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    • 2. 发明授权
    • Canted longitudinal patterned exchange biased dual-stripe magnetoresistive (DSMR) sensor element and method for fabrication thereof
    • 垂直图案交换偏置双条磁阻(DSMR)传感器元件及其制造方法
    • US06449131B2
    • 2002-09-10
    • US09818963
    • 2001-03-28
    • Yimin GuoKochan JuPo-Kang WangCherng-Chyi HanHui-Chuan Wang
    • Yimin GuoKochan JuPo-Kang WangCherng-Chyi HanHui-Chuan Wang
    • G11B539
    • G11B5/3954G11B5/3932H04R15/00Y10T29/49034Y10T29/49044Y10T29/49046
    • A dual stripe magnetoresistive (DSMR) sensor element, and a method for fabricating the dual stripe magnetoresistive (DSMR) sensor element. When fabricating the dual stripe magnetoresistive (DSMR) sensor element while employing the method, there are employed two pair of patterned magnetic biasing layers formed of a single magnetic biasing material. The two pair of patterned magnetic biasing layers bias a pair of patterned magnetoresistive (MR) layers in a pair of opposite canted directions. The method employs multiple thermal annealing methods one of which employs a thermal annealing temperature, a thermal annealing exposure time and an extrinsic magnetic bias field such that a first pair of transversely magnetically biased patterned magnetic biasing layers is not substantially demagnetized when forming a second pair of transversely magnetically biased patterned magnetic biasing layers of anti-parallel transverse magnetic bias direction to the first pair of transversely magnetically biased patterned magnetic biasing layers.
    • 双条带磁阻(DSMR)传感器元件,以及制造双条磁阻(DSMR)传感元件的方法。 当采用该方法制造双重磁阻(DSMR)传感器元件时,使用由单个磁偏置材料形成的两对图案化的磁偏置层。 两对图案化的磁偏置层在一对相反的倾斜方向上偏置一对图案化磁阻(MR)层。 该方法采用多种热退火方法,其中之一采用热退火温度,热退火暴露时间和非本征磁偏置场,使得当形成第二对的第一对成对的第一对横向磁偏压图案化磁偏置层时,基本上不消磁 向第一对横向磁偏置图案化磁偏置层的横向磁偏置图案化的反平行横向偏磁方向的偏置偏压层。
    • 3. 发明授权
    • Canted longitudinal patterned exchange biased dual-stripe magnetoresistive (DSMR) sensor element and method for fabrication thereof
    • 垂直图案交换偏置双条磁阻(DSMR)传感器元件及其制造方法
    • US06230390B1
    • 2001-05-15
    • US09182761
    • 1998-10-30
    • Yimin GuoKochan JuPo-Kang WangCherng-Chyi HanHui-Chuan Wang
    • Yimin GuoKochan JuPo-Kang WangCherng-Chyi HanHui-Chuan Wang
    • G11B5127
    • G11B5/3954G11B5/3932H04R15/00Y10T29/49034Y10T29/49044Y10T29/49046
    • A dual stripe magnetoresistive (DSMR) sensor element, and a method for fabricating the dual stripe magnetoresistive (DSMR) sensor element. When fabricating the dual stripe magnetoresistive (DSMR) sensor element while employing the method, there are employed two pair of patterned magnetic biasing layers formed of a single magnetic biasing material. The two pair of patterned magnetic biasing layers bias a pair of patterned magnetoresistive (MR) layers in a pair of opposite canted directions. The method employs multiple thermal annealing methods one of which employs a thermal annealing temperature, a thermal annealing exposure time and an extrinsic magnetic bias field such that a first pair of transversely magnetically biased patterned magnetic biasing layers is not substantially demagnetized when forming a second pair of transversely magnetically biased patterned magnetic biasing layers of anti-parallel transverse magnetic bias direction to the first pair of transversely magnetically biased patterned magnetic biasing layers.
