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21. 发明授权

US06231054B1 Elastomeric sliding seal for vacuum bellows 失效
标题翻译：用于真空波纹管的弹性滑动密封
公开(公告)号：US06231054B1
公开(公告)日：2001-05-15
申请号：US09217383
申请日：1998-12-21
申请人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
发明人： Ernest E. Allen, Jr. , Robert J. Mitchell , Perry J. I. Justesen , Alexander F. Pless
IPC分类号： F16J300
CPC分类号： F16J3/047
摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.
摘要翻译：改进的波纹管组件（18）被提供用于例如离子注入机（10）。波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（54），用于将波纹管组件可滑动地安装到第二真空室（15）上; 和位于第一和第二安装部之间的钢质波纹管（60）。波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。第二安装部分包括具有第一耐磨板（78）的第一滑动板（74），具有第二耐磨板（80）的第二滑动板（76）和用于将真空条件保持在设置在第一和第二耐磨板之间的可滑动配合表面。

22. 发明授权

US6100536A Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation 失效
标题翻译：用于在离子注入期间中和衬底上的电荷积聚的电子泛滥装置
公开(公告)号：US6100536A
公开(公告)日：2000-08-08
申请号：US81596
申请日：1998-05-20
申请人： Hiroyuki Ito , Xue-Yu Qian , Robert J. Mitchell , Stephen Moffatt
发明人： Hiroyuki Ito , Xue-Yu Qian , Robert J. Mitchell , Stephen Moffatt
IPC分类号： H01J37/20 , H01J37/02 , H01J37/077 , H01J37/317 , H01L21/265
CPC分类号： H01J37/026 , H01J2237/0041
摘要： An Electron flood apparatus for neutralizing positive charge build-up on substrate during implantation of ions in a substrate by ion beam implantation apparatus. The electron flood apparatus comprises a tube for axially receiving and passing an ion beam to a substrate, an opening in a sidewall of the tube, a plasma chamber having an exit aperture in communication with said opening of said tube, a supply of inert gas to said plasma chamber, a high frequency power generator, and means to deliver high frequency power from said generator to maintain a plasma in said chamber to produce low energy electrons, whereby a flux of said low energy electrons emerges from said chamber through said exit aperture into said tube to merge with the ion beam.
摘要翻译：一种电子泛滥装置，用于通过离子束注入装置在衬底中注入离子期间中和基底上的正电荷积聚。电子泛滥装置包括用于轴向地接收并将离子束通过到衬底的管，管的侧壁中的开口，具有与所述管的所述开口连通的出口孔的等离子体室，向惰性气体供应惰性气体所述等离子体室是高频发电机，以及用于从所述发生器输送高频功率以保持所述室中的等离子体以产生低能量电子的装置，由此所述低能电子的通量从所述室通过所述出口孔排出到所述管与离子束合并。

23. 发明授权

US08915136B2 Determination of pipe internal cross-sectional area 有权
标题翻译：管内截面积的确定
公开(公告)号：US08915136B2
公开(公告)日：2014-12-23
申请号：US13439230
申请日：2012-04-04
申请人： Anthony G. Razzell , Robert J. Mitchell
发明人： Anthony G. Razzell , Robert J. Mitchell
IPC分类号： G01B13/10 , G01B21/28
CPC分类号： G01B21/28
摘要： A method is provided of determining the internal cross-sectional area of a pipe along its length. The method includes the steps of: (a) filling the pipe with a first fluid; (b) feeding a second fluid into the pipe at a known flow rate, a meniscus being formed between the first and the second fluid, and the meniscus moving along the pipe as the second fluid displaces the first fluid in the pipe; (c) ultrasonically detecting the position of the meniscus as it moves along the pipe; and (d) determining from the second fluid flow rate and the meniscus position, the internal cross-sectional area of the pipe along its length.
摘要翻译：提供了一种确定管道沿其长度的内部横截面面积的方法。该方法包括以下步骤：（a）用第一流体填充管道; （b）以已知的流速将第二流体供给到管中，在第一和第二流体之间形成弯月面，并且当第二流体移动管道中的第一流体时，弯液面沿着管移动; （c）超声检测弯液面沿管道移动时的位置; 和（d）从第二流体流速和弯液面位置确定管沿其长度的内部横截面面积。

