上且小于80%,直径等于或大于90μm的气泡的含量为10%以上且小于30%。 包含在不透明玻璃状二氧化硅层(11)中的相对小的气泡有助于在初始拉伸阶段的坩埚的导热性,并且通过长期拉伸工艺使包含在不透明玻璃状二氧化硅层中的相对大的气泡膨胀,从而大大地扩大 有助于在稍后的拉动阶段坩埚的保温性能。
    • 27. 发明授权
    • Method for producing quartz glass crucible
    • 生产石英玻璃坩埚的方法
    • US08286447B2
    • 2012-10-16
    • US12169838
    • 2008-07-09
    • Hiroshi KishiMinoru Kanda
    • Hiroshi KishiMinoru Kanda
    • C03B19/01C03B19/06
    • C03B19/095C30B15/10C30B35/002
    • A method of producing a quartz glass crucible by arc melting a quartz powder molded product loaded on the inner side of a mold while performing vacuum suction, includes initiating the melting of quartz powder from the rim edge of a quartz powder molded product, subsequently lowering the arc electrode or raising the mold to heat and melt the sections on the downside of the rim edge. The method is preferably carried out such that the inner surface of the crucible is sealed within a time corresponding to 10% of the total arc time starting from the initiation of arc melting, and the seal thickness is 3 mm or less. The quartz glass crucible thus produced is useful for the pulling up of silicon single crystals and has a uniform glass layer with fewer internal bubbles.
    • 通过电弧熔融装载在模具内侧的石英粉末成形体同时进行真空抽吸来制造石英玻璃坩埚的方法包括从石英粉末成型品的边缘开始熔融石英粉末,随后将 电弧电极或提升模具以加热和熔化边缘边缘的下侧的部分。 该方法优选进行,使得坩埚的内表面在从电弧熔化开始起的总电弧时间的10%的时间内密封,并且密封厚度为3mm以下。 由此制造的石英玻璃坩埚可用于提升硅单晶,并且具有均匀的具有较少内部气泡的玻璃层。