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21. 发明授权

US06714577B1 Energy stabilized gas discharge laser 失效
标题翻译：能量稳定气体放电激光器
公开(公告)号：US06714577B1
公开(公告)日：2004-03-30
申请号：US09513025
申请日：2000-02-25
申请人： Uwe Stamm , Igor Bragin , Wolfgang Zschocke
发明人： Uwe Stamm , Igor Bragin , Wolfgang Zschocke
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/104 , H01S3/134 , H01S3/225 , H01S3/2251
摘要： An excimer or molecular fluorine laser, such as a KrF- or ArF-laser, or a molecular fluorine (F2) laser, particularly for photolithography applications, has a gas mixture including a trace amount of a gas additive. The concentration of the gas additive in the gas mixture is optimized for improving energy stability and/or the overshoot control of the laser output beam. The concentration is further determined and adjusted at new fills and/or during laser operation based on its effect on the output pulse energy in view of constraints and/or aging on the discharge circuit and/or other components of the laser system. Attenuation control is also provided for increasing the lifetimes of components of the laser system by controlling the concentration of the gas additive over time. A specific preferred concentration of xenon is more than 100 ppm for improving the energy stability and/or overshoot control. The laser system may be equipped with an internal gas supply unit including an internal xenon gas supply, or a xenon generator for supplying xenon gas from condensed matter xenon.
摘要翻译：特别是用于光刻应用的激发子或分子氟激光，例如KrF-或ArF激光，或分子氟（F2）激光，具有包含微量气体添加剂的气体混合物。气体混合物中气体添加剂的浓度被优化以改善激光输出光束的能量稳定性和/或过冲控制。考虑到放电电路和/或激光系统的其他部件的约束和/或老化，基于其对输出脉冲能量的影响，在新填充和/或激光操作期间进一步确定和调整浓度。还提供衰减控制，用于通过控制气体添加剂随时间的浓度来增加激光系统的部件的寿命。氙的特定优选浓度大于100ppm以改善能量稳定性和/或过冲控制。激光系统可以配备有内部气体供给单元，该内部气体供给单元包括内部氙气供应源或用于从凝结物质氙提供氙气的氙气发生器。

22. 发明授权

US06650679B1 Preionization arrangement for gas laser 失效
标题翻译：气体激光器的预处理装置
公开(公告)号：US06650679B1
公开(公告)日：2003-11-18
申请号：US09247887
申请日：1999-02-10
申请人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
发明人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , H01S3/0384 , H01S3/0385
摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.
摘要翻译：用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。介电壳体包括具有不同外部曲率半径的两个圆柱形区域。外壳的开口端具有比封闭的另一端更大的曲率半径。内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

23. 发明授权

US06414978B1 Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权
公开(公告)号：US06414978B1
公开(公告)日：2002-07-02
申请号：US09826296
申请日：2001-04-03
申请人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
发明人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
IPC分类号： H01S322
摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

24. 发明授权

US07756184B2 Electrodes for generating a stable discharge in gas laser system 有权
标题翻译：用于在气体激光系统中产生稳定放电的电极
公开(公告)号：US07756184B2
公开(公告)日：2010-07-13
申请号：US11711193
申请日：2007-02-27
申请人： Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
发明人： Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
IPC分类号： H01S3/097
CPC分类号： H01S3/225 , H01S3/0384 , H01S3/0388
摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.
摘要翻译：通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化，肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。

25. 发明申请

US20080205474A1 Electrodes for generating a stable discharge in gas laser systems 有权
标题翻译：用于在气体激光系统中产生稳定放电的电极
公开(公告)号：US20080205474A1
公开(公告)日：2008-08-28
申请号：US11711193
申请日：2007-02-27
申请人： Igor Bragin , Rustem Osmanow , Jurgen Baumler , Michael Semling
发明人： Igor Bragin , Rustem Osmanow , Jurgen Baumler , Michael Semling
IPC分类号： H01S3/097
CPC分类号： H01S3/225 , H01S3/0384 , H01S3/0388
摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.
摘要翻译：通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化，肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。