24. 发明授权

US07816153B2 Method and apparatus for producing a dislocation-free crystalline sheet 有权
标题翻译：用于生产无位错结晶片的方法和装置
公开(公告)号：US07816153B2
公开(公告)日：2010-10-19
申请号：US12478513
申请日：2009-06-04
申请人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P. T. Bateman , Robert J. Mitchell
发明人： Peter L. Kellerman , Frank Sinclair , Frederick Carlson , Nicholas P. T. Bateman , Robert J. Mitchell
IPC分类号： H01L21/00
CPC分类号： C30B11/003 , C30B11/001 , C30B28/06 , C30B29/06 , C30B29/60
摘要： A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.
摘要翻译：可以由熔体形成无位错的片材。使用冷却板在材料的熔体上形成具有第一宽度的材料片。这张纸有位错。片材相对于冷却板输送，并且位错迁移到片材的边缘。片材的第一宽度通过冷却板增加到第二宽度。片材在第二个宽度上不具有位错。在一种情况下，冷却板可以具有两种不同宽度的形状。冷却板可以具有在不同温度下操作的段，以在另一种情况下增加片材的宽度。片材可以相对于冷却板拉动或流动。

25. 发明申请

US20100084579A1 FLUID DELIVERY MECHANISM FOR VACUUM WAFER PROCESSING SYSTEM 有权
标题翻译：用于真空加湿系统的流体输送机构
公开(公告)号：US20100084579A1
公开(公告)日：2010-04-08
申请号：US12243983
申请日：2008-10-02
申请人： Roger B. Fish , Robert J. Mitchell
发明人： Roger B. Fish , Robert J. Mitchell
IPC分类号： G21K5/00
CPC分类号： H01L21/67213 , H01J37/20 , H01J37/3171 , H01J2237/006 , H01J2237/0216 , H01J2237/2001 , H01L21/67109 , Y10T279/23
摘要： The fluid delivery mechanism of the present disclosure provides a solution for use in a single axis of motion that allows the connection of one or more fluid flow paths over a wide range of temperatures into a vacuum environment. The mechanism does not employ flexible tubing that is prone to fatigue, especially at very low temperatures. In one embodiment, a tube is axially moved within a sealed piston to allow for fluid delivery. In a second embodiment, bellows are used to provide the required functionality. In another embodiment, it is possible to achieve movement in two or more axis of motion by utilizing two or more appropriately configured mechanisms.
摘要翻译：本公开的流体输送机构提供了用于单个运动轴线的解决方案，其允许在宽范围的温度下将一个或多个流体流动路径连接到真空环境中。该机构不使用容易疲劳的柔性管，特别是在非常低的温度下。在一个实施例中，管在密封活塞内轴向移动以允许流体输送。在第二实施例中，波纹管用于提供所需的功能。在另一个实施例中，可以通过利用两个或更多个适当配置的机构实现两个或更多个运动轴的运动。

