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21. 发明申请

US20060269870A1 Novel polymerizable ester compounds 有权
标题翻译：新型可聚合酯化合物
公开(公告)号：US20060269870A1
公开(公告)日：2006-11-30
申请号：US11440107
申请日：2006-05-25
申请人： Yuji Harada , Jun Hatakeyama , Yoshio Kawai , Kazuhiko Maeda , Haruhiko Komoriya , Michitaka Ootani
发明人： Yuji Harada , Jun Hatakeyama , Yoshio Kawai , Kazuhiko Maeda , Haruhiko Komoriya , Michitaka Ootani
IPC分类号： G03C1/00
CPC分类号： G03F7/0397 , G03F7/0046
摘要： Ester compounds having formula (1) wherein R1 is fluorine or C1-C10 fluoroalkyl, R2 is C1-C10 alkylene or fluoroalkylene, and R3 is an acid labile group are novel. They can be polymerized into polymers which are used to formulate resist compositions, which are processed by the lithography involving ArF exposure, offering many advantages including improved resolution and transparency, minimal line edge roughness, improved etch resistance, and especially minimal surface roughness after etching.
摘要翻译：式（1）其中R 1是氟或C 1 -C 10氟烷基的酯化合物，其中R 1是氢或C 1 -C 10 - 是C 1 -C 10亚烷基或氟代亚烷基，R 3是酸不稳定基团是新的。它们可以聚合成用于配制抗蚀剂组合物的聚合物，其通过涉及ArF曝光的光刻加工，提供许多优点，包括改进的分辨率和透明度，最小的线边缘粗糙度，改善的耐蚀刻性，以及蚀刻后特别是最小的表面粗糙度。

22. 发明授权

US07125943B2 Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions 有权
标题翻译：含氟化合物及其聚合物可用于抗反射膜材料和抗蚀剂组合物
公开(公告)号：US07125943B2
公开(公告)日：2006-10-24
申请号：US10634997
申请日：2003-08-06
申请人： Shinichi Sumida , Haruhiko Komoriya , Kazuhiko Maeda
发明人： Shinichi Sumida , Haruhiko Komoriya , Kazuhiko Maeda
IPC分类号： C08F112/08
CPC分类号： C08F20/30 , C08F14/18 , C08F20/28 , C08F216/1408 , C08F220/24 , C08F220/30 , C09D125/16 , C09D133/16 , Y10S430/108 , Y10S430/111 , C08F2/00
摘要： A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1–25 or (b) an aromatic hydrocarbon group, each of the hydrogen group and the aromatic hydrocarbon group independently optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1–5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is present in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要翻译：由式1表示的含氟化合物，其中R 1是甲基或三氟甲基，R 2和R 3，独立地为氢原子或含有（a）具有直链，支链或环状的碳原子数为1-25的烃基或（b）芳族烃基的基团，每个氢基和芳族烃基独立地任选地含有氟原子，氧原子和羰基键中的至少一个，l为0〜2的整数，m和n分别为1-5的整数，以满足表达式的m + n <= 6，当R 1，R 2和R 3中的至少一个存在多个时， R 1，R 2和R 3中的至少一个可以彼此相同或不同。

23. 发明申请

US20060177765A1 Polymer, resist composition and patterning process 有权
标题翻译：聚合物，抗蚀剂组合物和图案化工艺
公开(公告)号：US20060177765A1
公开(公告)日：2006-08-10
申请号：US11345325
申请日：2006-02-02
申请人： Yuji Harada , Jun Hatakeyama , Yoshio Kawai , Masaru Sasago , Masayuki Endo , Kazuhiko Maeda , Haruhiko Komoriya , Michitaka Ootani
发明人： Yuji Harada , Jun Hatakeyama , Yoshio Kawai , Masaru Sasago , Masayuki Endo , Kazuhiko Maeda , Haruhiko Komoriya , Michitaka Ootani
IPC分类号： G03C1/76
CPC分类号： G03F7/0046 , C08F220/18 , C08F220/24 , C08F220/26 , C08F220/28 , C08F232/08 , G03F7/0397 , Y10S430/106 , Y10S430/111
摘要： A fluorinated polymer comprising recurring units of formulae (1a) to (1d) and having a Mw of 1,000-500,000 is provided. R1 is an acid labile group, R2 is a single bond or methylene, a1, a2, a3, and a4 are numbers from more than 0 to less than 1, and 0
摘要翻译：提供了包含式（1a）至（1d）的重复单元并且Mw为1,000-500,000的含氟聚合物。 R 1是酸不稳定基团，R 2是单键或亚甲基，a1，a2，a3和a4是大于0至小于1的数，并且0

