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    • 21. 发明授权
    • Polishing apparatus and substrate processing apparatus
    • 抛光装置和基板处理装置
    • US07862402B2
    • 2011-01-04
    • US12699318
    • 2010-02-03
    • Akihisa HongoKenya ItoKenji YamaguchiMasayuki Nakanishi
    • Akihisa HongoKenya ItoKenji YamaguchiMasayuki Nakanishi
    • B24B49/00
    • B24B37/02B24B9/065B24B21/002
    • The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing for forming a polishing chamber therein, a rotational table for holding and rotating a substrate, a polishing tape supply mechanism for supplying a polishing tape into the polishing chamber and taking up the polishing tape which has been supplied to the polishing chamber, a polishing head for pressing the polishing tape against a bevel portion of the substrate, a liquid supply for supplying a liquid to a front surface and a rear surface of the substrate, and a regulation mechanism for making an internal pressure of the polishing chamber being set to be lower than an external pressure of the polishing chamber.
    • 本发明涉及一种用于去除在基板的周边部分产生的表面粗糙度或用于去除形成在基板的周边部分上的膜的抛光装置。 抛光装置包括:用于在其中形成抛光室的壳体,用于保持和旋转基板的旋转台;抛光带供给机构,用于将研磨带供给到抛光室中并且吸收已经被供给到抛光的研磨带 用于将抛光带压靠在基板的斜面部分上的抛光头,用于将液体供应到基板的前表面和后表面的液体供应源,以及用于使抛光室的内部压力的调节机构 被设定为低于抛光室的外部压力。
    • 24. 发明授权
    • Polishing apparatus and substrate processing apparatus
    • 抛光装置和基板处理装置
    • US07682225B2
    • 2010-03-23
    • US10581669
    • 2005-02-23
    • Akihisa HongoKenya ItoKenji YamaguchiMasayuki Nakanishi
    • Akihisa HongoKenya ItoKenji YamaguchiMasayuki Nakanishi
    • B24B24/00
    • B24B37/02B24B9/065B24B21/002
    • The present invention relates to a polishing apparatus for removing surface roughness produced at a peripheral portion of a substrate, or for removing a film formed on a peripheral portion of a substrate. The polishing apparatus includes a housing for forming a polishing chamber therein, a rotational table for holding and rotating a substrate, a polishing tape supply mechanism for supplying a polishing tape into the polishing chamber and taking up the polishing tape which has been supplied to the polishing chamber, a polishing head for pressing the polishing tape against a bevel portion of the substrate, a liquid supply for supplying a liquid to a front surface and a rear surface of the substrate, and a regulation mechanism for making an internal pressure of the polishing chamber being set to be lower than an external pressure of the polishing chamber.
    • 本发明涉及一种用于去除在基板的周边部分产生的表面粗糙度或用于去除形成在基板的周边部分上的膜的抛光装置。 抛光装置包括:用于在其中形成抛光室的壳体,用于保持和旋转基板的旋转台;抛光带供给机构,用于将研磨带供给到抛光室中并且吸收已经被供给到抛光的研磨带 用于将抛光带压靠在基板的斜面部分上的抛光头,用于将液体供应到基板的前表面和后表面的液体供应源,以及用于使抛光室的内部压力的调节机构 被设定为低于抛光室的外部压力。
    • 29. 发明授权
    • In-mold foam molding apparatus and method, and in-mold foam molded articles
    • 模内发泡成型装置和方法以及模内发泡成型制品
    • US07172717B2
    • 2007-02-06
    • US10617091
    • 2003-07-11
    • Masahiko SameshimaYoshiyuki KobayashiKenji Yamaguchi
    • Masahiko SameshimaYoshiyuki KobayashiKenji Yamaguchi
    • B29C44/04
    • B29C44/0469Y10S425/247Y10T428/24174Y10T428/24273Y10T428/24331Y10T428/24996Y10T428/249981
    • There is provided an in-mold foam molding apparatus affording a significantly simpler design for a molding apparatus capable of molding molded portions comprising bead starting materials having different properties into a unitary molded article, and effectively preventing various drawbacks associated with the provision of partitioning members; and an in-mold foam molded article devoid of flash projecting from its visible surfaces. There are provided partitioning members (32), (40) for partitioning into a plurality of partitioned mold chambers a mold cavity (13) defined by a core mold (11) and a cavity mold (12), these partitioning members (32), (40) being arranged such that at least a portion of the plurality of partitioned molding sections (11a), (11b) constituting the partitioned mold chambers within the core mold (11) are unitary, and filling units are provided to each partitioned mold chamber for filling thereof with a bead starting material, adjacent partitioned mold chambers being fillable with bead starting materials of different properties.
    • 提供了一种模内发泡成型装置,其对于能够将包括具有不同性质的珠粒起始材料成型的成型部分的模制装置设计成一体成型制品,并且有效地防止了与提供分隔件相关的各种缺陷; 以及从其可见表面没有闪光的模内发泡模塑制品。 设置有分隔构件(32),(40),用于将由模芯(11)和空腔模具(12)限定的模腔(13)分隔成多个分隔模腔,这些分隔构件(32), (40)被布置成使得在所述芯模具(11)内构成分隔模腔的所述多个分隔模塑部分(11a),(11b)的至少一部分是一体的,并且将填充单元设置到每个分隔 模具室,用于用胎圈起始材料填充,相邻的分隔模具室可以用不同性质的胎圈起始材料填充。