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21. 发明授权

US09152054B2 Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method 有权
标题翻译：曝光装置，基板处理装置，曝光基板的方法和基板处理方法
公开(公告)号：US09152054B2
公开(公告)日：2015-10-06
申请号：US13845211
申请日：2013-03-18
申请人： Kazuhiro Nishimura , Akihiko Morita , Yukihiko Inagaki
发明人： Kazuhiro Nishimura , Akihiko Morita , Yukihiko Inagaki
IPC分类号： G03B27/32 , G03B27/52 , G03F7/20 , G03F7/00 , G03F7/38
CPC分类号： G03F7/2012 , G03F7/0035 , G03F7/38
摘要： In an entire region exposure unit, a platform section and a local transfer mechanism are arranged in one direction. The local transfer mechanism is provided with a local transfer hand. A substrate on which a resist film having a predetermined pattern is formed is held by the local transfer hand. A light-emitting device is attached to the upper portion of the local transfer mechanism. Strip-shaped light is emitted from the light-emitting device toward below. The local transfer mechanism operates such that the local transfer hand is moved relative to the light-emitting device. At this time, the light-emitting device irradiates one surface of the substrate that is moving horizontally with the strip-shaped light. The resist film is modified by the light.
摘要翻译：在整个区域曝光单元中，平台部分和局部传送机构沿一个方向布置。本地传送机构设有本地传送手。其上形成有预定图案的抗蚀剂膜的基板由本地转印手保持。发光装置安装在本地传送机构的上部。带状光从发光装置向下方射出。本地传送机构的操作使得本地传送手相对于发光装置移动。此时，发光装置照射与条状光水平移动的基板的一个面。抗蚀剂膜被光改性。

22. 发明申请

US20110141651A1 POWER SEMICONDUCTOR DEVICE FOR IGNITER 有权
标题翻译： IGNITER的功率半导体器件
公开(公告)号：US20110141651A1
公开(公告)日：2011-06-16
申请号：US12877538
申请日：2010-09-08
申请人： Shinsuke GODO , Kazuhiro Nishimura , Kazuki Yamada
发明人： Shinsuke GODO , Kazuhiro Nishimura , Kazuki Yamada
IPC分类号： F23Q3/00
CPC分类号： F23Q3/004
摘要： A power semiconductor device for an igniter comprises: a semiconductor switching device causing a current to flow through a primary side of an ignition coil or shutting off the current; and an integrated circuit driving and controlling the semiconductor switching device, wherein the integrated circuit includes: a first discharge device discharging charge accumulated on a control terminal of the semiconductor switching device and shutting off the semiconductor switching device so as to generate ignition plug spark voltage on a secondary side of the ignition coil during a normal operation; and a second discharge device slower discharging the charge accumulated on the control terminal in comparison with the first discharge device and shutting off the semiconductor switching device so that a voltage on the second side of the ignition coil is equal to or lower than the ignition plug spark voltage during an abnormal state.
摘要翻译：一种用于点火器的功率半导体器件包括：使电流流过点火线圈的初级侧或切断电流的半导体开关器件; 以及驱动和控制所述半导体开关器件的集成电路，其中所述集成电路包括：第一放电器件，放电累积在所述半导体开关器件的控制端子上的电荷，并且切断所述半导体开关器件，以产生点火插头火花塞电压在正常操作期间点火线圈的次级侧; 并且与第一放电装置相比，第二放电装置放慢对蓄积在控制端子上的电荷的放电，并且切断半导体开关装置，使得点火线圈的第二侧上的电压等于或低于火花塞火花异常状态下的电压。

23. 发明申请

US20070127963A1 IMAGE FORMING APPARATUS 失效
标题翻译：图像形成装置
公开(公告)号：US20070127963A1
公开(公告)日：2007-06-07
申请号：US11538659
申请日：2006-10-04
申请人： Shuji Nishitani , Kazuhiro Nishimura
发明人： Shuji Nishitani , Kazuhiro Nishimura
IPC分类号： G03G15/00
CPC分类号： G03G15/6502 , G03G2215/00616 , G03G2215/00725
摘要： An image forming apparatus controls an image forming device on the basis of outputs from a detecting device for detecting a recording material accommodated in a storage device. The detecting device faces a recording material supporting member, and is able to come in contact with the recording material supported on the recording material supporting member. A supporting portion that supports the detecting device so as to be rotatable and a holding portion that holds the supporting portion so as to be movable allow for reliable and stable detection of the recording material by the detecting device even when the position of the recording material supporting member is changed.
摘要翻译：图像形成装置基于来自用于检测容纳在存储装置中的记录材料的检测装置的输出来控制图像形成装置。检测装置面向记录材料支撑构件，并且能够与支撑在记录材料支撑构件上的记录材料接触。支撑检测装置能够旋转的支撑部分和保持支撑部分以便可移动的保持部分，即使当记录材料支撑的记录材料的位置也能够由检测装置检测记录材料时可靠和稳定地检测会员更改

