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    • 25. 发明授权
    • Electrochemical method to improve MR reader edge definition and device reliability
    • 电化学方法提高MR读取器边缘定义和器件可靠性
    • US06287476B1
    • 2001-09-11
    • US09332429
    • 1999-06-14
    • Kochan JuShou-Chen KaoCherng-Chyi HanJei-Wei ChangMao-Min Chen
    • Kochan JuShou-Chen KaoCherng-Chyi HanJei-Wei ChangMao-Min Chen
    • G11B5127
    • B82Y25/00B82Y10/00G01R33/09G11B5/3106G11B5/3133G11B5/3903G11B5/40G11B2005/3996
    • A method to form a passivation layer using an electrochemical process over a MR Sensor so that the passivation layer defines the MR track width. The passivation layer is formed by anodizing the MR sensor. The passivation layer is an electrical insulator (preventing Sensor current (I) from shunting through the overspray) and a heat conductor to allow MR heat to dissipate away from the MR sensor through the overspray. The method comprises: forming a passivation layer on the MR sensor; the passivation layer formed using an electrochemical process. Then we spinning-on and printing a lift-off photoresist structure over the passivation layer. The passivation layer is etched to remove the passivation layer not covered by the lift-off structure thereby defining a track width of the MR sensor. Then we deposit a lead layer over the passivation layer and MR sensor. The lift-off structure is removed where by the passivation layer defines a track width. The passivation layer is an electrical insulator that prevents sensor current (I) form shunting through overspray layers while allowing heat to dissipate through to the lead layer.
    • 使用MR传感器上的电化学过程形成钝化层的方法,使得钝化层限定MR磁道宽度。 通过阳极氧化MR传感器形成钝化层。 钝化层是电绝缘体(防止传感器电流(I)通过过喷)分流)和热导体,以允许MR热量通过过喷器散射离开MR传感器。 该方法包括:在MR传感器上形成钝化层; 使用电化学工艺形成钝化层。 然后我们旋转并在钝化层上印刷剥离光致抗蚀剂结构。 蚀刻钝化层以除去未被剥离结构覆盖的钝化层,从而限定MR传感器的轨道宽度。 然后我们在钝化层和MR传感器上沉积铅层。 去除剥离结构,其中钝化层限定轨道宽度。 钝化层是电绝缘体,其防止传感器电流(I)通过过喷层形成分流,同时允许热量散发到引线层。
    • 26. 发明授权
    • Plated flat metal gap for very narrow recording heads
    • 用于非常窄的记录头的镀金属间隙
    • US06218080B1
    • 2001-04-17
    • US09519610
    • 2000-03-06
    • Xuehua WuKochan JuJei-Wei Chang
    • Xuehua WuKochan JuJei-Wei Chang
    • G11B523
    • C25D1/10G11B5/232G11B5/3116G11B5/3163Y10T29/49032
    • It has been observed that plated structures grown inside molds for small objects, such as a gap structure in a magnetic read head, often have curved rather than planar surfaces. This problem has been overcome as follows. Prior to laying down photoresist for the mold, a layer of copper is deposited on the substrate on which the head structure is to be grown (normally the shared pole). After the photoresist is patterned to form the mold, all exposed copper is selectively removed from the substrate a key feature being that the copper is over-etched so that some undercutting of the photoresist occurs. Then, when the layers making up the gap structure are electrodeposited inside the mold they grow away from the substrate as planar surfaces.
    • 已经观察到,用于小物体的模具内生长的电镀结构,例如磁读头中的间隙结构,通常具有弯曲而不是平面。 这个问题已被克服如下。 在为模具铺设光致抗蚀剂之前,在要在其上生长头部结构的基底(通常是共享极)上沉积一层铜。 在光致抗蚀剂被图案化以形成模具之后,从衬底中选择性地去除所有暴露的铜,其关键特征是铜被过度蚀刻,使得发生光刻胶的一些底切。 然后,当构成间隙结构的层电沉积在模具内部时,它们作为平面表面从衬底生长。
    • 30. 发明授权
    • Photoresist frame plated magnetic transducer pole layer employing high
magnetic permeability seed layer
    • 光电阻框架电磁换能器极层采用高磁导率种子层
    • US5843521A
    • 1998-12-01
    • US897796
    • 1997-07-21
    • Kochan JuMao-Min ChenYimin Guo
    • Kochan JuMao-Min ChenYimin Guo
    • G11B5/31G11B5/39B05D5/12
    • G11B5/3967G11B5/3103G11B5/3113G11B5/3146G11B5/3163Y10T428/1186Y10T428/265Y10T428/31678
    • A method for forming a magnetic transducer, and a magnetic transducer formed through the method. There is first provided a substrate. There is then formed over the substrate a first magnetic pole layer. There is then formed upon the first magnetic pole layer a gap filling dielectric layer. There is then formed upon the gap filling dielectric layer a seed layer. There is then formed upon the seed layer a photoresist frame employed in a photoresist frame plating method for forming a plated second magnetic pole layer upon the seed layer, where a base of a sidewall of the photoresist frame has a taper which provides a notch within an edge of the plated second magnetic pole layer at its interface with the seed layer. There is then plated through the photoresist frame plating method the plated second magnetic pole layer upon the seed layer, where the seed layer is formed of a thickness and of a material which compensates when electromagnetically energizing the magnetic transducer for a magnetic write field gradient boundary decompression between the first magnetic pole layer and the plated second magnetic pole layer due to the notch within the plated second magnetic pole layer. The method for forming the magnetic transducer contemplates the magnetic transducer formed through the method.
    • 一种用于形成磁换能器的方法,以及通过该方法形成的磁换能器。 首先提供基板。 然后在衬底上形成第一磁极层。 然后在第一磁极层上形成间隙填充介电层。 然后在填充介电层的间隙上形成种子层。 然后在种子层上形成光致抗蚀剂框架,该抗蚀剂框架用于在种子层上形成镀覆的第二磁极层的光致抗蚀剂框架镀覆方法,其中光致抗蚀剂框架的侧壁的基部具有锥形,其在 电镀第二磁极层的边缘与其种子层的界面处。 然后通过光致抗蚀剂框架电镀方法将电镀的第二磁极层电镀在种子层上,其中籽晶层由厚度形成,并且当材料在磁写入场梯度边界解压缩时对磁换能器进行电磁激励时补偿 由于镀覆的第二磁极层内的凹口,在第一磁极层和镀覆的第二磁极层之间。 用于形成磁换能器的方法考虑了通过该方法形成的磁换能器。