26. 发明授权

US06583428B1 Apparatus for the backside gas cooling of a wafer in a batch ion implantation system 失效
标题翻译：用于在批量离子注入系统中的晶片的背面气体冷却的装置
公开(公告)号：US06583428B1
公开(公告)日：2003-06-24
申请号：US09670241
申请日：2000-09-26
申请人： David J. Chipman , Bryan C. Lagos , Robert J. Mitchell , Gary Rosen , Dale K. Stone
发明人： David J. Chipman , Bryan C. Lagos , Robert J. Mitchell , Gary Rosen , Dale K. Stone
IPC分类号： H01J3717
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/2001
摘要： The invention provides apparatus by which a cooling gas is supplied from a stationary source to the back side of batch ion implanter workpieces being implanted in a rotating or spinning batch implanter process disk. The cooling gas provides improved heat transfer from the workpieces to the process disk, which may be advantageously combined with circulation of cooling fluid through passages in the process disk to remove heat therefrom. The invention further includes a rotary feedthrough employed to transfer the cooling gas from a stationary housing to a gas chamber in a rotating shaft which spins the batch implanter process disk. In addition, a seal apparatus is provided which seals the cooling gas applied to the back sides of the workpieces from the vacuum in which the front sides of the workpieces are implanted.
摘要翻译：本发明提供了一种装置，通过该装置将冷却气体从固定源供给到植入在旋转或旋转批量注入器处理盘中的批量离子注入机工件的背面。冷却气体提供从工件到处理盘的改进的热传递，其可以有利地与通过处理盘中的通道的冷却流体循环组合以从其中除去热量。本发明还包括用于将冷却气体从固定壳体转移到旋转轴中的气室的旋转馈通，其旋转批量注入器处理盘。此外，提供一种密封装置，其从被植入工件的前侧的真空中密封施加到工件的背面的冷却气体。

27. 发明授权

US06580082B1 System and method for delivering cooling gas from atmospheric pressure to a high vacuum through a rotating seal in a batch ion implanter 失效
标题翻译：通过批量离子注入机中的旋转密封将冷却气体从大气压输送到高真空的系统和方法
公开(公告)号：US06580082B1
公开(公告)日：2003-06-17
申请号：US09670091
申请日：2000-09-26
申请人： Robert J. Mitchell
发明人： Robert J. Mitchell
IPC分类号： G21K508
CPC分类号： H01J37/3171 , H01J37/20 , H01J2237/2001
摘要： The invention provides apparatus by which a cooling gas is supplied from a stationary source to the back side of batch ion implanter workpieces being implanted in a rotating or spinning batch implanter process disk. The cooling gas provides improved heat transfer from the workpieces to the process disk, which may be advantageously combined with circulation of cooling fluid through passages in the process disk to remove heat therefrom. The invention further includes a rotary feedthrough employed to transfer the cooling gas from a stationary housing to a gas chamber in a rotating shaft which spins the batch implanter process disk. In addition, a seal apparatus is provided which seals the cooling gas applied to the back sides of the workpieces from the vacuum in which the front sides of the workpieces are implanted.
摘要翻译：本发明提供了一种装置，通过该装置将冷却气体从固定源供给到植入在旋转或旋转批量注入器处理盘中的批量离子注入机工件的背面。冷却气体提供从工件到处理盘的改进的热传递，其可以有利地与通过处理盘中的通道的冷却流体循环组合以从其中除去热量。本发明还包括用于将冷却气体从固定壳体转移到旋转轴中的气室的旋转馈通，其旋转批量注入器处理盘。此外，提供一种密封装置，其从被植入工件的前侧的真空中密封施加到工件的背面的冷却气体。

28. 发明授权

US5264649A Alkylation catalyst regeneration 失效
标题翻译：烷基化催化剂再生
公开(公告)号：US5264649A
公开(公告)日：1993-11-23
申请号：US991060
申请日：1992-12-15
申请人： Alan D. Eastman , Ronald G. Abbott , Robert B. Eldridge , Fu-Ming Lee , David P. Mann , Robert J. Mitchell
发明人： Alan D. Eastman , Ronald G. Abbott , Robert B. Eldridge , Fu-Ming Lee , David P. Mann , Robert J. Mitchell
IPC分类号： B01D11/04 , C07C2/62 , C07C7/10
CPC分类号： B01D11/0492
摘要： Disclosed is a process for removing acid soluble oils, produced as an undesirable by-product of an HF catalyzed alkylation reaction, from a liquid containing a sulfone compound. The process includes the use of a solvent to extract the acid soluble oils from a sulfone-containing fluid that has previously been neutralized by a treating step.
摘要翻译：公开了从含有砜化合物的液体中除去作为HF催化烷基化反应的不良副产物产生的酸溶性油的方法。该方法包括使用溶剂从预先通过处理步骤中和的含砜流体萃取酸溶性油。

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