24. 发明授权

US06855477B2 Chemically amplified resist compositions and patterning process 有权
标题翻译：化学扩增抗蚀剂组合物和图案化工艺
公开(公告)号：US06855477B2
公开(公告)日：2005-02-15
申请号：US10256141
申请日：2002-09-27
申请人： Jun Hatakeyama , Yuji Harada , Yoshio Kawai , Masaru Sasago , Masayuki Endo , Shinji Kishimura , Michitaka Ootani , Haruhiko Komoriya , Kazuhiko Maeda
发明人： Jun Hatakeyama , Yuji Harada , Yoshio Kawai , Masaru Sasago , Masayuki Endo , Shinji Kishimura , Michitaka Ootani , Haruhiko Komoriya , Kazuhiko Maeda
IPC分类号： G03F7/004 , G03F7/039
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0392
摘要： A chemically amplified resist composition comprising (A) a polymer comprising recurring units containing at least one fluorine atom, (B) a compound of formula (1) wherein R1 and R2 are H, F or alkyl or fluorinated alkyl, at least one of R1 and R2 contains at least one fluorine atom, R3 is a single bond or alkylene, R4 is a n-valent aromatic or cyclic diene group, R5 is H or C(═O)R6, R6 is H or methyl, and n is 2, 3 or 4, (C) an organic solvent, and (D) a photoacid generator is sensitive to high-energy radiation and has improved sensitivity and transparency at a wavelength of less than 200 nm.
摘要翻译：一种化学放大抗蚀剂组合物，其包含（A）包含含有至少一个氟原子的重复单元的聚合物，（B）式（1）的化合物，其中R 1和R 2为H，F或烷基或氟化烷基，R 1和R 2中的至少一个含有至少一个氟原子，R 3是单键或亚烷基，R 4是n价的芳族或环状二烯基，R 5 >为H或C（= O）R 6，R 6为H或甲基，n为2,3或4，（C）有机溶剂，（D）光致酸发生剂对高能量辐射，并且在小于200nm的波长下具有改善的灵敏度和透明度。

25. 发明授权

US06322606B1 Coated granular fertilizer and method for producing same 有权
标题翻译：涂层颗粒肥料及其制备方法
公开(公告)号：US06322606B1
公开(公告)日：2001-11-27
申请号：US09665123
申请日：2000-09-20
申请人： Haruhiko Komoriya , Kazuhiko Maeda , Masayuki Shiota , Yoshi Hirashima , Kentaro Tsutsumi , Mikio Ootani , Yukio Ikeda
发明人： Haruhiko Komoriya , Kazuhiko Maeda , Masayuki Shiota , Yoshi Hirashima , Kentaro Tsutsumi , Mikio Ootani , Yukio Ikeda
IPC分类号： C05G500
CPC分类号： C08G18/36 , C05G3/0029 , C08G18/5021 , C08G18/8051
摘要： The invention relates to a coated granular fertilizer having a film covering fertilizer granules. This film comprises a polyurethane resin prepared by a method comprising the steps of (a) reacting an aromatic polyisocyanate with a first polyol component (i.e., castor oil or a castor oil derivative), thereby to obtain a prepolymer having terminal isocyanate groups in the molecule; and (b) reacting the prepolymer with a second polyol component (i.e., castor oil or a castor oil derivative) and a third polyol component which is an amine having at least two hydroxyl groups in the molecule, thereby to cure the prepolymer and thus to prepare the polyurethane resin. The invention relates to another coated granular fertilizer having a film covering fertilizer granules. This film comprises a urethane resin and aqueous-fluid-absorbing particles having a particle diameter of from 1 to 200 &mgr;m. This urethane resin may be the above polyurethane resin. This coated granular fertilizer can be produced by a method comprising the steps of (a) applying an aromatic polyisocyanate, a polyol component (i.e., castor oil or a castor oil derivative), an amine, and the aqueous-fluid-absorbing particles, at the same time or separately in no special order, while the fertilizer granules are kept fluidized or rolled, thereby to form a precursory film on the fertilizer granules; and (b) curing the precursory film into the film. Each coated granular fertilizer is substantially superior in regulation of the release of plant nutrient elements therefrom.
摘要翻译：本发明涉及具有覆盖肥料颗粒的薄膜的涂覆颗粒肥料。该膜包括通过包括以下步骤的方法制备的聚氨酯树脂：（a）使芳族多异氰酸酯与第一多元醇组分（即蓖麻油或蓖麻油衍生物）反应，由此得到分子中具有末端异氰酸酯基团的预聚物 ; 和（b）使预聚物与第二多元醇组分（即蓖麻油或蓖麻油衍生物）和第三多元醇组分反应，所述第三多元醇组分是分子中具有至少两个羟基的胺，从而固化预聚物，从而使制备聚氨酯树脂。本发明涉及具有覆盖肥料颗粒的膜的另一种涂覆颗粒肥料。该膜包含聚氨酯树脂和粒径为1〜200μm的水溶液吸收性粒子。该聚氨酯树脂可以是上述聚氨酯树脂。该涂覆的颗粒肥料可以通过以下方法制备：（a）将芳族多异氰酸酯，多元醇组分（即蓖麻油或蓖麻油衍生物），胺和水性流体吸收颗粒施用于同时或以特殊顺序分开，同时将肥料颗粒保持流化或滚动，从而在肥料颗粒上形成前体膜; 和（b）将前体膜固化成膜。每个涂覆的颗粒肥料在调节植物营养元素的释放方面基本上都是优异的。