24. 发明授权

US06480016B1 Tester, a test system, and a testing method for a semiconductor integrated circuit 失效
标题翻译：测试仪，测试系统和半导体集成电路的测试方法
公开(公告)号：US06480016B1
公开(公告)日：2002-11-12
申请号：US09645505
申请日：2000-08-25
申请人： Shinji Motoi , Kazuhiro Nishimura
发明人： Shinji Motoi , Kazuhiro Nishimura
IPC分类号： G01R3126
CPC分类号： G01R31/31926
摘要： An input signal for testing a device is stored in a first storage located on a test board. An expectation value signal output by the device, when it operates normally, in response to the input signal is stored in a second storage located on the same test board. The input signal from the first storage is supplied to the device based on an instruction from a tester body. The device outputs an output signal in response to input of this input signal. This signal is sent to a comparator. The comparator compares the signal output from the device with the expectation value signal stored in and output from the second storage.
摘要翻译：用于测试设备的输入信号被存储在位于测试板上的第一个存储器中。当设备响应于输入信号正常工作时，由设备输出的期望值信号被存储在位于同一测试板上的第二个存储器中。来自第一存储器的输入信号基于来自测试器主体的指令被提供给设备。该装置响应于该输入信号的输入而输出输出信号。该信号被发送到比较器。比较器将来自器件的信号输出与存储在第二存储器中并从第二存储器输出的期望值信号进行比较。

25. 发明授权

US6060697A Substrate processing apparatus having regulated power consumption and method therefor 失效
标题翻译：具有稳定功耗的基板处理装置及其方法
公开(公告)号：US6060697A
公开(公告)日：2000-05-09
申请号：US39141
申请日：1998-03-13
申请人： Akihiko Morita , Masami Ohtani , Yasuo Imanishi , Masao Tsuji , Masaki Iwami , Joichi Nishimura , Kazuhiro Nishimura , Tetsuya Hamada , Satoshi Yamamoto , Kenji Kamei
发明人： Akihiko Morita , Masami Ohtani , Yasuo Imanishi , Masao Tsuji , Masaki Iwami , Joichi Nishimura , Kazuhiro Nishimura , Tetsuya Hamada , Satoshi Yamamoto , Kenji Kamei
IPC分类号： H01L21/02 , G05D23/19 , H02J3/00 , H02J13/00 , H05B1/02
CPC分类号： G05D23/1951
摘要： A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.
摘要翻译：基板处理装置降低开启时的瞬时最大功耗。多个处理单元的受电部分分别通过开关连接到导通开关的一端。导通开关的另一端通过断路器连接到外部电源。定时器值分别在定时器中设置。当接通开关接通时，定时器分别在由定时器值定义的时间之后分别关闭相应的开关，由此处理单元被提供电力，每个具有恒定时间的延迟。

26. 发明授权

US5788868A Substrate transfer method and interface apparatus 失效
标题翻译：基板转印方法和接口装置
公开(公告)号：US5788868A
公开(公告)日：1998-08-04
申请号：US704261
申请日：1996-08-28
申请人： Masayuki Itaba , Kazuhiro Nishimura
发明人： Masayuki Itaba , Kazuhiro Nishimura
IPC分类号： H01L21/00 , H01L21/677 , B44C1/22
CPC分类号： H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67769 , H01L21/67778
摘要： An interface apparatus is disposed between a processing unit for performing varied treatments on substrates before and after exposure of the substrates, and an exposure unit for performing the exposure. The interface apparatus includes first and second substrate transfer robots, and a substrate storage having a plurality of storage racks for storing a plurality of substrates. The first substrate transfer robot transfer substrates between the processing unit and substrate storage while the second substrate transfer robot transfers substrates between the substrate storage and exposure unit. Each of the robots is operable independently of and parallel to the other robot. The first transfer robot may be omitted, and when it is so omitted, a substrate transport robot in the processing unit performs the functions of the first transfer robot.
摘要翻译：接口装置设置在用于在基板曝光之前和之后对基板进行各种处理的处理单元和用于进行曝光的曝光单元。接口装置包括第一和第二基板传送机器人，以及具有用于存储多个基板的多个存储架的基板存储器。第一基板传送机器人在处理单元和基板存储之间传送基板，而第二基板传送机器人在基板存储和曝光单元之间传送基板。每个机器人可独立于并且平行于另一机器人操作。可以省略第一传送机器人，并且当省略第一传送机器人时，处理单元中的基板传送机器人执行第一传送机器人的功能。

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