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    • 21. 发明授权
    • Apparatus for reproducing signals from a tape medium
    • 用于从磁带介质再现信号的装置
    • US6122129A
    • 2000-09-19
    • US811161
    • 1997-03-04
    • Osamu AokiHideaki Kondo
    • Osamu AokiHideaki Kondo
    • G11B15/665G11B15/46
    • G11B15/6656
    • An apparatus for reproducing signals which are recorded on a tape to form oblique tracks thereon. The apparatus includes a drum which has a plurality of rotary heads adjoining each other for scanning respective oblique tracks simultaneously to produce reproduced signals. The tape is wrapped around the drum and overlaps a first lead angle so that each of the rotary heads scans a plurality of the oblique tracks during one rotation in a still mode in which the tape is not transported. A control unit is also provided for controlling a rotational speed of the rotary heads and a transport speed of the tape; and a processes unit for processing the reproduced signals.
    • 一种用于再现记录在磁带上以在其上形成斜轨道的信号的装置。 该设备包括一个鼓,该滚筒具有彼此相邻的多个旋转头,用于同时扫描相应的倾斜轨道以产生再现信号。 磁带缠绕在磁鼓上并与第一引导角重叠,使得每个旋转磁头在不传输磁带的静止模式下的一个旋转期间扫描多个倾斜磁道。 还设置有用于控制旋转头的旋转速度和带的传送速度的控制单元; 以及用于处理再现信号的处理单元。
    • 25. 发明授权
    • Plasma treatment apparatus and plasma treatment method
    • 等离子体处理装置和等离子体处理方法
    • US08148268B2
    • 2012-04-03
    • US12040011
    • 2008-02-29
    • Kohei SatoHideaki KondoSusumu TauchiAkitaka Makino
    • Kohei SatoHideaki KondoSusumu TauchiAkitaka Makino
    • H01L21/302H01L21/461
    • H01J37/3244H01J37/32449H01J37/32834
    • The invention provides a plasma treatment apparatus or a plasma treatment method having a high productivity while maintaining a stable treatment performance. In a plasma treatment apparatus feeding a plurality of gases fed into the treatment chamber and treating a sample arranged within the treatment chamber by a plasma formed by using the plurality of gases, the plasma treatment apparatus has a plurality of feeding gas lines in which the plurality of gases respectively pass, a plurality of gas flow rate regulators respectively arranged on the feeding gas lines and respectively regulating flow rates of the plurality of gases, and a testing gas flow path coupled to the gas line so as to be arranged outside the treatment chamber and arranging a tester testing a flow rate of a gas from a gas flow rate controller therein, and the plasma treatment apparatus tests the gas flow rate regulator on a gas line corresponding to the gas which is not used for the treatment in the plurality of gases in parallel with the treatment.
    • 本发明提供一种具有高生产率的等离子体处理装置或等离子体处理方法,同时保持稳定的处理性能。 在等离子体处理装置中,供给进入处理室的多个气体并且通过使用多个气体形成的等离子体处理在处理室内布置的样品,等离子体处理装置具有多个供给气体管线,其中多个 气体分别通过多个气体流量调节器,分别布置在供给气体管线上并分别调节多个气体的流量,以及连接到气体管线的测试气体流动路径,以布置在处理室外部 以及对从气体流量控制器的气体流量进行测试的试验机进行排列,等离子体处理装置对气体流量调节器进行气体流量调节,所述气体管线对应于多个气体中不用于处理的气体 与治疗同时进行。
    • 26. 发明申请
    • VACUUM PROCESSING APPARATUS
    • 真空加工设备
    • US20110229289A1
    • 2011-09-22
    • US13021827
    • 2011-02-07
    • Keita NogiHideaki KondoSusumu TauchiTeruo Nakata
    • Keita NogiHideaki KondoSusumu TauchiTeruo Nakata
    • H01L21/677
    • H01L21/67201H01L21/67745
    • The apparatus includes a load lock adapted to store the workpiece inside and to be switched between atmosphere and vacuum; vacuum transport chambers connected to the load lock and to the corresponding process chambers in a state where the load lock and each of the process chambers are isolated mutually; transfer means for transferring the workpiece between each of the process chambers and the load lock via the corresponding vacuum transport chamber; load lock valves adapted to switch between interrupt and opening at a position between the load lock and the corresponding vacuum transport chambers; process chamber valves adapted to switch between interrupt and opening at a position between the process chambers and the corresponding vacuum transport chambers; and control means for controlling timing of the opening and closing of the valves whose timings are controlled in synchronization with the transfer of the workpieces.
    • 该装置包括适于将工件存储在大气和真空之间并在大气和真空之间切换的装载锁; 在负载锁定和每个处理室相互隔离的状态下连接到负载锁和相应处理室的真空输送室; 用于通过相应的真空传送室在每个处理室和装载锁之间传送工件的传送装置; 适于在装载锁和相应的真空传送室之间的位置处在中断和打开之间切换的装载锁定阀; 处理室阀适于在处理室和相应的真空输送室之间的位置处在中断和打开之间切换; 以及控制装置,用于控制与工件的传送同步地控制其定时的阀的打开和关闭的定时。
    • 28. 发明申请
    • PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
    • 等离子体处理装置和等离子体处理方法
    • US20090152242A1
    • 2009-06-18
    • US12040011
    • 2008-02-29
    • Kohei SatoHideaki KondoSusumu TauchiAkitaka Makino
    • Kohei SatoHideaki KondoSusumu TauchiAkitaka Makino
    • C23F1/00
    • H01J37/3244H01J37/32449H01J37/32834
    • The invention provides a plasma treatment apparatus or a plasma treatment method having a high productivity while maintaining a stable treatment performance. In a plasma treatment apparatus feeding a plurality of gases fed into the treatment chamber and treating a sample arranged within the treatment chamber by a plasma formed by using the plurality of gases, the plasma treatment apparatus has a plurality of feeding gas lines in which the plurality of gases respectively pass, a plurality of gas flow rate regulators respectively arranged on the feeding gas lines and respectively regulating flow rates of the plurality of gases, and a testing gas flow path coupled to the gas line so as to be arranged outside the treatment chamber and arranging a tester testing a flow rate of a gas from a gas flow rate controller therein, and the plasma treatment apparatus tests the gas flow rate regulator on a gas line corresponding to the gas which is not used for the treatment in the plurality of gases in parallel with the treatment.
    • 本发明提供一种具有高生产率的等离子体处理装置或等离子体处理方法,同时保持稳定的处理性能。 在等离子体处理装置中,供给进入处理室的多个气体并且通过使用多个气体形成的等离子体处理在处理室内布置的样品,等离子体处理装置具有多个供给气体管线,其中多个 气体分别通过多个气体流量调节器,分别布置在供给气体管线上并分别调节多个气体的流量,以及连接到气体管线的测试气体流动路径,以布置在处理室外部 以及对从气体流量控制器的气体流量进行测试的试验机进行排列,等离子体处理装置对气体流量调节器进行气体流量调节,所述气体管线对应于多个气体中不用于处理的气体 与治疗同时进行。