    • 双条带磁阻(DSMR)传感器元件,以及制造双条磁阻(DSMR)传感元件的方法。 当采用该方法制造双重磁阻(DSMR)传感器元件时,使用由单个磁偏置材料形成的两对图案化的磁偏置层。 两对图案化的磁偏置层在一对相反的倾斜方向上偏置一对图案化磁阻(MR)层。 该方法采用多种热退火方法,其中之一采用热退火温度,热退火暴露时间和非本征磁偏置场,使得当形成第二对的第一对的第一对横向磁偏压图案化的偏磁层基本上消磁时, 向第一对横向磁偏置图案化磁偏置层的横向磁偏置图案化的反平行横向偏磁方向的偏置偏压层。
    • 7. 发明授权
    • Multiple thermal annealing method for forming antiferromagnetic exchange biased magnetoresistive (MR) sensor element
    • 用于形成反铁磁交换偏磁电阻(MR)传感器元件的多重热退火方法
    • US06322640B1
    • 2001-11-27
    • US09489969
    • 2000-01-24
    • Rongfu XiaoChyu-Jiuh TorngHui-Chuan WangJei-Wei ChangCherng-Chyi HanKochan Ju
    • Rongfu XiaoChyu-Jiuh TorngHui-Chuan WangJei-Wei ChangCherng-Chyi HanKochan Ju
    • H01F4100
    • B82Y25/00B82Y40/00H01F10/3268H01F41/302H01L43/12Y10T29/49034
    • A method for forming a magnetically biased magnetoresistive (MR) layer. There is first provided a substrate. There is then formed over the substrate a ferromagnetic magnetoresistive (MR) material layer. There is then forming contacting the ferromagnetic magnetoresistive (MR) material layer a magnetic material layer formed of a first crystalline phase, where the magnetic material layer is formed of a crystalline multiphasic magnetic material having the first crystalline phase which does not appreciably antiferromagnetically exchange couple with the ferromagnetic magnetoresistive (MR) material layer and a second crystalline phase which does appreciably antiferromagnetically exchange couple with the ferromagnetic magnetoresistive (MR) material layer. There is then annealed thermally while employing a first thermal annealing method employing an extrinsic magnetic bias field the magnetic material layer formed of the first crystalline phase to form a magnetically aligned magnetic material layer formed of the first crystalline phase. Finally, there is then annealed thermally while employing a second thermal annealing method without employing an extrinsic magnetic bias field the magnetically aligned magnetic material layer formed of the first crystalline phase to form an antiferromagnetically coupled magnetically aligned magnetic material layer formed of the second crystalline phase. The method may be employed for forming non-parallel antiferromagnetically biased multiple magnetoresistive (MR) layer magnetoresistive (MR) sensor elements while employing a single antiferromagnetic material.
    • 一种用于形成磁偏置磁阻(MR)层的方法。 首先提供基板。 然后在衬底上形成铁磁磁阻(MR)材料层。 然后,形成使铁磁性磁阻(MR)材料层与由第一结晶相形成的磁性材料层接触,其中,磁性材料层由结晶多相磁性材料形成,该结晶多相磁性材料具有不明显地反铁磁性交换耦合的第一结晶相 铁磁磁阻(MR)材料层和第二结晶相,其明显地与铁磁性磁阻(MR)材料层反铁磁交换耦合。 然后在使用由第一结晶相形成的磁性材料层的外部磁偏置场的第一热退火方法进行退火,形成由第一结晶相形成的磁性取向的磁性材料层。 最后,在不使用由第一结晶相形成的磁性取向的磁性材料层的外部磁偏置场的情况下,采用第二热退火方法进行退火,形成由第二结晶相形成的反铁磁耦合的磁性取向的磁性材料层。 该方法可以用于在使用单个反铁磁材料的同时形成非平行的反铁磁偏振多磁阻(MR)层磁阻(MR)传感器元件。