26. 发明申请

US20120064459A1 Water Repellent Additive for Immersion Resist 审中-公开
标题翻译：防水添加剂
公开(公告)号：US20120064459A1
公开(公告)日：2012-03-15
申请号：US13320871
申请日：2010-05-14
申请人： Kazuhiko Maeda , Takamasa Kitamoto , Haruhiko Komoriya , Satoru Narizuka , Yoshimi Isono , Kazunori Mori
发明人： Kazuhiko Maeda , Takamasa Kitamoto , Haruhiko Komoriya , Satoru Narizuka , Yoshimi Isono , Kazunori Mori
IPC分类号： G03F7/039 , C08F20/22 , G03F7/38
CPC分类号： G03F7/20 , C08F20/26 , G03F7/0046 , G03F7/0397 , G03F7/2041
摘要： Disclosed is a water repellent additive for an immersion resist, which is composed of a fluorine-containing polymer that has a repeating unit represented by general formula (1). By adding the water repellent additive to a resist composition, the resist composition can be controlled to have high water repellency during exposure and to exhibit improved solubility in a developing solution during development. [In the formula, R1 represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group; R2 represents a heat-labile protecting group; R3 represents a fluorine atom or a fluorine-containing alkyl group; and W represents a divalent linking group.]
摘要翻译：公开了一种浸渍抗蚀剂的防水添加剂，其由具有由通式（1）表示的重复单元的含氟聚合物组成。通过将防水添加剂添加到抗蚀剂组合物中，可以将抗蚀剂组合物控制为在曝光期间具有高的拒水性，并且在显影期间在显影液中表现出改善的溶解性。 [式中，R 1表示氢原子，氟原子，甲基或三氟甲基。 R2代表热不稳定保护基; R3表示氟原子或含氟烷基; W表示二价连接基。]

27. 发明申请

US20110196121A1 Fluorine-Containing Compounds and their Polymers Useful for Anti-Reflection Film Materials and Resist Compositions 有权
标题翻译：含氟化合物及其聚合物可用于防反射膜材料和抗蚀剂组合物
公开(公告)号：US20110196121A1
公开(公告)日：2011-08-11
申请号：US13094281
申请日：2011-04-26
申请人： Shinichi SUMIDA , Haruhiko Komoriya , Kazuhiko Maeda
发明人： Shinichi SUMIDA , Haruhiko Komoriya , Kazuhiko Maeda
IPC分类号： C08F20/22 , C07C69/52 , C07C39/10 , C07C69/34 , C07C69/62 , C07C43/20
CPC分类号： C08F20/30 , C08F14/18 , C08F20/28 , C08F216/1408 , C08F220/24 , C08F220/30 , C09D125/16 , C09D133/16 , Y10S430/108 , Y10S430/111 , C08F2/00
摘要： A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
摘要翻译：由式1表示的含氟化合物，其中R 1为甲基或三氟甲基，R 2和R 3各自独立地为氢原子或含有（a）具有直链，支链或环的烃基的基团形成并具有1-25的碳原子数或（b）芳族烃基，所述基团任选地含有氟原子，氧原子和羰基键中的至少一个，l是0-2的整数， m和n各自独立地为1-5的整数，以满足m + n＆nlE; 6的表达式，并且当R 1，R 2和R 3中的至少一个为多个时，R 1，R 2和 R3可以彼此相同或不同。