26. 发明申请

US20070274363A1 Gas laser electrodes shaped in the longitudinal axis 有权
标题翻译：气体激光电极在纵轴上成形
公开(公告)号：US20070274363A1
公开(公告)日：2007-11-29
申请号：US11804795
申请日：2007-05-21
申请人： Igor Bragin , Vadim Berger
发明人： Igor Bragin , Vadim Berger
IPC分类号： H01S3/22 , H01S3/223 , H01S3/00
CPC分类号： H01S3/0385 , H01S3/225
摘要： A gas discharge laser includes elongated discharge electrodes having an active surface width that varies along the length of the resonator. In one example each of the electrodes is formed by a row of pins having a circular active surface. The pins are diametrically aligned with the active surfaces generally coplanar.
摘要翻译：气体放电激光器包括具有沿谐振器的长度变化的有源表面宽度的细长放电电极。在一个示例中，每个电极由具有圆形有源表面的一排销形成。这些销与活动表面沿径向对齐，通常共面。

27. 发明授权

US07266137B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US07266137B2
公开(公告)日：2007-09-04
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注入的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

28. 发明授权

US06965624B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US06965624B2
公开(公告)日：2005-11-15
申请号：US10338779
申请日：2003-01-06
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： G02B5/18 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/08 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225 , H01S3/00 , H01S3/09 , H01S3/097 , H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
摘要翻译：提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。分子氟以初始分压提供，并在激光放电室内耗尽。每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选地每次注射小于0.2毫巴，或者已经在其中的2％的量的7％在激光室内。可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。在每个范围内，气体注入和气体替换优选基于对放电的总施加电能和/或时间和/或脉冲计数进行。

29. 发明授权

US06757315B1 Corona preionization assembly for a gas laser 失效
标题翻译：用于气体激光器的电晕放电组件
公开(公告)号：US06757315B1
公开(公告)日：2004-06-29
申请号：US09692265
申请日：2000-10-19
申请人： Igor Bragin , Vadim Berger , Ivan Tassy-Julien , Uwe Stamm
发明人： Igor Bragin , Vadim Berger , Ivan Tassy-Julien , Uwe Stamm
IPC分类号： H01S322
CPC分类号： G03F7/70025 , H01S3/0384 , H01S3/0385
摘要： A preionization device for a gas laser includes an internal preionization electrode having a dielectric housing around it such that the preionization device is of corona type. The internal electrode connects to advantageous electrical circuitry, preferably external to the discharge chamber via a conductive feedthrough. The circuitry reduces the voltage across the dielectric tube of the preionization unit to reduce over-flashing at tube ends and oscillations due to residual energies stored in the dielectric. A semi-transparent mesh electrode between the preionization unit and the discharge area prevents field distortions and discharge instabilities.
摘要翻译：用于气体激光器的预电离装置包括内部预电离电极，其具有围绕其的介电壳体，使得所述预电离装置是电晕型的。内部电极通过导电馈通连接到有利的电路，优选地在放电室的外部。该电路降低了预电离单元的电介质管两端的电压，以减少由于存储在电介质中的剩余能量引起的管末端过度闪烁和振荡。在预电离单元和放电区之间的半透明网状电极防止场失真和放电不稳定。

30. 发明授权

US06721345B2 Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers 失效
标题翻译：用于气体放电激光器气体状态检测和控制系统的静电除尘器电晕放电点火电压探头
公开(公告)号：US06721345B2
公开(公告)日：2004-04-13
申请号：US09905640
申请日：2001-07-12
申请人： Igor Bragin , Juergen Kleinschmidt , Gerhard Ahlborn
发明人： Igor Bragin , Juergen Kleinschmidt , Gerhard Ahlborn
IPC分类号： H01S322
CPC分类号： H01S3/225 , B03C3/41 , B03C3/49 , B03C3/68 , B03C2201/04 , B03C2201/24 , H01S3/036
摘要： An excimer or molecular fluorine laser system is provided which emits a laser beam during operation and has a gas mixture with a gas composition initially provided within a discharge chamber. The laser system includes a discharge chamber containing a laser gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes within the discharge chamber and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, an electrostatic precipitator for having a voltage applied thereto and for receiving and precipitating contaminant particulates from a flow of the gas mixture, and a processor for monitoring the corona discharge ignition voltage of the electrostatic precipitator and for determining a status of said gas mixture based on the monitored voltage.
摘要翻译：提供准分子或分子氟激光系统，其在操作期间发射激光束，并且具有最初设置在放电室内的气体组成的气体混合物。激光系统包括：放电室，其包含至少包含含卤物质和缓冲气体的激光气体混合物，放电室内的多个电极，并连接到用于激励气体混合物的放电电路;激光束产生激光束，用于施加电压并用于从气体混合物流中接收和沉淀污染物颗粒的静电除尘器，以及用于监测静电除尘器的电晕放电点火电压并用于基于以下方式确定所述气体混合物的状态的处理器：监测电压。

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