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    • 21. 发明申请
    • METHOD FOR FABRICATING MEMS STRUCTURE
    • 制造MEMS结构的方法
    • US20100317138A1
    • 2010-12-16
    • US12849168
    • 2010-08-03
    • Bang-Chiang LanMing-I WangLi-Hsun HoHui-Min WuMin ChenChien-Hsin HuangTzung-I Su
    • Bang-Chiang LanMing-I WangLi-Hsun HoHui-Min WuMin ChenChien-Hsin HuangTzung-I Su
    • H01L21/768
    • B81C1/00246B81C2203/0714B81C2203/0742Y10T29/41Y10T29/49155
    • A method for fabricating a MEMS is described as follows. A substrate is provided, including a circuit region and an MEMS region separated from each other. A first metal interconnection structure is formed on the substrate in the circuit region, and simultaneously a first dielectric structure is formed on the substrate in the MEMS region. A second metal interconnection structure is formed on the first metal interconnection structure, and simultaneously a second dielectric structure, at least two metal layers and at least one protection ring are formed on the first dielectric structure. The metal layers and the protection ring are formed in the second dielectric structure and the protection ring connects two adjacent metal layers to define an enclosed space between two adjacent metal layers. The first dielectric structure and the second dielectric structure outside the enclosed space are removed to form an MEMS device in the MEMS region.
    • MEMS的制造方法如下所述。 提供了包括彼此分离的电路区域和MEMS区域的衬底。 第一金属互连结构形成在电路区域中的衬底上,并且同时在MEMS区域中的衬底上形成第一电介质结构。 第二金属互连结构形成在第一金属互连结构上,并且同时具有第二电介质结构,至少两个金属层和至少一个保护环形成在第一电介质结构上。 金属层和保护环形成在第二电介质结构中,并且保护环连接两个相邻的金属层以限定两个相邻金属层之间的封闭空间。 除去封闭空间外的第一电介质结构和第二电介质结构,以在MEMS区域中形成MEMS器件。
    • 25. 发明授权
    • Amplifier circuit having stacked main amplifier and parallel sub-amplifier
    • 具有堆叠主放大器和并联子放大器的放大器电路
    • US07589593B2
    • 2009-09-15
    • US12022159
    • 2008-01-30
    • Jie-Wei LaiMin Chen
    • Jie-Wei LaiMin Chen
    • H03F3/04H03F1/22
    • H03F1/223H03F1/26H03F1/3205H03F3/211H03F2200/294
    • An amplifier circuit for amplifying an input signal to generate an output signal is provided. The amplifier circuit has a stacked main amplifier, a parallel sub-amplifier, and a signal combiner. The stacked main amplifier includes a first amplifier unit for outputting a first amplified signal generated from processing the input signal; and a second amplifier unit for outputting a second amplified signal generated from processing the first amplified signal. The first amplifier unit and the second amplifier unit share bias current. The parallel sub-amplifier is coupled to the stacked main amplifier according to a parallel connection fashion, and outputs a third amplified signal generated from processing the input signal. The signal combiner combines the second amplified signal and the third amplified signal to generate the output signal.
    • 提供了用于放大输入信号以产生输出信号的放大器电路。 放大器电路具有堆叠的主放大器,并联子放大器和信号组合器。 堆叠的主放大器包括:第一放大器单元,用于输出从处理输入信号产生的第一放大信号; 以及第二放大器单元,用于输出从处理第一放大信号产生的第二放大信号。 第一放大器单元和第二放大器单元共享偏置电流。 并联子放大器根据并联连接方式耦合到堆叠的主放大器,并且输出从处理输入信号产生的第三放大信号。 信号组合器组合第二放大信号和第三放大信号以产生输出信号。
    • 26. 发明授权
    • Magnetic disk drive and method for efficiently determining and storing RRO compensation values using a secondary micro-actuator
    • 磁盘驱动器和用于使用次级微致动器有效地确定和存储RRO补偿值的方法
    • US07502192B1
    • 2009-03-10
    • US11484492
    • 2006-07-11
    • Zhi WangMin ChenRobert J. McNabJenghung Cheng
    • Zhi WangMin ChenRobert J. McNabJenghung Cheng
    • G11B21/02G11B5/596
    • G11B5/59627
    • A method is disclosed for efficiently determining and writing repeatable runout (RRO) compensation value sets for data tracks on a magnetic disk in a disk drive. The disk drive has a magnetoresistive (MR) head having a read element and a separate write element, and a secondary actuator coupled to the end of a primary actuator for adjusting a head skew angle. In the method, the head skew angle is set such that the read and write elements are substantially aligned along the first track. A position error signal for each servo sector is determined over a predetermined number of disk revolutions during track following along a first data track. An RRO compensation value set is calculated for the first data track based on the position error signals. The RRO compensation value set is written for the first data track. A seek operation is then performed to a second data track.
    • 公开了一种用于有效地确定和写入磁盘驱动器中的磁盘上的数据轨迹的可重复跳动(RRO)补偿值集合的方法。 磁盘驱动器具有磁阻(MR)磁头,其具有读取元件和单独的写入元件,以及耦合到主致动器的端部用于调整磁头倾斜角度的次级致动器。 在该方法中,头部偏斜角被设置为使得读取和写入元件沿着第一轨道基本对齐。 在沿着第一数据轨道的跟踪期间,在预定数量的盘转周期上确定每个伺服扇区的位置误差信号。 基于位置误差信号计算第一数据磁道的RRO补偿值集。 为第一个数据轨道写入RRO补偿值集。 然后对第二数据轨道执行寻道操作。
    • 28. 发明授权
    • Disk drive employing pivot friction compensation
    • 磁盘驱动器采用枢轴摩擦补偿
    • US07440225B1
    • 2008-10-21
    • US11507234
    • 2006-08-21
    • Min ChenZhi Wang
    • Min ChenZhi Wang
    • G11B5/596
    • G11B5/59627
    • A disk drive is disclosed including a disk having a plurality of servo tracks, wherein each servo track comprises a plurality of servo sectors forming N servo wedges, and a wedge time period (WTP) occurs between each servo wedge. A VCM control signal is generated by generating an estimated WTP by detecting the servo sectors, estimating a pivot velocity in response to the estimated WTP, the pivot velocity representing a velocity of an actuator arm about a pivot, generating a pivot friction compensation in response to the estimated pivot velocity, and generating the VCM control signal in response to the pivot friction compensation.
    • 公开了一种磁盘驱动器,包括具有多个伺服磁道的磁盘,其中每个伺服磁道包括形成N个伺服楔形的多个伺服扇区,并且在每个伺服楔之间发生楔形时间段(WTP)。 通过产生估计的WTP来产生VCM控制信号,通过检测伺服扇区,响应于所估计的WTP估计枢转速度,枢转速度表示致动器臂围绕枢轴的速度,产生响应于 估计枢转速度,并响应于枢轴摩擦补偿产生VCM控制信号。