28. 发明申请

US20100204422A1 Fluorine-Containing Cyclic Compound, Fluorine-Containing Polymer Compound, Resist Material Using Same and Method for Forming Pattern 有权
标题翻译：含氟环状化合物，含氟聚合物化合物，使用其的抗蚀材料和形成图案的方法
公开(公告)号：US20100204422A1
公开(公告)日：2010-08-12
申请号：US12765305
申请日：2010-04-22
申请人： Haruhiko Komoriya , Shinichi Sumida , Michitaka Ootani , Takeo Komata , Kazuhiko Maeda
发明人： Haruhiko Komoriya , Shinichi Sumida , Michitaka Ootani , Takeo Komata , Kazuhiko Maeda
IPC分类号： C08F214/18 , C07C49/573 , C07C33/44 , C07C69/54
CPC分类号： C07C33/44 , C07C31/44 , C07C49/337 , C07C49/573 , C07C69/653 , C07C2602/42 , C08F14/18 , C08F2/00
摘要： The present invention relates to, for example, a fluorine-containing cyclic compound represented by the following general formula (1). In the general formula (1), R1a is a C1-C25 cyclic alkyl group, cyclic alkenyl group or cyclic alkynyl group; each of R2 and R3 is independently a hydrogen atom, a halogen atom, or a C1-C25 straight-chain, branched or cyclic alkyl group; and each of R1a, R2 and R3 may contain fluorine atom, oxygen atom, sulfur atom, nitrogen atom or an atomic group containing a carbon-carbon double bond.
摘要翻译：本发明涉及例如由以下通式（1）表示的含氟环状化合物。在通式（1）中，R 1a是C 1 -C 25环烷基，环烯基或环炔基; R 2和R 3各自独立地为氢原子，卤素原子或C 1 -C 25直链，支链或环状烷基; R 1a，R 2和R 3可以含有氟原子，氧原子，硫原子，氮原子或含有碳 - 碳双键的原子团。

29. 发明申请

US20070026341A1 Resist protective coating material and patterning process 有权
标题翻译：抵抗保护涂料和图案化过程
公开(公告)号：US20070026341A1
公开(公告)日：2007-02-01
申请号：US11492957
申请日：2006-07-26
申请人： Jun Hatakeyama , Yuji Harada , Yoshio Kawai , Masayuki Endo , Masaru Sasago , Haruhiko Komoriya , Michitaka Ootani , Satoru Miyazawa , Kazuhiko Maeda
发明人： Jun Hatakeyama , Yuji Harada , Yoshio Kawai , Masayuki Endo , Masaru Sasago , Haruhiko Komoriya , Michitaka Ootani , Satoru Miyazawa , Kazuhiko Maeda
IPC分类号： G03C1/00
CPC分类号： G03F7/11 , G03F7/0046 , G03F7/2041 , Y10S430/106 , Y10S430/108 , Y10S430/111
摘要： A resist protective coating material is provided comprising an α-trifluoromethylacrylic acid/norbornene copolymer having cyclic perfluoroalkyl groups as pendant. In a pattern-forming process, the material forms on a resist film a protective coating which is water-insoluble, dissolvable in alkaline developer and immiscible with the resist film, allowing for effective implementation of immersion lithography.
摘要翻译：提供抗蚀剂保护涂层材料，其包含具有环状全氟烷基的α-三氟甲基丙烯酸/降冰片烯共聚物作为侧基。在图案形成过程中，材料在抗蚀剂膜上形成保护性涂层，其是不溶于水的，可溶于碱性显影剂中并且与抗蚀剂膜不混溶，从而有效地实施浸渍光刻。

30. 发明授权

US07060771B2 Transparent fluorine-containing copolymer 失效
标题翻译：透明含氟共聚物
公开(公告)号：US07060771B2
公开(公告)日：2006-06-13
申请号：US10178781
申请日：2002-06-25
申请人： Haruhiko Komoriya , Sunao Koga , Kentaro Tsutsumi , Kazuhiko Maeda
发明人： Haruhiko Komoriya , Sunao Koga , Kentaro Tsutsumi , Kazuhiko Maeda
IPC分类号： C08F118/20
CPC分类号： C08F220/22
摘要： The present invention relates to a fluorine-containing copolymer. This fluorine-containing copolymer includes (a) a first unit derived from α-trifluoromethyl acrylic ester represented by the following general formula (1); and (b) a second unit derived from a vinyl monomer, where R1 is an organic group containing at least one fluorine atom.
摘要翻译：本发明涉及含氟共聚物。该含氟共聚物包括（a）由以下通式（1）表示的α-三氟甲基丙烯酸酯衍生的第一单元; 和（b）衍生自乙烯基单体的第二单元，其中R 1是含有至少一个氟原子的有机基团。

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