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1. 发明授权

US5788868A Substrate transfer method and interface apparatus 失效
标题翻译：基板转印方法和接口装置
公开(公告)号：US5788868A
公开(公告)日：1998-08-04
申请号：US704261
申请日：1996-08-28
申请人： Masayuki Itaba , Kazuhiro Nishimura
发明人： Masayuki Itaba , Kazuhiro Nishimura
IPC分类号： H01L21/00 , H01L21/677 , B44C1/22
CPC分类号： H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67769 , H01L21/67778
摘要： An interface apparatus is disposed between a processing unit for performing varied treatments on substrates before and after exposure of the substrates, and an exposure unit for performing the exposure. The interface apparatus includes first and second substrate transfer robots, and a substrate storage having a plurality of storage racks for storing a plurality of substrates. The first substrate transfer robot transfer substrates between the processing unit and substrate storage while the second substrate transfer robot transfers substrates between the substrate storage and exposure unit. Each of the robots is operable independently of and parallel to the other robot. The first transfer robot may be omitted, and when it is so omitted, a substrate transport robot in the processing unit performs the functions of the first transfer robot.
摘要翻译：接口装置设置在用于在基板曝光之前和之后对基板进行各种处理的处理单元和用于进行曝光的曝光单元。接口装置包括第一和第二基板传送机器人，以及具有用于存储多个基板的多个存储架的基板存储器。第一基板传送机器人在处理单元和基板存储之间传送基板，而第二基板传送机器人在基板存储和曝光单元之间传送基板。每个机器人可独立于并且平行于另一机器人操作。可以省略第一传送机器人，并且当省略第一传送机器人时，处理单元中的基板传送机器人执行第一传送机器人的功能。

2. 发明授权

US5376216A Device for holding and rotating a substrate 失效
标题翻译：用于保持和旋转衬底的装置
公开(公告)号：US5376216A
公开(公告)日：1994-12-27
申请号：US220207
申请日：1994-03-30
申请人： Katsushi Yoshioka , Koji Nakagawa , Masayuki Itaba , Nobuyasu Hiraoka , Masafumi Takeoka
发明人： Katsushi Yoshioka , Koji Nakagawa , Masayuki Itaba , Nobuyasu Hiraoka , Masafumi Takeoka
IPC分类号： B05B13/02 , B05C11/08 , G11B7/26 , H01L21/027 , H01L21/30 , H01L21/304 , H01L21/306 , H01L21/683 , H01L21/687 , C23F1/02
CPC分类号： H01L21/68728 , B05C11/08
摘要： A plurality of substrate holding members and a substrate pressing member are disposed on a rotation stage at a peripheral portion. The substrate pressing member includes a magnet and is pivotally supported by the rotation stage. A ring-shaped permanent magnet is located below the rotation stage and forms a ring around the rotation axis of the rotation stage. When a substrate mounted on the rotation stage is rotated and processed, the ring-shaped permanent magnet is positioned in the vicinity of the magnet of the substrate pressing member. This creates a magnetic force between the magnets, causing the substrate pressing member to pivot so that the substrate pressing member contacts the edge of the substrate with a predetermined amount of pressure.
摘要翻译：多个基板保持构件和基板按压构件设置在周边部分的旋转台上。基板按压部件包括磁体并且由旋转台可枢转地支撑。环形永磁体位于旋转台的下方，并且围绕旋转台的旋转轴线形成环。当安装在旋转台上的基板旋转和加工时，环形永磁体位于基板按压部件的磁体附近。这在磁体之间产生磁力，导致基板按压部件枢转，使得基板按压部件以预定量的压力接触基板的边缘。

3. 发明授权

US5906469A Apparatus and method for detecting and conveying substrates in cassette 失效
标题翻译：用于检测和输送盒中底物的装置和方法
公开(公告)号：US5906469A
公开(公告)日：1999-05-25
申请号：US752149
申请日：1996-11-18
申请人： Yoshiji Oka , Yoshiteru Fukutomi , Masayuki Itaba , Yasufumi Koyama , Toshiya Yuge
发明人： Yoshiji Oka , Yoshiteru Fukutomi , Masayuki Itaba , Yasufumi Koyama , Toshiya Yuge
IPC分类号： B65G49/07 , H01L21/00
CPC分类号： H01L21/67265 , Y10S414/137
摘要： A substrate detecting apparatus includes: a light sensor unit having a light-emission element and a light-receiving element arranged to face each other across the cassette, and a vertical driving device for moving at least one of the light sensor unit and the cassette relative to each other in a vertical direction a substrate position detecter is also provided for detecting a vertical positional range of each substrate held in the cassette, based on a wave form of an output signal generated by the light sensor unit as the at least one of the light sensor unit and the cassette is vertically moving relative to each other. A substrate conveying apparatus includes a clearance measurement device for measuring a vertical clearance between a pair of substrates held in the cassette, and an arm driving device for inserting the conveyance arm between the pair of substrates while lifting up the conveyance arm along a slant locus when the vertical clearance is less than a predetermined critical value.
摘要翻译：一种基板检测装置，包括：光传感器单元，具有发光元件和被配置为相对于盒子彼此相对的光接收元件;以及垂直驱动装置，用于移动光传感器单元和盒相关的至少一个基板位置检测器还设置用于基于由光传感器单元产生的输出信号的波形来检测保持在盒中的每个基板的垂直位置范围，作为至少一个光传感器单元和盒相对于彼此垂直移动。基板输送装置包括用于测量保持在盒中的一对基板之间的垂直间隙的间隙测量装置和用于将输送臂插入在一对基板之间的臂驱动装置，同时沿着倾斜轨迹抬起输送臂，垂直间隙小于预定的临界值。

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